Journal of Micromechanics and Microengineering最新文献_第10页

A penetration efficiency model for the optimization of solid conical microneedles’ geometry 用于优化固体锥形微针几何形状的穿透效率模型

IF 2.3 4区工程技术

Journal of Micromechanics and Microengineering Pub Date : 2024-01-23 DOI: 10.1088/1361-6439/ad1e36

L. Piccolo, Kristal Bornillo, S. Micheli, M. Sorgato, Mauro Ricotta, Elisa Cimetta, G. Lucchetta

{"title":"A penetration efficiency model for the optimization of solid conical microneedles’ geometry","authors":"L. Piccolo, Kristal Bornillo, S. Micheli, M. Sorgato, Mauro Ricotta, Elisa Cimetta, G. Lucchetta","doi":"10.1088/1361-6439/ad1e36","DOIUrl":"https://doi.org/10.1088/1361-6439/ad1e36","url":null,"abstract":"\u0000 Microneedles (MNs) are promising alternatives to pills and traditional needles as drug delivery systems due to their fast, localized, and relatively less painful administration. Filling a knowledge gap, this study investigated and optimized the most influential geometrical factors determining the penetration efficiency of MNs. The effects of height, base diameter, and tip diameter were analyzed using the finite element method, with results showing that the most influencing factor was base diameter, followed by height. Moreover, the taper angle, which is dependent on all the geometrical factors, was found to directly affect the penetration efficiency at a fixed height. An additional model was developed to relate the height and taper angle to penetration efficiency, and the results were experimentally validated by compression testing of MN array prototypes printed using two-photon photolithography. The numerical model closely predicted the experimental results, with a root mean square error of 9.35. The results of our study have the potential to aid the design of high-penetration efficiency MNs for better functionality and applicability.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":null,"pages":null},"PeriodicalIF":2.3,"publicationDate":"2024-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139603484","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powder 利用盒式贝肯设计和简易打磨法与聚四氟乙烯粉末在 PET 基材上制备坚固的超疏水表面

IF 2.3 4区工程技术

Journal of Micromechanics and Microengineering Pub Date : 2024-01-19 DOI: 10.1088/1361-6439/ad208a

Xin Wang, Tao Wang, Jie Sheng, Ziting Wang, Weizhi Yang, Meng Li, Liping Shi

{"title":"Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powder","authors":"Xin Wang, Tao Wang, Jie Sheng, Ziting Wang, Weizhi Yang, Meng Li, Liping Shi","doi":"10.1088/1361-6439/ad208a","DOIUrl":"https://doi.org/10.1088/1361-6439/ad208a","url":null,"abstract":"\u0000 Superhydrophobic surfaces have attracted increasing interests due to their excellent features, while achieving facile preparation of superhydrophobic surface with good mechanical stability is still a challenging work. In this paper, we prepared a superhydrophobic surface by sanding polytetrafluoroethylene powder directly onto the surface of a polyethylene terephthalate (PET) film by means of a simple sanding method with sandpaper. The fabrication parameters were firstly optimized using response surface methodology. Surface morphology and chemical composition of the fabricated surface were characterized by SEM, FTIR and XPS. The mechanical performance of the superhydrophobic PET surfaces was evaluated by tape peeling test, and potential applications of this surface in self-cleaning and anti-icing were finally carried out. The results showed that the water contact angle (WCA) up to 153.5° and sliding angle (SA) less than ~3° on PET surface could be prepared under the optimum conditions, and its superhydrophobicity of surfaces was attributed to the synergistically effect of low surface energy and surface roughness. The fabricated superhydrophobic surfaces also exhibited good resistance to abrasion, and they have great potential for application in the fields of self-cleaning and anti-icing.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":null,"pages":null},"PeriodicalIF":2.3,"publicationDate":"2024-01-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139524604","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

High Performance Field Emission Cathode based on the Diamond Nanowires Prepared by Nanocrystalline Diamond Films Annealed in Air 基于在空气中退火的纳米晶金刚石薄膜制备的金刚石纳米线的高性能场发射阴极

IF 2.3 4区工程技术

Journal of Micromechanics and Microengineering Pub Date : 2024-01-16 DOI: 10.1088/1361-6439/ad1efe

