{"title":"Production-worthy WOW 3D integration technology using bumpless interconnects and ultra-thinning processes","authors":"T. Ohba","doi":"10.1109/VLSIT.2016.7573427","DOIUrl":"https://doi.org/10.1109/VLSIT.2016.7573427","url":null,"abstract":"Wafer-on-Wafer (WOW) technology for three-dimensional (3D) integration is discussed [1]. Back-to-face wafer stacking using bumpless interconnects and ultra-thinning of wafers are key features used as alternatives to conventional micro-bumps and chip-based stacking technologies [2]-[6]. There is no need for a bump process involving solder bumps and Cu posts for die-to-die internal electronic connections. Ultra-thinning of wafers down to ~2 μm provides the advantage of a small form factor, not only in terms of the total volume of 3D ICs, but also the aspect ratio of through-silicon-vias (TSVs).","PeriodicalId":129300,"journal":{"name":"2016 IEEE Symposium on VLSI Technology","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134324475","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
L. Liebmann, J. Zeng, Xuelian Zhu, Lei Yuan, G. Bouche, J. Kye
{"title":"Overcoming scaling barriers through design technology CoOptimization","authors":"L. Liebmann, J. Zeng, Xuelian Zhu, Lei Yuan, G. Bouche, J. Kye","doi":"10.1109/VLSIT.2016.7573398","DOIUrl":"https://doi.org/10.1109/VLSIT.2016.7573398","url":null,"abstract":"Design technology co-optimization (DTCO) is the term used to describe the process of deriving a competitive technology definition out of a number of increasingly complex trade-offs. DTCO is not a specific approach or methodology, but rather a commitment to closer collaboration between designers and process engineers born out of necessity to maintain value in semiconductor scaling. This paper aims to clarify this abstract concept through a series of examples encountered in scaling a logic cell from the N14 to the N3 technology node.","PeriodicalId":129300,"journal":{"name":"2016 IEEE Symposium on VLSI Technology","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114230680","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Khandelwal, A. Khan, J. Duarte, A. Sachid, S. Salahuddin, C. Hu
{"title":"Circuit performance analysis of negative capacitance FinFETs","authors":"S. Khandelwal, A. Khan, J. Duarte, A. Sachid, S. Salahuddin, C. Hu","doi":"10.1109/VLSIT.2016.7573446","DOIUrl":"https://doi.org/10.1109/VLSIT.2016.7573446","url":null,"abstract":"Circuit-level performance analysis of negative capacitance FinFETs (NC-FinFET) is presented for ultra-low power high performance applications. Circuit simulations are performed by developing a compact model which solves Landau-Khalatnikov (L-K) equations self-consistently with the three-dimensional device electrostatics of the FinFET device. Using an accurate Lg = 30 nm FinFET model, L-K model parameters of ferroelectric (FE) layer are extracted from an experimental NC-FinFET data. With the experimentally calibrated model, we show for the first time that for the same inverter delay as the 14 nm ITRS FinFET, Vdd for NC-FinFET can be lowered from 0.7 V to 0.25 V, reducing energy by ~10×. Optimization of the FE layer parameters can further boost the device performance.","PeriodicalId":129300,"journal":{"name":"2016 IEEE Symposium on VLSI Technology","volume":"294 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114301634","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
R. Berthelon, F. Andrieu, E. Josse, R. Bingert, O. Weber, E. Serret, A. Aurand, S. DelMedico, V. Farys, C. Bernicot, E. Béchet, É. Bernard, T. Poiroux, D. Rideau, P. Scheer, E. Baylac, P. Perreau, M. Jaud, J. Lacord, E. Petitprez, A. Pofelski, S. Ortolland, P. Sardin, D. Dutartre, A. Claverie, M. Vinet, J. Marin, M. Haond
