V. Chang, S.H. Wang, J. Lu, W. Wu, B. Wu, B. Hsu, K. Kwong, J. Yeh, C. Chang, C.H. Chen, C. O. Chui, M. Yeh, K.B. Huang, R. Chen, K.S. Chen, S. Wu
{"title":"Enabling Multiple-Vt Device Scaling for CMOS Technology beyond 7nm Node","authors":"V. Chang, S.H. Wang, J. Lu, W. Wu, B. Wu, B. Hsu, K. Kwong, J. Yeh, C. Chang, C.H. Chen, C. O. Chui, M. Yeh, K.B. Huang, R. Chen, K.S. Chen, S. Wu","doi":"10.1109/VLSITechnology18217.2020.9265050","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265050","url":null,"abstract":"For the first time, multiple-Vt (multi-Vt) device options with Vt range> 250 mV are achieved in standard cells at dimensions beyond 7nm technology node. To overcome the common scaling challenges of potential device options such as FinFET and gate all-around (GAA) nanosheet transistor - gate length and cell height scaling, key enablers are identified, including novel, thin, and conformal work function metal (WFM) with enhanced patterning efficiency, high-k (HK) engineering, and precise WFM patterning boundary control. This work enables design flexibility for advanced CMOS technology beyond 7nm node with critical differentiators.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"46 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87053039","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Kao, Wei-Hsiang Chen, Po-Cheng Hou, Wen-Hsien Huang, C. Shen, J. Shieh, W. Yeh
{"title":"Flexible and Transparent BEOL Monolithic 3DIC Technology for Human Skin Adaptable Internet of Things Chips","authors":"M. Kao, Wei-Hsiang Chen, Po-Cheng Hou, Wen-Hsien Huang, C. Shen, J. Shieh, W. Yeh","doi":"10.1109/VLSITechnology18217.2020.9265079","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265079","url":null,"abstract":"For the first time, below 400°C-fabricated poly-Si MOSFETs and 6T -SRAM fabrication process was demonstrated on polyimide (PI) substrate for flexible and transparent monolithic 3DIC. Key enablers are 400–900 nm transparent laser-stop layer (LsL), laser-crystallized/CMP-thinned poly Si channel and pulse UV-laser S/D activation. These advanced low thermal budget fabrication technologies enable stackable polySi MOSFETs on flexible 6” -wafer-scale PI substrate with high device uniformity $(mathrm{V}_{mathrm{th}}$ ‘SS~16.2%/16.6%) and bending stability $(mathrm{V}_{mathrm{th}}/mathrm{SS}sim 4.2%/9.8%)$ after cycle-bending at radius of 10mm. Such CMOS compatible technologies envision flexible 3D heterogeneous integration of circuits/optical sensors for human-skin adaptable Internet of Things (IoT) chips.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"41 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84675569","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. Lloyd, Niall Kearney, C. Lyden, Damien McCartney, David Robertson, Meabh Shine
{"title":"Silicon is Greener: Why Innovation in Circuits is Needed for Sustainability","authors":"J. Lloyd, Niall Kearney, C. Lyden, Damien McCartney, David Robertson, Meabh Shine","doi":"10.1109/VLSITechnology18217.2020.9265102","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265102","url":null,"abstract":"Sustainable development is one of the preeminent challenges facing humanity. The immediate and near-term identified challenge is carbon emissions, driven primarily from the energy sector. The integrated circuit industry has created an information and communications revolution which has transformed every sector of the economy from education to agriculture. Can the innovation and power of the industry transform sustainability? In this paper, we will show that by enabling electrification of the power sector (efficiency) and virtualization of physical processes (reducing energy demand), the integrated circuit industry will be a key enabler for solutions to sustainability issues.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"46 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89771915","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Tan, M. Pešić, L. Larcher, Y. Liao, Li-Chen Wang, J. Bae, C. Hu, S. Salahuddin
