Micro and Nano Engineering最新文献

{"title":"Ni-P metallization of nylon 6,6 yarns with varying twist numbers by supercritical CO2 catalyzation toward weavable devices","authors":"Kazuhiro Shibata ,&nbsp;Tomoyuki Kurioka ,&nbsp;Hikaru Kondo ,&nbsp;Nao Yoshida ,&nbsp;Wan-Ting Chiu ,&nbsp;Chun-Yi Chen ,&nbsp;Tso-Fu Mark Chang ,&nbsp;Hiromichi Kurosu ,&nbsp;Masato Sone","doi":"10.1016/j.mne.2025.100304","DOIUrl":"10.1016/j.mne.2025.100304","url":null,"abstract":"<div><div>Weavable devices are innovative fabric-based electronics created by weaving yarns with various functions into a single cloth, enabling multifunctionality beyond traditional wearable devices. Electrically conductive yarns are essential for this integration, and in practical applications, yarns are prepared with varying twist numbers. This study investigates the metallization of nylon 6,6 yarns using a supercritical CO₂-assisted Ni<img>P electroless plating method and examines the influence of twist numbers on metallization characteristics. The results show that increasing the twist number significantly decreases the electrical resistance of Ni-P/nylon 6,6 composite yarns, underscoring the critical role of yarn structure in electrical conductivity. Energy-dispersive X-ray spectroscopy (EDS) analysis indicates that higher twist numbers (0 T/m to 865 T/m) improve the distribution of Pd catalysts on scCO₂-catalyzed nylon 6,6 yarns. Additionally, scanning electron microscope (SEM) observations and EDS analysis show that increasing the twist number leads to thicker and more uniform Ni<img>P coatings, thereby improving the electrical performance. Overall, this study demonstrates that optimizing twist number is key to improving the metallization quality and electrical properties of nylon 6,6 yarns for advanced weavable electronic applications.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"28 ","pages":"Article 100304"},"PeriodicalIF":2.8,"publicationDate":"2025-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144322776","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Real time analysis of cancer ovarian cell growth and migration on soft surfaces","authors":"Maria Laura Coluccio ,&nbsp;Luigi Bruno ,&nbsp;Cristina Laurini ,&nbsp;Francesca Gualtieri ,&nbsp;Valentina Rocca ,&nbsp;Tahreem Arshad Butt ,&nbsp;Annamaria Cerantonio ,&nbsp;Anna Martina Battaglia ,&nbsp;Giuseppe Viglietto ,&nbsp;Carmela De Marco ,&nbsp;Francesco Gentile","doi":"10.1016/j.mne.2025.100303","DOIUrl":"10.1016/j.mne.2025.100303","url":null,"abstract":"<div><div>It is well established that the nano-geometry and mechanical properties of a material's interface can significantly influence - and potentially enhance - cell adhesion, growth, proliferation, and migration, collectively referred to as cell behavior. At the same time, these behavioral responses are inherently dependent on the cell's own biological characteristics, including its type, age, cell cycle phase, and whether it is normal or cancerous - as well as, in the latter case, the stage of cancer. In this context, we hypothesize that these material and cellular factors may act synergistically, such that carefully engineered materials can modulate and amplify cellular responses. Specifically, such materials may function as amplifiers, accentuating the behavioral differences between distinct cell lines and thereby improving our ability to distinguish between them. Here, we used this concept to segregate OVCAR-429 ovarian cancer cells silenced for the EXT1 gene (shEXT1) from a control (SCR): i.e. cells infected with an empty lentivirus. EXT1 encodes a glycosyltransferase implicated in the synthesis of heparan sulfate proteoglycans and may play a role in cancer cell invasion and metastasis. We produced polydimethylsiloxane (PDMS) substrates with low values of Young's modulus in the MPa range, and moderate values of roughness of about <span><math><mn>20</mn><mspace></mspace><mi>nm</mi></math></span>. Then, we monitored cell-behavior over time on PDMS substrates and on standard rigid microplates for comparison. Analysis of cell trajectories revealed that shEXT1 cells exhibited significantly reduced motility on PDMS surfaces compared control cells, with cell velocity and diffusivity reduced by more than twofold, whereas no significant differences were observed on standard surfaces. Our results thus indicate the potential of soft biomaterials to reveal biological differences in disease models.