IEEE Journal of the Electron Devices Society最新文献

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Design of an Integrated MEMS Magnetic Gradiometer Rejecting Vibrations and Stray Fields 抑制振动和杂散场的集成MEMS磁梯度计设计
IF 2 3区 工程技术
IEEE Journal of the Electron Devices Society Pub Date : 2025-02-19 DOI: 10.1109/JEDS.2025.3543662
Enrico Gasparin;Arno Hoogerwerf;Dara Bayat;Guido Spinola Durante;Yves Petremand;Maurizio Tormen;Michel Despont;Gaël Close
{"title":"Design of an Integrated MEMS Magnetic Gradiometer Rejecting Vibrations and Stray Fields","authors":"Enrico Gasparin;Arno Hoogerwerf;Dara Bayat;Guido Spinola Durante;Yves Petremand;Maurizio Tormen;Michel Despont;Gaël Close","doi":"10.1109/JEDS.2025.3543662","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3543662","url":null,"abstract":"Magnetic sensors are often used near current-carrying wires or electrical motors generating significant magnetic interference. To mitigate the effects of these stray fields, the traditional design approach relies on a differential sensing scheme: multiple magnetometers are spaced apart, and the field differences are measured. Despite being rejected, stray fields still constrain the design space. Extra linear range and matched channels are required to accommodate their peak amplitude without saturation or residual common-mode leakage. On the contrary, single-point MEMS gradiometers rely on the force acting on a magnet, which is directly proportional to the magnetic field gradient. The stray field is intrinsically rejected by the magnetic transducing mechanism, even before entering the measurement chain. The range of the measurement chain can then be largely optimized for the gradient, independently of the stray field amplitude. This paper discusses the design of a single-point MEMS gradiometer. By design, it rejects magnetic stray fields and mechanical disturbances like vibrations and gravity. It is the first single-point MEMS gradiometer capable of operating unshielded and in various orientations. The prototype achieves a noise density of 4 nT/mm/<inline-formula> <tex-math>$sqrt {mathrm { Hz}}$ </tex-math></inline-formula> within a measurement range of <inline-formula> <tex-math>${pm } 300~{mu }$ </tex-math></inline-formula>T/mm. The paper demonstrates the sensor’s effectiveness in a bus-bar current sensing application. Design limitations and future design prospects are also outlined.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"228-236"},"PeriodicalIF":2.0,"publicationDate":"2025-02-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10892099","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143667456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Highly Robust Integrated Gate Driver Based on Organic TFTs for Active-Matrix Displays 基于有机TFTs的高鲁棒集成栅极驱动器用于有源矩阵显示器
IF 2 3区 工程技术
IEEE Journal of the Electron Devices Society Pub Date : 2025-02-18 DOI: 10.1109/JEDS.2025.3542951
Wanming Wu;Chuanke Chen;Chunyu Zhang;Chen Gu;Yinzhi Tang;Shipeng Wang;Mengwen Yan;Qingding Tong;Di Geng;Ling Li
{"title":"A Highly Robust Integrated Gate Driver Based on Organic TFTs for Active-Matrix Displays","authors":"Wanming Wu;Chuanke Chen;Chunyu Zhang;Chen Gu;Yinzhi Tang;Shipeng Wang;Mengwen Yan;Qingding Tong;Di Geng;Ling Li","doi":"10.1109/JEDS.2025.3542951","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3542951","url":null,"abstract":"A highly robust integrated gate driver based on organic thin-film transistors (OTFTs) is proposed that effectively addresses the output degradation caused by depletion-mode operation, instability and variation. The series-connected two-transistor structures and the inverters generate positive gateto- source voltages for internal nodes, which eliminate the leakage current and voltage ripples in depletion-mode operation and extend the support threshold voltage (<inline-formula> <tex-math>$V_{TH}$ </tex-math></inline-formula>) range. The simulation waveforms of the 538th stage have no degradation, considering the <inline-formula> <tex-math>$Delta V_{TH}$ </tex-math></inline-formula> range from 1.18 to -0.53 V for single-gate (SG) OTFT and that from 2.13 to -8.07 V for dual-gate (DG) OTFT. The fabricated gate drivers generate stable scan signals with almost negligible voltage ripples for SG- and DG-OTFT with <inline-formula> <tex-math>$V_{TH}$ </tex-math></inline-formula> of +7.9 and +1.8 V, respectively. In a 5.8-inch AMOLED panel (resolution: 538×302), the circuit can operate at a frame rate range from 1 to 45 Hz, driven by clocks with a frequency of 12.5 kHz and a swing from 0 to -15 V.