Nomin-Erdene Oyunbaatar, A. Shanmugasundaram, K. Kwon, Dong-Weon Lee
{"title":"Continuous monitoring of cardiovascular function with a smart stent incorporating a flexible and stretchable wireless pressure sensor","authors":"Nomin-Erdene Oyunbaatar, A. Shanmugasundaram, K. Kwon, Dong-Weon Lee","doi":"10.1088/1361-6439/acf7ce","DOIUrl":"https://doi.org/10.1088/1361-6439/acf7ce","url":null,"abstract":"The development of smart stents, capable of monitoring cardiovascular diseases and communicating vascular abnormalities to medical doctors, has garnered significant attention in the field of biomedical engineering. Various ex-situ fabrication strategies have been proposed to concurrently manufacture the smart stent and pressure sensor, thereby reducing the risk of sensor detachment caused by blood flow. However, the practical utility of these devices is still limited due to the rigidity of the wireless pressure sensor. In this study, we propose a flexible and stretchable smart self-reporting stent that incorporates a wireless pressure sensor. The fabrication process has been optimized to create a serpentine-shaped wireless pressure sensor that matches the shape and flexibility of the polymer stent struts. We thoroughly investigated the structural integrity, resonance frequency, stretchability, flexibility, and radial force of the manufactured smart self-reporting stent under different conditions. The wireless pressure sensor demonstrated a sensitivity of 0.15 MHz mmHg−1, as determined through experimental analysis. To demonstrate the feasibility of the proposed smart stent, we implanted it into the arteries of a three-dimensional phantom system. The obtained results, combined with the flexible and stretchable nature of the proposed smart self-reporting stent, highlight its potential for effective monitoring of the heart’s functional dynamics and detection of in-stent restenosis.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48293184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Kun Liu, Chunming Yang, Jinmin Li, Gang Ling, S. Xiong
{"title":"Development of a piston-actuated 3D bio-printer with performance prediction system for the reliable printing of tubular structures","authors":"Kun Liu, Chunming Yang, Jinmin Li, Gang Ling, S. Xiong","doi":"10.1088/1361-6439/acf7cd","DOIUrl":"https://doi.org/10.1088/1361-6439/acf7cd","url":null,"abstract":"3D bio-printing is a promising approach for creating tubular structures within the human body by precisely controlling the distribution of cells. While several 3D bio-printers have been developed for printing tubular structures, achieving reliable and repeatable construction of effective human tubular structures remains a challenge. This paper presents a piston-actuated 3D bio-tubular structures printer that uses a rotary rod-support printing method and a printing performance prediction system. The printing performance prediction system is based on a two-phase flow computational fluid dynamics model that simulates the tubular structure forming process and provides optimal printing setup parameters, such as extrusion nozzle movement speed, nozzle height, and rod rotating speed. Experimental testing has validated the performance prediction system, which achieved a fair prediction accuracy with an average error of around 10%. The proposed bio-printer and prediction system have the potential to improve the efficiency and effectiveness of tubular structure printing for various biomedical applications.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"46013815","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Experimental and statistical investigation into surface characteristics in micro milling of bottom pouring/gravity stir cast Al6061 alloy","authors":"Sunil Rawal, Mayank Kumar, A. Sidpara, Jinu Paul","doi":"10.1088/1361-6439/acf675","DOIUrl":"https://doi.org/10.1088/1361-6439/acf675","url":null,"abstract":"Micro milling offers the best way to create micro channels; however, the burr formation and surface roughness of the micro channel are difficult to control. Micro channel fabrication and their characterization of stir cast Al6061 are rarely investigated. In the present study, Al6061 alloy was processed by the bottom pouring stir casting method. The micro channels were fabricated on a base and stir cast Al6061 alloys using TiSIN-coated micro end mill tools. The influence of micromachining parameters such as spindle speed, feed rate, and depth of cut on burr formation, cutting force, burr size, and surface roughness was investigated. A comparison was made between the findings obtained from the micro milling of the base and stir cast Al6061 alloys. The surface morphology of fabricated micro channels was analysed and correlated with the roughness profile to understand the channel profile and burr formation. The top burr formation mechanism in stir cast Al6061 alloy was investigated in detail. Low feed rate, low depth of cut, and high spindle speed produced the micro channel with fewer burrs, low surface roughness, and low cutting forces. At the optimum parameter, stir cast Al6061 alloy showed an approximate 420%, 16%, and 300% increase in Fy, Fz, and Ra, respectively, as compared to the base Al6061 alloy. Adhesion wear, built-up edge, and microchipping were found to be the main tool wear mechanisms in micro machining of stir cast alloy. This study directs the choice of cutting parameters for the stir cast micro milling process.