Reliability of surface micromachined MicroElectroMechanical actuators

2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400) Pub Date : 2000-05-14 DOI:10.1109/ICMEL.2000.840535

Dandle M. Tanner

引用次数: 38

Abstract

This paper will review some of the investigations into MicroElectroMechanical systems (MEMS) reliability. It will categorize the major reliability issues of MEMS actuators. Reliability concerns of stiction, mechanical wear, fracture, fatigue, shock, and vibration will be discussed.

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表面微加工微机电执行器的可靠性

本文将对微机电系统(MEMS)可靠性的一些研究进行综述。它将对MEMS执行器的主要可靠性问题进行分类。将讨论粘滞、机械磨损、断裂、疲劳、冲击和振动的可靠性问题。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400)

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