2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)最新文献

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Integrated 85V rated complimentary LDMOS devices utilizing patterned field plate structures for best-in-class performance in network communication applications 集成85V额定的免费LDMOS器件,利用图案场板结构,在网络通信应用中具有一流的性能
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694423
Santosh K. Sharma, Yun Shi, M. Zierak, D. Cook, R. Phelps, T. Letavic, N. Feilchenfeld
{"title":"Integrated 85V rated complimentary LDMOS devices utilizing patterned field plate structures for best-in-class performance in network communication applications","authors":"Santosh K. Sharma, Yun Shi, M. Zierak, D. Cook, R. Phelps, T. Letavic, N. Feilchenfeld","doi":"10.1109/ISPSD.2013.6694423","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694423","url":null,"abstract":"This paper presents complimentary 85V-rated LDMOS devices integrated in a 180nm power management technology platform. The devices are fabricated using a design technique which utilizes tapered dielectric regions in combination with patterned floating field plated structures. The performance of the new structures are compared to conventional LDMOS structures and it shown that the floating field plated structures have superior BV<sub>ds</sub>-R<sub>on, sp</sub>, HCI reliability, and forward safe operating area figures-of-merit. These devices exhibit best-in-class BV<sub>ds</sub>-R<sub>on, sp</sub> figure-of-merit (NLDMOS : BV<sub>ds</sub>=130V/R<sub>on, sp</sub>=195mΩ.mm<sup>2</sup> and PLDMOS : BV<sub>ds</sub>=140V/R<sub>on, sp</sub>=530mΩ.mm<sup>2</sup>) and hot carrier reliability in excess of 10 years analog lifetime for rated V<sub>DS</sub> = 85V and full range of V<sub>GS</sub>. These devices enable cost effective integration of PoE systems with multiple interface channels and auxiliary switching regulators.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"229 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116446158","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
10 kV SiC BJTs — Static, switching and reliability characteristics 10kv SiC bjt。静态、开关和可靠性特性
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694409
S. Sundaresan, Stoyan Jeliazkov, B. Grummel, R. Singh
{"title":"10 kV SiC BJTs — Static, switching and reliability characteristics","authors":"S. Sundaresan, Stoyan Jeliazkov, B. Grummel, R. Singh","doi":"10.1109/ISPSD.2013.6694409","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694409","url":null,"abstract":"Open-base breakdown voltages as high as 10.5 kV (91% of theoretical avalanche limit and 125 V/μm), on-resistance of 110 mΩ-cm2 close to the unipolar limit of 94 mΩ-cm2, and current gain as high as 75 are measured on 10 kV-class SiC BJTs. Monolithic Darlington-connected BJTs fabricated on the same wafer yield current gains as high as 3400, and show Si BJT-like output characteristics with a differential on-resistance as low as 44 mΩ-cm2 in the saturation region and a distinct quasi-saturation region. Switching measurements performed at a DC link voltage of 5 kV and collector current of 8 A feature a collector current rise time as low as 30 ns during turn-on and collector voltage recovery time as low as 100 ns during turn-off. Very low turn-on and turn-off switching energies of 4.2 mJ and 1.6 mJ, respectively, are extracted from the switching transients, which are 19 and 25 times smaller than the corresponding switching energies reported on 6.5 kV Si IGBTs. When turnedon to a short-circuited load at a collector bias of 4500 V, the 10 kV BJT shows a temperature-invariant, withstand time in excess of 20 μs. Leakage currents <; 1μA (system limit) are measured, even after 234 hours of operation under a DC collector bias of 5000 V at elevated temperatures.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132409297","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 21
New concept high-voltage IGBT gate driver with self-adjusting active gate control function for SiC-SBD hybrid module 用于SiC-SBD混合模块的具有自调节有源栅极控制功能的新概念高压IGBT栅极驱动器
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694418
