{"title":"Improvement in lateral IGBT design for 500 V 3 A one chip inverter ICs","authors":"A. Nakagawa, H. Funaki, Y. Yamaguchi, F. Suzuki","doi":"10.1109/ISPSD.1999.764125","DOIUrl":"https://doi.org/10.1109/ISPSD.1999.764125","url":null,"abstract":"This paper reports, for the first time, the development of 500 V, 3 A single chip inverter ICs. The chip size of the IC is 7.1/spl times/5.2 mm/sup 2/, which is only 30% larger than that of 500 A, 1 A inverter ICs. The chip size reduction has been realized by 35% improvement in lateral IGBT on-resistance and an optimized layout of LIGBT unit cells and bonding pads.","PeriodicalId":352185,"journal":{"name":"11th International Symposium on Power Semiconductor Devices and ICs. ISPSD'99 Proceedings (Cat. No.99CH36312)","volume":"145 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121610444","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"High voltage high frequency silicon bipolar transistors","authors":"D. Grădinaru, W. Ng, C. Salama","doi":"10.1109/ISPSD.1999.764120","DOIUrl":"https://doi.org/10.1109/ISPSD.1999.764120","url":null,"abstract":"In this paper, a novel design concept for a high voltage RF silicon BJT structure is introduced. Closely spaced p/sup +/ base contact diffusions are used to guard the thin base region, allowing independent tailoring of the breakdown voltage and high frequency performance.","PeriodicalId":352185,"journal":{"name":"11th International Symposium on Power Semiconductor Devices and ICs. ISPSD'99 Proceedings (Cat. No.99CH36312)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121658777","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Mitlehner, W. Bartsch, K. Dohnke, P. Friedrichs, R. Kaltschmidt, U. Weinert, B. Weis, D. Stephani
{"title":"Dynamic characteristics of high voltage 4H-SiC vertical JFETs","authors":"H. Mitlehner, W. Bartsch, K. Dohnke, P. Friedrichs, R. Kaltschmidt, U. Weinert, B. Weis, D. Stephani","doi":"10.1109/ISPSD.1999.764129","DOIUrl":"https://doi.org/10.1109/ISPSD.1999.764129","url":null,"abstract":"We have developed a novel structure for a fully implanted, normally-on vertical junction field effect transistor (VJFET) and fabricated prototypes with blocking voltages between 600 and 1000 V. Mounting the SiC VJFET together with a 50 V Si MOSFET on a DCB substrate in a cascode circuit, we obtain a normally-off high voltage switch. The specific on-resistance of the VJFET was sufficiently low, in the range of 18 to 40 m/spl Omega/cm/sup 2/, for various blocking voltages. The dynamic behaviour shows turn-off times between 50 ns and 2 /spl mu/s due to the RC-product of two different p-gate networks.","PeriodicalId":352185,"journal":{"name":"11th International Symposium on Power Semiconductor Devices and ICs. ISPSD'99 Proceedings (Cat. No.99CH36312)","volume":"59 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130066888","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
D. Peters, P. Friedrichs, R. Schorner, H. Mitlehner, B. Weis, D. Stephani
{"title":"Electrical performance of triple implanted vertical silicon carbide MOSFETs with low on-resistance","authors":"D. Peters, P. Friedrichs, R. Schorner, H. Mitlehner, B. Weis, D. Stephani","doi":"10.1109/ISPSD.1999.764071","DOIUrl":"https://doi.org/10.1109/ISPSD.1999.764071","url":null,"abstract":"This paper describes results of 6H silicon carbide vertical power MOSFETs designed for different blocking capabilities: 600 V and 1600 V. The fabrication is based on a triple implantation technique with a lateral inversion channel. The MOSFETs are normally off and exhibit specific on-resistances of 22 and 40 m/spl Omega/cm/sup 2/, respectively. A chip area of 1 mm/sup 2/ has emerged as a suitable value in order to achieve an acceptable yield with respect to the blocking capability. A SiC MOSFET of this size can be driven up to 1 A in continuous operation. As expected for a unipolar device, short turn-on and turn-off delay times have been measured. In particular, due to a very small accumulation zone, the Miller capacitance is small in comparison to Si MOSFETs. The switching speed can be influenced by the gate driving circuit in a wide range. The SiC MOSFET is controllable in all switching states and stable up to 125/spl deg/C case temperature. The switching behaviour tested under conditions typical for motor drives is robust against short cuts and short time overloading.","PeriodicalId":352185,"journal":{"name":"11th International Symposium on Power Semiconductor Devices and ICs. ISPSD'99 Proceedings (Cat. No.99CH36312)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116319058","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y.S. Chung, T. Willett, V. Macary, S. Merchant, B. Baird