{"title":"Hot Electrons as the Dominant Source of Degradation for Sub-5nm HZO FeFETs","authors":"A. Tan, M. Pešić, L. Larcher, Y. Liao, Li-Chen Wang, J. Bae, C. Hu, S. Salahuddin","doi":"10.1109/VLSITechnology18217.2020.9265067","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265067","url":null,"abstract":"In this work, we demonstrate FDSOI ferroelectric FETs (FeFETs) incorporating 4.5 nm hafnium zirconium oxide, which show a ~0.5V memory window at +/-3.3V and a program/erase speed of 1 $mu mathrm{s}$. In typical FeFETs where $geq 9$ nm thick ferroelectric (FE) gate oxides have been used, bulk charge trapping has been identified as the main mechanism for endurance degradation and shrinkage of the memory window (MW). By contrast, we find that the role of bulk trapping in our devices with a much thinner FE layer is minimal. Through a combination of cryogenic temperature-dependent electrical measurements and simulations using the Ginestra ™ modeling platform, we identify and prove that hot electron-induced hole damage during the application of negative gate biases is the primary source of endurance degradation and MW closure in FeFETs with scaled oxide layers.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"47 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91350975","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Chia-Che Chung, Hsin-Cheng Lin, H. H. Lin, W. K. Wan, M. Yang, C. Liu
{"title":"Interpretable Neural Network to Model and to Reduce Self-Heating of FinFET Circuitry","authors":"Chia-Che Chung, Hsin-Cheng Lin, H. H. Lin, W. K. Wan, M. Yang, C. Liu","doi":"10.1109/VLSITechnology18217.2020.9265107","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265107","url":null,"abstract":"An interpretable neural network (NN) is used to model the self-heating (SH) in complex FinFET circuits. The NN training/testing datasets from 3 -stage to 37 -stage chain circuits in folded layout composed of inverter (INV)/NAND/NOR are simulated by our distributed $mathrm{R}_{mathrm{th}}-mathrm{C}_{mathrm{th}}$ SPICE model [1], [2]. The interfacial thermal resistance [3], boundary scattering [4], alloy scattering [5], and layout dependence are considered. The NN interpretation by feature importance analysis is consistent with the thermal physics. Stage# is the most important feature of the NN prediction. Both via2 bundle positions and via2 numbers (via2#) are effective to reduce SH. As compared to SPICE, NN prediction in 37 -stage INV chain computes $3mathrm{x}10^{6}mathrm{X}$ faster with accuracy loss $< 1^{circ}mathrm{C}$. The high computation efficiency and high precision make NN feasible to predict chain circuits up to 40 stages, which cannot be simulated by SPICE due to long computation time.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"35 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87233371","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jixuan Wu, Fei Mo, T. Saraya, T. Hiramoto, M. Kobayashi
{"title":"A Monolithic 3D Integration of RRAM Array with Oxide Semiconductor FET for In-memory Computing in Quantized Neural Network AI Applications","authors":"Jixuan Wu, Fei Mo, T. Saraya, T. Hiramoto, M. Kobayashi","doi":"10.1109/VLSITechnology18217.2020.9265062","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265062","url":null,"abstract":"We have monolithically integrated RRAM array with oxide semiconductor channel access transistor in 3D stack, achieved uniform memory characteristics of 1 T1R cells at each layer, and demonstrated basic functionality of XNOR operation as in-memory computing for binary neural network AI applications, for the first time. The impact of RRAM bit error rate on neural network is also investigated. 3D neural network built by this architecture has high potential to enable area-efficient, low-power and low-latency computing.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"163 7 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86675455","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Miura, K. Nishioka, H. Naganuma, T. V. A. Nguyen, H. Honjo, S. Ikeda, T. Watanabe, H. Inoue, M. Niwa, T. Tanigawa, Y. Noguchi, T. Yoshiduka, M. Yasuhira, T. Endoh
{"title":"Scalability of Quad Interface p-MTJ for 1X nm STT-MRAM with 10 ns Low Power Write Operation, 10 years Retention and Endurance $> 10^{11}$","authors":"S. Miura, K. Nishioka, H. Naganuma, T. V. A. Nguyen, H. Honjo, S. Ikeda, T. Watanabe, H. Inoue, M. Niwa, T. Tanigawa, Y. Noguchi, T. Yoshiduka, M. Yasuhira, T. Endoh","doi":"10.1109/VLSITechnology18217.2020.9265104","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265104","url":null,"abstract":"We have firstly fabricated quad-interface perpendicular MTJ (Quad-MTJ) down to 33 nm with our developed PVD, RIE and damage control integration process technologies under 300 mm process. Secondly, we demonstrated scalability merit as well as high speed writing of Quad-MTJ compared with double-interface p-MTJ (Double-MTJ) as follows; (a) two times larger thermal stability factor $Delta(1mathrm{X}$ nm Quad- MTJ is extrapolated to achieve 10 years retention.), (b) lower write voltage at short write pulse regions at less than 30 ns, (c) in scaled MTJ, effective suppression of write current increase for higher write speed, (d) more than 2 times higher write efficiency at 10ns write operation down to 33 nm MTJ. Finally, we revealed that our developed 33 nm Quad-MTJ achieve excellent endurance of more 1011 thanks to higher write efficiency and low damage integration process technology. These results show that the Quad-MTJ technology is one of promising way for low power, high speed and enough reliable STT -MRAM with excellent scalability down to 1X nm node.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"57 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84341340","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
