M. Waltl, A. Grill, G. Rzepa, W. Goes, J. Franco, B. Kaczer, J. Mitard, T. Grasser
{"title":"Nanoscale evidence for the superior reliability of SiGe high-k pMOSFETs","authors":"M. Waltl, A. Grill, G. Rzepa, W. Goes, J. Franco, B. Kaczer, J. Mitard, T. Grasser","doi":"10.1109/IRPS.2016.7574644","DOIUrl":"https://doi.org/10.1109/IRPS.2016.7574644","url":null,"abstract":"It is commonly accepted that the susceptibility of conventional Si channel pMOSFETs to the negative bias temperature instability (NBTI) is a serious threat to further scaling. One possible solution of this problem is the use of SiGe quantum-well devices, which not only offer high mobilities but also superior NBTI reliability compared to conventional silicon transistors. It has been speculated that the latter is due to the energetically higher valence band edge of the SiGe channel with respect to Si, which increases the energetic separation between the defect bands in the high-k gate stack and the channel. We investigate this claim by comparing the behavior of single-defects in nanoscale devices to the averaged behavior of the large number of defects visible in large-area devices. Using detailed TCAD simulations together with the four-state non-radiative multiphonon model we determine the energetic and spatial locations of the traps in the gate stack and confirm that the previously developed picture correctly explains the significant reliability benefits of SiGe channel devices.","PeriodicalId":172129,"journal":{"name":"2016 IEEE International Reliability Physics Symposium (IRPS)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127338892","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Pešić, F. Fengler, S. Slesazeck, U. Schroeder, T. Mikolajick, L. Larcher, A. Padovani
{"title":"Root cause of degradation in novel HfO2-based ferroelectric memories","authors":"M. Pešić, F. Fengler, S. Slesazeck, U. Schroeder, T. Mikolajick, L. Larcher, A. Padovani","doi":"10.1109/IRPS.2016.7574619","DOIUrl":"https://doi.org/10.1109/IRPS.2016.7574619","url":null,"abstract":"HfO2-based ferroelectrics reveal full scalability and CMOS integratability compared to perovskite-based ferroelectrics that are currently used in non-volatile ferroelectric random access memories (FeRAMs). Up to now, the mechanisms responsible for the decrease of the memory window have not been revealed. Thus, the main scope of this study is an identification of the root causes for the endurance degradation. Utilizing trap density spectroscopy for examining defect evolution with cycling of the device studied together with modeling of the degradation resulted in an understanding of the main mechanisms responsible for degradation of the ferroelectric behavior.","PeriodicalId":172129,"journal":{"name":"2016 IEEE International Reliability Physics Symposium (IRPS)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126696194","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. Coignus, G. Torrente, A. Vernhet, S. Renard, D. Roy, G. Reimbold
{"title":"Modelling of 1T-NOR flash operations for consumption optimization and reliability investigation","authors":"J. Coignus, G. Torrente, A. Vernhet, S. Renard, D. Roy, G. Reimbold","doi":"10.1109/IRPS.2016.7574630","DOIUrl":"https://doi.org/10.1109/IRPS.2016.7574630","url":null,"abstract":"Performance improvement of 1T-NOR Flash technology is demonstrated, thanks to the optimization of memory cell electrical operations. An electrical model is proposed, providing optimized program and erase electrical pulse patterns as a function of application-related constraints. Model output covers a wide operating range of single Flash cell, and allows to finely tune the consumption / charge pump scalability compromise. In the meanwhile, novel experimental capabilities allow the simulated electrical patterns to be applied along endurance characterization, and provide an extended description of Flash program dynamics along device aging. Optimized cycling conditions are shown to reduce power consumption with the cost of reduced program speed, but without any detrimental impact on device reliability.","PeriodicalId":172129,"journal":{"name":"2016 IEEE International Reliability Physics Symposium (IRPS)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116917914","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Tian-Li Wu, J. Franco, D. Marcon, B. de Jaeger, B. Bakeroot, X. Kang, S. Stoffels, M. Van Hove, G. Groeseneken, S. Decoutere