{"title":"Energy capability of power devices with Cu layer integration","authors":"Y.S. Chung, T. Willett, V. Macary, S. Merchant, B. Baird","doi":"10.1109/ISPSD.1999.764051","DOIUrl":"https://doi.org/10.1109/ISPSD.1999.764051","url":null,"abstract":"Device level solutions are necessary for thermal management in smart power devices. For many automotive applications, the power pulses are too short for for packaging to affect the temperature. A thick copper layer is a potential solution because of its thermal properties. This paper reports for the first time experimental results on the energy capability of DMOS power devices with a thick copper layer integrated into a smart power technology. It was experimentally observed that a thick copper layer over the power device enhances energy capability significantly. The mechanics of the thick copper layer in increasing the energy capability is discussed.","PeriodicalId":352185,"journal":{"name":"11th International Symposium on Power Semiconductor Devices and ICs. ISPSD'99 Proceedings (Cat. No.99CH36312)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122198881","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"20 V LDMOS optimized for high drain current condition. Which is better, n-epi or p-epi?","authors":"K. Kinoshita, Y. Kawaguchi, T. Sano, A. Nakagawa","doi":"10.1109/ISPSD.1999.764049","DOIUrl":"https://doi.org/10.1109/ISPSD.1999.764049","url":null,"abstract":"This paper discusses whether n-epi or p-epi substrates are better for 20 V range LDMOSFETs. We present four optimized 20 V LDMOSFETs and compare them. The best compromise is the LDMOS on n-epi with a high dose n-implant layer which achieves a sufficiently low on-resistance of 17.2 m/spl Omega//spl middot/mm/sup 2/ and a high static breakdown voltage of 24.0 V without breakdown voltage degradation under large drain current flow conditions. The device on-state breakdown voltage for a 5 V gate voltage is 24.5 V.","PeriodicalId":352185,"journal":{"name":"11th International Symposium on Power Semiconductor Devices and ICs. ISPSD'99 Proceedings (Cat. No.99CH36312)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115512813","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Transient thermal simulation of power devices with Cu layer","authors":"Y.S. Chung","doi":"10.1109/ISPSD.1999.764112","DOIUrl":"https://doi.org/10.1109/ISPSD.1999.764112","url":null,"abstract":"The energy capability of power semiconductor devices is understood in terms of limitation in power density per unit area due to thermally driven failure, dealing with sub-millisecond time ranges. Analytical models are widely used to estimate the temperature changes with various power inputs and operations. This paper presents finite element method based thermal simulation results to understand the effectiveness of the copper thermal management layer integration for the energy capability improvement of power devices. Transient thermal simulations are performed to investigate various process and design parameters, such as thickness, existence of inter-dielectric materials, packaging and heat sink, operating conditions, including multi-pulse operations, and nonlinearity of the silicon thermal conductivity. The simulation data is compared to the experimental data and the mechanics of the copper layer for energy capability improvement are discussed.","PeriodicalId":352185,"journal":{"name":"11th International Symposium on Power Semiconductor Devices and ICs. ISPSD'99 Proceedings (Cat. No.99CH36312)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134133495","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Characterization of silicon direct bonding methodology for high performance IGBT","authors":"Tae