2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)最新文献

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Using LV process to design high voltage DDDMOSFET and LDMOSFET with 3-D profile structure 采用低压工艺设计了具有三维轮廓结构的高压DDDMOSFET和LDMOSFET
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694463
Chien-Hao Huang, Tsung-Yi Huang, C. Yang, H. Chu, K. Lo, C. Hung, Kuo-Cheng Chang, H. Su, Chih-Fang Huang, J. Gong
{"title":"Using LV process to design high voltage DDDMOSFET and LDMOSFET with 3-D profile structure","authors":"Chien-Hao Huang, Tsung-Yi Huang, C. Yang, H. Chu, K. Lo, C. Hung, Kuo-Cheng Chang, H. Su, Chih-Fang Huang, J. Gong","doi":"10.1109/ISPSD.2013.6694463","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694463","url":null,"abstract":"In this work, layout skills using three dimensional (3D) fish bone, slot, and island patterns to enhance the breakdown voltage of PW/NW junction of lateral MOSFETs is developed. Novel lateral double diffused MOSFETs (LDMOSFET) and Double Diffused Drain MOSFETs (DDDMOSFET) without any high voltage (HV) layer are achieved in a standard 5V low voltage (LV) CMOS technology. From the experiment results, the developed DDDMOSFETs and LDMOSFETs can be used for 10V and 60V application respectively.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133690035","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
MHz-converter design for high conversion ratio 高转换率的mhz变换器设计
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694445
J. Wittmann, B. Wicht
{"title":"MHz-converter design for high conversion ratio","authors":"J. Wittmann, B. Wicht","doi":"10.1109/ISPSD.2013.6694445","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694445","url":null,"abstract":"This paper presents a circuit design and efficiency study for integrated converters with switching frequencies up to 15 MHz at high conversion ratio with input voltages up to 40 V and output voltages <;5 V. An asynchronous buck converter is well suitable, while in contrast, a synchronous topology causes larger switching losses due to its low side switch. Critical design aspects are presented along with an implementation in a 180 nm HV BiCMOS technology. A saw-tooth with fast fall time is achieved with two interleaved integrator stages. The limitation due to the finite fall-time of the saw tooth signal was solved by a PWM comparator that gets reset by a synchronized clock with an adjusted lead time at min. or max. duty cycle, respectively. A high speed level shifter is used to shift the PWM signal to the high side domain. The gate driver uses a two-branch tapered buffer with asymmetry factor to achieve maximum switching speed while at the same time the current consumption is minimized. An efficiency model, verified by measurements, allows to simulate and to determine quantitatively the root cause of the power losses separately for each circuit block. At 15 MHz and 10 V input voltage a peak efficiency of ~65% was achieved. While the efficiency reduces to about 35% for a conversion from 40 V input to 5 V output, resonant concepts are expected to reach >50% efficiency. In experiments a switching frequency of 40 MHz was achieved.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132210588","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 17
Ultralow on-resistance 30–40 V UMOSFET by 2-D scaling of ion-implanted superjunction structure 基于离子注入超结结构的30-40 V超低导通电阻UMOSFET
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694403
Hisanori Okubo, Kenya Kobayashi, Y. Kawashima
{"title":"Ultralow on-resistance 30–40 V UMOSFET by 2-D scaling of ion-implanted superjunction structure","authors":"Hisanori Okubo, Kenya Kobayashi, Y. Kawashima","doi":"10.1109/ISPSD.2013.6694403","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694403","url":null,"abstract":"We present an ultimately narrow pitch superjunction UMOSFET (SJ-UMOS) with a record low specific on-resistance (Rsp) for automotive applications. This high performance device was designed by not only shrinkage of lateral p/n pitch, but reduction of longitudinal dimension for voltage sustaining region including ion-implanted p-columns. The refined technologies brought us a fully depleted SJ structure with extremely scaled pitch to a minimum of 1.0 μm. In the developed SJ-UMOS, an ultralow Rsp (VGS = 10 V) of 4.75 miimm2 (2.95 miimm2 without a substrate component) at a breakdown voltage of 32.8 V was obtained. We also confirmed excellent properties of low RonQG FOM and soft recovery operation of a body diode due to the best architecture around the gate electrode of the MOSFET.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129386974","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Low voltage MOSFET optimized for low VDS transient voltages 针对低VDS瞬态电压优化的低压MOSFET
