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Quasi-elliptic bandpass filter based on novel coupling scheme with wide stop-band suppression 基于新型宽阻带抑制耦合方案的准椭圆带通滤波器
IF 1.9 3区 工程技术
Microelectronics Journal Pub Date : 2025-10-10 DOI: 10.1016/j.mejo.2025.106922
Ke Gong , Hang Qian , Xuehui Hu , Chunfeng Fan , Qing Liu
{"title":"Quasi-elliptic bandpass filter based on novel coupling scheme with wide stop-band suppression","authors":"Ke Gong ,&nbsp;Hang Qian ,&nbsp;Xuehui Hu ,&nbsp;Chunfeng Fan ,&nbsp;Qing Liu","doi":"10.1016/j.mejo.2025.106922","DOIUrl":"10.1016/j.mejo.2025.106922","url":null,"abstract":"<div><div>A novel design method for wide-stopband quasi-elliptic bandpass filters (BPF) is proposed, which is realized by combining a stepped impedance resonator (SIR) and a phase coupling scheme. Using two folded SIRs in conjunction with a feed structure, the phase coupling scheme of electrical coupling paths with different electrical lengths is realized, and a two-pole quasi-elliptic BPF is realized. Then, two mixed coupling schemes of the classical trisection and phase coupling schemes are proposed, and two different types of wide-stopband quasi-elliptical BPFs are realized. The finite frequency transmission zeros (FTZs) and bandwidth (BW) of the proposed BPF can be effectively controlled by adjusting the structural parameters. For demonstration, two filters are designed, fabricated, and measured. The measured result is consistent with the simulated result, thereby validating the feasibility and universality of the proposed method. The proposed filter has the advantages of compact size, wide-stopband, and high selectivity.</div></div>","PeriodicalId":49818,"journal":{"name":"Microelectronics Journal","volume":"166 ","pages":"Article 106922"},"PeriodicalIF":1.9,"publicationDate":"2025-10-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145268528","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A 1500 V/μs slew rate, 300 MHz GBW operational amplifier in 0.18-μm HV BCD process for CMOS system-level monolithic integration 基于0.18 μ V HV BCD工艺的1500 V/μs转换速率、300 MHz GBW运算放大器,用于CMOS系统级单片集成
IF 1.9 3区 工程技术
Microelectronics Journal Pub Date : 2025-10-06 DOI: 10.1016/j.mejo.2025.106914
Jizhang Chen , Jueping Cai , Yuxin Zhang , Yixin Yin , Boming Tang
{"title":"A 1500 V/μs slew rate, 300 MHz GBW operational amplifier in 0.18-μm HV BCD process for CMOS system-level monolithic integration","authors":"Jizhang Chen ,&nbsp;Jueping Cai ,&nbsp;Yuxin Zhang ,&nbsp;Yixin Yin ,&nbsp;Boming Tang","doi":"10.1016/j.mejo.2025.106914","DOIUrl":"10.1016/j.mejo.2025.106914","url":null,"abstract":"<div><div>A high-voltage, high-slew-rate, large-current-drive, wideband operational amplifier (op-amp) based on a hybrid BJT-CMOS architecture is proposed to enable CMOS system-level monolithic integration. Unlike conventional high-voltage, high-slew-rate op-amps fabricated in complementary bipolar (CB) process, the proposed op-amp is implemented in TSMC 0.18-<span><math><mi>μ</mi></math></span>m HV BCD process. BJTs in the BCD process exhibit low current gain (<span><math><mi>β</mi></math></span>), leading to current mismatch, poor current-driving capability, and limitations in transient current. In order to minimize the input offset voltage caused by current mismatch, a complementary bias current generation circuit is introduced in the class-AB input stage to guarantee equal static currents in PNP mirrors and NPN mirrors, and a base current-sampling feedback compensation circuit to mitigate current mismatch at the amplification stage. To drive large currents, the CMOS-output current-feedback buffer is used. To prevent current limitations