Ultralow on-resistance 30–40 V UMOSFET by 2-D scaling of ion-implanted superjunction structure

We present an ultimately narrow pitch superjunction UMOSFET (SJ-UMOS) with a record low specific on-resistance (Rsp) for automotive applications. This high performance device was designed by not only shrinkage of lateral p/n pitch, but reduction of longitudinal dimension for voltage sustaining region including ion-implanted p-columns. The refined technologies brought us a fully depleted SJ structure with extremely scaled pitch to a minimum of 1.0 μm. In the developed SJ-UMOS, an ultralow Rsp (VGS = 10 V) of 4.75 miimm2 (2.95 miimm2 without a substrate component) at a breakdown voltage of 32.8 V was obtained. We also confirmed excellent properties of low RonQG FOM and soft recovery operation of a body diode due to the best architecture around the gate electrode of the MOSFET.