Journal of Micromechanics and Microengineering最新文献

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Development of Multi-depth Probing 3D Microelectrode Array to Record Electrophysiological Activity within Neural Cultures 多深度探测三维微电极阵列记录神经培养物内电生理活动的研制
4区 工程技术
Journal of Micromechanics and Microengineering Pub Date : 2023-09-22 DOI: 10.1088/1361-6439/acf940
Neeraj Yadav, Donatella Di Lisa, Flavio Giacomozzi, Alessandro Cian, Damiano Giubertoni, Sergio Martinoia, Leandro Lorenzelli
{"title":"Development of Multi-depth Probing 3D Microelectrode Array to Record Electrophysiological Activity within Neural Cultures","authors":"Neeraj Yadav, Donatella Di Lisa, Flavio Giacomozzi, Alessandro Cian, Damiano Giubertoni, Sergio Martinoia, Leandro Lorenzelli","doi":"10.1088/1361-6439/acf940","DOIUrl":"https://doi.org/10.1088/1361-6439/acf940","url":null,"abstract":"Abstract Microelectrode arrays (MEAs) play a crucial role in investigating the electrophysiological activities of neuronal populations. Although two-dimensional neuronal cell cultures have predominated in neurophysiology in monitoring in-vitro the electrophysiological activity, recent research shifted toward culture using three-dimensional (3D) neuronal network structures for developing more sophisticated and realistic neuronal models. Nevertheless, many challenges remain in the electrophysiological analysis of 3D neuron cultures, among them the development of robust platforms for investigating the electrophysiological signal at multiple depths of the 3D neurons’ networks. While various 3D MEAs have been developed to probe specific depths within the layered nervous system, the fabrication of microelectrodes with different heights, capable of probing neural activity from the surface as well as from the different layers within the neural construct, remains challenging. This study presents a novel 3D MEA with microelectrodes of different heights, realized through a multi-stage mold-assisted electrodeposition process. Our pioneering platform allows meticulous control over the height of individual microelectrodes as well as the array topology, paving the way for the fabrication of 3D MEAs consisting of electrodes with multiple heights that could be tailored for specific applications and experiments. The device performance was characterized by measuring electrochemical impedance, and noise, and capturing spontaneous electrophysiological activity from neurospheroids derived from human induced pluripotent stem cells. These evaluations unequivocally validated the significant potential of our innovative multi-height 3D MEA as an avant-garde platform for in vitro 3D neuronal studies.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"41 9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"136011678","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Micro gas chromatography column coated with ionic liquid/metal-organic framework composites as the stationary phase 微气相色谱柱包被离子液体/金属-有机骨架复合材料作为固定相
4区 工程技术
Journal of Micromechanics and Microengineering Pub Date : 2023-09-22 DOI: 10.1088/1361-6439/acf93e
Kangning Zhang, Xinyu Wu, Dazuo Wang, Xinyuan Hua, Ze Zhang, Peng Li, Bing Tian, Hairong Wang, Jianhai Sun
{"title":"Micro gas chromatography column coated with ionic liquid/metal-organic framework composites as the stationary phase","authors":"Kangning Zhang, Xinyu Wu, Dazuo Wang, Xinyuan Hua, Ze Zhang, Peng Li, Bing Tian, Hairong Wang, Jianhai Sun","doi":"10.1088/1361-6439/acf93e","DOIUrl":"https://doi.org/10.1088/1361-6439/acf93e","url":null,"abstract":"Abstract In this paper, the μ GC-IL/MOF and the μ GC-IL were prepared using [P66614][NTf 2 ]/ZIF-8 and [P66614][NTf 2 ] as the stationary phase, respectively. [P66614][NTf 2 ]/ZIF-8 composite stationary phase material has high specific surface area and porous structure, which increases the diffusion of gas molecules in the column. Compared to μ GC-IL, μ GC-IL/MOF can separate n-alkanes mixture (C5–C12) and lung cancer biomarkers (pentane, isoprene, acetone, benzene, 2-pentanone) with higher resolution, and the resolution ( R ) of pentane and isoprene was increased by 257.00% in particular. The μ GC-IL/MOF can separate lung cancer biomarkers in about 5 min with optimal carrier gas velocity and column temperature. The retention times of pentane, isoprene, acetone, benzene, and 2-pentanone were 0.884 min, 1.246 min, 1.634 min, 2.204 min, and 3.049 min, respectively. The resolutions of adjacent peaks were 1.785, 1.525, 2.521, and 3.514, respectively. Which meets the requirements of quantitative analysis ( R > 1.5). Therefore, the μ GC-IL/MOF is expected to be integrated into portable devices for environmental monitoring and medical diagnosis in the future.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"80 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"136011680","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms 用于分子诊断平台的集成压力驱动单向阀的低成本微流体盒的设计与制造
4区 工程技术
Journal of Micromechanics and Microengineering Pub Date : 2023-09-22 DOI: 10.1088/1361-6439/acf8d2
R Scott Downen, Quan Dong, Julius Lee Chen, Zhenyu Li