Kohei Onda, A. Konno, J. Sakano
{"title":"New concept high-voltage IGBT gate driver with self-adjusting active gate control function for SiC-SBD hybrid module","authors":"Kohei Onda, A. Konno, J. Sakano","doi":"10.1109/ISPSD.2013.6694418","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694418","url":null,"abstract":"We present a new concept in insulated-gate bipolar transistor (IGBT) gate drivers with a blocking voltage up to 3.3kV that have a pulse transformer interface and a function for self-adjusting active gate control. The error-correcting decoder we proposed contributed to the reliability of signal transmission. Moreover, the method of gate control using differentiation of gate voltage could automatically adjust the timing of gate controls against variations in the threshold voltage or collector current without the use of external sensors. These functions were integrated into custom ICs. The new concept high-voltage IGBT gate drivers applied to a 3.3 kV/1200A silicon carbide Schottky barrier diode (SiC-SBD) hybrid-module suppressed ringing in the SiC-SBD and reduced the slew rate by 70%.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"52 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129380088","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Breakthrough in trade-off between threshold voltage and specific on-resistance of SiC-MOSFETs sic - mosfet的阈值电压与导通电阻权衡的突破
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694397
M. Furuhashi, T. Tanioka, Y. Ebiike, E. Suekawa, Y. Tarui, S. Sakai, N. Yutani, N. Miura, M. Imaizumi, S. Yamakawa, T. Oomori
{"title":"Breakthrough in trade-off between threshold voltage and specific on-resistance of SiC-MOSFETs","authors":"M. Furuhashi, T. Tanioka, Y. Ebiike, E. Suekawa, Y. Tarui, S. Sakai, N. Yutani, N. Miura, M. Imaizumi, S. Yamakawa, T. Oomori","doi":"10.1109/ISPSD.2013.6694397","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694397","url":null,"abstract":"The threshold voltage of 4H-SiC MOSFET increases drastically by performing wet oxidation after nitridation of gate oxide without significant decrease in the channel effective mobility. The increment of the threshold voltage depends on the wet oxidation conditions, and wet oxidation improves the trade-off between the threshold voltage and the specific on-resistance. We fabricated 600 V 4H-SiC MOSFETs with a threshold voltage of 5.11 V and a specific on-resistance of 5.2 mΩcm2 using the procedure above. The stability of the threshold voltage for the SiC-MOSFETs was confirmed by a HTGB test.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116796876","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Correlation between MR-DCIV current and high-voltage-stress-induced degradation in LDMOSFETs ldmosfet中MR-DCIV电流与高压应力诱导降解的相关性
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694426
Yandong He, Lin Han, Ganggang Zhang, Xing Zhang
{"title":"Correlation between MR-DCIV current and high-voltage-stress-induced degradation in LDMOSFETs","authors":"Yandong He, Lin Han, Ganggang Zhang, Xing Zhang","doi":"10.1109/ISPSD.2013.6694426","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694426","url":null,"abstract":"MR-DCIV current has demonstrated the nondestructive capability to profile the interface states along the channel, accumulation and STI regions in high-voltage LDMOSFET. The correlation between interface state and MR-DCIV current has been studied under high voltage stresses in LDMOSFETs. Our study results show that RON degradation is mainly affected by newly-generated interface states in the STI region. Compare to the PBTI with higher gate voltage, OFF-state stress with higher drain voltage would become the worst degradation condition in an STI-based nLDMOSFETs.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125689704","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Design and optimization of 700V HVIC technology with multi-ring isolation structure 多环隔离700V HVIC技术的设计与优化
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694451
Nam-Chil Moon, K. Kwon, Changjun Lee, K. Sung, Bum-Seok Kim, K. Yoo, H. Park