Yang Wang, Chen Lin, Jinwen Zhang

{"title":"High Performance Field Emission Cathode based on the Diamond Nanowires Prepared by Nanocrystalline Diamond Films Annealed in Air","authors":"Yang Wang, Chen Lin, Jinwen Zhang","doi":"10.1088/1361-6439/ad1efe","DOIUrl":"https://doi.org/10.1088/1361-6439/ad1efe","url":null,"abstract":"\u0000 This paper reports the field emission (FE) characteristics of a diamond nanowires (DNWs) array. The nanocrystalline diamond (NCD) film was deposited on silicon by microwave plasma chemical vapor deposited (MPCVD) and then annealed in air forming DNWs and hydrogenated at last. A high-field flat-plate emission test structure with a 1.03 μm gap between anode and cathode was prepared and the electrical properties proved it feasible. The FE performance of DNWs array was measured in a vacuum test system and that of NCDs film either as a comparison. Finally, their FE parameters were analyzed and extracted based on the Fowler-Nordheim (F-N) theory. The results show that transforming NCDs film into DNWs array can improve the FE characteristics greatly. The turn-on field is as low as 1.36 V/μm dropping by one order of magnitude, while the field enhancement factor and FE current density are up to 156.68 and 484.75 mA/cm2 respectively rising both by two orders of magnitude. This excellent FE performance stems from the characteristics of large aspect ratio, very small tip radius and high density of DNWs.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":null,"pages":null},"PeriodicalIF":2.3,"publicationDate":"2024-01-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139618318","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Development of Microneedle Based Blood Extraction Device 开发基于微针的血液提取装置

IF 2.3 4区工程技术

Journal of Micromechanics and Microengineering Pub Date : 2024-01-12 DOI: 10.1088/1361-6439/ad1e34

Chaofeng Dong, Kang-Hyuk Lee, Jong-Hyun Na, Dong-Hyun Joo, Jin-Ho Choi, W. Park

引用次数: 0

Fabrication of high-aspect-ratio metallic microstructures by microelectroforming using silver-coated polydimethylsiloxane molds with controllable wettability 使用具有可控润湿性的银涂层聚二甲基硅氧烷模具，通过微电铸制造高宽比金属微结构

IF 2.3 4区工程技术

Journal of Micromechanics and Microengineering Pub Date : 2024-01-09 DOI: 10.1088/1361-6439/ad1c72

Bo Zhou, Longfei Xie, Tingli Wang, Bo Su, Junhu Meng

{"title":"Fabrication of high-aspect-ratio metallic microstructures by microelectroforming using silver-coated polydimethylsiloxane molds with controllable wettability","authors":"Bo Zhou, Longfei Xie, Tingli Wang, Bo Su, Junhu Meng","doi":"10.1088/1361-6439/ad1c72","DOIUrl":"https://doi.org/10.1088/1361-6439/ad1c72","url":null,"abstract":"\u0000 Microelectroforming is a specialized electroplating process to prepare functional metallic microstructures. However, the formability of microelectroforming is usually restricted by the limited mass transfer in high-aspect-ratio microcavities of molds. This paper presents a simple and reliable method utilizing silver (Ag)-coated polydimethylsiloxane (PDMS) molds with controllable wettability to enhance the formability of microelectroforming. The surfaces of these molds exhibited reversible water contact angles ranging from 4° to 151° realized through ultraviolet irradiation and heat treatment. The hydrophilicity of the PDMS molds facilitated liquid-phase mass transfer, contributing to the fabrication of complete and defect-free nickel microstructures with high aspect ratios. Subsequently, the hydrophobic PDMS molds reduced the interfacial adhesion between these molds and nickel microstructures, which was beneficial for perfect demolding. Nickel microstructures with an aspect ratio of 10 can be achieved by using the PDMS molds, which significantly enhance the formability of microelectroforming. This method provides a potential method to prepare high-aspect-ratio metallic microstructures.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":null,"pages":null},"PeriodicalIF":2.3,"publicationDate":"2024-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139442775","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Artificial swim by undulating rigid flagellum with joint controllers 通过带有关节控制器的起伏刚性鞭毛进行人工游泳

IF 2.3 4区工程技术

Journal of Micromechanics and Microengineering Pub Date : 2024-01-09 DOI: 10.1088/1361-6439/ad1c73

Ryosuke Yano, H. Kuroda

引用次数: 0

Experimental study on femtosecond laser ablation of 4H-SiC substrate 飞秒激光烧蚀 4H-SiC 衬底的实验研究