{"title":"Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms","authors":"R Scott Downen, Quan Dong, Julius Lee Chen, Zhenyu Li","doi":"10.1088/1361-6439/acf8d2","DOIUrl":"https://doi.org/10.1088/1361-6439/acf8d2","url":null,"abstract":"Abstract This paper describes the design, fabrication, and preliminary testing of a low-cost, easy to manufacture microfluidics cartridge capable of fluid storage and manipulation through a custom pressure-driven check valve. Cartridge components are fabricated using a desktop CNC and laser cutter, the check valve is fabricated using PDMS in a custom acrylic mold, and the components are assembled using a thermal diffusion welder. Following assembly, preliminary testing of the cartridge, including fluid manipulation and use for molecular diagnostics, was performed. To pull a sample into the lysing chamber, a vacuum over 1.4PSI was required. No opening of the valve to the reaction chamber was observed. Moving fluid across the custom valve from the lysing chamber to the reaction chamber then required a vacuum over 4.5PSI. Finally, a proof-of-concept demonstration of one potential application was performed using a custom benchtop LAMP system for molecular diagnostic testing. The low-cost nature of the design, ease of manufacturing, fluid storage and manipulation demonstrated make this design ideal for research and high-volume testing in low resource environments.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"136060368","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Continuous monitoring of cardiovascular function with a smart stent incorporating a flexible and stretchable wireless pressure sensor 智能支架结合柔性可拉伸无线压力传感器,可持续监测心血管功能
IF 2.3 4区 工程技术
Journal of Micromechanics and Microengineering Pub Date : 2023-09-08 DOI: 10.1088/1361-6439/acf7ce
Nomin-Erdene Oyunbaatar, A. Shanmugasundaram, K. Kwon, Dong-Weon Lee
{"title":"Continuous monitoring of cardiovascular function with a smart stent incorporating a flexible and stretchable wireless pressure sensor","authors":"Nomin-Erdene Oyunbaatar, A. Shanmugasundaram, K. Kwon, Dong-Weon Lee","doi":"10.1088/1361-6439/acf7ce","DOIUrl":"https://doi.org/10.1088/1361-6439/acf7ce","url":null,"abstract":"The development of smart stents, capable of monitoring cardiovascular diseases and communicating vascular abnormalities to medical doctors, has garnered significant attention in the field of biomedical engineering. Various ex-situ fabrication strategies have been proposed to concurrently manufacture the smart stent and pressure sensor, thereby reducing the risk of sensor detachment caused by blood flow. However, the practical utility of these devices is still limited due to the rigidity of the wireless pressure sensor. In this study, we propose a flexible and stretchable smart self-reporting stent that incorporates a wireless pressure sensor. The fabrication process has been optimized to create a serpentine-shaped wireless pressure sensor that matches the shape and flexibility of the polymer stent struts. We thoroughly investigated the structural integrity, resonance frequency, stretchability, flexibility, and radial force of the manufactured smart self-reporting stent under different conditions. The wireless pressure sensor demonstrated a sensitivity of 0.15 MHz mmHg−1, as determined through experimental analysis. To demonstrate the feasibility of the proposed smart stent, we implanted it into the arteries of a three-dimensional phantom system. The obtained results, combined with the flexible and stretchable nature of the proposed smart self-reporting stent, highlight its potential for effective monitoring of the heart’s functional dynamics and detection of in-stent restenosis.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48293184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of a piston-actuated 3D bio-printer with performance prediction system for the reliable printing of tubular structures 具有性能预测系统的活塞驱动三维生物打印机的开发,用于可靠打印管状结构
IF 2.3 4区 工程技术
Journal of Micromechanics and Microengineering Pub Date : 2023-09-08 DOI: 10.1088/1361-6439/acf7cd
Kun Liu, Chunming Yang, Jinmin Li, Gang Ling, S. Xiong
{"title":"Development of a piston-actuated 3D bio-printer with performance prediction system for the reliable printing of tubular structures","authors":"Kun Liu, Chunming Yang, Jinmin Li, Gang Ling, S. Xiong","doi":"10.1088/1361-6439/acf7cd","DOIUrl":"https://doi.org/10.1088/1361-6439/acf7cd","url":null,"abstract":"3D bio-printing is a promising approach for creating tubular structures within the human body by precisely controlling the distribution of cells. While several 3D bio-printers have been developed for printing tubular structures, achieving reliable and repeatable construction of effective human tubular structures remains a challenge. This paper presents a piston-actuated 3D bio-tubular structures printer that uses a rotary rod-support printing method and a printing performance prediction system. The printing performance prediction system is based on a two-phase flow computational fluid dynamics model that simulates the tubular structure forming process and provides optimal printing setup parameters, such as extrusion nozzle movement speed, nozzle height, and rod rotating speed. Experimental testing has validated the performance prediction system, which achieved a fair prediction accuracy with an average error of around 10%. The proposed bio-printer and prediction system have the potential to improve the efficiency and effectiveness of tubular structure printing for various biomedical applications.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"46013815","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Experimental and statistical investigation into surface characteristics in micro milling of bottom pouring/gravity stir cast Al6061 alloy 底部浇注/重力搅拌铸造Al6061合金微铣削表面特性的实验与统计研究