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"28 ","pages":"Article 100303"},"PeriodicalIF":2.8,"publicationDate":"2025-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144312573","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Influence of DMSO/DMF ratio on the crystal growth and optical properties of Sn-based perovskite films","authors":"Hideto Tokizawa ,&nbsp;Xinwei Zhao ,&nbsp;Mariko Murayama","doi":"10.1016/j.mne.2025.100302","DOIUrl":"10.1016/j.mne.2025.100302","url":null,"abstract":"<div><div>Perovskite solar cells (PSCs) are promising candidates for next-generation photovoltaic technology because of their high power conversion efficiency (PCE) and low production cost. However, the presence of lead in most PSCs raises concerns about their environmental impact. Tin (Sn)-based PSCs offer a less toxic alternative, but their performance still lags behind lead (Pb)-based counterparts. This study investigates the impact of solvent composition and annealing temperature on the crystal growth and optoelectronic properties of Sn-based perovskite (MA_0.2FA_0.8SnI₃) thin films. By varying the ratio of dimethyl sulfoxide (DMSO) and <em>N</em>,<em>N</em>-dimethylformamide (DMF) in the precursor solution, we systematically controlled the crystallization process, guided by the LaMer model. X-ray diffraction (XRD) and microscopy analyses revealed that solvent ratio and annealing temperature significantly influence the crystallinity and morphology of the films. High DMSO ratios promoted larger crystal formation, while high DMF ratios induced smaller crystals. Optical characterization revealed a correlation between film morphology and band gap, with deviations from the theoretical value attributed to voids and incomplete surface coverage. Our findings demonstrate the critical role of solvent engineering in optimizing the quality of tin-based perovskite films for enhanced solar cell performance.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"28 ","pages":"Article 100302"},"PeriodicalIF":2.8,"publicationDate":"2025-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144272353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Energy dissipation in silicon nitride microbeam resonators with a 3D-printed polymer layer","authors":"Lucia Crocetto ,&nbsp;Tomás Manzaneque ,&nbsp;Murali Krishna Ghatkesar","doi":"10.1016/j.mne.2025.100300","DOIUrl":"10.1016/j.mne.2025.100300","url":null,"abstract":"<div><div>We present an analysis of the main mechanisms of dissipation of resonant multilayer double-clamped microbeams in the frequency range 200 to 500 kHz. The devices consist of <span><math><mn>2</mn><mspace></mspace><mi>μm</mi></math></span> thick silicon nitride (E <span><math><mo>≈</mo></math></span> 160 GPa) beams covered with a polymer IP-Dip (E <span><math><mo>≈</mo></math></span> 4 GPa) layer fabricated by two-photon polymerization. A laser-Doppler vibrometer was used to measure the resonant vibrations and energy dissipation of the devices in high vacuum (&lt; 0.05 Pa) at room temperature. The experimental findings were compared with theoretical and finite element method (FEM) results. The quality factor, dominated by the intrinsic dissipation in the IP-Dip layer, has proven to have a strong dependence on polymer thickness. On this basis, a viscous model for intrinsic dissipation in a polymer layer was formulated.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"28 ","pages":"Article 100300"},"PeriodicalIF":2.8,"publicationDate":"2025-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144262766","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Stereolithography 3D printing method for multi-material hydrogel 2D photo-patterning in a microfluidic chip","authors":"S. Assie-Souleille,&nbsp;L. Seguier,&nbsp;D. Gauchard,&nbsp;I. Drobecq,&nbsp;B. Franc,&nbsp;L. Malaquin,&nbsp;J. Foncy","doi":"10.1016/j.mne.2025.100301","DOIUrl":"10.1016/j.mne.2025.100301","url":null,"abstract":"<div><div>We present a novel and straightforward method using a standard stereolithography (SLA) 3D printer for high-resolution (20 μm x-y resolution), multi-material 2D hydrogel photo-patterning directly within a microfluidic chip. The process involves sequential injections of photosensitive hydrogel into a transparent microfluidic chip coupled with sequential direct laser writing by the printer through point-by-point photopolymerization. Our approach integrates a custom miniaturized syringe pump system into the SLA printer, thereby enabling fluid management and sequential injection of different photosensitive hydrogels directly into the microfluidic environment between each laser writing sequence. This technique enables the fabrication of intricate, multi-material hydrogel patterns (e.g., PEGDA and HAMA) with high spatial resolution over areas spanning several square millimeters. Future developments will focus on expanding the range of biomaterials and incorporating cell-laden hydrogels to facilitate the creation of biologically relevant microenvironments on chip.