A. Ortiz-Conde, Y. Ma, J. Thomson, E. Santos, J. J. Liou, F. Sánchez, M. Lei, J. Finol, P. Layman
{"title":"Parameter extraction using lateral and vertical optimization","authors":"A. Ortiz-Conde, Y. Ma, J. Thomson, E. Santos, J. J. Liou, F. Sánchez, M. Lei, J. Finol, P. Layman","doi":"10.1109/ICMEL.2000.840546","DOIUrl":"https://doi.org/10.1109/ICMEL.2000.840546","url":null,"abstract":"We revisited the direct lateral optimization method, which is based on the approach of minimizing the error on the lateral axis. We compare the efficiency and robustness of the widely used vertical optimization and the present lateral optimization methods.","PeriodicalId":215956,"journal":{"name":"2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400)","volume":"120 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128117519","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
N. Cezac, P. Rossel, F. Morancho, H. Tranduc, A. Peyre-Lavigne, I. Pagès
{"title":"A new generation of power devices based on the concept of the \"Floating Islands\"","authors":"N. Cezac, P. Rossel, F. Morancho, H. Tranduc, A. Peyre-Lavigne, I. Pagès","doi":"10.1109/ICMEL.2000.838771","DOIUrl":"https://doi.org/10.1109/ICMEL.2000.838771","url":null,"abstract":"In this paper, a new concept called \"Floating Islands Diode\" (FLI-Diode) is proposed: the voltage handling capability of this new diode is assumed by the association of several PN junctions in series. This new concept can be applied to any power devices (lateral or vertical): for instance, the specific on-resistance of a 900 Volts Vertical DMOS Transistor is strongly improved (reduction of 70% when compared to the conventional structure).","PeriodicalId":215956,"journal":{"name":"2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400)","volume":"119 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130054448","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"New MESFET noise models as user-defined elements of program Libra library","authors":"N. Males-Ilic, V. Markovic, B. Milovanovic","doi":"10.1109/ICMEL.2000.840540","DOIUrl":"https://doi.org/10.1109/ICMEL.2000.840540","url":null,"abstract":"In this paper we present a procedure for defining two new MESFET noise models as user-defined elements of standard microwave circuit simulator Libra. The first implemented model is based on equivalent temperatures including complete correlation between intrinsic transistor noise sources, while the second model extends the first one by involving the gate-leakage current influence to transistor noise characteristics.","PeriodicalId":215956,"journal":{"name":"2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134268200","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Industrial demands on micromechanical products","authors":"H. Detter, G. Popovic","doi":"10.1109/ICMEL.2000.840531","DOIUrl":"https://doi.org/10.1109/ICMEL.2000.840531","url":null,"abstract":"According to the development of microsystems, a completely new perspective can be observed for those fields of application where smallest dimensions, often smaller than the dot of an \"i\", are required. Micro system technology (MST), including micro-mechanical components, have to he applied in all fields where highest \"power density\", minimum weight and highest reliability are needed. The new approach into the micro-world could he a challenge in medical technology, telecommunications, agriculture, automotive industry, consumer products etc. A plenitude of measuring and controlling tasks do exist in almost all domains. The research and development in the promising field of microsystems is oriented towards the applications enabling a better quality of life, giving new chances for enterprises and opening new market potentials. In this paper some aspects of the actual demands the industry is putting on the MST products are presented.","PeriodicalId":215956,"journal":{"name":"2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133060190","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
G. Ayvazyan, A. Vardanyan, A.A. Chomoyan, G. A. Makaryan
{"title":"High temperature treatment effect on wafers warpage with anodized porous silicon layers","authors":"G. Ayvazyan, A. Vardanyan, A.A. Chomoyan, G. A. Makaryan","doi":"10.1109/ICMEL.2000.840575","DOIUrl":"https://doi.org/10.1109/ICMEL.2000.840575","url":null,"abstract":"The influence of high-temperature treatment from 800 to 1200/spl deg/C in neutral atmosphere on the warpage of wafers with porous silicon (PS) layers has been investigated. We have shown that the warpage has an anisotropic nature and its magnitude depends on the regimes of forming a layer of PS and the subsequent heat treatment. The link between the wafers and the structural changes of the PS is discussed.","PeriodicalId":215956,"journal":{"name":"2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124221971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Endoh, H. Sakuraba, Katsuhisa Shinmei, F. Masuoka
