Micro and Nano Engineering最新文献

{"title":"Design and feasibility of strain FET based on TMD heterostructure","authors":"Nigama Vajjula,&nbsp;Fitunerediate G. Gebeyehu,&nbsp;Youngsang Ko,&nbsp;Yeonwoong Jung,&nbsp;Ethan C. Ahn","doi":"10.1016/j.mne.2026.100395","DOIUrl":"10.1016/j.mne.2026.100395","url":null,"abstract":"<div><div>Electrostrictive materials and devices have been widely explored for information processing and storage devices. Electrostrictive field-effect transistor (E-FET) is an emerging steep-slope device concept which could allow low-power logic operations. However, E-FET has not been experimentally demonstrated yet, largely due to a gap in fundamental knowledge of constituent materials that meet the device requirements. Here we propose to adopt 2D materials as a backbone of E-FET that consists of a piezoelectric TMD (transition metal dichalcogenide) monolayer interfaced with another TMD channel layer. By performing literature-benchmarked finite-element simulations on various TMD heterostructures, including the flagship material stack of MoS₂/PtSe₂, we show that the application of a nominal gate voltage to the piezoelectric 2D layer can induce compressive stress as high as 10⁷ N/m² on the adjacent 2D channel layer. C-AFM (conductive atomic force microscopy) is also carried out to experimentally prove that this stress can cause reversible modulation of conductance for the 2D channel layer (PtSe₂). From the phase diagram analysis that simulates both the stress and electric potential distributions inside the piezoelectric 2D layer, the stress is found to be the largest at the interface with the 2D channel layer. A scaling study is also conducted by varying the thickness of both 2D layers to ultimately guide experimental researchers through the design and manufacturing of strain FETs based on 2D materials.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"32 ","pages":"Article 100395"},"PeriodicalIF":4.6,"publicationDate":"2026-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148934440","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Tailorable liquid metal composite inks: Formulations, properties, and applications","authors":"Xueheng Zheng ,&nbsp;Shuting Liang ,&nbsp;FengJiao Li ,&nbsp;Dabo Jiang ,&nbsp;JunHeng Fu ,&nbsp;Liang Hu ,&nbsp;Qingshan Lin ,&nbsp;Yuanzhe Tang","doi":"10.1016/j.mne.2026.100361","DOIUrl":"10.1016/j.mne.2026.100361","url":null,"abstract":"<div><div>Advanced liquid metal (LM) inks, which combine the metallic properties with processability, are revolutionizing flexible electronics, bio-integrated devices, and intelligent sensing. However, single-component LM inks often fall short of the demands imposed by modern 3D/4D printing technologies, making the development of high-performance LM composite inks increasingly important. To systematically survey the characteristics and recent progress of emerging LM inks, this review provides a comprehensive overview of their formulation and preparation—spanning ink design, performance tuning, and functional applications. We categorize inks modified with polymers, metals, inorganic materials, and gels, detailing how these composites enhance key properties (e.g, rheology, viscosity: 10⁻¹–10³ Pa·s, sheet resistance: 0.01–10 Ω/sq, printability). Furthermore, the application efficiency of composites in stretchable sensors, skin bioelectronics, and reconfigurable circuits is discussed. The structure-activity relationship of over 28 kinds of LM ink formulations was systematically evaluated, and the core challenges along with future research directions in this field are outlined.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"31 ","pages":"Article 100361"},"PeriodicalIF":3.1,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148184693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Easy fabrication of flat, functional coverslips with electrodes for micro- and nanofluidic lab-on-a-chip devices","authors":"Rukan Nasri ,&nbsp;Herbert Atrian-Garcia ,&nbsp;Christian Einsiedler ,&nbsp;Franziska Esmek ,&nbsp;Paul Stützle ,&nbsp;Irene Fernandez-Cuesta","doi":"10.1016/j.mne.2026.100362","DOIUrl":"10.1016/j.mne.2026.100362","url":null,"abstract":"<div><div>Microfluidic devices with integrated electrodes are crucial for analytical applications, provided that they are leakage-free and manufactured using a simple, scalable fabrication method.</div><div>This work presents a fast and potentially scalable process for embedding pre-patterned gold electrodes at the micro- and nanoscale into a polymer coverslip, enabling their integration into micro- and nanofluidic devices without leakage. The fabrication is based on drop casting a UV-curable polymer (Ormostamp) onto a substrate with pre-patterned gold structures. After curing and peel-off, a flat, and close to step-free surface is achieved, embedding the metal structures seamlessly into the coverslip.