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694402
P. Rutter, S. Peake, A. Elford
{"title":"Low voltage MOSFET optimized for low VDS transient voltages","authors":"P. Rutter, S. Peake, A. Elford","doi":"10.1109/ISPSD.2013.6694402","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694402","url":null,"abstract":"A 30V power MOSFET technology, employing a low voltage superjunction approach, has been optimized for operation as a low-side switch in a DC-DC buck converter. In particular, this technology has been designed with an emphasis on minimizing the voltage overshoots that occur in high efficiency DC-DC converters by modification of the MOSFET's body diode and output capacitance, COSS. This has resulted in a significant reduction in VDS overshoot of ≈50%.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125798615","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
0.35μm, 30V fully isolated and low-Ron nLDMOS for DC-DC applications 0.35μm, 30V完全隔离和低ron nLDMOS,用于DC-DC应用
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694454
Kyungho Lee, Haeung Jeon, Byunghee Cho, Joonhee Cho, Yon-Sup Pang, Jin-Seok Moon, S. Kwon, F. Hébert, Junghwan Lee, Taejong Lee
{"title":"0.35μm, 30V fully isolated and low-Ron nLDMOS for DC-DC applications","authors":"Kyungho Lee, Haeung Jeon, Byunghee Cho, Joonhee Cho, Yon-Sup Pang, Jin-Seok Moon, S. Kwon, F. Hébert, Junghwan Lee, Taejong Lee","doi":"10.1109/ISPSD.2013.6694454","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694454","url":null,"abstract":"In this paper, we present a new approach to integrate in a 0.35 μm BCD technology, low Ron LDMOS power transistors with highly competitive Specific Resistance figure of merit (Rsp, defined as Ron*Area). The LDMOS are fully isolated in order to support applications which may bias the source/drain electrodes below the substrate potential, which is critical for devices used in high-current, high-frequency switching applications. The new devices are suitable for high-efficiency DC-DC converter products with operating voltage of up to 30V, such as mobile PMICs. For maximum performance, two different extended-drain LDMOS structures have been developed to cover the entire operating voltage range: for 16V and below, a planar-gate structure is used and for 20V and above, a non-planar “offset-LOCOS” gate is used for 20V and above.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"46 21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126461281","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 17
60V-class power IC technology for an intelligent power switch with an integrated trench MOSFET 60v级功率IC技术,用于集成沟槽MOSFET的智能电源开关
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694450
Y. Toyoda, Hideaki Katakura, Takatoshi Ooe, M. Iwaya, H. Sumida
{"title":"60V-class power IC technology for an intelligent power switch with an integrated trench MOSFET","authors":"Y. Toyoda, Hideaki Katakura, Takatoshi Ooe, M. Iwaya, H. Sumida","doi":"10.1109/ISPSD.2013.6694450","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694450","url":null,"abstract":"New 60V-class intelligent power switch (IPS) technology implementing a vertical trench MOSFET has been developed for automotive applications. We have realized the method to integrate a 60V-class vertical trench MOSFET with high voltage surge robustness and 5V- and 60V-class lateral planar MOSFETs on one chip. The integrated vertical trench MOSFET is designed by 0.35μm-rule in order to reduce its specific on-resistance (Ron·A). As a result, our integrated vertical trench MOSFET has the Ron·A below 0.6mΩ·cm2 which is about 40% Ron·A of the vertical planar MOSFET integrated in the conventional IPS. This paper reports our newly developed 60V-class power IC technology for the IPS.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124325445","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Comparison of theoretical limits between superjunction and field plate structures 超结结构与场极板结构的理论极限比较
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694461
W. Saito