{"title":"The 1.44F/sup 2/ memory cell technology with the stacked-surrounding gate transistor (S-SGT) DRAM","authors":"T. Endoh, H. Sakuraba, Katsuhisa Shinmei, F. Masuoka","doi":"10.1109/ICMEL.2000.838730","DOIUrl":"https://doi.org/10.1109/ICMEL.2000.838730","url":null,"abstract":"The proposed Stacked-Surrounding Gate Transistor (S-SGT) DRAM is structured by stacking several SGT-type cells in series vertically. When the S-SGT DRAM is stacking 4 cells and one bit-line of both S-SGT and the normal DRAM has 1 K-bit cells, the S-SGT DRAM can realize a cell area per bit of 1.44F/sup 2/, while cell area per bit of the normal DRAM with the same design rule is 12F/sup 2/. Also the S-SGT DRAM achieves a 230% larger signal capacitance over total bit-line capacitance (Cs/Cb) than that of the normal DRAM.","PeriodicalId":215956,"journal":{"name":"2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114797848","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Endoh, H. Sakuraba, Katsuhisa Shinmei, F. Masuoka
{"title":"New three dimensional (3D) memory array architecture for future ultra high density DRAM","authors":"T. Endoh, H. Sakuraba, Katsuhisa Shinmei, F. Masuoka","doi":"10.1109/ICMEL.2000.838729","DOIUrl":"https://doi.org/10.1109/ICMEL.2000.838729","url":null,"abstract":"A three dimensional (3D) memory array architecture is realized by stacking several cells in series vertically up on each cell which is located in two dimensional (2D) array matrix. Total bit-line capacitance of this proposed architecture's DRAM is suppressed to 37% of normal DRAM, when one bit-line has 1 K-bit cells and the same design rules are used. Moreover, array area of 1 M-bit DRAM using the proposed architecture, is reduced to 11.5% of normal DRAM using the same design rules.","PeriodicalId":215956,"journal":{"name":"2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400)","volume":"603 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117071543","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Simulation of high sensitivity and stability surface acoustic wave NO/sub 2/ gas sensor based on amplitude variations as measurand","authors":"K. El-Shennawy, M. S. Orabi, T. E. Taha","doi":"10.1109/ICMEL.2000.838765","DOIUrl":"https://doi.org/10.1109/ICMEL.2000.838765","url":null,"abstract":"This paper presents the use of Surface Acoustic Wave (SAW) devices as gas sensors utilizing Multi-Strip Coupler (MSC), where the amplitude of the SAW's is the measured quantity, based on conductivity changes of the used sensor film. A theoretical model for SAW-MSC on LiNbO/sub 3/ substrate and using Copper phthalocyanine (CuPc) as a sensor layer for NO/sub 2/ gas sensor is illustrated. A computer simulation program is developed to obtain the variations in the insertion loss (IL) of the device under the adsorption influence of the substance to be detected, and its results are compared with the published experimental results.","PeriodicalId":215956,"journal":{"name":"2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129439093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Characterization of power VDMOSFETs by split C-V measurements","authors":"P. Habaš, S. Mileusnic, T. Zivanov","doi":"10.1109/ICMEL.2000.840584","DOIUrl":"https://doi.org/10.1109/ICMEL.2000.840584","url":null,"abstract":"Split C-V measurements are evaluated as a characterization method for power VDMOSFETs. The measurement of the gate total capacitance results for VDMOSFETs in a complex curve which is superposition of the electron and hole, accumulation, depletion and inversion contributions of different interface regions. As opposed, in the split C-V measurements, giving gate-drain and gate-source capacitance, the electron and hole contributions of particular interface areas are separated. The structure of the split C-V characteristics and the gate total capacitance of a VDMOS cell is clarified. Interpretation of experimental results is confirmed by numerical 2D calculations of the split C-V characteristics by means of small signal ac analysis, and by numerical quasi-static analysis of the gate-capacitance components which originate from the different interface regions. The impact of the drain-source bias on the characteristics is explained. Applications are envisaged: measurements of technology parameters in VDMOSFETs, and separate measurement of the level of gate oxide degradation in the channel and in the epitaxial region after irradiation.","PeriodicalId":215956,"journal":{"name":"2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129821138","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Reliability of surface micromachined MicroElectroMechanical actuators","authors":"Dandle M. Tanner","doi":"10.1109/ICMEL.2000.840535","DOIUrl":"https://doi.org/10.1109/ICMEL.2000.840535","url":null,"abstract":"This paper will review some of the investigations into MicroElectroMechanical systems (MEMS) reliability. It will categorize the major reliability issues of MEMS actuators. Reliability concerns of stiction, mechanical wear, fracture, fatigue, shock, and vibration will be discussed.","PeriodicalId":215956,"journal":{"name":"2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130518449","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}