Micro and Nano Engineering最新文献_第6页

Cross-sectional geometry effect on bending strength of gold micro-cantilever with trapezoidal cross-section 横截面几何形状对梯形截面金微型悬臂弯曲强度的影响

Micro and Nano Engineering Pub Date : 2024-05-11 DOI: 10.1016/j.mne.2024.100259

Ryohei Hori , Kazuya Fujita , Chun Yi Chen , Tomoyuki Kurioka , Jhen-Yang Wu , Tso-Fu Mark Chang , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone

{"title":"Cross-sectional geometry effect on bending strength of gold micro-cantilever with trapezoidal cross-section","authors":"Ryohei Hori , Kazuya Fujita , Chun Yi Chen , Tomoyuki Kurioka , Jhen-Yang Wu , Tso-Fu Mark Chang , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone","doi":"10.1016/j.mne.2024.100259","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100259","url":null,"abstract":"<div><p>Gold is a promising material for movable components in MEMS devices by the high mass density, which allows reduction of the Brownian noise. Mechanical properties of metallic materials are known to be affected by the sample size effect. When bending test is utilized, the sample geometry effect is another factor. In this study, effects of the shape of the cross-section, or the cross-sectional geometry effect, are evaluated using micro-cantilevers with a trapezoidal cross-section. The yield stresses are ranged from 112 MPa to 185 MPa in micro-cantilevers composed of single crystalline gold, and the yield stresses varied from 372 MPa to 489 MPa in polycrystalline gold micro-cantilevers. The yield stress is found to be higher in the micro-cantilever having a smaller ratio of the top width over the bottom width, which demonstrates the cross-sectional geometry effect. Also, the cross-sectional geometry effect is more significant in the polycrystalline micro-cantilevers.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100259"},"PeriodicalIF":0.0,"publicationDate":"2024-05-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000224/pdfft?md5=c975d3baea9813e31a1d20e50884ceb8&pid=1-s2.0-S2590007224000224-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140951303","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Fabrication of pyrolytic carbon interdigitated microelectrodes by maskless UV photolithography with epoxy-based photoresists SU-8 and mr-DWL 利用环氧基光刻胶 SU-8 和 mr-DWL，通过无掩模紫外光刻技术制造热解碳插接微电极

Micro and Nano Engineering Pub Date : 2024-05-08 DOI: 10.1016/j.mne.2024.100257

Nicolai Støvring , Babak Rezaei , Arto Heiskanen , Jenny Emnéus , Stephan Sylvest Keller

{"title":"Fabrication of pyrolytic carbon interdigitated microelectrodes by maskless UV photolithography with epoxy-based photoresists SU-8 and mr-DWL","authors":"Nicolai Støvring , Babak Rezaei , Arto Heiskanen , Jenny Emnéus , Stephan Sylvest Keller","doi":"10.1016/j.mne.2024.100257","DOIUrl":"10.1016/j.mne.2024.100257","url":null,"abstract":"<div><p>Maskless UV photolithography is increasingly used, especially in research environments where low turn-around time for new designs improves productivity. Here, we fabricate pyrolytic carbon interdigitated microelectrodes with small interelectrode gaps, good adhesion to the carrier substrate, high surface area and excellent electrochemical properties using maskless UV photolithography with two negative epoxy-based photoresists, namely the commonly used SU-8 and the recently developed mr-DWL. The minimum realizable trench width in 15 μm thick photoresist films is 2.4 ± 0.15 μm for mr-DWL 5 and 3.1 ± 0.10 μm for SU-8 2035. After pyrolysis, the two resulting pyrolytic carbon materials show similar electrochemical properties. However, shrinkage during pyrolysis is significantly lower for mr-DWL compared to SU-8, which is beneficial for the fabrication of interdigitated microelectrodes. Furthermore, delamination of the electrodes during processing and operation is prevented due to the introduction of poly silicon adhesion structures. This work provides valuable insights into maskless UV lithography as well as into the pyrolytic carbon process to increase the yield, performance and productivity for fabrication of microelectrodes.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100257"},"PeriodicalIF":0.0,"publicationDate":"2024-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000200/pdfft?md5=60673ebe8420e6820b9903f3d1fe7dce&pid=1-s2.0-S2590007224000200-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141049018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Controlled wettability of biphilic patterned surfaces for enhanced atmospheric water harvesting 控制双亲图案表面的润湿性，增强大气集水能力