</div><div>We demonstrate the process for various electrode and arbitrary shape geometries with lengths up to 3 cm and minimum metal feature sizes down to 70 nm (lateral width). Surface roughness measurements show an average roughness of 2.97 ± 1.39 nm for the gold electrodes and 3.18 ± 0.92 nm for the surrounding Ormostamp polymer, with a step height difference of only 1–2 nm, enabling tight bonding to fluidic microchannels.</div><div>Coverslip functionality was validated using rhodamine-dyed water and isopropanol, demonstrating sealed microchannels without observed leakage, tested up to 200 mbar pressure during operation. Additionally, electrical measurements of liquids directly pipetted on coverslips with electrodes as well as confined in PDMS cuvettes and flowing in a fluidic device sealed with the coverslips revealed a significant difference in conductivity comparing NaCl solution to DI water, confirming that the functionality of the embedded electrodes is preserved after the fabrication process.</div><div>These results underline the suitability of the presented fabrication method for integrating metallic microstructures into fluidic chips, with potential applications in electrochemistry, catalysis, lab-on-a-chip devices and optofluidics.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"31 ","pages":"Article 100362"},"PeriodicalIF":3.1,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148184696","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Developing photo-catalytic mechanical polishing fluid for the chemical-mechanical polishing process of single-crystal silicon carbide","authors":"Hong-Hui Lian,&nbsp;Kai-Jung Chen,&nbsp;Ming-Yi Tsai","doi":"10.1016/j.mne.2025.100346","DOIUrl":"10.1016/j.mne.2025.100346","url":null,"abstract":"<div><div>Silicon carbide (SiC) is not only notoriously difficult to finish by chemical mechanical polishing (CMP) owing to its ultrahigh hardness and chemical inertness, but it has also become the material of choice for a new generation of harsh-environment sensors—including deep-UV photodiodes, piezoresistive pressure chips for turbine combustors, and micro-resonant chemical detectors—whose responsivity, quality factor, and long-term drift are exceedingly sensitive to sub-surface damage and nanoscale surface roughness. Consequently, elevating SiC-CMP surface quality and throughput is pivotal for manufacturing low-noise, reliable sensor dies at competitive cost. This research, therefore, explores the integration of a mixed-abrasive slurry (MAS) endowed with photocatalytic activity into the SiC-CMP process to realize a high-efficiency, cost-effective, and environmentally friendlier finishing route. The study details MAS preparation via high-energy ball milling and evaluates the polishing effectiveness of two distinct formulations. Using an MAS composed of SiO₂ and TiO₂/rGO abrasives, we achieve a material-removal rate of 823 nm/h and a surface roughness of 0.350 nm under UV irradiation, demonstrating the slurry's suitability for fabricating sensor-grade SiC surfaces.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"30 ","pages":"Article 100346"},"PeriodicalIF":3.1,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145798573","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Integrated UV/IR-cut optical filter with nanoimprinted pyramid diffuser featuring tailored light diffusion and hydrophobicity","authors":"Chih-Han Wu ,&nbsp;Chao-Te Lee ,&nbsp;Chi-Sheng Chung ,&nbsp;Shao-Jen Yeh ,&nbsp;Tzu-Yu Chiu ,&nbsp;Chun-Hung Lin","doi":"10.1016/j.mne.2025.100340","DOIUrl":"10.1016/j.mne.2025.100340","url":null,"abstract":"<div><div>This study presents the design, fabrication, and characterization of a UV/IR cut optical filter integrated with a surface diffuser featuring nanoimprinted pyramid structures, aimed at achieving uniform light distribution and minimizing angular sensitivity in optical systems. The key innovation lies in the nanoimprinted pyramid diffuser, which addresses the critical limitation of angular sensitivity inherent in interference-based multilayer filters. The nanoimprinted diffuser introduces deterministic scattering properties that ensure uniform light distribution, reduce angular sensitivity, and provide stable optical performance. The multilayer filter, composed of alternating SiO₂ and TiO₂ layers, was deposited using magnetron sputtering with carefully optimized parameters to achieve high transmittance in the visible range (400–700 nm) while effectively blocking ultraviolet (200–400 nm) and near-infrared (700–1100 nm) wavelengths. The final structure consisted of 29 layers, and the measured optical performance closely matched theoretical