D. Okamoto, Y. Suzuki, J. Fujikata, M. Tokushima, J. Ushida, T. Horikawa, K. Takemura, T. Nakamura, Y. Hagihara, K. Yashiki, M. Kurihara, K. Kinoshita, K. Kurata
{"title":"High-Temperature Operation of Chip-Scale Silicon-Photonic Transceiver","authors":"D. Okamoto, Y. Suzuki, J. Fujikata, M. Tokushima, J. Ushida, T. Horikawa, K. Takemura, T. Nakamura, Y. Hagihara, K. Yashiki, M. Kurihara, K. Kinoshita, K. Kurata","doi":"10.1109/VLSITechnology18217.2020.9265051","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265051","url":null,"abstract":"A chip-scale optical transceiver was developed based on silicon photonics technology and optical/electrical assembly for 25-Gbs× four -channel applications. Optical transmitters and receivers were integrated on a single silicon platform enabled by the hybrid integration of a quantum-dot laser diode, optical pins, and a 28-nm CMOS based electrical IC. Temperature compensation functions were implemented in a modulator driver and a transimpedance amplifier for high-temperature operations. The functions allowed us to successfully demonstrate error-free 25 Gb $/mathrm{s}times mathrm{four}$ -channel data transmission at 85°C.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"1 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89702924","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
E. Nako, K. Toprasertpong, R. Nakane, Z. Wang, Y. Miyatake, M. Takenaka, S. Takagi
{"title":"Proposal and Experimental Demonstration of Reservoir Computing using Hf0.5Zr0.5O2/Si FeFETs for Neuromorphic Applications","authors":"E. Nako, K. Toprasertpong, R. Nakane, Z. Wang, Y. Miyatake, M. Takenaka, S. Takagi","doi":"10.1109/VLSITechnology18217.2020.9265110","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265110","url":null,"abstract":"We propose a new AI calculation scheme by reservoir computing utilizing the memory effect and nonlinearity of ferroelectric gate MOSFETs (FeFETs) for neuromorphic applications. The task operations of time-series data are experimentally demonstrated by taking time responses of the drain current for gate voltage input as the virtual nodes. A high ability to classify input data is experimentally verified.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"397 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76609744","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
B. C. Paz, L. L. Guevel, M. Cassé, G. Billiot, G. Pillonnet, A. Jansen, R. Maurand, S. Haendler, A. Juge, E. Vincent, P. Galy, G. Ghibaudo, M. Vinet, S. de Franceschi, T. Meunier, F. Gaillard
{"title":"Variability Evaluation of 28nm FD-SOI Technology at Cryogenic Temperatures down to 100mK for Quantum Computing","authors":"B. C. Paz, L. L. Guevel, M. Cassé, G. Billiot, G. Pillonnet, A. Jansen, R. Maurand, S. Haendler, A. Juge, E. Vincent, P. Galy, G. Ghibaudo, M. Vinet, S. de Franceschi, T. Meunier, F. Gaillard","doi":"10.1109/VLSITechnology18217.2020.9265034","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265034","url":null,"abstract":"Variability of28nm FD-SOI transistors is evaluated for the first time down to ultra low temperatures (UL T), at T= 1 00mK. High performance is achieved at UL T for short channel transistors, with $mathrm{I}_{mathrm{ON}} > 1mathrm{mA}mu mathrm{m}$ and $mathrm{I}_{mathrm{OFF}}$ below the equipment accuracy <1 fA, in particular by keeping advantage of forward back biasing (FBB), with the same efficiency from room temperature (R T) down to 100mK. The physical origins of MOSFET mismatch at ULT are studied, highlighting the impact of the charge fluctuations increase on both threshold voltage $(mathrm{V}_{mathrm{TH}})$ and current gain factor $(beta)$ variabilities. Besides that, we demonstrated that the increase of $mathrm{V}_{mathrm{TH}}$ and $beta$ variabilities at low temperature remains reasonably low in comparison to RT values and other CMOS technologies, so that it should not be detrimental to circuit operation in this range of temperatures.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"40 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85397265","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}