Frank J. C. Lee, Mei Wong, J. Tzou, J. Yuan, Daniel Chang, S. Rusu
{"title":"Heterogeneous System-Level Package Integration - Trends and Challenges","authors":"Frank J. C. Lee, Mei Wong, J. Tzou, J. Yuan, Daniel Chang, S. Rusu","doi":"10.1109/VLSITechnology18217.2020.9265085","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265085","url":null,"abstract":"Heterogeneous package-level integration plays an increasing role in higher functional density and lower power processors for general computing, machine learning and mobile applications. This paper will review technology trends and challenges for 2.5D and 3D package-level integration with special focus on system-technology co-optimization of the die partitioning, electrical interfaces, power delivery, thermal modeling and EDA flows.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"39 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78439683","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
W. Wan, R. Kubendran, B. Gao, Siddharth Josbi, Priyanka Raina, Huaqiang Wu, G. Cauwenberghs, H. Wong
{"title":"A Voltage-Mode Sensing Scheme with Differential-Row Weight Mapping For Energy-Efficient RRAM-Based In-Memory Computing","authors":"W. Wan, R. Kubendran, B. Gao, Siddharth Josbi, Priyanka Raina, Huaqiang Wu, G. Cauwenberghs, H. Wong","doi":"10.1109/VLSITechnology18217.2020.9265066","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265066","url":null,"abstract":"The energy efficiency of RRAM-based in-memory matrix-vector multiplication (MVM) depends largely on the output sensing mechanism. We design a novel voltage-mode sensing configuration with differential-row weight mapping that achieves a 3.6x improvement in energy per multiply-accumulate (MAC) at the same read voltage compared to current-mode sensing, and avoids the nonlinear source-line dynamics issue that occurs in conventional voltage-mode sensing. We verify the MVM performance of our scheme by performing measurements using a RRAM array monolithically integrated with CMOS voltage-mode neurons. We compare the effects of weight normalization on MVM accuracy under two different weight mapping schemes, and provide guidance in selecting the scheme based on weight sparsity and consistency of the L-1 weight norm across the columns.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"9 1 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88075050","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Soyoun Kim, S. Kim, Taiko Yamaguchi, Jae Chul Kim, Byung-Gook Park, Y. Y. Masuoka, S. Kwon
{"title":"Local Variation-Aware Transistor Design through Comprehensive Analysis of Various Vdd/Temperatures Using Sub- 7nm Advanced FinFET Technology","authors":"Soyoun Kim, S. Kim, Taiko Yamaguchi, Jae Chul Kim, Byung-Gook Park, Y. Y. Masuoka, S. Kwon","doi":"10.1109/VLSITechnology18217.2020.9265089","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265089","url":null,"abstract":"In this paper, key contributors to local variability of sub-7nm FinFET has been identified in various operating environments. Through a comprehensive analysis, different root-cause for high and low temperature region have been revealed and confirmed by advanced Si wafer for the first time. Moreover, a local variation-aware transistor was successfully demonstrated to reduce $sigma V_{mathrm{min}}$ distribution by 0.5 x and 0.3 x at cold temperature.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"61 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91348757","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Fang-Liang Lu, Yi-Chun Liu, Chung-En Tsai, Hung-Yu Ye, C. Liu
{"title":"Record Low Contact Resistivity to Ge:B $(8.1mathrm{x}10^{-10}Omega-mathrm{cm}^{2})$ and GeSn:B $(4.1mathrm{x}10^{-10}Omega-mathrm{cm}^{2})$ with Optimized [B] and [Sn] by In-situ CVD Doping","authors":"Fang-Liang Lu, Yi-Chun Liu, Chung-En Tsai, Hung-Yu Ye, C. Liu","doi":"10.1109/VLSITechnology18217.2020.9265009","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265009","url":null,"abstract":"The record low contact resistivity <tex>$(rho_{mathrm{c}})$</tex> of Ti contact to Ge:B <tex>$(8.1mathrm{x}10^{-10}Omega-mathrm{cm}^{2})$</tex> is achieved by in-situ doped CVD using the high-order Ge precursor <tex>$(mathrm{Ge}_{2}mathrm{H}_{6})$</tex>. The best achievable <tex>$[mathrm{B}]_{mathrm{act}}$</tex>. of <tex>$7mathrm{x}10^{20}mathrm{cm}^{-3}$</tex> and extended epitaxial process window are obtained using <tex>$mathrm{Ge}_{2}mathrm{H}_{6}$</tex>. By optimizing the [B] and [Sn], 2% Sn addition into Ge epitaxy reaches the lowest <tex>$mathrm{p}_{mathrm{c}}$</tex> of <tex>$4.1mathrm{x}10^{-10} Omega-mathrm{cm}^{2}$</tex>. Further Sn addition (4.7% and 13.2%) increases <tex>$rho_{mathrm{c}}$</tex> due to reduced [B], and degrades the thermal stability. The record low resistivity <tex>$(2mathrm{x}10^{-4}Omega-mathrm{cm})$</tex> among epitaxial p-type Ge and GeSn is also demonstrated. Optimized metal etching processes (<tex>$mathrm{Cl}_{2}+mathrm{BCl}_{3}$</tex> for metal on <tex>$mathrm{GeSn}:mathrm{B}$</tex>, while <tex>$mathrm{C}1_{2}$</tex> for metal on Ge:B) are necessary to minimize etching of GeSn:B and Ge:B, and to fabricate the test structure. A two-sheet-resistance model is used to correctly extract the <tex>$rho_{mathrm{c}}$</tex>. B segregation <tex>$(> 1mathrm{x}10^{21}mathrm{cm}^{-3})$</tex> at the metal/semiconductor interface enables the record low <tex>$rho_{mathrm{c}}$</tex>.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"35 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89418520","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Hardware-Software Co-integration for Configurable 5G mmWave Systems","authors":"A. Valdes-Garcia, A. Paidimarri, B. Sadhu","doi":"10.1109/VLSITechnology18217.2020.9265032","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265032","url":null,"abstract":"Directional communication systems based on millimeter-wave phased arrays have reached a significant level of maturity and have entered the commercial space for 5G networks. In order to realize their full potential, Si -based phased arrays must be integrated efficiently at the system level with digital control electronics, firmware, and software. This paper describes key architecture approaches for such vertical integration from digital-RF co-integration in the IC to API definition in software. The important benefits of low-latency and versatile control of beam forming and radio functions from high-level APIs is illustrated with application examples at 28 GHz including directional channel sounding, spatio-temporal beamforming, and 3D imaging.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"8 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82189270","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Razavieh, V. Mahajan, W. L. Oo, S. Cimino, S. Khokale, K. Nagahiro, L. Pantisano, T. Ethirajan, J. Lemon, M. Gu, Y. Chen, H. Wang, T. H. Lee
{"title":"FinFET with Contact over Active-Gate for 5G Ultra-Wideband Applications","authors":"A. Razavieh, V. Mahajan, W. L. Oo, S. Cimino, S. Khokale, K. Nagahiro, L. Pantisano, T. Ethirajan, J. Lemon, M. Gu, Y. Chen, H. Wang, T. H. Lee","doi":"10.1109/VLSITechnology18217.2020.9265095","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265095","url":null,"abstract":"FinFET with contact over active-gate (COAG) is implemented on 12nm node technology platform to optimize the Maximum Oscillation Frequency $(F_{MAX})$) and the Minimum Noise Figure $(NF_{MIN}$ for devices with large fin numbers. This study shows that proposed COAG design can reduce the gate resistance of the 40-fin device by ~ 10- fold, while improving the $F_{MAX}$ by ~ 180% with comparable reliability performance to traditional FinFETs. Excellent DC and RF performances with $NF_{MIN}$ of 0.6dB at 26GHz and 3dB improvement in NF with $50mathrm{Q}$ source impedance $(NF_{50}$) over the 5-26GHz frequency range makes large fin number COAG FinFET an excellent candidate for variety of 5G sub-6GHz and mmWave applications in which high $mathrm{F}_{mathrm{MAX}}$ and low noise are critical.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"14 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79513668","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
P. Bhosale, S. Parikh, N. Lanzillo, R. Tao, T. Nogami, M. Gage, R. Shaviv, H. Huang, A. Simon, M. Stolfi, S. Reidy, J. Lee, N. Loubet, B. Haran
{"title":"Composite Interconnects for High-Performance Computing Beyond the 7nm Node","authors":"P. Bhosale, S. Parikh, N. Lanzillo, R. Tao, T. Nogami, M. Gage, R. Shaviv, H. Huang, A. Simon, M. Stolfi, S. Reidy, J. Lee, N. Loubet, B. Haran","doi":"10.1109/VLSITechnology18217.2020.9265021","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265021","url":null,"abstract":"We demonstrate a design-technology co-optimization (DTCO) solution for enabling novel composite interconnects in next-generation high-performance computing (HPC) applications. Minimum-pitch signal line optimization with aggressively shrunk feature size potentially requires a non-Cu conductor while relaxed-pitch signal and power line optimization require traditional Cu metallization, along with properly tuned power tap spacing, activity factor and standard cell size. We discuss significant process innovation required to co-optimize signal and power line resistances. Our composite metallization scheme also reduces via resistance by 50%, which results in a net performance uplift of between 2%-10% depending on via density and power requirements. We believe this is an optimal approach for HPC applications that have implemented alternate, higher-resistivity conductor metals at the 1x levels","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"96 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75023745","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Kabuyanagi, D. Garbin, A. Fantini, S. Clima, R. Degraeve, G. Donadio, W. Devulder, R. Delhougne, D. Cellier, A. Cockburn, W. Kim, M. Pakala, M. Suzuki, L. Goux, G. Kar
