Journal of Micromechanics and Microengineering最新文献_第7页

Fabrication and Characterization of suspended La_0.7Sr_0.3MnO₃Nanofibers for high-sensitive and fast-responsive Infrared Bolometer 高灵敏快速响应红外测热计用悬浮la0.7 sr0.3 mno3纳米纤维的制备与表征

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Journal of Micromechanics and Microengineering Pub Date : 2023-11-07 DOI: 10.1088/1361-6439/ad0a3c

nirupam paul, Sudharshan vandala, satish bonam, Amit Agrawal, Siva Rama Krishna Vanjari, Shiv Govind Singh

{"title":"Fabrication and Characterization of suspended La0.7Sr0.3MnO3Nanofibers for high-sensitive and fast-responsive Infrared Bolometer","authors":"nirupam paul, Sudharshan vandala, satish bonam, Amit Agrawal, Siva Rama Krishna Vanjari, Shiv Govind Singh","doi":"10.1088/1361-6439/ad0a3c","DOIUrl":"https://doi.org/10.1088/1361-6439/ad0a3c","url":null,"abstract":"Abstract La 1-x Sr x MnO 3 manganite oxides have shown great potential for infrared sensing. In this study, La 0.7 Sr 0.3 MnO 3 (LSMO) nanofibers, synthesized by a simple electrospinning process, are suspended between gold interdigitated electrodes(IDE). These electrodes, which acts as a supporting platform for the dangling nanofiber, are Microelectromechanical systems (MEMS) based that can be fabricated quickly and economically with fewer fabrication steps. Due to the large surface-area-to-volume ratio, these fibers have outstanding thermo-electrical properties, which puts them in the leagues of materials suitable for infrared sensing. Performance-wise these hanging nanofibers belong to a class of promising thermal sensors due to negligible thermal loss. The optoelectrical characterization shows its TCR is -1.48 %K -1 , and its electrical resistance follows an inverse square law for distance from the infrared source. The fabricated LSMO nanofibers based Microbolometer has a significantly low thermal time constant with average thermal response and recovery time of 63 ms and 77 ms, respectively. Furthermore, they show encouraging bolometric properties with thermal conductance, thermal capacitance, and voltage responsivity,and thermal noise limited detectivity of 3.6 x 10 -3 WK -1 , 0.23 x 10 -3 JK -1 , and 1.96 x 10 5 VW- 1 and 3.7 x 108 cm Hz1/2/W respectively. The high voltage responsivity and TCR, commensurate with the ultralow response and recovery time confirm that the fabricated Microbolometer can find industrial applications as thermal sensors.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"183 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135479649","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Damping of 3D-printed polymer microbeam resonators 3d打印聚合物微束谐振器的阻尼

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Journal of Micromechanics and Microengineering Pub Date : 2023-11-02 DOI: 10.1088/1361-6439/ad08ef

Jikke de Winter, Tomás Manzaneque, Murali Krishna Ghatkesar

引用次数: 0

Triaxial piezoresistive force sensor probe with high sensitivity and stiffness using 3D notch structure 三轴压阻式力传感器探头采用三维缺口结构，具有高灵敏度和刚度

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Journal of Micromechanics and Microengineering Pub Date : 2023-11-02 DOI: 10.1088/1361-6439/ad00c6

Hidetoshi Takahashi, Yusuke Takei, Kentaro Noda, Kiyoshi Matsumoto, Isao Shimoyama

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A Two-channel Ultrasonic Flowmeter Based on AlN Piezoelectric Micromachined Ultrasonic Transducers Arrays with Improved Cross-correlation Method 基于改进互相关法的AlN压电微机械超声换能器阵列双通道超声流量计

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Journal of Micromechanics and Microengineering Pub Date : 2023-10-20 DOI: 10.1088/1361-6439/ad0307

Linjin Shi, Mengjiao Qu, Dongze Lv, Weiting Liu, Jin Xie

引用次数: 0

Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces 具有粗糙表面的水下静电弯曲电极致动器的静力学与动力学

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Journal of Micromechanics and Microengineering Pub Date : 2023-10-18 DOI: 10.1088/1361-6439/acfa0b