{"title":"Design / technology co-optimization of strain-induced layout effects in 14nm UTBB-FDSOI CMOS: Enablement and assessment of continuous-RX designs","authors":"R. Berthelon, F. Andrieu, E. Josse, R. Bingert, O. Weber, E. Serret, A. Aurand, S. DelMedico, V. Farys, C. Bernicot, E. Béchet, É. Bernard, T. Poiroux, D. Rideau, P. Scheer, E. Baylac, P. Perreau, M. Jaud, J. Lacord, E. Petitprez, A. Pofelski, S. Ortolland, P. Sardin, D. Dutartre, A. Claverie, M. Vinet, J. Marin, M. Haond","doi":"10.1109/VLSIT.2016.7573425","DOIUrl":"https://doi.org/10.1109/VLSIT.2016.7573425","url":null,"abstract":"We report on the main local layout effect in 14nm Ultra-Thin Buried oxide and Body Fully Depleted Silicon On Insulator (UTBB-FDSOI) CMOS technology [1]. This effect is demonstrated by Nano-Beam Diffraction to be directly induced by the strain in the SiGe channel and reproduced by an accurate electrical compact model. An original continuous-RX design optimizes the stress management, maintaining longitudinal stress component while relaxing the transverse one. A 28% ring oscillator delay improvement is experimentally demonstrated at same leakage for 1-finger inverter at VDD=0.8V supply voltage and a frequency gain up to 15% is simulated in a critical path of an A9 core.","PeriodicalId":129300,"journal":{"name":"2016 IEEE Symposium on VLSI Technology","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121292242","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A 512×576 65-nm CMOS ISFET sensor for food safety screening with 123.8 mV/pH sensitivity and 0.01 pH resolution","authors":"Yu Jiang, X. Liu, Tran Chien Dang, Mei Yan, Hao Yu, Jui-Cheng Huang, Cheng-Hsiang Hsieh, Tung-Tsun Chen","doi":"10.1109/VLSIT.2016.7573440","DOIUrl":"https://doi.org/10.1109/VLSIT.2016.7573440","url":null,"abstract":"Internet-of-things (IoTs) need a common CMOS technology platform to build multi-modal sensor on chip. This paper shows a CMOS-based ion-sensitive field effect transistor (ISFET) pH sensor for food safety screening. A low-power high-gain subthreshold trans-impedance amplifier is integrated with an integration capacitor to form a readout scheme by pH-to-time-to-voltage conversion (pH-TVC), which greatly improves sensitivity of a single ISFET pixel. Fabricated in standard CMOS 65-nm process with the smallest pixel pitch of 4.4 μm, a 123.8 mV/pH sensitivity is achieved compared to traditional source-follower readout with a 6.3 mV/pH sensitivity. E. coli experiment further shows its great potential to monitor hygiene condition for food safety with a 0.01 pH resolution.","PeriodicalId":129300,"journal":{"name":"2016 IEEE Symposium on VLSI Technology","volume":"52 3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116837771","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Bonnevialle, C. Le Royer, Y. Morand, S. Reboh, C. Plantier, N. Rambal, J.-P Pedini, S. Kerdilès, P. Besson, J. Hartmann, D. Marseilhan, B. Mathieu, R. Berthelon, M. Cassé, F. Andrieu, D. Rouchon, O. Weber, F. Boeuf, M. Haond, A. Claverie, M. Vinet