{"title":"Understanding of Tunable Selector Performance in Si-Ge-As-Se OTS Devices by Extended Percolation Cluster Model Considering Operation Scheme and Material Design","authors":"S. Kabuyanagi, D. Garbin, A. Fantini, S. Clima, R. Degraeve, G. Donadio, W. Devulder, R. Delhougne, D. Cellier, A. Cockburn, W. Kim, M. Pakala, M. Suzuki, L. Goux, G. Kar","doi":"10.1109/VLSITechnology18217.2020.9265011","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265011","url":null,"abstract":"Switching mechanism and its controllability in Ovonic Threshold Switching (OTS) devices are systematically investigated by using Si-Ge-As-Se quaternary system known as promising OTS materials. We newly demonstrate that selector device performance is flexibly tunable by controlling fall time of switching pulse as well as operation current. Meanwhile, As- and Si-incorporation are found to be beneficial in terms of stable operation and faster recovery. All results are consistently understandable by extended percolation cluster model, supported by ab-initio and Monte-Carlo simulations.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"66 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75092548","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Fujii, M. Yamaguchi, S. Kabuyanagi, K. Ota, M. Saitoh
{"title":"Improved state stability of HfO2 ferroelectric tunnel junction by template-induced crystallization and remote scavenging for efficient in-memory reinforcement learning","authors":"S. Fujii, M. Yamaguchi, S. Kabuyanagi, K. Ota, M. Saitoh","doi":"10.1109/VLSITechnology18217.2020.9265059","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265059","url":null,"abstract":"We investigated the effects of read current instabilities originated from depolarization field and charge trapping in HfO2 ferroelectric tunnel junctions (FTJs) on the performance of in-memory reinforcement learning. We utilized, for the first time, remote scavenging to control interfacial layer thickness, combined with template-induced crystallization to stabilize the ferroelectric phase. These are found to improve both short-term and long-term stability of memory state. Pole-cart simulation results reveal that these improvements significantly contribute to the efficiency and stability of reinforcement learning with the FTJ cross-point array.","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"56 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73842515","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Mochizuki, B. Colombeau, J. Zhang, S. Kung, M. Stolfi, H. Zhou, M. Breton, K. Watanabe, J. Li, H. Jagannathan, M. Cogorno, T. Mandrekar, P. Chen, N. Loubet, S. Natarajan, B. Haran
{"title":"Structural and Electrical Demonstration of SiGe Cladded Channel for PMOS Stacked Nanosheet Gate-All-Around Devices","authors":"S. Mochizuki, B. Colombeau, J. Zhang, S. Kung, M. Stolfi, H. Zhou, M. Breton, K. Watanabe, J. Li, H. Jagannathan, M. Cogorno, T. Mandrekar, P. Chen, N. Loubet, S. Natarajan, B. Haran","doi":"10.1109/VLSITechnology18217.2020.9265097","DOIUrl":"https://doi.org/10.1109/VLSITechnology18217.2020.9265097","url":null,"abstract":"In this paper, horizontal gate-all-around (hGAA) devices with a SiGe cladded nanosheet (NS) channel have been explored for their potential benefits of Vt modulation and improved NBTI. The SiGe cladded NS channel was formed through trimming of the Si NS channel followed by selective SiGe epitaxial growth. Selective Si NS channel trimming of 1 - 2 nm per side with low roughness and conformal SiGe cladding epitaxial growth of 2 - 3 nm with good crystallinity were demonstrated. It is shown that a SiGe cladding NS channel provides a reduction of threshold voltage (Vt) and improved reliability. It is also shown that a conformal Si cap grown on the SiGe cladded NS channel suppresses the interface trap density (Dit).","PeriodicalId":6850,"journal":{"name":"2020 IEEE Symposium on VLSI Technology","volume":"100 1","pages":"1-2"},"PeriodicalIF":0.0,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80745792","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}