Micro and Nano Engineering Pub Date : 2024-04-30 DOI: 10.1016/j.mne.2024.100255

Joyce Estephan, Marie Panabière, Camille Petit-Etienne, Sebastien Labau, Léo Bon, Jean-Hervé Tortai, Cécile Gourgon

{"title":"Controlled wettability of biphilic patterned surfaces for enhanced atmospheric water harvesting","authors":"Joyce Estephan, Marie Panabière, Camille Petit-Etienne, Sebastien Labau, Léo Bon, Jean-Hervé Tortai, Cécile Gourgon","doi":"10.1016/j.mne.2024.100255","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100255","url":null,"abstract":"<div><p>Water is a vital component for all living organisms, yet persistent water scarcity remains a global challenge. One potential solution lies in replicating the atmospheric water collection mechanism observed in the Stenocara beetle, characterized by a dorsal surface featuring alternating hydrophilic and hydrophobic regions. In this study, we have designed and examined two distinct biphilic patterned surface configurations, integrating various technologies, to mimic the beetle's water collection strategy. Our investigation evaluates the efficiency of these surfaces in both capturing water from fog and condensing water from dew. For fog collection two parameters were the most impactful: the roughness and the wettability contrast between hydrophilic and hydrophobic zones. In contrast, dew condensation was influenced by additional parameters notably the patterns' size and density that directly affect the water contact angle. It is worth noting, however, that the optimal surface for fog collection may not necessarily coincide with the most effective surface for dew condensation. Furthermore, our research includes a comparative analysis between the theoretically predicted volume of water droplet departure and the empirically observed results.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100255"},"PeriodicalIF":0.0,"publicationDate":"2024-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000182/pdfft?md5=ceffce399788bdc2ff24b6d2f8ce8bee&pid=1-s2.0-S2590007224000182-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140844409","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

CVD graphene-MoS2 Van der Waals heterostructures on the millimeter-scale 毫米尺度的 CVD 石墨烯-MoS2 范德华异质结构

Micro and Nano Engineering Pub Date : 2024-04-28 DOI: 10.1016/j.mne.2024.100256

Nico Rademacher , Eros Reato , Lukas Völkel , Annika Grundmann , Michael Heuken , Holger Kalisch , Andrei Vescan , Alwin Daus , Max C. Lemme

{"title":"CVD graphene-MoS2 Van der Waals heterostructures on the millimeter-scale","authors":"Nico Rademacher , Eros Reato , Lukas Völkel , Annika Grundmann , Michael Heuken , Holger Kalisch , Andrei Vescan , Alwin Daus , Max C. Lemme","doi":"10.1016/j.mne.2024.100256","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100256","url":null,"abstract":"<div><p>This study investigates the interactions between chemical vapor-deposited graphene and metal-organic chemical vapor-deposited molybdenum disulfide (MoS<sub>2</sub>) in heterostructures assembled via wet transfer. We use Raman spectroscopy to quantitatively determine close coupling between graphene and MoS<sub>2</sub> based on the peak separations in graphene. Although annealing seems to be necessary after transfer to establish a close coupling, its parameters do not have a significant impact on the quality of coupling (for 100 °C < <em>T</em> < 400 °C and 5 min < <em>t</em> < 120 min). Furthermore, the method is robust against variations in graphene thickness because bilayers can be distinguished by comparing the full width at half maximum of the graphene 2D peak. We expand our study to mm<sup>2</sup>-scale areas of graphene-MoS<sub>2</sub> heterostructures finding that films assembled via wet-transfer technique exhibit considerable variability in terms of coupling strength. Evaluating such interactions in heterostructures on large areas is important for future practical applications in heterostructure devices.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100256"},"PeriodicalIF":0.0,"publicationDate":"2024-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000194/pdfft?md5=342c3ffee3f2291ee9ca619303288e95&pid=1-s2.0-S2590007224000194-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140824232","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Effects of the strain rate in compression of electrodeposited gold micro-pillars toward the design of MEMS components 电沉积金微柱压缩应变率对微机电系统元件设计的影响