{"title":"Smart solutions for efficient dual strain integration for future FDSOI generations","authors":"A. Bonnevialle, C. Le Royer, Y. Morand, S. Reboh, C. Plantier, N. Rambal, J.-P Pedini, S. Kerdilès, P. Besson, J. Hartmann, D. Marseilhan, B. Mathieu, R. Berthelon, M. Cassé, F. Andrieu, D. Rouchon, O. Weber, F. Boeuf, M. Haond, A. Claverie, M. Vinet","doi":"10.1109/VLSIT.2016.7573406","DOIUrl":"https://doi.org/10.1109/VLSIT.2016.7573406","url":null,"abstract":"We present deep insights on the integration and physics of two new strain boosters for FDSOI CMOS. “STRASS” and “BOX creep” techniques (for tensily and compressively stressed channels, respectively) are for the first time integrated in a localized manner on a state-of-the-art 14nm FDSOI route. STRASS enables to achieve +1.6 GPa in SOI active regions (w.r.t. +1.3 GPa for thin BOX sSOI). BOX creep process leads to more than +10% in hole mobility and +6% in Ieff(Ioff) plots. The BOX creep efficiency is investigated with respect to device dimensions: the electrical data evolution matches the proposed mobility model based on 2D simulated stress profiles.","PeriodicalId":129300,"journal":{"name":"2016 IEEE Symposium on VLSI Technology","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125923864","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Haitong Li, Kai-Shin Li, Chang-Hsien Lin, Juo-Luen Hsu, W. Chiu, Min-Cheng Chen, Tsung-Ta Wu, Joon Sohn, S. Eryilmaz, J. Shieh, W. Yeh, H.-S. Philip Wong
{"title":"Four-layer 3D vertical RRAM integrated with FinFET as a versatile computing unit for brain-inspired cognitive information processing","authors":"Haitong Li, Kai-Shin Li, Chang-Hsien Lin, Juo-Luen Hsu, W. Chiu, Min-Cheng Chen, Tsung-Ta Wu, Joon Sohn, S. Eryilmaz, J. Shieh, W. Yeh, H.-S. Philip Wong","doi":"10.1109/VLSIT.2016.7573431","DOIUrl":"https://doi.org/10.1109/VLSIT.2016.7573431","url":null,"abstract":"For the first time, a four-layer HfOx-based 3D vertical RRAM, the “tallest” one ever reported, is developed and integrated with FinFET selector. Uniform memory performance across four layers is obtained (±0.8V switching, 106 endurance, 104s@125°C). SPICE simulations show that high drive current of pillar select transistors is required for high-rise 3D RRAM arrays. The four-layer 3D RRAM is a versatile computing unit for (a) brain-inspired computing and (b) in-memory computing. (a) Stochastic RRAM synapses enable robust pattern learning for a 3D neuromorphic visual system. The 3D architecture with dense and balanced neuron-synapse connections provides 55% EDP savings and 74% VDD reduction (enhanced robustness) compared with conventional 2D architecture; (b) in-memory logic such as NAND, NOR, and bit shift, are essential elements for hyper-dimensional computing. Utilizing the unique vertical connection of 3D RRAM cells, these operations are performed with little data movement.","PeriodicalId":129300,"journal":{"name":"2016 IEEE Symposium on VLSI Technology","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125350056","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Vardi, Jianqiang Lin, Wenjie Lu, Xin Zhao, J. D. del Alamo
{"title":"High aspect ratio InGaAs FinFETs with sub-20 nm fin width","authors":"A. Vardi, Jianqiang Lin, Wenjie Lu, Xin Zhao, J. D. del Alamo","doi":"10.1109/VLSIT.2016.7573408","DOIUrl":"https://doi.org/10.1109/VLSIT.2016.7573408","url":null,"abstract":"We demonstrate self-aligned InGaAs FinFETs with sub-20 nm fin width fabricated through a CMOS compatible front-end process. Working devices with fins as narrow as 7 nm, fin aspect ratios in excess of 5 and gate lengths as short as 20 nm have been fabricated using precision dry etching and digital etch. The devices also feature self-aligned metal contacts that are 20-30 nm away from the edge of the gate. FinFETs with Lg=30 nm, Wf=22 nm and channel height of 40 nm exhibit a transconductance of 1400 μS/μm at VDS=0.5 V. When normalized to Wf, this is a record value among all III-V FinFETs, indicating that our device architecture makes efficient use of conduction along the fin sidewalls.","PeriodicalId":129300,"journal":{"name":"2016 IEEE Symposium on VLSI Technology","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123997572","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Veloso, B. Parvais, P. Matagne, E. Simoen, T. Huynh-Bao, V. Paraschiv, E. Vecchio, K. Devriendt, E. Rosseel, M. Ercken, B. Chan, C. Delvaux, E. Altamirano-Sanchez, J. Versluijs, Z. Tao, S. Suhard, S. Brus, A. Sibaja-Hernandez, N. Waldron, P. Lagrain, O. Richard, H. Bender, A. Chasin, B. Kaczer, T. Ivanov, S. Ramesh, K. De Meyer, J. Ryckaert, N. Collaert, A. Thean
