{"title":"具有调幅读出的Lissajous调频MEMS陀螺仪数字控制体系结构的噪声分析与建模","authors":"Xuetong Wang, Xu-dong Zheng, Yaojie Shen, Chenhao Xia, Wenyuan Tong, Zhonghe Jin, Zhipeng Ma","doi":"10.1088/1361-6439/ace6af","DOIUrl":null,"url":null,"abstract":"We report a digital control architecture that demodulates both amplitude-modulated (AM) and frequency-modulated (FM) rate information simultaneously from a gyroscope working in Lissajous frequency-modulated (LFM) mode. The angular rate information is derived from both quadrature (X and Y) resonance modes of the gyroscope simultaneously. A noise model for the AM signal processing channel of the LFM gyroscope is built, analyzed and compared with that of a conventional AM gyroscope, which shows that methods to improve the performance of the conventional AM gyroscope can also be applied to the AM signal processing channel of the LFM gyroscope. The angular rate output obtained from the AM information of the LFM gyroscope has better noise characteristics, which therefore supplements the low precision inadequacy of the FM signal channel of the LFM mode. Tests on the same gyroscope working in different control architectures are conducted. The angle random walk (ARW) and bias instability (BI) of the AM channel of the proposed architecture are 0.51 deg √h−1 and 1.8 deg h−1, respectively, which are better than the results obtained from the FM channel in the same architecture, with values of 0.99 deg √h−1 and 4.3 deg h−1, respectively. Also ARW amd BI of the same gyroscope working in conventional AM mode is 0.50 deg √h−1 and 5.2 deg h−1, respectively.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.4000,"publicationDate":"2023-07-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout\",\"authors\":\"Xuetong Wang, Xu-dong Zheng, Yaojie Shen, Chenhao Xia, Wenyuan Tong, Zhonghe Jin, Zhipeng Ma\",\"doi\":\"10.1088/1361-6439/ace6af\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report a digital control architecture that demodulates both amplitude-modulated (AM) and frequency-modulated (FM) rate information simultaneously from a gyroscope working in Lissajous frequency-modulated (LFM) mode. The angular rate information is derived from both quadrature (X and Y) resonance modes of the gyroscope simultaneously. A noise model for the AM signal processing channel of the LFM gyroscope is built, analyzed and compared with that of a conventional AM gyroscope, which shows that methods to improve the performance of the conventional AM gyroscope can also be applied to the AM signal processing channel of the LFM gyroscope. The angular rate output obtained from the AM information of the LFM gyroscope has better noise characteristics, which therefore supplements the low precision inadequacy of the FM signal channel of the LFM mode. Tests on the same gyroscope working in different control architectures are conducted. The angle random walk (ARW) and bias instability (BI) of the AM channel of the proposed architecture are 0.51 deg √h−1 and 1.8 deg h−1, respectively, which are better than the results obtained from the FM channel in the same architecture, with values of 0.99 deg √h−1 and 4.3 deg h−1, respectively. Also ARW amd BI of the same gyroscope working in conventional AM mode is 0.50 deg √h−1 and 5.2 deg h−1, respectively.\",\"PeriodicalId\":16346,\"journal\":{\"name\":\"Journal of Micromechanics and Microengineering\",\"volume\":\" \",\"pages\":\"\"},\"PeriodicalIF\":2.4000,\"publicationDate\":\"2023-07-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Micromechanics and Microengineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1088/1361-6439/ace6af\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Micromechanics and Microengineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1088/1361-6439/ace6af","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout
We report a digital control architecture that demodulates both amplitude-modulated (AM) and frequency-modulated (FM) rate information simultaneously from a gyroscope working in Lissajous frequency-modulated (LFM) mode. The angular rate information is derived from both quadrature (X and Y) resonance modes of the gyroscope simultaneously. A noise model for the AM signal processing channel of the LFM gyroscope is built, analyzed and compared with that of a conventional AM gyroscope, which shows that methods to improve the performance of the conventional AM gyroscope can also be applied to the AM signal processing channel of the LFM gyroscope. The angular rate output obtained from the AM information of the LFM gyroscope has better noise characteristics, which therefore supplements the low precision inadequacy of the FM signal channel of the LFM mode. Tests on the same gyroscope working in different control architectures are conducted. The angle random walk (ARW) and bias instability (BI) of the AM channel of the proposed architecture are 0.51 deg √h−1 and 1.8 deg h−1, respectively, which are better than the results obtained from the FM channel in the same architecture, with values of 0.99 deg √h−1 and 4.3 deg h−1, respectively. Also ARW amd BI of the same gyroscope working in conventional AM mode is 0.50 deg √h−1 and 5.2 deg h−1, respectively.
期刊介绍:
Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data.
The journal is focussed on all aspects of:
-nano- and micro- mechanical systems
-nano- and micro- electomechanical systems
-nano- and micro- electrical and mechatronic systems
-nano- and micro- engineering
-nano- and micro- scale science
Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering.
Below are some examples of the topics that are included within the scope of the journal:
-MEMS and NEMS:
Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc.
-Fabrication techniques and manufacturing:
Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing.
-Packaging and Integration technologies.
-Materials, testing, and reliability.
-Micro- and nano-fluidics:
Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip.
-Lab-on-a-chip and micro- and nano-total analysis systems.
-Biomedical systems and devices:
Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces.
-Energy and power:
Including power MEMS/NEMS, energy harvesters, actuators, microbatteries.
-Electronics:
Including flexible electronics, wearable electronics, interface electronics.
-Optical systems.
-Robotics.