</div><div>This study opens new possibilities for high-resolution, multi-material hydrogel patterning in microfluidics and offers a valuable platform for advancing research in microsystems engineering.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"27 ","pages":"Article 100301"},"PeriodicalIF":2.8,"publicationDate":"2025-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144204270","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Assessing ultrasonic and optical flow velocimetry in a millifluidic device using oil-in-water emulsions as blood mimicking fluid","authors":"Estelle Lu ,&nbsp;Williams Flores Cisternas ,&nbsp;Héloïse Uhl ,&nbsp;Alexandre Chargueraud ,&nbsp;Quentin Grimal ,&nbsp;Guillaume Renaud ,&nbsp;Jean-Gabriel Minonzio ,&nbsp;Jacques Fattaccioli","doi":"10.1016/j.mne.2025.100298","DOIUrl":"10.1016/j.mne.2025.100298","url":null,"abstract":"<div><div>Blood-mimicking fluids (BMFs) play a critical role in ultrasonic imaging and Doppler flow studies by replicating the physical and acoustic properties of blood. This study introduces a novel soybean oil-in-water emulsion as a BMF with particle size akin to red blood cells. Using a millifluidic device, we cross-validated flow profiles through both Doppler velocimetry and optical particle tracking, demonstrating compatibility with theoretical Poiseuille flow models. The millifluidic chip, fabricated via stereolithography, provided an optimized platform for dual optical and ultrasonic assessments. Results showed strong agreement between the two methods across a range of flow rates, affirming the suitability of the emulsion for velocimetry applications. Furthermore, the acoustic properties of soybean oil droplets support their potential as an echogenic and stable alternative to conventional BMFs.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"27 ","pages":"Article 100298"},"PeriodicalIF":2.8,"publicationDate":"2025-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143942364","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Near-collector electroprinting of cellulose acetate structures with large specific surface per volume","authors":"Farnaz Rezaei ,&nbsp;Daniel O. Carlsson ,&nbsp;Jimmy Hedin Dahlstrom ,&nbsp;Jonas Lindh ,&nbsp;Stefan Johansson","doi":"10.1016/j.mne.2025.100299","DOIUrl":"10.1016/j.mne.2025.100299","url":null,"abstract":"<div><div>This study focuses on the fabrication and analysis of 3D-printed high-detail resolution cellulose acetate (CA) structures, particularly examining their specific surface area per volume <span><math><mfenced><msub><mi>S</mi><mi>v</mi></msub></mfenced></math></span>. While electrospinning is a widely used technique for creating nanofiber membranes with high <span><math><msub><mi>S</mi><mi>v</mi></msub></math></span>, which is advantageous for applications like chromatography, the performance could be further improved by precisely controlling fiber placement. To further develop membranes, this research explores the use of electroprinting with small distances between nozzle and collector, here named near-collector electroprinting, to create 3D structures. By optimizing printing parameters, in particular the reduction of the nozzle-to-collector distance, 3D structures with precise fiber placement within a few micrometers were fabricated. The specific surface area per volume was calculated for both 3D-printed and electrospun filters. Results showed that 3D-printed structures with a 5 μm pitch achieved a <span><math><msub><mi>S</mi><mi>v</mi></msub></math></span> similar to electrospun filters.</div><div>Incorporating polyethyleneimine (PEI) in the CA ink enabled the 3D-printed structures to gain ion binding capacity which was further investigated. This ion-exchange ability which integrated into the printing step, eliminating the need for a separate post-modification process in bio-separation applications. By switching the substrate voltage from positive to negative, relative to the grounded nozzle, the printed fiber diameter decreased substantially for the CA ink with PEI. The <span><math><msub><mi>S</mi><mi>v</mi></msub></math></span> for near-collector electroprinted fibers of this material could therefore potentially be higher than that of electrospun membranes, provided that an order of magnitude higher printing speed, than presently possible can be used. These findings suggest that near-collector electroprinted CA structures offer potential improvements in membrane design and performance, making them a promising alternative to traditional electrospun membranes for bio-separation applications.