IF 2.3 4区 工程技术
Journal of Micromechanics and Microengineering Pub Date : 2023-09-04 DOI: 10.1088/1361-6439/acf675
Sunil Rawal, Mayank Kumar, A. Sidpara, Jinu Paul
{"title":"Experimental and statistical investigation into surface characteristics in micro milling of bottom pouring/gravity stir cast Al6061 alloy","authors":"Sunil Rawal, Mayank Kumar, A. Sidpara, Jinu Paul","doi":"10.1088/1361-6439/acf675","DOIUrl":"https://doi.org/10.1088/1361-6439/acf675","url":null,"abstract":"Micro milling offers the best way to create micro channels; however, the burr formation and surface roughness of the micro channel are difficult to control. Micro channel fabrication and their characterization of stir cast Al6061 are rarely investigated. In the present study, Al6061 alloy was processed by the bottom pouring stir casting method. The micro channels were fabricated on a base and stir cast Al6061 alloys using TiSIN-coated micro end mill tools. The influence of micromachining parameters such as spindle speed, feed rate, and depth of cut on burr formation, cutting force, burr size, and surface roughness was investigated. A comparison was made between the findings obtained from the micro milling of the base and stir cast Al6061 alloys. The surface morphology of fabricated micro channels was analysed and correlated with the roughness profile to understand the channel profile and burr formation. The top burr formation mechanism in stir cast Al6061 alloy was investigated in detail. Low feed rate, low depth of cut, and high spindle speed produced the micro channel with fewer burrs, low surface roughness, and low cutting forces. At the optimum parameter, stir cast Al6061 alloy showed an approximate 420%, 16%, and 300% increase in Fy, Fz, and Ra, respectively, as compared to the base Al6061 alloy. Adhesion wear, built-up edge, and microchipping were found to be the main tool wear mechanisms in micro machining of stir cast alloy. This study directs the choice of cutting parameters for the stir cast micro milling process.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48551110","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation 超薄内部电介质静电致动器,用于降低引入电压和双向驱动
IF 2.3 4区 工程技术
Journal of Micromechanics and Microengineering Pub Date : 2023-09-04 DOI: 10.1088/1361-6439/acf674
Satish K. Verma, Bhaskar Mitra
{"title":"Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation","authors":"Satish K. Verma, Bhaskar Mitra","doi":"10.1088/1361-6439/acf674","DOIUrl":"https://doi.org/10.1088/1361-6439/acf674","url":null,"abstract":"Direction and analog deflection control, as well as low voltage digital switching are the most desirable attributes in electrostatic actuators for current MEMS applications. In this work we show how internal dielectric transduction can be used to reduce pull-in voltages without reducing the air gap, and to effect bi-directional actuation. The actuator is a metal–dielectric–metal sandwich. For hybrid actuation to achieve reduced pull-in, the device has a thick bottom metal and a thin top metal, while for the upward actuator the device has a thick top metal and a thin bottom metal. An out-of-plane deflection of 108 nm is achieved using 5 V applied voltage for the upward actuator, while the hybrid actuator shows over 50% reduction in pull-in voltage from 1.26 V to 0.62 V.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45367007","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Micromachined piezoelectric Lamb wave resonators: a review 微机械压电兰姆波谐振器综述
IF 2.3 4区 工程技术
Journal of Micromechanics and Microengineering Pub Date : 2023-08-31 DOI: 10.1088/1361-6439/acf587
Xianzheng Lu, Hao Ren