Melinda A Lake-Speers, SINDHU PREETHAM BURUGUPALLY, David John Hoelzle

{"title":"Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces","authors":"Melinda A Lake-Speers, SINDHU PREETHAM BURUGUPALLY, David John Hoelzle","doi":"10.1088/1361-6439/acfa0b","DOIUrl":"https://doi.org/10.1088/1361-6439/acfa0b","url":null,"abstract":"Abstract Here, we present a model, design, static and dynamic testing, and analysis of an electrostatic curved electrode actuator in deionized water. The actuator is integrated within a microfluidic device designed for high throughput cell sorting. The actuator shifts the bifurcation point of a Y-shaped microfluidic channel to simultaneously increase the width of one channel while decreasing the width of another channel, thus changing the bias in hydrodynamic resistance between outlet channels. The actuator is modeled as a clamped-roller beam and the static displacement is calculated based on Rayleigh–Ritz energy methods. The model accounts for oxide growth and surface roughness that occurs during fabrication. We observe that modeling a rough contact surface improves the maximum displacement prediction to within less than 20% error from the experimental value. Additionally, the model predicts a release voltage within less than 8% error of the experimental value. We also present dynamic experiments to test the actuator displacement at frequencies from 1 to 4096 Hz and show that the actuator achieves large displacements ( <?CDATA $gt$?> <mml:math xmlns:mml=\"http://www.w3.org/1998/Math/MathML\" overflow=\"scroll\"> <mml:mo>></mml:mo> </mml:math> 8 µ m) at high frequencies ( <?CDATA $gt$?> <mml:math xmlns:mml=\"http://www.w3.org/1998/Math/MathML\" overflow=\"scroll\"> <mml:mo>></mml:mo> </mml:math> 100 Hz).","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"53 70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135823308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Simple Electrode Insulation and Channel Fabrication Technique for High-Electric Field Microfluidics 一种用于强电场微流体的简单电极绝缘和通道制造技术

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Journal of Micromechanics and Microengineering Pub Date : 2023-10-16 DOI: 10.1088/1361-6439/acffd5

Gaurav Anand, Samira Safaripour, Jaynie Tercovich, Jenna Capozzi, Mark Griffin, Nathan Schin, Nicholas Mirra, Craig Snoeyink

{"title":"A Simple Electrode Insulation and Channel Fabrication Technique for High-Electric Field Microfluidics","authors":"Gaurav Anand, Samira Safaripour, Jaynie Tercovich, Jenna Capozzi, Mark Griffin, Nathan Schin, Nicholas Mirra, Craig Snoeyink","doi":"10.1088/1361-6439/acffd5","DOIUrl":"https://doi.org/10.1088/1361-6439/acffd5","url":null,"abstract":"Abstract A simple and robust electrode insulation technique that can withstand a voltage as high as <?CDATA $mathrm{1000,V}$?> <mml:math xmlns:mml=\"http://www.w3.org/1998/Math/MathML\" overflow=\"scroll\"> <mml:mrow> <mml:mn>1000</mml:mn> <mml:mi mathvariant=\"normal\">V</mml:mi> </mml:mrow> </mml:math> , which is equivalent to an electric field strength of <?CDATA ${sim}1$?> <mml:math xmlns:mml=\"http://www.w3.org/1998/Math/MathML\" overflow=\"scroll\"> <mml:mrow> <mml:mo>∼</mml:mo> </mml:mrow> <mml:mn>1</mml:mn> </mml:math> MV m −1 across a <?CDATA $10,mumathrm{m}$?> <mml:math xmlns:mml=\"http://www.w3.org/1998/Math/MathML\" overflow=\"scroll\"> <mml:mn>10</mml:mn> <mml:mi>μ</mml:mi> <mml:mrow> <mml:mi mathvariant=\"normal\">m</mml:mi> </mml:mrow> </mml:math> channel filled with an electrolyte of conductivity <?CDATA ${sim}0.1$?> <mml:math xmlns:mml=\"http://www.w3.org/1998/Math/MathML\" overflow=\"scroll\"> <mml:mrow> <mml:mo>∼</mml:mo> </mml:mrow> <mml:mn>0.1</mml:mn> </mml:math> S m −1 , i.e. higher than sea water’s conductivity, is introduced. A multi-dielectric layers approach is adopted to fabricate the blocked electrodes, which helps reduce the number of material defects. Dielectric insulation with an exceptional breakdown electric field strength for an electrolyte confined between electrodes can have a wide range of applications in microfluidics, like high electric field strength-based dielectrophoresis. The voltage-current characteristics are studied for various concentrations of sodium chloride solution to estimate the insulation strength of the proposed materials, and the breakdown strength is calculated at the point where the electrical insulation failed. A detailed adhesion technique is also demonstrated, which will reduce the ambiguity around the fabrication of a sealed channel using SU-8.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"136078074","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Review Paper: MEMS Audio Speakers 综述论文:MEMS音频扬声器