{"title":"Comparison of theoretical limits between superjunction and field plate structures","authors":"W. Saito","doi":"10.1109/ISPSD.2013.6694461","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694461","url":null,"abstract":"This paper reports that theoretical limits for the superjunction (SJ) and field plate (FP) structures and the optimum application voltage range is discussed with the previous experimental data. The specific on-resistance limit of the SJ structure is as same as that of the FP structure and inverse proportional to the cell aspect ratio γSJ and γFP (= drift thickness/lateral cell pitch). The cell aspect ratio can be easily increased with the breakdown voltage due to the drift thickness. On the other hand, at the low voltage device, the aspect ratio is determined by the lateral cell pitch due to the process technology. At the FP structure, the insulator thickness interferes to increase the aspect ratio. From the viewpoints of the aspect ratio limit and the output capacitance stored energy (Eoss), the SJ structure is effective for high voltage MOSFETs and the FP structure is effective for low voltage ones. The border of the optimum application voltage is 100-200 V.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"82 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114269332","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 32
A novel high voltage Pch-MOS with a new drain drift structure for 1200V HVICs 一种用于1200V hvic的新型漏极漂移结构的高压Pch-MOS
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694401
M. Yoshino, K. Shimizu
{"title":"A novel high voltage Pch-MOS with a new drain drift structure for 1200V HVICs","authors":"M. Yoshino, K. Shimizu","doi":"10.1109/ISPSD.2013.6694401","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694401","url":null,"abstract":"A new 1200V Pch-MOS having a new drain structure is proposed. Our proposing new 1200V Pch-MOS improves a substrate leak problem which occurred in conventional one without sacrificing a breakdown voltage and an output current. Thanks to the new Pch-MOS, a 1200V HVIC which provides a high voltage level-shifting from high voltage region to low voltage region is successfully realized.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117165428","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A novel super-junction trench gate MOSFET fabricated using high aspect-ratio trench etching and boron lateral diffusion technologies 采用高宽高比沟槽刻蚀和硼横向扩散技术制备了一种新型的超结沟槽栅MOSFET
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694459
S. G. Kim, H. Park, S. Yoo, K. Na, J. Koo, J. Won, K. Park, Y. Yang, J. Lee
{"title":"A novel super-junction trench gate MOSFET fabricated using high aspect-ratio trench etching and boron lateral diffusion technologies","authors":"S. G. Kim, H. Park, S. Yoo, K. Na, J. Koo, J. Won, K. Park, Y. Yang, J. Lee","doi":"10.1109/ISPSD.2013.6694459","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694459","url":null,"abstract":"We propose a super-junction trench gate MOSFET (SJ TGMOSFET) which is fabricated with a simple p-pillar forming process using deep trench and boron silicate glass (BSG) doping process technologies to reduce the process complexity. The p-pillar region is formed through lateral boron diffusion from BSG film and annealing process after the silicon deep etching. For the SJ TGMOSFET fabricated with BSG lateral diffusion, the controls of the boron concentration and the profile are important to achieve the charge balance between p-and n-pillars. Throughout the various boron doping experiments as well as process simulation, we optimize process conditions related with p-pillar depth, BSG doping concentration and diffusion temperature. Due to the trenched p-pillar, the potential of the SJ TGMOSFET more uniformly distributes and widely spreads into the bulk region of the n-drift layer comparing to the conventional TGMOSFET. The measured breakdown voltage of SJ TGMOSFET increases at least 28% than that of the conventional TGMOSFET.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127241520","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Intermediate bus architectures: A practical review 中间总线体系结构:实用回顾
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694471
Don Tan
{"title":"Intermediate bus architectures: A practical review","authors":"Don Tan","doi":"10.1109/ISPSD.2013.6694471","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694471","url":null,"abstract":"Three basic intermediate bus architectures are reviewed for electronic power system developers. Salient features for practical system development are then discussed in detail, including power efficiency, regulation, component selection, load cross regulation, and board thermal flux density. The double regulated intermediate bus architecture has the best overall efficiency, regulation, size, and thermal performance.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125389704","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
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