and improve slew rate during signal conversion, a dynamic biasing architecture is adopted. Simulation results show that the op-amp achieves 300 MHz gain-bandwidth product (GBW) and <span><math><mo>&lt;</mo></math></span>0.5 mV (3<span><math><mi>σ</mi></math></span>) input offset voltage consuming 6.2 mA quiescent current at ±5 V supply. Measurement results show that the slew rate exceeds 1500 V/<span><math><mrow><mi>μ</mi><mi>s</mi></mrow></math></span> under 4 <span><math><msub><mrow><mi>V</mi></mrow><mrow><mi>pp</mi></mrow></msub></math></span> output, and the op-amp delivers ±50 mA (±100 mA) of load current maintaining an output voltage swing from <span><math><mo>−</mo></math></span>3.5 V to + 3.4 V (from <span><math><mo>−</mo></math></span>3.2 V to + 3.0 V).</div></div>","PeriodicalId":49818,"journal":{"name":"Microelectronics Journal","volume":"167 ","pages":"Article 106914"},"PeriodicalIF":1.9,"publicationDate":"2025-10-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145324144","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A broadband tunable high-selectivity bandpass filter and filtering power amplifier with continuous tunability and high stopband suppression level 一种宽带可调谐高选择性带通滤波器和滤波功率放大器,具有连续可调谐和高阻带抑制水平
IF 1.9 3区 工程技术
Microelectronics Journal Pub Date : 2025-09-28 DOI: 10.1016/j.mejo.2025.106911
Leidan Pan , Yongle Wu , Weimin Wang , Shaobo Li , Anna Piacibello , Vittorio Camarchia
{"title":"A broadband tunable high-selectivity bandpass filter and filtering power amplifier with continuous tunability and high stopband suppression level","authors":"Leidan Pan ,&nbsp;Yongle Wu ,&nbsp;Weimin Wang ,&nbsp;Shaobo Li ,&nbsp;Anna Piacibello ,&nbsp;Vittorio Camarchia","doi":"10.1016/j.mejo.2025.106911","DOIUrl":"10.1016/j.mejo.2025.106911","url":null,"abstract":"<div><div>In this paper, an unequal-width-three-coupled line (UWTCL) is applied for the design of a broadband tunable bandpass filter and filtering power amplifier (PA) using varactor diodes. A continuous tunability is achieved in both cases, adopting a single varactor diode in the passive filter and a common-cathode diodes matrix in the filtering PA. High coupling coefficient of the UWTCL enables wideband filtering and high out-of-band suppression level. The implemented filter achieves the high-selectivity filtering and wideband tunable range (1.6–2.4 GHz). Based on the filter, the tunable PA is developed with wideband impedance matching network (IMN) and a high-selectivity tunable output matching network (OMN), which offers improved filtering performances and facilitated tuning process. Measurements demonstrate the capability of the PA for frequency tuning from 1.7 to 2.2 GHz with good filtering performances, high efficiency, and a stopband suppression level exceeding 60 dB.</div></div>","PeriodicalId":49818,"journal":{"name":"Microelectronics Journal","volume":"166 ","pages":"Article 106911"},"PeriodicalIF":1.9,"publicationDate":"2025-09-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145226993","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A new double-trench gate 4H-SiC LDMOS with heterojunction and buffer layer for improved single-event burnout tolerance 一种具有异质结和缓冲层的新型双沟栅4H-SiC LDMOS,可提高单事件烧蚀耐受性
IF 1.9 3区 工程技术
Microelectronics Journal Pub Date : 2025-09-27 DOI: 10.1016/j.mejo.2025.106909
Liqun Wang, Panpan Tang, Tong Liu