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Journal of Micromechanics and Microengineering Pub Date : 2023-09-29 DOI: 10.1088/1361-6439/acfe86

Meera Vikas Garud, Rudra Pratap

{"title":"Review Paper: MEMS Audio Speakers","authors":"Meera Vikas Garud, Rudra Pratap","doi":"10.1088/1361-6439/acfe86","DOIUrl":"https://doi.org/10.1088/1361-6439/acfe86","url":null,"abstract":"Abstract Miniaturization of electro-mechanical sensors and actuators has benefited from an advancement in CMOS technology over the years. However, miniaturization of audio speakers has seen considerable development only in the recent times. This paper reviews the developments in MEMS audio speaker research and the initial commercial products available in the market. At first glance, it appears that the relatively slow development of MEMS speakers can be attributed to the fact that the principle of actuation has remained unchanged for several decades. Unfortunately, the physics behind audible sound production holds us back from exclusively adopting miniaturized speakers — sound pressure level is directly proportional to the area of the sound radiating surface. Nevertheless, researchers are continuing to explore new avenues for designing and developing MEMS speakers, without limiting themselves to the existing actuation principles. With newly discovered materials and improving technology, the research in MEMS speakers is gaining attention and new products are emerging. A speaker design based on piezoelectric actuation or electrostatics actuation is favourable at MEMS scale. Indian research community is also contributing to advances in MEMS speakers and near-ultrasonic devices. This paper reviews the development in MEMS audio speakers in India and in the world. The tabulated review findings aim to offer readers an overview of the development of micro-speakers and to provide guidance for designing new micro-speakers.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135193488","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

MXene (Ti3C2Tx)/TMD (ReSe2) Nanohybrid-based Flexible Electromechanical Sensors for Cervical Collar Strain and Shoulder Load Detection Applications MXene (Ti3C2Tx)/TMD (ReSe2)纳米混合柔性机电传感器用于颈部应变和肩部载荷检测

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Journal of Micromechanics and Microengineering Pub Date : 2023-09-29 DOI: 10.1088/1361-6439/acfc52

Vivek Adepu, Manav Tathacharya, Raghuram CS, Parikshit Sahatiya

{"title":"MXene (Ti3C2Tx)/TMD (ReSe2) Nanohybrid-based Flexible Electromechanical Sensors for Cervical Collar Strain and Shoulder Load Detection Applications","authors":"Vivek Adepu, Manav Tathacharya, Raghuram CS, Parikshit Sahatiya","doi":"10.1088/1361-6439/acfc52","DOIUrl":"https://doi.org/10.1088/1361-6439/acfc52","url":null,"abstract":"Abstract The possibly complex impacts of volunteer’s heavy backpacks, chronic neck pain are significant concerns and must be considered by the scientific and academic community. However already existing several alert systems can tackle these issues, but the evaluation approaches are costly and complicated. In this regard, ReSe 2 /Ti 3 C 2 T x nanohybrid based flexible sensors were fabricated by low-cost vacuum filtration technique and integrated into cervical collar strain and shoulder load detection alert systems to tackle these issues. The fabricated sensor displayed an excellent gauge factor of 14.38 and an improved sensitivity of 14.06 kPa −1 . The response and recovery time of the pressure and strain sensor were 288 and 90 msec at 15% strain and 95 and 182 msec at 1.477 kPa pressure. There was a negligible degradation in performance when the pressure sensor was assessed for 5000 and the strain sensor for 4500 cycles, proving that the fabricated sensors are highly durable. The comprehensive underlying transduction mechanism is elucidated by intrinsic piezoresistive properties of nanohybrid (ReSe 2 /Ti 3 C 2 T x ) and Schottky barrier height mechanism with complete electronic bandstructure realization using real-time ultraviolet photoelectron spectroscopy. Also, to transfer/receive data wirelessly on an Android/ios based smartphone, the fabricated sensors were connected to an electrical circuit with a microcontroller and Bluetooth module. The effective corroboration of the ReSe 2 /Ti 3 C 2 T x nanohybrid based physical sensors initiates innovative prospects in the field of flexible electronics.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135131304","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Highly-sensitive expandable microsphere-based flexible pressure sensor for human-machine interaction 用于人机交互的高灵敏度可扩展微球柔性压力传感器