IF 2.3 4区工程技术

Journal of Micromechanics and Microengineering Pub Date : 2024-01-09 DOI: 10.1088/1361-6439/ad1c74

Ziqiang Zhao, Lin Zhao, Yun Peng

{"title":"Experimental study on femtosecond laser ablation of 4H-SiC substrate","authors":"Ziqiang Zhao, Lin Zhao, Yun Peng","doi":"10.1088/1361-6439/ad1c74","DOIUrl":"https://doi.org/10.1088/1361-6439/ad1c74","url":null,"abstract":"\u0000 Data Access Statement: Research data supporting this publication are available from the NN repository at located at www.NNN.org/download/. Silicon carbide (SiC) is an ideal substrate for manufacturing high-power electronic devices and microwave devices, and has broad application prospects. The surface treatment of SiC wafers plays a critical role and faces challenges in the semiconductor industry. Among the multiple treatment methods, the laser-based method has gradually attracted the attention of scholars. Therefore, this research uses a femtosecond laser to ablate 4H-SiC sliced wafers and analyzes the influence of key parameters, such as laser pulse energy, defocus amount, repetition frequency, and scanning intervals, on the laser ablation depth, width, and surface morphology. Scanning electron microscopy (SEM) and laser coherence-focused microscopy were used to characterize the laser ablation surface. The results show that under a defocus amount of +6 mm, a laser pulse energy of 87.5 μJ, scanning speed of 500 mm/s, and pulse frequency of 300 kHz. The results show that the optimized surface roughness (Sa) was 0.267μm, and brittle fracture areas such as microcracks and pits on the original surface were removed. Effective removal facilitates further material surface processing, which provides valuable insights for similar researchers and benefits for the semiconductor industry. Ethical Compliance: All procedures performed in studies involving human participants were in accordance with the ethical standards of the institutional and/or national research committee and with the 1964 Helsinki Declaration and its later amendments or comparable ethical standards.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":null,"pages":null},"PeriodicalIF":2.3,"publicationDate":"2024-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139444891","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A liquid-metal-based microscale calorimetric in-chip flow sensor for flow rate measuring 用于测量流量的液态金属微尺度热量计片内流量传感器

IF 2.3 4区工程技术

Journal of Micromechanics and Microengineering Pub Date : 2024-01-09 DOI: 10.1088/1361-6439/ad1c75

Yuqin Deng, Zi Ye, Zhongshan Deng, Jie Hong, Huimin Zhang, Lin Gui

{"title":"A liquid-metal-based microscale calorimetric in-chip flow sensor for flow rate measuring","authors":"Yuqin Deng, Zi Ye, Zhongshan Deng, Jie Hong, Huimin Zhang, Lin Gui","doi":"10.1088/1361-6439/ad1c75","DOIUrl":"https://doi.org/10.1088/1361-6439/ad1c75","url":null,"abstract":"\u0000 This work proposes a liquid-metal-based calorimetric micro-flow sensor within a polydimethylsiloxane (PDMS) chip. It can measure the flow rate of fluid in microscale channels, with a range as low as several microliters per minute. This in-chip sensor is proposed to solve the issue of detecting the flow rate in microfluidic systems. To make the sensor compatible with PDMS microfluidic chips, low-melting-point gallium-based alloy and bismuth-based (bi-based) alloy are used to make the micro heater and bi-metal thermocouples, for these alloys can be easily injected into a PDMS chip to form electrodes. To minimize heat resistance (or temperature difference) between fluid and the detecting ends of thermocouples, these ends are directly exposed to liquid in the flow channel with the help of a special reversible bonding technology. Thermocouples are connected in parallel to improve the sensor’s response. A novel method to bond and electrically connect the sensor to a PCB (print circuit board) is also elaborated. Since the calorimetric flow sensor is sensitive to heating power, fluid temperature and environment cooling, a dimensionless parameter less independent of these factors is deduced from heat transfer theory, and this idea is used in result processing to offset the bad effect. Experiments with pure water show that this sensor can be used to detect flow rates, with a resolution up to 4 µl/min/mV and a range of 12 µl/min in this case, and that at different heating powers, the thermal potential results vary significantly whereas the dimensionless results nearly keep the same. Present work indicates that this sensor has the potential to be integrated into a PDMS microfluidic system and to provide accurate and stable results if a dimensionless method is used in data processing.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":null,"pages":null},"PeriodicalIF":2.3,"publicationDate":"2024-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139443298","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Precise In-situ Fabrication of Perovskite Single Crystal Arrays via Cosolvent based Electrohydrodynamic Printing 通过基于共溶剂的电流体动力打印技术原位精确制备 Perovskite 单晶阵列