{"title":"Design and optimization of 700V HVIC technology with multi-ring isolation structure","authors":"Nam-Chil Moon, K. Kwon, Changjun Lee, K. Sung, Bum-Seok Kim, K. Yoo, H. Park","doi":"10.1109/ISPSD.2013.6694451","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694451","url":null,"abstract":"For high side gate driver IC, we applied to single p-type isolation technic between high side region and 700V LDMOS (lateral double-diffused MOS) drain to reduce electric potential of junction termination by the crossing drain metal of 700V LDMOS. This single p-type isolation has low doping concentration to be fully depleted for maintaining a high voltage, normally more than 700V. It is limited to remove the cross-talk problem caused by leakage current between high side region and drain of 700V LDMOS in HVIC (High Voltage Integrated Circuits) using self-shielding structure. So, we are proposed to multi-ring p-type isolation technic to clear leakage issue between two LDMOS used as level shifters. And a robust high side gate driver IC adapting new self-shielding concept with perfect isolation using p-type multi-ring structure is experimentally realized. Experiment results have shown that over 850V breakdown voltage and no leakage current between LDMOS drain and high side region even though the drain voltage of LDMOS is lower than 2V. In addition, highly doped n+ buried layer in the high side region of proposed structure led good dV/dt immunity.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124280642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
A novel 4H-SiC Trench MOS Barrier Schottky rectifier fabricated by a two-mask process 采用双掩膜工艺制备的新型4H-SiC沟槽MOS势垒肖特基整流器
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694473
Chwan-Ying Lee, C. Yen, K. Chu, Young-Shying Chen, C. Hung, L. Lee, Tzu-Ming Yang, C. Chuang, C. Huang, M. Tsai
{"title":"A novel 4H-SiC Trench MOS Barrier Schottky rectifier fabricated by a two-mask process","authors":"Chwan-Ying Lee, C. Yen, K. Chu, Young-Shying Chen, C. Hung, L. Lee, Tzu-Ming Yang, C. Chuang, C. Huang, M. Tsai","doi":"10.1109/ISPSD.2013.6694473","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694473","url":null,"abstract":"A two-mask process for 4H-SiC Trench MOS Barrier Schottky (TMBS) rectifiers was studied in this paper. Systematic simulations and process developments were performed and SiC TMBS devices with breakdown voltage (BV) larger than 600V were successfully fabricated. SiC TMBS devices with a mesa width of 2μm to 4μm, a trench depth 2μm and a trench oxide layer of 0.2μm oxide thickness provide good characteristics of low reverse leakage current and low forward voltage drop. This simple two-mask process (one is for defining trench and the other is for defining top electrode) gives the SiC TMBS device the advantages of getting ride of expensive processes such as high temperature Al+ implantations (>450°C) and ultra-high temperature activations (>1600°C). This may enable SiC TMBS a potential lost cost solution to help further widespread the adoption of SiC Schottky rectifiers.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125026440","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Suppressing channel-conduction during dynamic avalanche to improve high density power MOSFET ruggedness and reverse recovery softness 抑制动态雪崩时的通道传导,以提高高密度功率MOSFET的坚固性和反向恢复柔软性
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694413
Jingjing Chen, L. Radic, T. Henson
{"title":"Suppressing channel-conduction during dynamic avalanche to improve high density power MOSFET ruggedness and reverse recovery softness","authors":"Jingjing Chen, L. Radic, T. Henson","doi":"10.1109/ISPSD.2013.6694413","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694413","url":null,"abstract":"This paper demonstrates a new phenomenon for the state-of-the-art ultra-high density trench power MOSFET: channel conduction during dynamic avalanche even when gate voltage is well below the nominal threshold voltage. In particular, a comprehensive study has been done through mixed-mode 2D device simulation and measurement, showing that the channel conduction during avalanche can not only strongly influence body diode reverse recovery behavior, but also impact device ruggedness during Unclamped Inductive Switching (UIS). Results show that by suppressing the channel conduction, diode reverse recovery softness can be improved by 23% for the same reverse peak current, and the UIS avalanche current can be improved by 7%, which is significant for the harsh automotive DC-DC converter and hybrid vehicle motor inverter applications.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129690334","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