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"27 ","pages":"Article 100299"},"PeriodicalIF":2.8,"publicationDate":"2025-05-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143936336","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Ultrasonic power and data transfer for active medical implants using adaptive beamforming","authors":"Tianhui Li ,&nbsp;James A. Flint ,&nbsp;Hailing Fu ,&nbsp;Sotiris Korossis ,&nbsp;Stephanos Theodossiades","doi":"10.1016/j.mne.2025.100296","DOIUrl":"10.1016/j.mne.2025.100296","url":null,"abstract":"<div><div>Wireless power transfer provides a sustainable power source for active medical implants. Recent developments in biosensors, MEMS technologies and the advent of ubiquitous computing has opened up the potential for a millimeter-sized active medical implant for continuous health monitoring. Frequent wireless communication and data processing requires more energy than traditional active medical implants. Therefore, a continuous power source is needed. This study investigated the development of an ultrasonic power transfer (USPT) system for active medical implants. The system, comprised of a wearable and an implantable device, can transfer both power and data between the implant and the wearable. By implementing beamforming, it can adapt to misalignment between the transmitter and the receiver. In the experiments, the receiver outputs 0.16 mW after rectification, when transmitting through 0.5 cm of water. By measuring the time-of-flight (ToF) of a pulse transmitted from the receiver, implant position feedback is achieved. Data transfer is demonstrated at a rate of 1 kbit/s, across a 4 cm path in water, which is adequate for many biomedical applications.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"27 ","pages":"Article 100296"},"PeriodicalIF":2.8,"publicationDate":"2025-04-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143924689","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Regional proximity effect correction for replicating 28 nm lines/spaces in HSQ as dielectric diffraction gratings with high aspect ratio","authors":"Qingxin Wu ,&nbsp;Wentao Yuan ,&nbsp;Qiucheng Chen ,&nbsp;Hao Quan ,&nbsp;Yifang Chen","doi":"10.1016/j.mne.2025.100295","DOIUrl":"10.1016/j.mne.2025.100295","url":null,"abstract":"<div><div>With the rapid advances of extreme ultraviolet (EUV) lithography toward ultra-high resolution, characterization technique of EUV resists by interference lithography (IL) for 14-nm node process needs urgent upgrading because of the considerable loss of light transmission by metallic grating masks. Diffraction phase gratings in dielectric silicon dioxide as masks are a promising solution, provided that 28 nm lines/spaces with high aspect ratio as well as large grating areas are obtained. This paper reports our recent success in replicating 28 nm half-pitch gratings with the aspect ratio of 13:1 and the area up to 200 × 200 μm² by state-of-the-art electron beam lithography with regional proximity effect correction (PEC) in hydrogen silsesquioxane (HSQ) coated on a 100 nm silicon nitride membrane. To ensure well resolved lines/spaces in 350 nm thick HSQ, Monte Carlo algorithm is applied in the simulations of 3D absorbing electron energy density distributions, followed by calculations of equal energy contours of deposited energy based on the kinetic development model, which enables us to work out reliable dose windows. The process developed in this work should be feasibly extended to large area gratings in a future industrialization.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"26 ","pages":"Article 100295"},"PeriodicalIF":2.8,"publicationDate":"2025-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143739189","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Corrigendum to “Understanding dose correction for high-resolution 50 kV electron-beam lithography on thick resist layers” [Micro and Nano Engineering Volume 16, August 2022, 100141]","authors":"Mattias Åstrand,&nbsp;Thomas Frisk,&nbsp;Hanna Ohlin,&nbsp;Ulrich Vogt","doi":"10.1016/j.mne.2025.100297","DOIUrl":"10.1016/j.mne.2025.100297","url":null,"abstract":"","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"26 ","pages":"Article 100297"},"PeriodicalIF":2.8,"publicationDate":"2025-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143941511","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}