Micro and Nano Engineering Pub Date : 2024-04-23 DOI: 10.1016/j.mne.2024.100254

Shota Kanno , Taro Omura , Jhen-Yang Wu , Tomoyuki Kurioka , Chun-Yi Chen , Parthojit Chakraborty , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone , Tso-Fu Mark Chang

{"title":"Effects of the strain rate in compression of electrodeposited gold micro-pillars toward the design of MEMS components","authors":"Shota Kanno , Taro Omura , Jhen-Yang Wu , Tomoyuki Kurioka , Chun-Yi Chen , Parthojit Chakraborty , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone , Tso-Fu Mark Chang","doi":"10.1016/j.mne.2024.100254","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100254","url":null,"abstract":"<div><p>In this study, the strain rate dependence in yield strengths of electrodeposited gold micro-pillars is evaluated for the design of movable components in MEMS devices. The micro-pillars are fabricated from electrodeposited gold by focused ion beam system. The strain rate dependence is quantified by the strain rate sensitivity, and the strain rate sensitivity is calculated from the yield strength obtained from compression tests of the gold micro-pillars having different sizes at different strain rates. An increase in the yield strength following a reduction in the pillar size is observed, which is the sample size effect. Also, weakening of the yield strength is observed following a decrease in the strain rate, which is the strain rate dependence, and the strain rate sensitivity of the gold micro-pillars is found be at roughly 0.03.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100254"},"PeriodicalIF":0.0,"publicationDate":"2024-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000170/pdfft?md5=2e1d5e856d9a5174587acc53b7d0f432&pid=1-s2.0-S2590007224000170-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140645225","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Wheatstone bridge sensor arrays in foil by robust μ-via technology combining femtosecond-laser drilling and pulsed electrodeposition 通过结合飞秒激光钻孔和脉冲电沉积的鲁棒性 μ-via 技术在箔片中形成惠斯通电桥传感器阵列

Micro and Nano Engineering Pub Date : 2024-04-20 DOI: 10.1016/j.mne.2024.100252

Maolei Zhou, Yadi Zhen, Andreas Dietzel

{"title":"Wheatstone bridge sensor arrays in foil by robust μ-via technology combining femtosecond-laser drilling and pulsed electrodeposition","authors":"Maolei Zhou, Yadi Zhen, Andreas Dietzel","doi":"10.1016/j.mne.2024.100252","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100252","url":null,"abstract":"<div><p>Flexible sensor arrays with multilevel circuits typically require complex production cycles leading to high costs and reliability issues. For establishing flexible arrays of strain sensors in Wheatstone bridge configurations structures on different levels within flexible films have to be connected by robust μ-via technology. Usually, dry etching is used to establish via-holes and direct current (DC) electrodeposition is used to fill them with copper. However, dry etching can lead to damages in the underlying electrode or incomplete removal of polymeric material, as inhomogeneities of polymeric foil thicknesses cannot completely be eliminated. This affects the quality of the plating and the reliability of the μ-via connections. It is aggravated by the fact that DC electroplated copper is often weakened by various defects, such as small voids. This article describes a reliable and less complex fabrication process for a Wheatstone bridge sandwich structure consisting of five polymer interlayers separating four metal layers. The femtosecond-laser μ-via drilling proved to be fast, material selective and therefore tolerant to inhomogeneities of polymeric foil thicknesses. Moreover, pulsed current (PC) electrodeposition significantly improved the quality of the copper filling. No voids were found using electron microscopy. Finally, the respiration monitoring sensors produced using this method were subjected to repetitive cycles of bending and relaxation. At a frequency of five cycles per second, reproducible cycles of signal changes were obtained, indicating the usefulness for detecting respiratory cycles of premature infants.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100252"},"PeriodicalIF":0.0,"publicationDate":"2024-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000157/pdfft?md5=36f574491110d65f5414a3f6e29f78e9&pid=1-s2.0-S2590007224000157-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140638400","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Mathematical modeling for predicting electrical energy harvested using piezoelectric composite materials for smart system applications 利用压电复合材料预测智能系统应用中电能采集的数学建模

Micro and Nano Engineering Pub Date : 2024-04-15 DOI: 10.1016/j.mne.2024.100253

Meryiem Derraz , Chouaib Ennawaoui , Hicham Mastouri , Youssef El Hmamssy , Nourredine Abouricha , Abdelkader Rjafallah , El Mehdi Laadissi , Abdelowahed Hajjaji