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48551110","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation","authors":"Satish K. Verma, Bhaskar Mitra","doi":"10.1088/1361-6439/acf674","DOIUrl":"https://doi.org/10.1088/1361-6439/acf674","url":null,"abstract":"Direction and analog deflection control, as well as low voltage digital switching are the most desirable attributes in electrostatic actuators for current MEMS applications. In this work we show how internal dielectric transduction can be used to reduce pull-in voltages without reducing the air gap, and to effect bi-directional actuation. The actuator is a metal–dielectric–metal sandwich. For hybrid actuation to achieve reduced pull-in, the device has a thick bottom metal and a thin top metal, while for the upward actuator the device has a thick top metal and a thin bottom metal. An out-of-plane deflection of 108 nm is achieved using 5 V applied voltage for the upward actuator, while the hybrid actuator shows over 50% reduction in pull-in voltage from 1.26 V to 0.62 V.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45367007","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Micromachined piezoelectric Lamb wave resonators: a review","authors":"Xianzheng Lu, Hao Ren","doi":"10.1088/1361-6439/acf587","DOIUrl":"https://doi.org/10.1088/1361-6439/acf587","url":null,"abstract":"With the development of next-generation wireless communication and sensing technologies, there is an increasing demand for high-performance and miniaturized resonators. Micromachined piezoelectric Lamb wave resonators are becoming promising candidates because of their multiple vibration modes, lithographically defined frequencies, and small footprint. In the past two decades, micromachined piezoelectric Lamb wave resonators based on various piezoelectric materials and structures have achieved considerable progress in performance and applications. This review focuses on the state-of-the-art Lamb wave resonators based on aluminum nitride (AlN), aluminum scandium nitride (Al x Sc1−x N), and lithium niobate (LiNbO3), as well as their applications and further developments. The promises and challenges of micromachined piezoelectric Lamb wave resonators are also discussed. It is promising for micromachined piezoelectric Lamb wave resonators to achieve higher resonant frequencies and performance through advanced fabrication technologies and new structures, the integration of multifrequency devices with radio frequency (RF) electronics as well as new applications through utilizing nonlinearity and spurious modes. However, several challenges, including degenerated electrical and thermal properties of nanometer-scale electrodes, accurate control of film thickness, high thin film stress, and a trade-off between electromechanical coupling efficiencies and resonant frequencies, may limit the commercialization of micromachined piezoelectric Lamb wave resonators and thus need further investigation. Potential mitigations to these challenges are also discussed in detail in this review. Through further painstaking research and development, micromachined piezoelectric Lamb wave resonators may become one of the strongest candidates in the commercial market of RF and sensing applications.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43716207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Research on MEMS dual-channel microwave power sensor with fixed beam structure","authors":"Chen Li, Ximing Guo, Aodi Xu, Debo Wang","doi":"10.1088/1361-6439/acf2a6","DOIUrl":"https://doi.org/10.1088/1361-6439/acf2a6","url":null,"abstract":"To improve the sensitivity and dynamic range of microwave power sensors, a micro-electromechanical system (MEMS) dual-channel microwave power sensor is proposed in this study. The sensor is designed and manufactured using the GaAs monolithic microwave integrated circuit` (MMIC) process and MEMS technology. The microwave performance, overload power and sensitivity are theoretically studied. At 8–12 GHz, the return loss of the sensors with three different fixed beam sizes are approximately −10 dB, which is good microwave performance. The sensitivities for capacitive detection channel of the two sensors with larger sizes are 2.4 fF W−1 @10 GHz and 14.5 fF W−1 @10 GHz, respectively, and the sensitivities of the thermoelectric detection channel of the three sensors is 25.7 mV W−1, 24.9 mV W−1 and 24.2 mV W−1, respectively. Compared with traditional microwave power sensors, the sensor proposed takes into account the advantages of microwave power sensors in both thermoelectric and capacitive structures. This work helps lay the foundation for the design of microwave power sensors with a fixed beam structure and thermoelectric microwave power sensors.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43242662","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Binghui Lin, Yao Cai, Ya-xin Wang, Chao Gao, Gai Wu, Yan Liu, Wenjuan Liu, D. D. Cheam, Chengliang Sun
{"title":"High crystal quality and low residual stress composite piezoelectric films prepared by a two-step method","authors":"Binghui Lin, Yao Cai, Ya-xin Wang, Chao Gao, Gai Wu, Yan Liu, Wenjuan Liu, D. D. Cheam, Chengliang Sun","doi":"10.1088/1361-6439/acf2a8","DOIUrl":"https://doi.org/10.1088/1361-6439/acf2a8","url":null,"abstract":"The crystal quality and residual stress of piezoelectric films are critical factors that limit the performance of acoustic wave devices. To overcome this challenge, a new two-step method integrating metal-organic chemical vapor deposition (MOCVD) and physical vapor deposition (PVD) was presented. The lower part of the composite film was first grown by MOCVD, exhibiting monocrystalline quality and high residual stress. Subsequently, the upper part of the composite film deposited by PVD effectively compensates for the residual stress in the lower part of the composite film. The new two-step method was validated on the growth of AlN and AlScN on sapphire substrate. A composite film Al0.8Sc0.2 N/AlN was obtained with a full width at half maximum of 0.047° for AlN (002) of rocking curve, exhibiting a residual stress of +381 MPa and a surface roughness of 1.12 nm. It demonstrates the feasibility of preparing high-quality composite piezoelectric films for further acoustic applications.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"47861710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Megala Ramasamy, Brandon Ho, C. Phan, N. Qin, C. Ren, Lyndon Jones