{"title":"Micromachined piezoelectric Lamb wave resonators: a review","authors":"Xianzheng Lu, Hao Ren","doi":"10.1088/1361-6439/acf587","DOIUrl":"https://doi.org/10.1088/1361-6439/acf587","url":null,"abstract":"With the development of next-generation wireless communication and sensing technologies, there is an increasing demand for high-performance and miniaturized resonators. Micromachined piezoelectric Lamb wave resonators are becoming promising candidates because of their multiple vibration modes, lithographically defined frequencies, and small footprint. In the past two decades, micromachined piezoelectric Lamb wave resonators based on various piezoelectric materials and structures have achieved considerable progress in performance and applications. This review focuses on the state-of-the-art Lamb wave resonators based on aluminum nitride (AlN), aluminum scandium nitride (Al x Sc1−x N), and lithium niobate (LiNbO3), as well as their applications and further developments. The promises and challenges of micromachined piezoelectric Lamb wave resonators are also discussed. It is promising for micromachined piezoelectric Lamb wave resonators to achieve higher resonant frequencies and performance through advanced fabrication technologies and new structures, the integration of multifrequency devices with radio frequency (RF) electronics as well as new applications through utilizing nonlinearity and spurious modes. However, several challenges, including degenerated electrical and thermal properties of nanometer-scale electrodes, accurate control of film thickness, high thin film stress, and a trade-off between electromechanical coupling efficiencies and resonant frequencies, may limit the commercialization of micromachined piezoelectric Lamb wave resonators and thus need further investigation. Potential mitigations to these challenges are also discussed in detail in this review. Through further painstaking research and development, micromachined piezoelectric Lamb wave resonators may become one of the strongest candidates in the commercial market of RF and sensing applications.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43716207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Research on MEMS dual-channel microwave power sensor with fixed beam structure 固定波束结构MEMS双通道微波功率传感器的研究
IF 2.3 4区 工程技术
Journal of Micromechanics and Microengineering Pub Date : 2023-08-22 DOI: 10.1088/1361-6439/acf2a6
Chen Li, Ximing Guo, Aodi Xu, Debo Wang
{"title":"Research on MEMS dual-channel microwave power sensor with fixed beam structure","authors":"Chen Li, Ximing Guo, Aodi Xu, Debo Wang","doi":"10.1088/1361-6439/acf2a6","DOIUrl":"https://doi.org/10.1088/1361-6439/acf2a6","url":null,"abstract":"To improve the sensitivity and dynamic range of microwave power sensors, a micro-electromechanical system (MEMS) dual-channel microwave power sensor is proposed in this study. The sensor is designed and manufactured using the GaAs monolithic microwave integrated circuit` (MMIC) process and MEMS technology. The microwave performance, overload power and sensitivity are theoretically studied. At 8–12 GHz, the return loss of the sensors with three different fixed beam sizes are approximately −10 dB, which is good microwave performance. The sensitivities for capacitive detection channel of the two sensors with larger sizes are 2.4 fF W−1 @10 GHz and 14.5 fF W−1 @10 GHz, respectively, and the sensitivities of the thermoelectric detection channel of the three sensors is 25.7 mV W−1, 24.9 mV W−1 and 24.2 mV W−1, respectively. Compared with traditional microwave power sensors, the sensor proposed takes into account the advantages of microwave power sensors in both thermoelectric and capacitive structures. This work helps lay the foundation for the design of microwave power sensors with a fixed beam structure and thermoelectric microwave power sensors.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43242662","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High crystal quality and low residual stress composite piezoelectric films prepared by a two-step method 两步法制备高晶体质量、低残余应力的复合压电薄膜
IF 2.3 4区 工程技术
Journal of Micromechanics and Microengineering Pub Date : 2023-08-22 DOI: 10.1088/1361-6439/acf2a8
Binghui Lin, Yao Cai, Ya-xin Wang, Chao Gao, Gai Wu, Yan Liu, Wenjuan Liu, D. D. Cheam, Chengliang Sun
{"title":"High crystal quality and low residual stress composite piezoelectric films prepared by a two-step method","authors":"Binghui Lin, Yao Cai, Ya-xin Wang, Chao Gao, Gai Wu, Yan Liu, Wenjuan Liu, D. D. Cheam, Chengliang Sun","doi":"10.1088/1361-6439/acf2a8","DOIUrl":"https://doi.org/10.1088/1361-6439/acf2a8","url":null,"abstract":"The crystal quality and residual stress of piezoelectric films are critical factors that limit the performance of acoustic wave devices. To overcome this challenge, a new two-step method integrating metal-organic chemical vapor deposition (MOCVD) and physical vapor deposition (PVD) was presented. The lower part of the composite film was first grown by MOCVD, exhibiting monocrystalline quality and high residual stress. Subsequently, the upper part of the composite film deposited by PVD effectively compensates for the residual stress in the lower part of the composite film. The new two-step method was validated on the growth of AlN and AlScN on sapphire substrate. A composite film Al0.8Sc0.2 N/AlN was obtained with a full width at half maximum of 0.047° for AlN (002) of rocking curve, exhibiting a residual stress of +381 MPa and a surface roughness of 1.12 nm. It demonstrates the feasibility of preparing high-quality composite piezoelectric films for further acoustic applications.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"47861710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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