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"128-133"},"PeriodicalIF":2.0,"publicationDate":"2025-02-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10891473","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143553246","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Self-Aligned Staggered Amorphous-Indium-Gallium-Zinc-Oxide Thin-Film Transistors With Ultra-Low Contact Resistance for High-Speed Circuits Application 自对准交错非晶铟镓锌氧化物薄膜晶体管的超低接触电阻应用于高速电路
IF 2 3区 工程技术
IEEE Journal of the Electron Devices Society Pub Date : 2025-02-18 DOI: 10.1109/JEDS.2025.3543212
Chuanke Chen;Xinlv Duan;Congyan Lu;Xichen Chuai;Wanming Wu;Chunyu Zhang;Chen Gu;Guanhua Yang;Nianduan Lu;Di Geng;Ling Li
{"title":"Self-Aligned Staggered Amorphous-Indium-Gallium-Zinc-Oxide Thin-Film Transistors With Ultra-Low Contact Resistance for High-Speed Circuits Application","authors":"Chuanke Chen;Xinlv Duan;Congyan Lu;Xichen Chuai;Wanming Wu;Chunyu Zhang;Chen Gu;Guanhua Yang;Nianduan Lu;Di Geng;Ling Li","doi":"10.1109/JEDS.2025.3543212","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3543212","url":null,"abstract":"A self-aligned (SA) staggered structure for amorphous-In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) is proposed. The bottom contact between n+-IGZO and source/drain (S/D) enables larger contact area and shorter current-transmission distance, thus reducing the contact resistance. The non-overlap structure helps to eliminate the overlap-induced parasitic capacitance, thereby improving the device operating speed. The fabricated SA staggered a-IGZO TFTs exhibit good performance, including channel-width-normalized contact resistance (RCW) as low as 1.53 <inline-formula> <tex-math>$Omega cdot mathrm{~cm}$ </tex-math></inline-formula> and transit frequency (fT) as high as 1.4 GHz, which are quite competitive in the field of high-speed a-IGZO TFTs.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"135-138"},"PeriodicalIF":2.0,"publicationDate":"2025-02-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10891703","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143553084","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Generic Cryogenic CMOS Device Modeling and EDA-Compatible Platform for Reliable Cryogenic IC Design 通用低温CMOS器件建模和eda兼容平台的可靠低温IC设计
IF 2 3区 工程技术
IEEE Journal of the Electron Devices Society Pub Date : 2025-02-17 DOI: 10.1109/JEDS.2025.3542589
Zhidong Tang;Zewei Wang;Yumeng Yuan;Chang He;Xin Luo;Ao Guo;Renhe Chen;Yongqi Hu;Longfei Yang;Chengwei Cao;Lin Lin Liu;Liujiang Yu;Ganbing Shang;Yongfeng Cao;Shoumian Chen;Yuhang Zhao;Shaojian Hu;Xufeng Kou
{"title":"Generic Cryogenic CMOS Device Modeling and EDA-Compatible Platform for Reliable Cryogenic IC Design","authors":"Zhidong Tang;Zewei Wang;Yumeng Yuan;Chang He;Xin Luo;Ao Guo;Renhe Chen;Yongqi Hu;Longfei Yang;Chengwei Cao;Lin Lin Liu;Liujiang Yu;Ganbing Shang;Yongfeng Cao;Shoumian Chen;Yuhang Zhao;Shaojian Hu;Xufeng Kou","doi":"10.1109/JEDS.2025.3542589","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3542589","url":null,"abstract":"This paper outlines the establishment of a generic cryogenic CMOS database in which key electrical parameters and transfer characteristics of the MOSFETs are quantified as functions of device size, temperature/frequency responses. Meanwhile, comprehensive device statistical analysis is conducted to evaluate the influence of variation and mismatch effects at low temperatures. Furthermore, by incorporating the Cryo-CMOS compact model into the process design kit (PDK), the cryogenic 4 Kb SRAM and 5-bit flash ADC are designed, and their performance is investigated and optimized based on the EDA-compatible platform, hence laying a solid foundation for large-scale cryogenic IC design.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"117-127"},"PeriodicalIF":2.0,"publicationDate":"2025-02-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10891147","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143512789","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Harmonic Enhancement of Terahertz GaN Planar Gunn Oscillators With Multiple Gates 多门太赫兹GaN平面Gunn振荡器的谐波增强