{"title":"A new double-trench gate 4H-SiC LDMOS with heterojunction and buffer layer for improved single-event burnout tolerance","authors":"Liqun Wang,&nbsp;Panpan Tang,&nbsp;Tong Liu","doi":"10.1016/j.mejo.2025.106909","DOIUrl":"10.1016/j.mejo.2025.106909","url":null,"abstract":"<div><div>As an important aerospace power device, silicon carbide (SiC) Lateral Diffused Metal Oxide Semiconductor (LDMOS) is susceptible to single-event burnout (SEB), which causes catastrophic damage when exposed to space radiation. The current work employs the Sentaurus TCAD simulations to present the SEB hardening method for a 1.2-kV 4H-SiC LDMOS. A double-trench gate 4H-SiC LDMOS containing low specific on-resistance (<span><math><msub><mrow><mi>R</mi></mrow><mrow><mi>o</mi><mi>n</mi><mo>,</mo><mi>s</mi><mi>p</mi></mrow></msub></math></span>) is proposed, significantly improving the device’s SEB threshold voltage (<span><math><msub><mrow><mi>V</mi></mrow><mrow><mi>S</mi><mi>E</mi><mi>B</mi></mrow></msub></math></span>). The proposed hardening design integrates multi-buffer layer with a heterojunction, impressively mitigating the high electric field at the drain area while suppressing the parasitic bipolar junction transistor (BJT). Besides, the device’s resistance is significantly decreased by designing the double-trench gate and current spreading layer (CSL). Accordingly, the constructed device achieves a (498 ± 11)% increase in <span><math><msub><mrow><mi>V</mi></mrow><mrow><mi>S</mi><mi>E</mi><mi>B</mi></mrow></msub></math></span> while reducing the <span><math><msub><mrow><mi>R</mi></mrow><mrow><mi>o</mi><mi>n</mi><mo>,</mo><mi>s</mi><mi>p</mi></mrow></msub></math></span> by (41.8 ± 1.8)% compared with the traditional 4H-SiC LDMOS. This significantly enhances the device’s reliability in radiation environments.</div></div>","PeriodicalId":49818,"journal":{"name":"Microelectronics Journal","volume":"166 ","pages":"Article 106909"},"PeriodicalIF":1.9,"publicationDate":"2025-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145226992","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Improving small signal modeling of GaN HEMTs with vector fitting method 用矢量拟合方法改进GaN hemt的小信号建模
IF 1.9 3区 工程技术
Microelectronics Journal Pub Date : 2025-09-25 DOI: 10.1016/j.mejo.2025.106912
Shaowei Wang , Hongliang Lu , Silu Yan , Lin Cheng , Yanghui Hu , Longxiang He , Liu Wang , Yuming Zhang
{"title":"Improving small signal modeling of GaN HEMTs with vector fitting method","authors":"Shaowei Wang ,&nbsp;Hongliang Lu ,&nbsp;Silu Yan ,&nbsp;Lin Cheng ,&nbsp;Yanghui Hu ,&nbsp;Longxiang He ,&nbsp;Liu Wang ,&nbsp;Yuming Zhang","doi":"10.1016/j.mejo.2025.106912","DOIUrl":"10.1016/j.mejo.2025.106912","url":null,"abstract":"<div><div>In the paper, an improved small-signal equivalent circuit model for GaN HEMTs is proposed for effectively capturing the high-frequency behavior of the device. In order to simulate the gain flatness of the device at high frequencies, the intrinsic capacitive coupling noise characteristic at high frequencies is considered in the proposed model. Also, in order to consider the phase delay phenomenon present in the device at high frequency conditions, additional current sources are added to the proposed model to simulate the phenomenon. In addition, the parameter values in the model are obtained by analyzing the rational function poles, residuals, and constants extracted by vector fitting (VF), which accurately models the <em>Y</em>-parameter characteristics of the device at high frequencies. The proposed model can accurately model the main physical properties of the device with good physical consistency and parameter interpretability. With the help of the VF, the model realizes high-precision matching of the <em>Y</em>-parameters of the device in a wide frequency band while significantly reducing the complexity of parameter extraction.</div></div>","PeriodicalId":49818,"journal":{"name":"Microelectronics Journal","volume":"166 ","pages":"Article 106912"},"PeriodicalIF":1.9,"publicationDate":"2025-09-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145268526","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A 4.5–37 GHz ultra-wideband amplifier with asymmetric T-coil matching network in 0.18-μm SiGe BiCMOS technology 基于0.18 μm SiGe BiCMOS技术的非对称t圈匹配网络4.5-37 GHz超宽带放大器