simulations. To enhance uniform light distribution and reduce the inherent angle dependence of interference-based filters, a surface diffuser was fabricated using nanoimprint lithography, replicating randomly arranged pyramid structures etched into silicon via anisotropic KOH wet etching. By varying etch times, diffuser structures with different scattering profiles were obtained, with the 6-min etched sample exhibiting the highest haze value (92.38 %) and the strongest diffusion capability. Additionally, surface modification with F₁₃-TCS rendered the diffusers hydrophobic, with contact angles reaching a maximum of 124°, enhancing durability and self-cleaning capability. This refined approach offers a robust solution for improving optical system performance across various applications.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"30 ","pages":"Article 100340"},"PeriodicalIF":3.1,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145693209","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Corrigendum to Harnessing microarray projection patch technology for targeted agri-ceutical delivery, Micro & Nano Engineering volume 30 (2026) Article Number 100352","authors":"Tashi Dhendrup ,&nbsp;Likitha Rajashekhara ,&nbsp;Masood Ali ,&nbsp;Yousuf Mohammed","doi":"10.1016/j.mne.2026.100356","DOIUrl":"10.1016/j.mne.2026.100356","url":null,"abstract":"","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"30 ","pages":"Article 100356"},"PeriodicalIF":3.1,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147395852","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Harnessing microarray projection patch technology for targeted agri-ceutical delivery","authors":"Tashi Dhendrup ,&nbsp;Likitha Rajashekhara ,&nbsp;Masood Ali ,&nbsp;Yousuf Mohammed","doi":"10.1016/j.mne.2026.100352","DOIUrl":"10.1016/j.mne.2026.100352","url":null,"abstract":"<div><div>The precise delivery of agrochemicals with minimal environmental impact remains a major challenge in modern agriculture. Microarray Projection Patches (MAPs), inspired by their success in biomedical drug delivery, are emerging as a promising technology for the targeted administration of agri-ceuticals into specific plant tissues. This review provides a concise overview of the evolution of MAPs from transdermal therapeutic platforms to innovative agricultural tools. Various MAP formats, including solid, coated, hollow, hydrogel-forming, and dissolving systems, are discussed in the context of their adaptation for plant applications. Key focus areas include materials selection, fabrication techniques (e.g., micromilling, photolithography), and the physicochemical mechanisms governing delivery into vascular structures such as the xylem and phloem. Recent advances in microfabrication have enabled the development of customisable, cost-effective MAPs as <strong>resource-efficient agri-materials</strong>, with the potential to improve uptake efficiency, reduce agrochemical waste, and enhance plant health. The review also highlights how these systems contribute to <strong>precision agriculture</strong> by enabling localised, controlled dosing at the tissue level. Additionally, we examine the comparative environmental footprint of MAP-mediated delivery versus conventional spraying methods and present a preliminary economic perspective on scalability and implementation. By promoting efficient and localised agrochemical application, MAPs offer a transformative approach to boost crop resilience and productivity, with potential implications for sustainable food production and global food security.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"30 ","pages":"Article 100352"},"PeriodicalIF":3.1,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147395854","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Gold nanostructures: A way for their assembling on flexible devices","authors":"Cristina Laurini ,&nbsp;Francesca Cutuli ,&nbsp;Paola Cuzzola ,&nbsp;Valentina Mollo ,&nbsp;Edmondo Battista ,&nbsp;Martina Paraggio ,&nbsp;Luigi Bruno ,&nbsp;Francesco Gentile ,&nbsp;Maria Laura Coluccio","doi":"10.1016/j.mne.2025.100348","DOIUrl":"10.1016/j.mne.2025.100348","url":null,"abstract":"<div><div>This study presents the development of a gold nanoparticle island substrate deposited on a polydimethylsiloxane (PDMS) disk. Metal nanoparticles are known for their strong electromagnetic response when illuminated by incident light. In Raman analysis, this phenomenon leads to a significant signal enhancement from molecules adsorbed on the nanoparticles, known as the Surface-Enhanced Raman Scattering (SERS) effect. In medical applications, this enables the detection of biomarkers in complex biological fluids, such as blood or saliva. In recent years, metallic nanoparticles assembled on silicon