IF 2 3区 工程技术
IEEE Journal of the Electron Devices Society Pub Date : 2025-02-17 DOI: 10.1109/JEDS.2025.3543017
Ying Wang;Shuai Hui;Yu-Xin Fu;Yuan-Zhu Xia;He Guan
{"title":"Harmonic Enhancement of Terahertz GaN Planar Gunn Oscillators With Multiple Gates","authors":"Ying Wang;Shuai Hui;Yu-Xin Fu;Yuan-Zhu Xia;He Guan","doi":"10.1109/JEDS.2025.3543017","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3543017","url":null,"abstract":"In this paper, we propose a novel design of GaN-based planar Gunn oscillator as terahertz signal source. The oscillator has multiple gates and each gate can be individually biased. By controlling gate bias voltage and distance to the barrier layer, the output oscillating current can be formed in such a way that the higher harmonics are more powerful than the fundamental one. This is because multiple Gunn domains created under the gates in the channel are synchronized. Compared to the conventional single-domain diode, this multi-gate configuration not only increases the frequency and output power but also provides superior harmonic control, leading to higher efficiency and more stable operation at terahertz frequencies. We will review the design details and analysis on domain forming conditions using a physics-based numerical model. The optimal parameters for high power, high DC-RF conversion efficiency and high frequency will be given. Specifically, in dual-gate device, when it works in the dual-domain mode, the second harmonic is enhanced, reaching a frequency of 310.5 GHz with 7.6 mW of power and 11.2% efficiency. The tri-gate device operating in tri-domain mode further enhances the third harmonic to 417.0 GHz, with 9.57 mW of power and 9.23% efficiency. The multi-gate structure allows for more efficient harmonic generation, greater frequency tunability, and better power management, all of which are crucial for advanced terahertz application such as mixing, frequency multiplexing, and signal amplification.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"145-153"},"PeriodicalIF":2.0,"publicationDate":"2025-02-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10891377","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143611872","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Modeling of van der Waals-Based Photovoltaic Devices 基于范德华的光伏设备建模
IF 2 3区 工程技术
IEEE Journal of the Electron Devices Society Pub Date : 2025-02-14 DOI: 10.1109/JEDS.2025.3542168
Ángel A. Díaz-Burgos;Enrique G. Marin;Francisco Pasadas;Francisco G. Ruiz;Andrés Godoy
{"title":"Modeling of van der Waals-Based Photovoltaic Devices","authors":"Ángel A. Díaz-Burgos;Enrique G. Marin;Francisco Pasadas;Francisco G. Ruiz;Andrés Godoy","doi":"10.1109/JEDS.2025.3542168","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3542168","url":null,"abstract":"Two-dimensional Transition Metal Dichalcogenide-based van der Waals heterostructures have been proposed for avant-garde, highly scalable optoelectronic and excitonic devices. Although ab initio techniques have been thoroughly employed to analyze these confined systems from a microscopic perspective, a robust mesoscopic description for device-scale simulation is still lacking. In this work, we account for the recent reports on the role of interlayer excitons and the band alignment in van der Waals-based optoelectronic devices, developing an extended van Roosbroeck system within the framework of the Drift-Diffusion approximation. Ultrafast interlayer charge transfer of photo-generated carriers is incorporated effectively, as is interlayer recombination. This description succeeds in reproducing selected experimental measurements of a van der Waals-based gated-diode, providing a comprehensive physical description of the involved magnitudes.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"219-227"},"PeriodicalIF":2.0,"publicationDate":"2025-02-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10887203","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143667623","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A 3-kV GaN MISHEMT With High Reliability and a Power Figure-of-Merit of 685 MW/cm² 具有高可靠性和685 MW/cm²功率特性的3kv GaN MISHEMT
