Voice coil motor-driven multi-DOF compliant parallel micropositioning stage based on a large range beam-based spherical hinge and fully symmetrical layout
IF 2.4 4区 工程技术Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
{"title":"Voice coil motor-driven multi-DOF compliant parallel micropositioning stage based on a large range beam-based spherical hinge and fully symmetrical layout","authors":"Yunzhuang Chen, Leijie Lai, Yu Fang, Li-Min Zhu","doi":"10.1088/1361-6439/ace918","DOIUrl":null,"url":null,"abstract":"With the recent rapid developments in the field of precision engineering, demand for the large range multi-degrees-of-freedom (DOF) micropositioning stage has increased significantly. In this paper, to solve the problems of small motion range, local stress concentration, and low motion accuracy caused by the parasitic motion of the traditional flexure hinge in the multi-DOF micropositioning stage, we first propose a type of large-range beam-based flexure spherical hinge (BFSH). Subsequently, based on the proposed BFSH, a large range 3-DOF θxθyz spatial micropositioning stage driven by the voice coil motor is designed employing parallel branch chains and a fully symmetrical layout. This arrangement realizes theoretical motion decoupling in structural design. Furthermore, we use the geometric method to derive kinematic equations of the moving platform, which are used as the decoupling matrix of the control loop. Based on the compliance matrix method and Lagrange’s method, the compliance matrix model of the BFSH, the 3-DOF micropositioning stage, and the stage dynamic model are determined respectively. Additionally, finite element analysis and experimental tests are conducted to verify the accuracy of the analytical model and assess the static and dynamic performance of the designed 3-DOF stage. Moreover, a fractional order phase advanced proportional integral controller is designed for closed-loop control to track the sinusoidal trajectory and spherical trajectory. The results reveal that the stage can achieve the desired large workspace of ± 21.5 mrad × ± 20.3 mrad × ± 3.23 mm, as well as excellent decoupling and trajectory tracking performance.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.4000,"publicationDate":"2023-07-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Micromechanics and Microengineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1088/1361-6439/ace918","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
With the recent rapid developments in the field of precision engineering, demand for the large range multi-degrees-of-freedom (DOF) micropositioning stage has increased significantly. In this paper, to solve the problems of small motion range, local stress concentration, and low motion accuracy caused by the parasitic motion of the traditional flexure hinge in the multi-DOF micropositioning stage, we first propose a type of large-range beam-based flexure spherical hinge (BFSH). Subsequently, based on the proposed BFSH, a large range 3-DOF θxθyz spatial micropositioning stage driven by the voice coil motor is designed employing parallel branch chains and a fully symmetrical layout. This arrangement realizes theoretical motion decoupling in structural design. Furthermore, we use the geometric method to derive kinematic equations of the moving platform, which are used as the decoupling matrix of the control loop. Based on the compliance matrix method and Lagrange’s method, the compliance matrix model of the BFSH, the 3-DOF micropositioning stage, and the stage dynamic model are determined respectively. Additionally, finite element analysis and experimental tests are conducted to verify the accuracy of the analytical model and assess the static and dynamic performance of the designed 3-DOF stage. Moreover, a fractional order phase advanced proportional integral controller is designed for closed-loop control to track the sinusoidal trajectory and spherical trajectory. The results reveal that the stage can achieve the desired large workspace of ± 21.5 mrad × ± 20.3 mrad × ± 3.23 mm, as well as excellent decoupling and trajectory tracking performance.
期刊介绍:
Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data.
The journal is focussed on all aspects of:
-nano- and micro- mechanical systems
-nano- and micro- electomechanical systems
-nano- and micro- electrical and mechatronic systems
-nano- and micro- engineering
-nano- and micro- scale science
Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering.
Below are some examples of the topics that are included within the scope of the journal:
-MEMS and NEMS:
Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc.
-Fabrication techniques and manufacturing:
Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing.
-Packaging and Integration technologies.
-Materials, testing, and reliability.
-Micro- and nano-fluidics:
Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip.
-Lab-on-a-chip and micro- and nano-total analysis systems.
-Biomedical systems and devices:
Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces.
-Energy and power:
Including power MEMS/NEMS, energy harvesters, actuators, microbatteries.
-Electronics:
Including flexible electronics, wearable electronics, interface electronics.
-Optical systems.
-Robotics.