{"title":"电沉积金微柱压缩应变率对微机电系统元件设计的影响","authors":"Shota Kanno , Taro Omura , Jhen-Yang Wu , Tomoyuki Kurioka , Chun-Yi Chen , Parthojit Chakraborty , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone , Tso-Fu Mark Chang","doi":"10.1016/j.mne.2024.100254","DOIUrl":null,"url":null,"abstract":"<div><p>In this study, the strain rate dependence in yield strengths of electrodeposited gold micro-pillars is evaluated for the design of movable components in MEMS devices. The micro-pillars are fabricated from electrodeposited gold by focused ion beam system. The strain rate dependence is quantified by the strain rate sensitivity, and the strain rate sensitivity is calculated from the yield strength obtained from compression tests of the gold micro-pillars having different sizes at different strain rates. An increase in the yield strength following a reduction in the pillar size is observed, which is the sample size effect. Also, weakening of the yield strength is observed following a decrease in the strain rate, which is the strain rate dependence, and the strain rate sensitivity of the gold micro-pillars is found be at roughly 0.03.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100254"},"PeriodicalIF":2.8000,"publicationDate":"2024-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000170/pdfft?md5=2e1d5e856d9a5174587acc53b7d0f432&pid=1-s2.0-S2590007224000170-main.pdf","citationCount":"0","resultStr":"{\"title\":\"Effects of the strain rate in compression of electrodeposited gold micro-pillars toward the design of MEMS components\",\"authors\":\"Shota Kanno , Taro Omura , Jhen-Yang Wu , Tomoyuki Kurioka , Chun-Yi Chen , Parthojit Chakraborty , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone , Tso-Fu Mark Chang\",\"doi\":\"10.1016/j.mne.2024.100254\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>In this study, the strain rate dependence in yield strengths of electrodeposited gold micro-pillars is evaluated for the design of movable components in MEMS devices. The micro-pillars are fabricated from electrodeposited gold by focused ion beam system. The strain rate dependence is quantified by the strain rate sensitivity, and the strain rate sensitivity is calculated from the yield strength obtained from compression tests of the gold micro-pillars having different sizes at different strain rates. An increase in the yield strength following a reduction in the pillar size is observed, which is the sample size effect. Also, weakening of the yield strength is observed following a decrease in the strain rate, which is the strain rate dependence, and the strain rate sensitivity of the gold micro-pillars is found be at roughly 0.03.</p></div>\",\"PeriodicalId\":37111,\"journal\":{\"name\":\"Micro and Nano Engineering\",\"volume\":\"23 \",\"pages\":\"Article 100254\"},\"PeriodicalIF\":2.8000,\"publicationDate\":\"2024-04-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.sciencedirect.com/science/article/pii/S2590007224000170/pdfft?md5=2e1d5e856d9a5174587acc53b7d0f432&pid=1-s2.0-S2590007224000170-main.pdf\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micro and Nano Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S2590007224000170\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro and Nano Engineering","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2590007224000170","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Effects of the strain rate in compression of electrodeposited gold micro-pillars toward the design of MEMS components
In this study, the strain rate dependence in yield strengths of electrodeposited gold micro-pillars is evaluated for the design of movable components in MEMS devices. The micro-pillars are fabricated from electrodeposited gold by focused ion beam system. The strain rate dependence is quantified by the strain rate sensitivity, and the strain rate sensitivity is calculated from the yield strength obtained from compression tests of the gold micro-pillars having different sizes at different strain rates. An increase in the yield strength following a reduction in the pillar size is observed, which is the sample size effect. Also, weakening of the yield strength is observed following a decrease in the strain rate, which is the strain rate dependence, and the strain rate sensitivity of the gold micro-pillars is found be at roughly 0.03.
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