High breakdown voltage AlGaN/GaN MOS-HEMTs-on-Si with atomic-layer-deposited Al2O3 gate insulator 具有原子层沉积Al2O3栅极绝缘体的高击穿电压AlGaN/GaN MOS-HEMTs-on-Si
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694482
Young-shil Kim, M. Ha, O. Seok, W. Ahn, M. Han
{"title":"High breakdown voltage AlGaN/GaN MOS-HEMTs-on-Si with atomic-layer-deposited Al2O3 gate insulator","authors":"Young-shil Kim, M. Ha, O. Seok, W. Ahn, M. Han","doi":"10.1109/ISPSD.2013.6694482","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694482","url":null,"abstract":"We have proposed and fabricated AlGaN/GaN MOSHEMTs employing an atomic-layer-deposited (ALD) Al<sub>2</sub>O<sub>3</sub> gate insulator. A 10-nmm Al<sub>2</sub>O<sub>3</sub> served as passivation layer as well as gate dielectric, which results in stable blocking characteristics. The drain leakage current of the proposed device was decreased by five orders. The leakage current of the conventional device (MESFET) with L<sub>GD</sub> of 15 μm was 87 μA/mm while that of the proposed device with the same L<sub>GD</sub> was 0.2 nA/mm. The ratio of the gate leakage current to the total leakage (I<sub>G</sub>/I<sub>DSS</sub>) was decreased to 0.1 while that of the conventional one was over 0.8. It was found that ALD-Al<sub>2</sub>O<sub>3</sub> gate insulator made a significant contribution to the device blocking capability by suppressing gate leakage effectively. The measured breakdown voltage (V<sub>BR</sub>) of the MOSHEMTs with L<sub>GD</sub> of 20 μm was 1980 V while the V<sub>BR</sub> of the conventional HEMTs device with the same L<sub>GD</sub> was 1310 V. In addition, the MOS-HEMTs with 3-μm gate exhibited good dc and pulse characteristics due to passivation effect of the ALD-Al<sub>2</sub>O<sub>3</sub> gate insulator.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132861829","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High breakdown voltage InAlN/AlN/GaN HEMTs achieved by Schottky-Source technology 肖特基源技术实现高击穿电压InAlN/AlN/GaN hemt
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD) Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694479
Qi Zhou, Wanjun Chen, Sheng-gen Liu, Bo Zhang, Zhihong Feng, S. Cai, K. J. Chen
{"title":"High breakdown voltage InAlN/AlN/GaN HEMTs achieved by Schottky-Source technology","authors":"Qi Zhou, Wanjun Chen, Sheng-gen Liu, Bo Zhang, Zhihong Feng, S. Cai, K. J. Chen","doi":"10.1109/ISPSD.2013.6694479","DOIUrl":"https://doi.org/10.1109/ISPSD.2013.6694479","url":null,"abstract":"In this paper, we demonstrate 253% improvement in the off-state breakdown voltage (BV) of the lattice-matched In<sub>0.17</sub>Al<sub>0.83</sub>N/GaN high-electron-mobility transistors (HEMTs) by using a new Schottky-Source technology. Based on this concept, the Schottky-Source (SS) InAlN/GaN HEMTs are proposed. The SS HEMTs with a L<sub>GD</sub> of 15 μm showed a three-terminal BV of 650 V, while conventional InAlN/GaN HEMTs of the same geometry showed a maximum BV of 184 V. Without using any field-plate the result measured in the proposed device is the highest BV ever achieved on InAlN/GaN HEMTs. The corresponding specific on-resistance (R<sub>sp, on</sub>) is as low as 3.4 mΩ·cm<sup>2</sup>. A BV of 118 V was also obtained in an SS InAlN/GaN HEMTs with L<sub>GD</sub>=1 μm, which is the highest BV in GaN-based HEMTs featuring such a short L<sub>GD</sub> with GaN buffer.","PeriodicalId":175520,"journal":{"name":"2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130767001","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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