IF 2 3区 工程技术
IEEE Journal of the Electron Devices Society Pub Date : 2025-02-13 DOI: 10.1109/JEDS.2025.3533920
Yifan Cui;Minghao He;Jianguo Chen;Yang Jiang;Chuying Tang;Qing Wang;Hongyu Yu
{"title":"A 3-kV GaN MISHEMT With High Reliability and a Power Figure-of-Merit of 685 MW/cm²","authors":"Yifan Cui;Minghao He;Jianguo Chen;Yang Jiang;Chuying Tang;Qing Wang;Hongyu Yu","doi":"10.1109/JEDS.2025.3533920","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3533920","url":null,"abstract":"In this letter, GaN metal–insulator–semiconductor high electron mobility transistors (MISHEMTs) are fabricated on Si substrates with an ultra-high breakdown voltage of over 3 kV using a 90-nm in situ <inline-formula> <tex-math>$textrm {SiN}_{mathrm { X}}$ </tex-math></inline-formula> layer as both the gate dielectric and surface passivation. The devices exhibit low off-state leakage current (on/off ratio of <inline-formula> <tex-math>$10{^{{9}}}$ </tex-math></inline-formula>), high forward gate breakdown voltage (>122 V), and state-of-the-art figure of merit (685 MW/cm2). Moreover, the reliability of the in situ <inline-formula> <tex-math>$textrm {SiN}_{mathrm { X}}$ </tex-math></inline-formula> dielectric is evaluated through the high-temperature gate bias test. The results are fitted with a Weibull distribution, estimating a 10-year estimation of 100 ppm. The maximum gate-source voltage of over 70 V is obtained. This letter presents a strategy for mass producing GaN-on-Si MISHEMTs with high breakdown voltage and reliability.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"106-111"},"PeriodicalIF":2.0,"publicationDate":"2025-02-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10886964","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143446251","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Understanding the Slow Erase Operation in IGZO-Channel FeFETs: The Role of Positive Charge Generation Kinetics 理解igzo沟道效应管的慢擦除操作:正电荷产生动力学的作用
IF 2 3区 工程技术
IEEE Journal of the Electron Devices Society Pub Date : 2025-02-12 DOI: 10.1109/JEDS.2025.3541418
Zhuo Chen;Nicolò Ronchi;Roman Izmailov;Hongwei Tang;Mihaela Ioana Popovici;Harold Dekkers;Alexandru Pavel;Geert Van den Bosch;Maarten Rosmeulen;Valeri V. Afanas’Ev;Jan Van Houdt
{"title":"Understanding the Slow Erase Operation in IGZO-Channel FeFETs: The Role of Positive Charge Generation Kinetics","authors":"Zhuo Chen;Nicolò Ronchi;Roman Izmailov;Hongwei Tang;Mihaela Ioana Popovici;Harold Dekkers;Alexandru Pavel;Geert Van den Bosch;Maarten Rosmeulen;Valeri V. Afanas’Ev;Jan Van Houdt","doi":"10.1109/JEDS.2025.3541418","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3541418","url":null,"abstract":"This work systematically investigates the programming and erasing dynamics of IGZO-channel back-gated FeFETs, uncovering that erase operation is significantly slower than programming. PUND measurements in ferroelectric capacitors with IGZO top electrodes reveal that the ferroelectric switching kinetics under negative bias are limited by the generation of positive charges. Two underlying physical mechanisms are identified: (1) IGZO-bandgap donor states, which can get positively charged by emitting electrons to Conduction Band and reversibly neutralized during programming, help ferroelectric switching and limits the switching kinetics; and (2) hydrogen doping into IGZO, which proceeds at a much slower rate and is irreversible, thus incapable of supporting ferroelectric switching. This work emphasizes the importance to deepen the understanding of erasing kinetics to enable low-latency, and high-endurance applications of oxide-semiconductor-channel FeFETs.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"245-251"},"PeriodicalIF":2.0,"publicationDate":"2025-02-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10883345","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143667455","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Logic-Compatible Asymmetrical FET for Gain Cell eDRAM With Long Retention and Fast Access Speed 具有长保留和快速存取速度的增益单元eDRAM逻辑兼容非对称场效应管
IF 2 3区 工程技术
