Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout

IF 2.4 4区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Micromechanics and Microengineering Pub Date : 2023-07-12 DOI:10.1088/1361-6439/ace6af

Xuetong Wang, Xu-dong Zheng, Yaojie Shen, Chenhao Xia, Wenyuan Tong, Zhonghe Jin, Zhipeng Ma

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引用次数: 0

Abstract

We report a digital control architecture that demodulates both amplitude-modulated (AM) and frequency-modulated (FM) rate information simultaneously from a gyroscope working in Lissajous frequency-modulated (LFM) mode. The angular rate information is derived from both quadrature (X and Y) resonance modes of the gyroscope simultaneously. A noise model for the AM signal processing channel of the LFM gyroscope is built, analyzed and compared with that of a conventional AM gyroscope, which shows that methods to improve the performance of the conventional AM gyroscope can also be applied to the AM signal processing channel of the LFM gyroscope. The angular rate output obtained from the AM information of the LFM gyroscope has better noise characteristics, which therefore supplements the low precision inadequacy of the FM signal channel of the LFM mode. Tests on the same gyroscope working in different control architectures are conducted. The angle random walk (ARW) and bias instability (BI) of the AM channel of the proposed architecture are 0.51 deg √h−1 and 1.8 deg h−1, respectively, which are better than the results obtained from the FM channel in the same architecture, with values of 0.99 deg √h−1 and 4.3 deg h−1, respectively. Also ARW amd BI of the same gyroscope working in conventional AM mode is 0.50 deg √h−1 and 5.2 deg h−1, respectively.

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具有调幅读出的Lissajous调频MEMS陀螺仪数字控制体系结构的噪声分析与建模

我们报道了一种数字控制架构，该架构同时解调来自利萨茹调频（LFM）模式下工作的陀螺仪的调幅（AM）和调频（FM）速率信息。角速率信息同时从陀螺仪的正交（X和Y）谐振模式导出。建立了线性调频陀螺仪AM信号处理通道的噪声模型，并与传统AM陀螺仪的噪声模型进行了比较，结果表明，提高传统AM陀螺仪性能的方法也可以应用于线性调频陀螺仪的AM信号处理信道。从LFM陀螺仪的AM信息获得的角速率输出具有更好的噪声特性，从而补充了LFM模式的FM信号通道的低精度不足。对在不同控制结构下工作的同一陀螺仪进行了测试。所提出的架构的AM信道的角度随机游动（ARW）和偏置不稳定性（BI）分别为0.51°√h−1和1.8°h−1，这比从相同架构的FM信道获得的结果要好，其值分别为0.99°√h‑1和4.3°h−1。同样，在传统AM模式下工作的同一陀螺仪的ARW和BI分别为0.50°√h−1和5.2°h−1。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Micromechanics and Microengineering 工程技术-材料科学：综合

CiteScore

4.50

自引率

4.30%

发文量

136

审稿时长

2.8 months

期刊介绍： Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data. The journal is focussed on all aspects of: -nano- and micro- mechanical systems -nano- and micro- electomechanical systems -nano- and micro- electrical and mechatronic systems -nano- and micro- engineering -nano- and micro- scale science Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering. Below are some examples of the topics that are included within the scope of the journal: -MEMS and NEMS: Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc. -Fabrication techniques and manufacturing: Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing. -Packaging and Integration technologies. -Materials, testing, and reliability. -Micro- and nano-fluidics: Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip. -Lab-on-a-chip and micro- and nano-total analysis systems. -Biomedical systems and devices: Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces. -Energy and power: Including power MEMS/NEMS, energy harvesters, actuators, microbatteries. -Electronics: Including flexible electronics, wearable electronics, interface electronics. -Optical systems. -Robotics.