{"title":"Positive bias temperature instability evaluation in fully recessed gate GaN MIS-FETs","authors":"Tian-Li Wu, J. Franco, D. Marcon, B. de Jaeger, B. Bakeroot, X. Kang, S. Stoffels, M. Van Hove, G. Groeseneken, S. Decoutere","doi":"10.1109/IRPS.2016.7574527","DOIUrl":"https://doi.org/10.1109/IRPS.2016.7574527","url":null,"abstract":"In this paper, positive bias temperature instability (PBTI) in fully recessed gate GaN MIS-FETs is studied by using an eMSM (extended Measure-Stress-Measure) technique, which consists of a set of stress/recovery tests. By using this technique, V<sub>TH</sub> shift after a stress and the relaxation information can be collected in one experiment. First of all, a typical forward-reverse gate sweep and frequency-dependent conductance method are used to characterize V<sub>TH</sub> shift and interface state density (D<sub>it</sub>) in fully recessed gate MIS-FETs with two different gate dielectrics (PEALD SiN and ALD Al<sub>2</sub>O<sub>3</sub>), showing that ALD Al<sub>2</sub>O<sub>3</sub> has a smaller V<sub>TH</sub> shift compared with PEALD SiN although the latter has a smaller Dit. Then, an eMSM technique is used to understand the trapping/de-trapping phenomena under stress and relaxation period. The results show a power law dependency of V<sub>TH</sub> shift with respect to the stress time. Furthermore, the voltage dependency of V<sub>TH</sub> shift (7) can be extracted, showing that ALD Al<sub>2</sub>O<sub>3</sub> has a higher 7 compared to PEALD SiN. The physical model is proposed to explain the mechanism for the different voltage dependency. On the other hand, the relaxation data is collected as well, indicating that Al<sub>2</sub>O<sub>3</sub> has a faster relaxation even under a high voltage overdrive stress, which is consistent with physical model since accessibility of defects in Al<sub>2</sub>O<sub>3</sub> are located at energies less favorable for channel carriers, compared to SiN.","PeriodicalId":172129,"journal":{"name":"2016 IEEE International Reliability Physics Symposium (IRPS)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124026048","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
G. Torrente, X. Federspiel, D. Rideau, F. Monsieur, C. Tavernier, J. Coignus, D. Roy, G. Ghibaudo
{"title":"Hot carrier stress: Aging modeling and analysis of defect location","authors":"G. Torrente, X. Federspiel, D. Rideau, F. Monsieur, C. Tavernier, J. Coignus, D. Roy, G. Ghibaudo","doi":"10.1109/IRPS.2016.7574546","DOIUrl":"https://doi.org/10.1109/IRPS.2016.7574546","url":null,"abstract":"In this paper a complete TCAD model addressing Hot Carrier Degradation for Flash technology is presented and its validity range extended respect to our previous work. Using the correlation of drifting electrical parameters, a simple technique for the analysis of trap distribution location is presented and physical insights on defect shape evolution are provided at different stress conditions.","PeriodicalId":172129,"journal":{"name":"2016 IEEE International Reliability Physics Symposium (IRPS)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115091038","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Highly-accelerated WLR learning cycles for development of a trench MOSFET: Method and case study","authors":"D. Moore, G. Hall, Masaru Suzuki, Peter Burke","doi":"10.1109/IRPS.2016.7574629","DOIUrl":"https://doi.org/10.1109/IRPS.2016.7574629","url":null,"abstract":"This work describes the improvement in reliability of a trench MOSFET through modification of the cobalt silicide module. Integration options explored are; (a) use of a nitride spacer, and (b) use of TiN cap during the salicidation process. WLR methodologies are used to quantify improvements that can then undergo more extensive PLR testing. The WLR methodologies used include highly accelerated wafer level bias temperature instability test (WLBTI), and Wafer Level Time Dependent Dielectric Breakdown (WLTDDB).","PeriodicalId":172129,"journal":{"name":"2016 IEEE International Reliability Physics Symposium (IRPS)","volume":"195 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115150568","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Jiang, H. Zhang, D. Ball, L. Massengill, B. Bhuva, T. Assis, B. Narasimham
{"title":"SE performance of a Schmitt-trigger-based D-flip-flop design in a 16-nm bulk FinFET CMOS process","authors":"H. Jiang, H. Zhang, D. Ball, L. Massengill, B. Bhuva, T. Assis, B. Narasimham","doi":"10.1109/IRPS.2016.7574517","DOIUrl":"https://doi.org/10.1109/IRPS.2016.7574517","url":null,"abstract":"A hardened flip-flop (FF) design using Schmitt-trigger circuits for improved soft-error (SE) performance is presented. The Schmitt-trigger-based DFF (STDFF) design along with conventional DFF in a 16-nm bulk FinFET CMOS process were tested using alpha particles, heavy-ions, proton, and neutron. The STDFF design shows ~162× improvement in the alpha SE cross-section, up to ~30× improvement in heavy-ion SE cross-section, and ~5× improvement in both proton and neutron failure in time (FIT) rates compared with conventional DFF at nominal supply voltage and room temperature. STDFF also outperformed DFF for SE cross-section over frequency (up to 1.3 GHz) and temperature (up to 125 °C) ranges of interest.","PeriodicalId":172129,"journal":{"name":"2016 IEEE International Reliability Physics Symposium (IRPS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115197853","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jiang Zhu, Gabriel Surier, Dan Wu, Daniel Montiel-Chicharro, T. Betts, R. Gottschalg