IF 1.9 3区 工程技术
Microelectronics Journal Pub Date : 2025-09-24 DOI: 10.1016/j.mejo.2025.106913
Hao Jiang , Zenglong Zhao , Nengxu Zhu , Keping Wang , Fanyi Meng
{"title":"A 4.5–37 GHz ultra-wideband amplifier with asymmetric T-coil matching network in 0.18-μm SiGe BiCMOS technology","authors":"Hao Jiang ,&nbsp;Zenglong Zhao ,&nbsp;Nengxu Zhu ,&nbsp;Keping Wang ,&nbsp;Fanyi Meng","doi":"10.1016/j.mejo.2025.106913","DOIUrl":"10.1016/j.mejo.2025.106913","url":null,"abstract":"<div><div>This paper presents an ultra-wideband silicon-based amplifier designed to overcome the limitations of traditional transformer-based and distributed amplifier designs. The pro-posed amplifier is implemented in a 0.18 μm SiGe BiCMOS process and operates over a frequency range of 4.5–37 GHz. It features a single-stage differential topology using a common-emitter/common-base (CE-CB) configuration, with a series RC network for negative feedback. An asymmetric differential T-coil structure is employed for broadband input and output matching. Simulation results show return losses better than −10 dB across the full frequency range. The amplifier achieves a peak small-signal gain of 10.2 dB, with gain flatness of ±0.9 dB. It consumes less than 10 mW of DC power and delivers an OP1dB between 6 and 12.7 dBm. The core occupies only 0.14 mm<sup>2</sup>, making it suitable for compact and low-power broadband systems.</div></div>","PeriodicalId":49818,"journal":{"name":"Microelectronics Journal","volume":"166 ","pages":"Article 106913"},"PeriodicalIF":1.9,"publicationDate":"2025-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158633","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An integrated GaN PNP Bipolar Junction Transistor for ESD applications 用于ESD应用的集成GaN PNP双极结晶体管
IF 1.9 3区 工程技术
Microelectronics Journal Pub Date : 2025-09-23 DOI: 10.1016/j.mejo.2025.106905
Pengfei Zhang , Zhijia Zhao , Gaoqiang Deng , Xiaorong Luo , Shuxiang Sun , Yuxi Wei , Jie Wei
{"title":"An integrated GaN PNP Bipolar Junction Transistor for ESD applications","authors":"Pengfei Zhang ,&nbsp;Zhijia Zhao ,&nbsp;Gaoqiang Deng ,&nbsp;Xiaorong Luo ,&nbsp;Shuxiang Sun ,&nbsp;Yuxi Wei ,&nbsp;Jie Wei","doi":"10.1016/j.mejo.2025.106905","DOIUrl":"10.1016/j.mejo.2025.106905","url":null,"abstract":"<div><div>In this paper, a novel ESD protection circuit incorporating GaN PNP BJT (Bipolar Junction Transistor) is proposed and simulated. Compared with the conventional diodes, resistive and capacitive GaN ESD clamp, the proposed new ESD circuit exhibits superior discharging capability on same chip area, and its clamping voltage is reduced by at least 5.1V under 1.5A TLP (transmission line pulsing) current. Meanwhile, the proposed ESD circuit reduces the overshoot voltage during its discharging channel opens. After that the characteristics of GaN BJT is also investigated. By introducing a p-GaN back barrier layer, new p-GaN HEMT's conduction characteristics and breakdown voltage are improved compared to the conventional p-GaN HEMT.</div></div>","PeriodicalId":49818,"journal":{"name":"Microelectronics Journal","volume":"166 ","pages":"Article 106905"},"PeriodicalIF":1.9,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145268529","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Low-Power and Area-Efficient CIM: An SRAM-based fully-digital computing-in-memory hardware acceleration processor with approximate adder tree for multi-precision sparse neural networks 低功耗和区域高效CIM:一种基于sram的全数字内存计算硬件加速处理器,具有近似加法树,用于多精度稀疏神经网络