substrates have been successfully used for spectroscopic analysis, achieving high sensitivity in detecting trace biomolecules in biological mixtures. However, while these rigid devices offer excellent sensor performance, their lack of flexibility makes them unsuitable for direct application to biological samples, which are inherently soft. Here, we demonstrate a flexible PDMS-based plasmonic device. The fabrication process involves a two-step chemical deposition on a pre-patterned PDMS disk to create gold nanoparticle islands. Using a polymeric soft material instead of a semiconductor offers several advantages, including flexibility, transparency, good mechanical properties, and cost-effectiveness. Most importantly, a soft material can conform to biological tissues, enabling direct, on-site applications. The resulting soft device exhibits promising performance, not only for Raman analysis but also as a versatile platform for soft, metal-decorated materials with potential applications in biosensing and flexible electronics.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"30 ","pages":"Article 100348"},"PeriodicalIF":3.1,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145939353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Accessible, high-resolution LCD lithography for microelectrode fabrication: Application to inkjet-printed PEDOT:PSS temperature sensors","authors":"Michael Georgas,&nbsp;Georgios Mitrousis,&nbsp;Filippos Farmakis","doi":"10.1016/j.mne.2025.100349","DOIUrl":"10.1016/j.mne.2025.100349","url":null,"abstract":"<div><div>In this work we present a cost-effective, accessible method for fabricating high-resolution patterns such as interdigitated electrodes (IDEs) using a consumer-grade Liquid Crystal Display resin (LCD) printer as an alternative to traditional photolithography. By leveraging the native 17 μm pixel high resolution of the printer's monochrome LCD and its UV source, we achieved consistent electrode structures with feature sizes down to 17 μm, without necessitating photomasks or specialized equipment. As a proof-of-concept, IDEs patterned with this method were deposited with aluminum via Direct Current (DC) magnetron sputtering and used as the base for inkjet-printed PEDOT:PSS films, creating temperature sensors optimized for monitoring human body temperature. The sensors were tested over a narrow, physiologically relevant range (36–42 °C), and exhibited a strong, voltage-tunable temperature response. Across all tested bias levels, the devices showed a clear, linear decrease in resistance with increasing temperature, with absolute temperature coefficient of resistance (TCR) values reaching as high as <span><math><mn>159.6</mn><mo>∗</mo><msup><mn>10</mn><mrow><mo>−</mo><mn>3</mn><mo>°</mo></mrow></msup><msup><mi>C</mi><mrow><mo>−</mo><mn>1</mn></mrow></msup></math></span>. This performance exceeds values typically reported in literature for similar printed sensors. Overall, this approach offers a flexible, scalable, and affordable alternative to photolithography, with an emphasis on inkjet-printed temperature sensors suitable for wearable and biomedical applications.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"30 ","pages":"Article 100349"},"PeriodicalIF":3.1,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145939351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A MEMSTENNA relay: Coupling a slot dipole antenna with a MEMS relay for wireless and batteryless switching control","authors":"Raul Ruiz,&nbsp;Daniyal Khosh Maram,&nbsp;Xavier Cartoixà,&nbsp;Gabriel Abadal","doi":"10.1016/j.mne.2025.100350","DOIUrl":"10.1016/j.mne.2025.100350","url":null,"abstract":"<div><div>This work presents the design and implementation of the MEMSTENNA relay, an innovative device that integrates a slot dipole antenna with a MEMS relay to enable wireless and batteryless switching control. The proposed concept exploits direct transduction from the electromagnetic to the mechanical domain, specifically within the gigahertz frequency range. The MEMSTENNA relay is fabricated on an FR4 PCB substrate incorporating a copper slot dipole antenna, designed to resonate at <strong>1.2</strong> GHz. Electromagnetic simulations reveal that, at a resonant frequency of 0.82 GHz, an incident electric field of 50 V/m is sufficient to exceed the pull-in voltage, thereby actuating the relay. Experimental validation demonstrates consistent operation with minimal excitation, highlighting the potential of this approach for energy-efficient integration of MEMS technology into RF systems.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"30 ","pages":"Article 100350"},"PeriodicalIF":3.1,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145939354","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}