{"title":"Adhesion requirements for photovoltaic modules of polymeric encapsulation","authors":"Jiang Zhu, Gabriel Surier, Dan Wu, Daniel Montiel-Chicharro, T. Betts, R. Gottschalg","doi":"10.1109/IRPS.2016.7574636","DOIUrl":"https://doi.org/10.1109/IRPS.2016.7574636","url":null,"abstract":"Adhesion requirements for PV are often discussed but a detailed quantification based on scientific principles is outstanding. A test for the realistic assessment of requirements is presented. The difference between this test and the conventional peel test is that the test is conducted in-situ during ageing experiments in the climatic cabinet at realistic operating temperatures. Weights are attached to the backsheet of tested PV mini-modules to test stability of adhesion as devices being aged. This test is designed to identify the weakest interface of the multilayer encapsulation system and investigate the difference between field tests and failures (not) observed in certification testing. A series of samples was prepared under a wide range of lamination conditions. Different failure modes and ageing characteristics were observed. Some samples suffered quick failure of the adhesive bonds in the encapsulation system while others withstood forces of 20g/cm for 1000 hours. The test allows a clear discrimination between different samples and links closely to operational requirements.","PeriodicalId":172129,"journal":{"name":"2016 IEEE International Reliability Physics Symposium (IRPS)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122839370","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"On why dielectric breakdown strength reduces with dielectric thickness","authors":"J. McPherson","doi":"10.1109/IRPS.2016.7574512","DOIUrl":"https://doi.org/10.1109/IRPS.2016.7574512","url":null,"abstract":"An intrinsic/fundamental-physics reason is presented for why the dielectric breakdown strength E<sub>bd</sub> reduces with dielectric thickness t<sub>diel</sub>. Through extensive use of layered dipole summations, it is shown that the Lorentz factor L tends to increase with thickness. The increase in L with dielectric thickness produces a higher local electric field (E<sub>loc</sub>) in thicker dielectrics. Higher E<sub>loc</sub> produces more polar-bond distortion (stretching, compressing, bending, etc.) and this leads to a reduction in bond strength. A reduction in bond strength causes E<sub>bd</sub> and TDDB reductions regardless of the actual bond breakage mechanism (standard Boltzmann processes, current driven processes, or hydrogen release processes). While thicker SiO<sub>2</sub> layers have lower E<sub>bd</sub>, all SiO<sub>2</sub> thicknesses tend to breakdown at roughly the same local electric field (E<sub>loc</sub>)<sub>bd</sub> ≈ 40MV/cm.","PeriodicalId":172129,"journal":{"name":"2016 IEEE International Reliability Physics Symposium (IRPS)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130041840","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
X. Kang, D. Wellekens, M. Van Hove, B. de Jaeger, N. Ronchi, T.-L. Wu, S. You, B. Bakeroot, J. Hu, D. Marcon, S. Stoffels, S. Decoutere
{"title":"Device breakdown optimization of AhOs/GaN MISFETs","authors":"X. Kang, D. Wellekens, M. Van Hove, B. de Jaeger, N. Ronchi, T.-L. Wu, S. You, B. Bakeroot, J. Hu, D. Marcon, S. Stoffels, S. Decoutere","doi":"10.1109/IRPS.2016.7574589","DOIUrl":"https://doi.org/10.1109/IRPS.2016.7574589","url":null,"abstract":"In this paper we demonstrate a solution to achieve robust enhancement-mode Al2O3/GaN MISFETs with a high breakdown voltage and suggest a possible model for the device off-state breakdown. It is found that the device breakdown exhibits different gate voltage dependence for different surface treatments before the gate dielectric deposition. The device performance is greatly improved by using an in-situ surface plasma treatment. The improved device performance is explained by a reduction of traps at the Al2O3/GaN interface, which finally leads to a reduction in the amount of trapped positive charges and associated with that a reduction of the effective electric field across the gate dielectric when the device is in off-state. Several experimental results support this hypothesis: (1) The recoverable negative threshold voltage shift after reverse gate bias depends on the interface clean before gate dielectric deposition, (2) The reverse bias gate dielectric breakdown voltage is improved by this interface plasma treatment, although the forward bias gate dielectric breakdown voltage is identical.","PeriodicalId":172129,"journal":{"name":"2016 IEEE International Reliability Physics Symposium (IRPS)","volume":"59 23","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120888895","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}