Capillary enhanced phase change in a microfabricated self-oscillating fluidic heat engine (SOFHE)

This paper reports the design, fabrication, and characterization of a miniaturized version of a self-oscillating fluidic heat engine (SOFHE) for thermal energy harvesting. This new design includes capillary corners of a square cross-section, as well as an etched capillary path on the bottom wall that improves the performance in terms of stability and mechanical power owing to the enhanced phase change. The engine consists of a vapor bubble trapped in a microchannel by an oscillating liquid plug (acting as a piston) set in motion by periodic evaporation and condensation in the vapor bubble. The underlying physics of the oscillations is similar to those of a single-branch pulsating heat pipe. The channel is microfabricated by anodically bonding a grooved glass wafer (top and sidewalls) to a silicon wafer (bottom wall). To further increase the phase change, two more channels are fabricated with an etched capillary path on the bottom wall at two different widths of 25 and 50 µm and a depth of 100 µm. This is the first miniaturized SOFHE that generates a reliable amplitude in the millimeter range. By measuring the change in the volume of the vapor bubble and the frequency, we calculated the change in pressure using the momentum balance on the liquid plug, and then calculated the work, mechanical power, and power density. We observed that the addition of the etched capillary path at a width of 50 µm increased the amplitude (from 1.6 to 4 mm) leading to a fivefold increase in the generated power (from 8 to 40 µW). This study opens a new path towards designing different wicking structures to maximize the amplitude and power density of the SOFHE, making it a promising thermal energy harvester to power wireless sensors.