{"title":"Junctionless gate-all-around lateral and vertical nanowire FETs with simplified processing for advanced logic and analog/RF applications and scaled SRAM cells","authors":"A. Veloso, B. Parvais, P. Matagne, E. Simoen, T. Huynh-Bao, V. Paraschiv, E. Vecchio, K. Devriendt, E. Rosseel, M. Ercken, B. Chan, C. Delvaux, E. Altamirano-Sanchez, J. Versluijs, Z. Tao, S. Suhard, S. Brus, A. Sibaja-Hernandez, N. Waldron, P. Lagrain, O. Richard, H. Bender, A. Chasin, B. Kaczer, T. Ivanov, S. Ramesh, K. De Meyer, J. Ryckaert, N. Collaert, A. Thean","doi":"10.1109/VLSIT.2016.7573409","DOIUrl":"https://doi.org/10.1109/VLSIT.2016.7573409","url":null,"abstract":"We report a comprehensive evaluation of junctionless (JL) vs. conventional inversion-mode (IM) gate-all-around (GAA) nanowire FETs (NWFETs) with the same lateral (L) configuration. Lower I<sub>OFF</sub> values and excellent electrostatics can be obtained with optimized NW doping for a given JL NW size (W<sub>NW</sub>≤25nm, H<sub>NW</sub>~22nm), with increased doping enabling ION improvement without I<sub>OFF</sub> penalty for W<sub>NW</sub> ≤10nm. These devices also appear as a viable option for analog/RF, showing similar speed and voltage gain, and reduced LF noise as compared to IM NWFETs. V<sub>T</sub> mismatch performance shows higher A<sub>VT</sub> with increased NW doping for JL NMOS, with less impact seen for PMOS and at smaller NWs. The JL concept is also demonstrated in vertical (V) GAA-NWFETs with in-situ doped Si epi NW pillars (d<sub>NW</sub>≥20-30nm), integrated on the same 300mm Si platform as lateral devices. Low I<sub>OFF</sub>, I<sub>G</sub>, and good electrostatics are achieved over a wide range of VNW arrays. Lastly, a novel SRAM design is proposed, taking advantage of the JL process simplicity, by vertically stacking two VNWFETs (n/n or p/p) to reduce SRAM area per bit by 39%.","PeriodicalId":129300,"journal":{"name":"2016 IEEE Symposium on VLSI Technology","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125640388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Chai Zheng, Jigang Ma, W. Zhang, B. Govoreanu, Eddy Simoen, J. Zhang, Z. Ji, Rui Gao, Guido Groeseneken, Malgorzata Jurczak
{"title":"RTN-based defect tracking technique: Experimentally probing the spatial and energy profile of the critical filament region and its correlation with HfO2RRAM switching operation and failure mechanism","authors":"Chai Zheng, Jigang Ma, W. Zhang, B. Govoreanu, Eddy Simoen, J. Zhang, Z. Ji, Rui Gao, Guido Groeseneken, Malgorzata Jurczak","doi":"10.1109/VLSIT.2016.7573402","DOIUrl":"https://doi.org/10.1109/VLSIT.2016.7573402","url":null,"abstract":"For the first time, an RTN based defect tracking technique has been developed that can monitor the defect movement and filament alteration in RRAM devices. Critical filament region has been identified during switching operation at various conditions and new endurance failure mechanism is revealed. This technique provides a useful tool for RRAM technology development.","PeriodicalId":129300,"journal":{"name":"2016 IEEE Symposium on VLSI Technology","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127576891","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}