{"title":"Mathematical modeling for predicting electrical energy harvested using piezoelectric composite materials for smart system applications","authors":"Meryiem Derraz , Chouaib Ennawaoui , Hicham Mastouri , Youssef El Hmamssy , Nourredine Abouricha , Abdelkader Rjafallah , El Mehdi Laadissi , Abdelowahed Hajjaji","doi":"10.1016/j.mne.2024.100253","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100253","url":null,"abstract":"<div><p>In the contemporary quest for sustainable energy, the potential of piezoelectric energy harvesters to convert mechanical vibrations into electrical energy has become increasingly important. This study focuses on piezoelectric composites, in particular a BaTiO<sub>3</sub>/PLA (Barium Titanate/ Polylactic Acid) system with different volume percentages of BaTiO<sub>3</sub> ceramic particles (20%, 40% and 60%), with the aim of optimizing energy conversion efficiency. A mathematical model is introduced, encompassing material attributes, mechanical loading frequencies and electrical energy outputs. The central role of mathematical modeling in predicting harvested energy is highlighted, offering insights beyond experimental limitations. The model, which is functionally dependent on the properties of the ceramic and polymer, enables the systematic exploration of various compositions and the identification of optimal material ratios. Experimental validation of the model for different strains (0.4%, 0.8% and 1%) and compositions of BaTiO<sub>3</sub>/PLA reaffirms its reliability. Notably, the highest power harvest observed is around 4.5 μW under a strain of 1% with a BaTiO<sub>3</sub> composition of 60%. With these specific numerical values, this approach merges materials science and energy technology, propelling the advancement of efficient piezoelectric materials for renewable energy applications.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100253"},"PeriodicalIF":0.0,"publicationDate":"2024-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000169/pdfft?md5=260daf411a495666f7d851fc90385f87&pid=1-s2.0-S2590007224000169-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140555202","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Damascene versus subtractive line CMP process for resistive memory crossbars BEOL integration 电阻记忆横梁的大马士革与减法线 CMP 工艺 BEOL 集成

Micro and Nano Engineering Pub Date : 2024-04-12 DOI: 10.1016/j.mne.2024.100251

Raphaël Dawant , Matthieu Gaudreau , Marc-Antoine Roy , Pierre-Antoine Mouny , Matthieu Valdenaire , Pierre Gliech , Javier Arias Zapata , Malek Zegaoui , Fabien Alibart , Dominique Drouin , Serge Ecoffey

{"title":"Damascene versus subtractive line CMP process for resistive memory crossbars BEOL integration","authors":"Raphaël Dawant , Matthieu Gaudreau , Marc-Antoine Roy , Pierre-Antoine Mouny , Matthieu Valdenaire , Pierre Gliech , Javier Arias Zapata , Malek Zegaoui , Fabien Alibart , Dominique Drouin , Serge Ecoffey","doi":"10.1016/j.mne.2024.100251","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100251","url":null,"abstract":"<div><p>In recent years, resistive memories have emerged as a pivotal advancement in the realm of electronics, offering numerous advantages in terms of energy efficiency, scalability, and non-volatility [1]. Characterized by their unique resistive switching behavior, these memories are well-suited for a variety of applications, ranging from high-density data storage to neuromorphic computing [2]. Their potential is further enhanced by their compatibility with advanced semiconductor processes, enabling seamless integration into modern electronic circuits [3]. A particularly promising avenue for resistive memory lies in its integration at the Back-End-of-Line (BEOL) stage of semiconductor manufacturing [4]. BEOL integration involves processes that occur after the fabrication of the transistors, primarily focusing on creating interconnections that electrically link these transistors. Integrating resistive memories at this stage can lead to compact, efficient, and high-performance architectures, pivotal for in-memory computing applications where data storage and processing are co-located [5]. This paper studies three ways to integrate TiO<sub><em>x</em></sub>-based resistive memory into passive crossbar array structures, using chemical mechanical polishing (CMP) processes, focusing on identifying the optimal integration techniques.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100251"},"PeriodicalIF":0.0,"publicationDate":"2024-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000145/pdfft?md5=636ca20e86a04bf9828411b55d748881&pid=1-s2.0-S2590007224000145-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140558500","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Fabrication of a hybrid device for the integration of light-triggered proton pumps 制造集成光触发质子泵的混合装置