IF 1.9 3区 工程技术
Microelectronics Journal Pub Date : 2025-09-23 DOI: 10.1016/j.mejo.2025.106903
Zhendong Fang, Yi Wang, Yaohua Xu
{"title":"Low-Power and Area-Efficient CIM: An SRAM-based fully-digital computing-in-memory hardware acceleration processor with approximate adder tree for multi-precision sparse neural networks","authors":"Zhendong Fang,&nbsp;Yi Wang,&nbsp;Yaohua Xu","doi":"10.1016/j.mejo.2025.106903","DOIUrl":"10.1016/j.mejo.2025.106903","url":null,"abstract":"<div><div>Emergent architecture called computing-in-memory (CIM) effectively alleviates the issue of insufficient memory bandwidth and reduces energy consumption when accessing the on-chip buffer and registers. Some analog CIM macros designed to accelerate the neural network inference process have demonstrated significant improvements in both throughput and energy efficiency. These analog CIM macros are primarily utilized for neural networks with fixed activation and weight precision, which poses challenges for widespread deployment on edge devices with limited resources. On the other hand, analog macros exhibit heightened sensitivity to variations in process, voltage, and temperature, and the overhead associated with data conversion between analog and digital domains is unavoidable during calculation. Furthermore, exploring the sparse scheme compatible with CIM architecture can be beneficial in enhancing the energy efficiency of sparse neural network models. This article presents an SRAM-based fully-digital CIM hardware acceleration processor named Low-Power and Area-Efficient CIM (LPAE CIM), which combines the memory and computing macro of fully-digital architecture with peripheral storage and control modules to form a relatively comprehensive systematic structure. First, the sparsity of weight data is effectively utilized through a structured pruning method, and successive rows of the macro are opened flexibly for processing the sparsity of input activation. Second, the proposed area-friendly approximate adder tree replaces partial full adders with OR gates, reducing transistor count and promoting high-density integration of system-on-chip. Third, the shift adder outside the macro features dynamically adjustable 1–8 bit input activation and reconfigurable 4/8 bit storage weight, providing flexibility for fixed hardware resources. It achieves 148.5 TOPS/W energy efficiency at 4-bit activation and weight precision, which shows at least a 1.32× improvement over prior works.</div></div>","PeriodicalId":49818,"journal":{"name":"Microelectronics Journal","volume":"166 ","pages":"Article 106903"},"PeriodicalIF":1.9,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158628","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An 1-μA, 25 ppm/°C, PVT resilient resistor-less CMOS current reference 1 μ a, 25 ppm/°C, PVT弹性无电阻CMOS电流基准
IF 1.9 3区 工程技术
Microelectronics Journal Pub Date : 2025-09-23 DOI: 10.1016/j.mejo.2025.106894
César Casañas , Atila Alvandpour , Alireza Saberkari , André F. Ponchet , Robson Moreno , Osamu Saotome , Ingemar Söderquist , Lucas Compassi-Severo