Hoon Kim, C. Yun, Soo-Seong Kim, H. Jang","doi":"10.1109/ISPSD.1999.764093","DOIUrl":"https://doi.org/10.1109/ISPSD.1999.764093","url":null,"abstract":"Silicon direct bonding methods for 1200 V IGBTs are introduced and their effects on the device characteristics are discussed. Device characteristics of SDB IGBTs are mainly determined by the ion implantation, oxide etching and cleaning conditions. A 1200 V punchthrough (PT) IGBT fabricated using this bonding methodology exhibits V/sub ce,sat/ of 2.5 V, E/sub off/ of 30 uJ/A and short-circuit withstanding time of 50 /spl mu/s.","PeriodicalId":352185,"journal":{"name":"11th International Symposium on Power Semiconductor Devices and ICs. ISPSD'99 Proceedings (Cat. No.99CH36312)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114535116","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
D. Byeon, You-Sang Lee, Won-Oh Lee, M. Han, Yearn-Ik Choi
{"title":"The maximum controllable current of improved base resistance controlled thyristor employing a self-aligned corrugated p-base","authors":"D. Byeon, You-Sang Lee, Won-Oh Lee, M. Han, Yearn-Ik Choi","doi":"10.1109/ISPSD.1999.764105","DOIUrl":"https://doi.org/10.1109/ISPSD.1999.764105","url":null,"abstract":"We report an improved corrugated p-base base-resistance-controlled thyristor (CB-BRT) employing a reduced width n/sup +/ cathode and increased length finger gate in order to increase the MCC (maximum controllable current) and to suppress snap-back effectively. The MCC of the CB-BRT is increased considerably by the increased MOS channel density and the suppressed regenerative thyristor action. Experimental results show that the maximum controllable currents of the CB-BRT and the conventional BRT are 977 A/cm/sup 2/ and 687 A/cm/sup 2/, respectively, for a ramped turn-off gate voltage of -10 V and a p-base implantation dose of 6/spl times/10/sup 13/ cm/sup -2/.","PeriodicalId":352185,"journal":{"name":"11th International Symposium on Power Semiconductor Devices and ICs. ISPSD'99 Proceedings (Cat. No.99CH36312)","volume":"224 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115678762","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"COOLMOS/sup TM/-a new milestone in high voltage power MOS","authors":"L. Lorenz, G. Deboy, A. Knapp, M. Mârz","doi":"10.1109/ISPSD.1999.764028","DOIUrl":"https://doi.org/10.1109/ISPSD.1999.764028","url":null,"abstract":"Recently, a new technology for high voltage power MOSFETs has been introduced: the CoolMOS/sup TM/. Based on the new device concept of charge compensation, the R/sub DS(on)/ area product for e.g. 600 V transistors has been reduced by a factor of 5. The devices show no bipolar current contribution like the well known tail current observed during the turn-off phase of IGBTs. CoolMOS/sup TM/ virtually combines the low switching losses of a MOSFET with the on-state losses of an IGBT. Furthermore, the dependence of R/sub DS(on)/ on the breakdown voltage has been redefined. The more than square-law dependence in the case of standard MOSFET has been broken and a linear voltage dependence achieved. This opens the way to new fields of application even without avalanche operation. System miniaturization, higher switching frequencies, lower circuit parasitics, higher efficiency, and reduced system costs are pointing the way towards future developments. Not only has the new technology achieved breakthrough at reduced R/sub DS(on)/ values, but new benchmarks have also been set for the device capacitances. Due to chip shrinkage and a novel internal structure, the technology shows both a very small input capacitance and a strongly nonlinear output capacitance. The drastically lower gate charge facilitates and reduces the cost of controllability, and the smaller feedback capacitance reduces the dynamic losses. With this new technology, the minimum R/sub DS(on)/ values in all packages are being redefined in the important 600-1000 V categories.","PeriodicalId":352185,"journal":{"name":"11th International Symposium on Power Semiconductor Devices and ICs. ISPSD'99 Proceedings (Cat. No.99CH36312)","volume":"182 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123999841","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}