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Journal of Micromechanics and Microengineering Pub Date : 2023-09-27 DOI: 10.1088/1361-6439/acfdb5

Ye Wang, Shengshun Duan, Jiachen Liu, Fangzhi Zhao, Pinzhen Chen, Qiongfeng Shi, Jun Wu

{"title":"Highly-sensitive expandable microsphere-based flexible pressure sensor for human-machine interaction","authors":"Ye Wang, Shengshun Duan, Jiachen Liu, Fangzhi Zhao, Pinzhen Chen, Qiongfeng Shi, Jun Wu","doi":"10.1088/1361-6439/acfdb5","DOIUrl":"https://doi.org/10.1088/1361-6439/acfdb5","url":null,"abstract":"Abstract Flexible microstructural pressure sensors (FMPSs) have been widely used in different areas including health monitoring, human-machine interaction and electronic skin for their good reliability, easy fabrication, and highly sensitive sensing performance. Although the use of a sensing layer with microstructure improves the sensor sensitivity, it also results in limited sensitive pressure range, slow response and poor cyclic stability, which prevents the sensors from being utilized in applications requiring wide detect range, real-time response and high durability. Here, we propose an advanced micro-structured sensing layer through doping thermally expandable microspheres (EP) into the screen-printing carbon black (CB) slurry to enhance its mechanical properties. An FMPS is then developed based on this enhanced micro-structured sensing layer. Benefiting from the expanded microsphere-like microstructure, the as-prepared sensor features high sensitivity (37.16 kPa-1), fast response/recovery time (126 / 52 ms), and good mechanical stability (over 3000 cycles). In addition, a home-made and effective collision avoidance system consisting of a robotic arm, the pressure sensor, a MEGA2560 microcontroller unit (MCU) and a computer is constructed to indicate the sensor’s outstanding tactile perception characteristic, making it a promising candidate for intelligent robotic applications such as human-robot collaboration (HRC). Furthermore, we develop a pressure sensor array and demonstrate its ability to spatial pressure distribution perception. The developed microsphere-based pressure sensor and its array show great potential to be adopted in various monitoring and interactive applications such as humanoid robots, smart home, human-machine interaction, etc.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"99 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135534350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array v型槽/褶皱层叠阵列压印屈曲的实验与仿真研究

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Journal of Micromechanics and Microengineering Pub Date : 2023-09-26 DOI: 10.1088/1361-6439/acf93f

Nianqiang Zhang, Jin Ji, Jilai Wang, Zhenyu Shi, Chengpeng Zhang

{"title":"Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array","authors":"Nianqiang Zhang, Jin Ji, Jilai Wang, Zhenyu Shi, Chengpeng Zhang","doi":"10.1088/1361-6439/acf93f","DOIUrl":"https://doi.org/10.1088/1361-6439/acf93f","url":null,"abstract":"Abstract With the in-depth development and continuous innovation of micro and nano manufacturing technology, flexible strain sensors are more and more widely used in various fields, including soft robots, smart clothing and so on, and high-performance sensors are more in demand. An efficient tactic for enhancing the performance of flexible strain sensors is to design and create hierarchical structures, and its efficient and controllable manufacturing is a key problem. The controllable manufacturing of V-groove/wrinkles hierarchical structure is realized by nano-imprint and prestretch-release process, which provides an effective method for large-area controllable preparation of hierarchical structure, and provides a foundation for the construction of high-performance flexible strain sensor. Single-factor experiments were carried out on the slope of the primary structure, pre-strain and substrate thickness, and response surface analysis was carried out by Box–Behnken experiments. The results of the structure’s formation are significantly influenced by the slope and substrate thickness, and the optimal process parameters are obtained by response surface analysis. Then the impact of each process parameter was investigated using a process simulation model. Finally, the forming conditions of hierarchical structure are analyzed. This study can provide guidance for the efficient and controllable manufacturing of micro/nano hierarchical structures.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"328 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134903936","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0