{"title":"An 1-μA, 25 ppm/°C, PVT resilient resistor-less CMOS current reference","authors":"César Casañas ,&nbsp;Atila Alvandpour ,&nbsp;Alireza Saberkari ,&nbsp;André F. Ponchet ,&nbsp;Robson Moreno ,&nbsp;Osamu Saotome ,&nbsp;Ingemar Söderquist ,&nbsp;Lucas Compassi-Severo","doi":"10.1016/j.mejo.2025.106894","DOIUrl":"10.1016/j.mejo.2025.106894","url":null,"abstract":"<div><div>This paper presents a resistor-less current reference robust against process, voltage, and temperature (PVT) variations. The temperature compensation is achieved by combining a proportional-to-absolute-temperature (PTAT) component with its complementary-to-absolute-temperature (CTAT) counterpart, both generated through self-cascode MOSFET (SCM) circuits. The transconductance efficiency (<span><math><mrow><msub><mrow><mi>g</mi></mrow><mrow><mi>m</mi></mrow></msub><mo>/</mo><msub><mrow><mi>I</mi></mrow><mrow><mi>D</mi></mrow></msub></mrow></math></span>) methodology is employed for device sizing and define the inversion region. Designed in 65 nm CMOS technology, the proposed current reference occupies a layout area of 0.032 <span><math><msup><mrow><mi>mm</mi></mrow><mrow><mn>2</mn></mrow></msup></math></span>. Post-layout simulations demonstrate a mean output current of <span><math><mrow><mn>1</mn><mo>.</mo><mn>04</mn><mspace></mspace><mi>μ</mi><mi>A</mi></mrow></math></span> (nominal case) with a standard deviation of 9 nA, a temperature coefficient (TC) of 25 ppm/°C (over −40 °C to 120 °C), and a temperature variation of 1.3%. Additionally, the circuit achieves a power supply rejection ratio (PSRR) of 47.5 dB, a line sensitivity (LS) of 14 %/V, and a average power dissipation of 4.92 <span><math><mi>μ</mi></math></span>W.</div></div>","PeriodicalId":49818,"journal":{"name":"Microelectronics Journal","volume":"166 ","pages":"Article 106894"},"PeriodicalIF":1.9,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158631","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Channel geometry-Driven performance enhancement under metal gate strain engineering in GAAFET 金属栅极应变工程下GAAFET沟道几何驱动性能增强
IF 1.9 3区 工程技术
Microelectronics Journal Pub Date : 2025-09-22 DOI: 10.1016/j.mejo.2025.106910
Haiyuan Lyu , Lei Cao , Qingkun Li , Zhaohao Zhang , Huaxiang Yin
{"title":"Channel geometry-Driven performance enhancement under metal gate strain engineering in GAAFET","authors":"Haiyuan Lyu ,&nbsp;Lei Cao ,&nbsp;Qingkun Li ,&nbsp;Zhaohao Zhang ,&nbsp;Huaxiang Yin","doi":"10.1016/j.mejo.2025.106910","DOIUrl":"10.1016/j.mejo.2025.106910","url":null,"abstract":"<div><div>Metal Gate (MG) strain engineering has been employed in CMOS technology since the 45 nm node to enhance device performance. Since the MG strain engineering and corresponding performance enhancement critically depend on the geometry of the underlying channel, the dependency necessitates rigorous study of MG strain effects in advanced logic devices with diverse 3D channel architectures. In this work, we investigate the performance impact of MG-strained Si technology across FinFETs and nanosheet FETs (NSFETs) at the 3-nm node using 3D Technology Computer-Aided Design (TCAD) simulations. With the distinct channel geometry of NS, larger driving current enhancement (<em>ΔI</em><sub>on</sub>) and mobility enhancement (<em>Δμ</em>) are obtained on <em>p</em>-type NSFETs. Si channel strain distribution analysis shows that the performance enhancement can be attributed to the larger longitudinal (ZZ) compressive stress and the lateral (YY) tensile stress in the nanosheet channel. Subsequently, our investigation reveals that enhancing the effectiveness of MG strained Si technology in <em>p</em>-type NSFETs is achievable by reducing the nanosheet thickness or increasing its width.</div></div>","PeriodicalId":49818,"journal":{"name":"Microelectronics Journal","volume":"166 ","pages":"Article 106910"},"PeriodicalIF":1.9,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145159421","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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