Micro and Nano Engineering Pub Date : 2024-03-29 DOI: 10.1016/j.mne.2024.100250

Jacqueline Figueiredo da Silva , Vesna Bacheva , Ute Drechsler , Philippe Nicollier , Steffen Reidt , Dimitrios Fotiadis , Armin Knoll , Heiko Wolf

{"title":"Fabrication of a hybrid device for the integration of light-triggered proton pumps","authors":"Jacqueline Figueiredo da Silva , Vesna Bacheva , Ute Drechsler , Philippe Nicollier , Steffen Reidt , Dimitrios Fotiadis , Armin Knoll , Heiko Wolf","doi":"10.1016/j.mne.2024.100250","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100250","url":null,"abstract":"<div><p>Biological ion pumps, such as bacteriorhodopsin (bR), utilize photons to move ions against concentration gradients, offering energy harvesting and spatiotemporal control of chemical gradients. This capability goes far beyond the capabilities of today's synthetic devices, suggesting a hybrid approach to embed bRs in synthetic devices in order to direct the proton flow towards useful system applications. In this study, a hybrid silicon-based nanochannel network with integrated purple membranes (PM) containing bR was fabricated. The fabrication method combines thermal scanning probe lithography, etching techniques, atomic layer deposition, plasma-enhanced chemical vapor deposition, and photolithography to create devices with buried nanochannels on silicon substrates. PM patches were deposited onto specified sites by a tunable nanofluidic confinement apparatus. The resulting device holds the potential for locally controlling directed ion transport in micrometer scale devices, a first step towards applications, such as locally affected proton catalyzed chemical reaction networks. Furthermore, this fabrication strategy, employing a maskless overlay, is a tool for constructing intricate nanofluidic network designs which are mechanically robust and straightforward to fabricate.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100250"},"PeriodicalIF":0.0,"publicationDate":"2024-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000133/pdfft?md5=907b0512bf199bb1eefa3b01cb6f097e&pid=1-s2.0-S2590007224000133-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140347770","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Dependence of Structural Design on Effective Young's Modulus of Ti/Au Multi-layered Micro-cantilevers 结构设计对钛/金多层微悬臂有效杨氏模量的影响

Micro and Nano Engineering Pub Date : 2024-03-29 DOI: 10.1016/j.mne.2024.100249

Shunkai Watanabe , Tomoyuki Kurioka , Chun-Yi Chen , Tso-Fu Mark Chang , Akira Onishi , Parthojit Chakraborty , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone

{"title":"Dependence of Structural Design on Effective Young's Modulus of Ti/Au Multi-layered Micro-cantilevers","authors":"Shunkai Watanabe , Tomoyuki Kurioka , Chun-Yi Chen , Tso-Fu Mark Chang , Akira Onishi , Parthojit Chakraborty , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone","doi":"10.1016/j.mne.2024.100249","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100249","url":null,"abstract":"<div><p>Gold-based micro-electro-mechanical-systems (Au-MEMS) capacitive accelerometers can simultaneously realize high sensitivity and miniaturization because of the high mass density of Au. In order to further improve the sensitivity of the Au-MEMS capacitive accelerometers, Young's modulus of the cantilever-like spring part connected to the movable component is a key parameter. Considering the size effect in the mechanical property of metallic materials on micro-scale, the design of the spring part is expected to reflect their Young's modulus; that is, effective Young's modulus (<em>E</em><sub>eff</sub>). In this study, we clarify effects of the structural designs of the Au-based micro-cantilevers on their <em>E</em><sub>eff</sub> by experiments and finite element analyses (FEA) simulations. The <em>E</em><sub>eff</sub> of the Au micro-cantilevers having Ti/Au multi-layered structures is evaluated by resonance frequency method, which demonstrates the key structural parameters affecting their <em>E</em><sub>eff</sub>. The FEA calculations show a consistent trend with that observed in the experimental results.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100249"},"PeriodicalIF":0.0,"publicationDate":"2024-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000121/pdfft?md5=9023396f9b43780109efb15a52677e42&pid=1-s2.0-S2590007224000121-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140342104","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0