IF 2.3 4区工程技术

Journal of Micromechanics and Microengineering Pub Date : 2024-01-04 DOI: 10.1088/1361-6439/ad1b1b

Rui Yu, Wenshuo Xie, Weili Yang, Xinrui Yang, Yongqing Duan

{"title":"Precise In-situ Fabrication of Perovskite Single Crystal Arrays via Cosolvent based Electrohydrodynamic Printing","authors":"Rui Yu, Wenshuo Xie, Weili Yang, Xinrui Yang, Yongqing Duan","doi":"10.1088/1361-6439/ad1b1b","DOIUrl":"https://doi.org/10.1088/1361-6439/ad1b1b","url":null,"abstract":"\u0000 Single crystal (SC) perovskites exhibit superior stability and optoelectronic performance compared to polycrystalline ones, offering significant potential for high-performance and low-cost photovoltaic/optoelectronic applications. However, conventional SC growth processes often require intricate cutting or transferring of SC in the manufacturing of optoelectronic devices. High-resolution, in-situ, and scalable fabrication of perovskite SC arrays remain challenging. In this work, we propose a method for in-situ deposition of cosolvent based perovskite precursor solutions using electrohydrodynamic (EHD) printing technology. The addition of a cosolvent (which exhibits good chemical compatibility with the precursor and the main solvent, accompanied by lower solubility and vapor pressure) to the mixed solution promotes early-stage supersaturation and nucleation in the solution, enabling precise control over crystal morphology, size, and positioning through in-situ EHD printing. The effect of different cosolvent ratios on SC growth and the inhibition of parasitic crystallization by altering the contact angle of substrate were investigated. Finally, the parameters for precise control of the EHD printing process were investigated, enabling the growth of SC arrays ranging from 1 to 35 μm in size. This strategy offers a direct patterning approach for SC perovskite preparation without complex temperature control or multi-step operation. The printed patterns exhibit high resolution and excellent uniformity, offering significant potential for manufacturing SC-based perovskite optoelectronic devices with precise size and positioning control.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":null,"pages":null},"PeriodicalIF":2.3,"publicationDate":"2024-01-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139385325","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range 动态范围可调的静电致动全金属 MEMS 皮拉尼计

IF 2.3 4区工程技术

Journal of Micromechanics and Microengineering Pub Date : 2024-01-04 DOI: 10.1088/1361-6439/ad1b1a

Manu Garg, D. S. Arya, Sushil Kumar, Khanjan Joshi, M. Yousuf, Yi-Yen Chiu, PUSHPAPRAJ SINGH

{"title":"Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range","authors":"Manu Garg, D. S. Arya, Sushil Kumar, Khanjan Joshi, M. Yousuf, Yi-Yen Chiu, PUSHPAPRAJ SINGH","doi":"10.1088/1361-6439/ad1b1a","DOIUrl":"https://doi.org/10.1088/1361-6439/ad1b1a","url":null,"abstract":"\u0000 An electrostatically actuated all-metal MEMS Pirani gauge with a tunable dynamic range is proposed. Contrary to the conventional fixed gap Pirani gauges, an electrostatic mechanism is employed to tune the gaseous conduction gap. Due to the electrostatic force between the heating element and heat sink, this tuning results in shifting the transition pressure to a higher pressure. As a result, the operating range of the Pirani gauge can be tuned depending on the magnitude of the actuation voltage. Theoretical estimation of the transition pressure corresponding to different gaseous conduction gaps is also presented. Depending on the available margin of gap tuning, the electromechanical and electrothermal analyses are carried out in COMSOL Multiphysics. The analytical approach is validated by experimentally characterizing the fabricated device. The experimentally tested device with the proposed actuation mechanism shows an 11.2 dB increase in dynamic range in comparison to the conventional design. In a CMOS-compatible fabrication process flow, the proposed gauge can be used to monitor vacuum from 40 Pa to 5×10^5 Pa with the electrostatic actuation.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":null,"pages":null},"PeriodicalIF":2.3,"publicationDate":"2024-01-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139385803","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0