IEEE Journal of the Electron Devices Society Pub Date : 2025-02-11 DOI: 10.1109/JEDS.2025.3540581
Kaifeng Wang;Pengfei Hao;Fangxing Zhang;Lining Zhang;Qianqian Huang;Ru Huang
{"title":"Logic-Compatible Asymmetrical FET for Gain Cell eDRAM With Long Retention and Fast Access Speed","authors":"Kaifeng Wang;Pengfei Hao;Fangxing Zhang;Lining Zhang;Qianqian Huang;Ru Huang","doi":"10.1109/JEDS.2025.3540581","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3540581","url":null,"abstract":"A novel Asymmetrical FET (AsyFET) is proposed to enhance the retention of gain cell memory and is experimentally demonstrated based on standard 300mm logic foundry platform. In AsyFET, the asymmetrical S/D doping and S/D gate spacer are designed to suppress leakage current. The modulated Schottky direct tunneling current and band-to-band tunneling current are designed to write “1” and “0” respectively without write disturb. The AsyFET-based 2T0C DRAM with significantly enhanced retention and fast access speed is also proposed and experimentally demonstrated on the same wafer. Without area penalty or new materials, the fabricated Si AsyFET can obtain ultralow off-state current of <inline-formula> <tex-math>$sim 10{^{-}17 }$ </tex-math></inline-formula>A/<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>m, leading to the long retention above second-level in 55nm technology node across the 300mm wafer. The on-state currents of AsyFET at forward and reverse bias are <inline-formula> <tex-math>$sim 10{^{-}6 }$ </tex-math></inline-formula>A/<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>m, enabling write speed of below 5ns with negligible temperature dependence. The experimental results show the great potential of proposed AsyFET 2T0C DRAM design for low-power, high-density, and high-speed on-chip memory.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"237-244"},"PeriodicalIF":2.0,"publicationDate":"2025-02-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10879406","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143667575","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Trap Analysis of Normally-Off Ga₂O₃ MOSFET Enabled by Charge Trapping Layer: Photon Stimulated Characterization and TDDB 电荷捕获层激活的常关Ga₂O₃MOSFET的陷阱分析:光子激发表征和TDDB
IF 2 3区 工程技术
IEEE Journal of the Electron Devices Society Pub Date : 2025-02-07 DOI: 10.1109/JEDS.2025.3538769
Minghao He;Mujun Li;Chenkai Deng;Xiaohui Wang;Qing Wang;Hongyu Yu;Kah-Wee Ang
{"title":"Trap Analysis of Normally-Off Ga₂O₃ MOSFET Enabled by Charge Trapping Layer: Photon Stimulated Characterization and TDDB","authors":"Minghao He;Mujun Li;Chenkai Deng;Xiaohui Wang;Qing Wang;Hongyu Yu;Kah-Wee Ang","doi":"10.1109/JEDS.2025.3538769","DOIUrl":"https://doi.org/10.1109/JEDS.2025.3538769","url":null,"abstract":"A charge trapping layer (CTL) technique is incorporated to achieve a normally-off Ga2O3 MOSFET. The gate dielectric was engineered using a stack composed of a blocking layer (16 nm <inline-formula> <tex-math>${mathrm { HfO}}_{mathrm { x}}$ </tex-math></inline-formula> / 2 nm Al2O3), a CTL (5.76 nm Al:HfO<inline-formula> <tex-math>${_{text {x}}}~1$ </tex-math></inline-formula>:5), and a tunneling barrier (2 nm Al2O3 / 2 nm <inline-formula> <tex-math>${mathrm { HfO}}_{mathrm { x}}$ </tex-math></inline-formula> / 2 nm Al2O3). The trap profile of the CTL layer and the interface of the gate dielectric and Ga2O3 channel are studied by photon-stimulated characterization, which yield highly uniform results, indicating the high quality and uniformity of the proposed method. Furthermore, we conducted a time-dependent dielectric breakdown (TDDB) test on devices both without a field plate (NOFP) and with a source-connected field plate (SFP) to investigate the dielectric failure mechanism and gain valuable insights for the design of CTL-based Ga2O3 MOSFETs.","PeriodicalId":13210,"journal":{"name":"IEEE Journal of the Electron Devices Society","volume":"13 ","pages":"112-116"},"PeriodicalIF":2.0,"publicationDate":"2025-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10877719","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143446253","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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