{"title":"Inexpensive and rapid fabrication of PDMS microfluidic devices for biological testing applications using low cost commercially available 3D printers","authors":"Megala Ramasamy, Brandon Ho, C. Phan, N. Qin, C. Ren, Lyndon Jones","doi":"10.1088/1361-6439/acf2a7","DOIUrl":"https://doi.org/10.1088/1361-6439/acf2a7","url":null,"abstract":"Polydimethylsiloxane (PDMS) elastomers have been extensively used in the development of microfluidic devices, capable of miniaturizing biomolecular and cellular assays to the microlitre and nanolitre range, thereby increasing the throughput of experimentation. PDMS has been widely used due to its optical clarity and biocompatibility, among other desirable physical and chemical properties. Despite the widespread use of PDMS in microfluidic devices, the fabrication process typically via soft lithography technology requires specialized facilities, instruments, and materials only available in a limited number of laboratories. To expand microfluidic research capabilities to a greater scientific population, we developed and characterized a simple and robust method of fabricating relatively inexpensive PDMS microfluidic devices using readily available reagents and commercially available three-dimensional (3D) printers. The moulds produced from the 3D printers resolve designed microfluidic channel features accurately with high resolution (>100 µm). The critical physical and chemical post-processing modifications we outline here are required to generate functional and optically clear microfluidic devices.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"44891007","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Splashing of droplet under the vibration effect of flexible membrane","authors":"Sanghyun Lee, Sangmin Lee","doi":"10.1088/1361-6439/acf13c","DOIUrl":"https://doi.org/10.1088/1361-6439/acf13c","url":null,"abstract":"The impact dynamics of a droplet falling onto a substrate is significant in various applications such as inkjet printing, spray coating, and bioprinting. Generally, several factors, such as the fluid properties (e.g. viscosity or surface tension) and substrate characteristics (e.g. surface roughness or flexibility) govern whether falling droplets spread or splash. In this study, we experimentally investigate droplet impact dynamics on a thin, flexible membrane for various Weber numbers (230 < We < 600) and membrane stiffnesses, which can be controlled by the applied tensile force. In addition, the effect of membrane vibration on impact behavior is considered. In the high Weber number regime, splashing is dominant, regardless of the membrane stiffness. In contrast, in the low Weber number regime, a transition between splashing and deposition is observed, depending on the membrane stiffness. In short, flexible membrane vibration induces droplet splashing despite the insufficient kinetic energy of the droplet. Increasing the stiffness of the membrane contributes to the suppression of droplet splashing by minimizing membrane vibration.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"47158836","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
N. Karami, A. Tessier-Poirier, É. Léveillé, A. Amnache, L. Fréchette
{"title":"Capillary enhanced phase change in a microfabricated self-oscillating fluidic heat engine (SOFHE)","authors":"N. Karami, A. Tessier-Poirier, É. Léveillé, A. Amnache, L. Fréchette","doi":"10.1088/1361-6439/acf13b","DOIUrl":"https://doi.org/10.1088/1361-6439/acf13b","url":null,"abstract":"This paper reports the design, fabrication, and characterization of a miniaturized version of a self-oscillating fluidic heat engine (SOFHE) for thermal energy harvesting. This new design includes capillary corners of a square cross-section, as well as an etched capillary path on the bottom wall that improves the performance in terms of stability and mechanical power owing to the enhanced phase change. The engine consists of a vapor bubble trapped in a microchannel by an oscillating liquid plug (acting as a piston) set in motion by periodic evaporation and condensation in the vapor bubble. The underlying physics of the oscillations is similar to those of a single-branch pulsating heat pipe. The channel is microfabricated by anodically bonding a grooved glass wafer (top and sidewalls) to a silicon wafer (bottom wall). To further increase the phase change, two more channels are fabricated with an etched capillary path on the bottom wall at two different widths of 25 and 50 µm and a depth of 100 µm. This is the first miniaturized SOFHE that generates a reliable amplitude in the millimeter range. By measuring the change in the volume of the vapor bubble and the frequency, we calculated the change in pressure using the momentum balance on the liquid plug, and then calculated the work, mechanical power, and power density. We observed that the addition of the etched capillary path at a width of 50 µm increased the amplitude (from 1.6 to 4 mm) leading to a fivefold increase in the generated power (from 8 to 40 µW). This study opens a new path towards designing different wicking structures to maximize the amplitude and power density of the SOFHE, making it a promising thermal energy harvester to power wireless sensors.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"33 1","pages":""},"PeriodicalIF":2.3,"publicationDate":"2023-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"60643102","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}