Micro and Nano Engineering最新文献

{"title":"Investigation of hydrothermally-produced ZnO nanorods and the mechanisms of Li incorporation as a possible dopant","authors":"Georgios P. Papageorgiou ,&nbsp;Nikolaos Boukos ,&nbsp;Maria Androulidaki ,&nbsp;Dimitrios Christofilos ,&nbsp;Vassilis Psycharis ,&nbsp;Maria Katsikini ,&nbsp;Fani Pinakidou ,&nbsp;Eleni C. Paloura ,&nbsp;Christoforos Krontiras ,&nbsp;Eleni Makarona","doi":"10.1016/j.mne.2024.100260","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100260","url":null,"abstract":"<div><p>Zinc oxide (ZnO) has emerged as one of the most promising candidates for mass-producing cost-efficient optoelectronic devices. This is primarily because it can be synthesized in high-quality nanostructures on a wide range of substrates through relatively simple chemical methods. However, producing p-type ZnO, regardless of the chosen method, remains an open and controversial issue. In this work, Li-doped ZnO nanostructures of varying Li-cocnentration were produced via a two-step hydrothermal growth synthesis and an in-depth analysis based on with Field Emission Scanning Electron Microscopy (FE-SEM), X-ray diffraction (XRD), Raman Spectroscopy, Extended X-Ray Absorption Fine Structure (EXAFS) Spectroscopy, and temperature-dependent Photoluminescence (PL) was carried out in an effort to gain insights into the Li-incorporation mechanisms. The findings indicated a strong interplay between the native defects responsible for the inherent n-type character of the material and Li incorporation. It is suggested that this interplay hinders the successful conversion of the Li-doped nanorods into p-type nanostructures and that when employing the hydrothermal approach it is essential to identify the precise conditions necessary for genuine Li incorporation as a Zn substitutional.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100260"},"PeriodicalIF":0.0,"publicationDate":"2024-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000236/pdfft?md5=9550786a76dde3a2bafc733a00d2da47&pid=1-s2.0-S2590007224000236-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141067393","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Clarification of Geometric Effects on Long-term Structural Stability of Ti/Au Multi-layered Micro-cantilevers","authors":"Ryosuke Miyai ,&nbsp;Tomoyuki Kurioka ,&nbsp;Chun-Yi Chen ,&nbsp;Tso-Fu Mark Chang ,&nbsp;Akira Onishi ,&nbsp;Parthojit Chakraborty ,&nbsp;Katsuyuki Machida ,&nbsp;Hiroyuki Ito ,&nbsp;Yoshihiro Miyake ,&nbsp;Masato Sone","doi":"10.1016/j.mne.2024.100244","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100244","url":null,"abstract":"<div><p>A gold micro-electro-mechanical-systems (Au-MEMS) capacitive accelerometer having Ti/Au multi-layered structures is a promising device to detect very weak accelerations, such as muscle sounds, because of the high mass density of Au. However, Au is a soft metal, which raises concerns about the structural stability of the Au-MEMS capacitive accelerometers for practical use. In this work, we clarify the key geometric parameters to enhance their long-term structural stability by conducting a long-term vibration test for a total of 240 Ti/Au multi-layered micro-cantilevers with different geometric parameters, such as the length, width, and thickness of the micro-cantilevers, and the number of Ti/Au multi-layered structures. The long-term structural stability is evaluated from the change in the tip height of the micro-cantilevers before and after the vibration tests. These tests demonstrate that the micro-cantilevers with a shorter length, larger thickness, and more Ti/Au multi-layered structures are found to show better long-term structural stability.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100244"},"PeriodicalIF":0.0,"publicationDate":"2024-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000078/pdfft?md5=07c8b696eec7ebecb309f899837f7237&pid=1-s2.0-S2590007224000078-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140160885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"2D BDiode – A switchable bidirectional diode for analog electronic circuits fabricated entirely from 2D materials","authors":"Christian D. Matthus ,&nbsp;Phanish Chava ,&nbsp;Kenji Watanabe ,&nbsp;Takashi Taniguchi ,&nbsp;Thomas Mikolajick ,&nbsp;Artur Erbe","doi":"10.1016/j.mne.2024.100246","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100246","url":null,"abstract":"<div><p>The advent of two-dimensional (2D) materials has led to innovative and compact electronic devices with remarkable properties. In this work, we introduce a switchable bidirectional diode (2D BDiode), fabricated entirely using different 2D materials, that serves as a fundamental building block for various analog circuit applications. This proof-of-concept diode exhibits the ability to control the flow of current in both forward and reverse bias configurations, enabling advanced functionality in the realm of analog circuit design. We provide a SPICE-based model for the diode based on current-voltage device characterization, capturing its behavior under different biasing conditions, and finally demonstrate a few potential use cases of the 2D BDiode including AC/DC conversion, DC/AC conversion and charge pump circuits.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100246"},"PeriodicalIF":0.0,"publicationDate":"2024-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000091/pdfft?md5=0f99259ac1e3a5fba569346b5db40a4b&pid=1-s2.0-S2590007224000091-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140290679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Design and fabrication of an opto-mechanical antenna in the NIR range","authors":"Daniyal Khosh Maram ,&nbsp;Xavier Borrisé ,&nbsp;Joan Garcia-Garcia ,&nbsp;Raul Ruiz ,&nbsp;Xavier Cartoixà ,&nbsp;Gabriel Abadal","doi":"10.1016/j.mne.2024.100241","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100241","url":null,"abstract":"<div><p>In this study we present a novel device for the direct transduction of optical radiation in the near-infrared region into mechanical actuation, which is based on a plasmonic optical nanoantenna integrated in a microcantilever. We propose and demonstrate the feasibility of a simple fabrication process consisting in the nano-tailoring of a commercially available Atomic Force Microscope (AFM) cantilever by means of the Focused Ion Beam (FIB) milling technique. Furthermore, the comprehensive analysis of the device performance characteristics included in this work reveals the different sensitivity values of these characteristics to the fabrication process tolerances of the most relevant geometric design parameters.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100241"},"PeriodicalIF":0.0,"publicationDate":"2024-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000042/pdfft?md5=035a50e22d9f7691eae1113a50bbbf62&pid=1-s2.0-S2590007224000042-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140103873","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Cross-sectional geometry effect on bending strength of gold micro-cantilever with trapezoidal cross-section","authors":"Ryohei Hori ,&nbsp;Kazuya Fujita ,&nbsp;Chun Yi Chen ,&nbsp;Tomoyuki Kurioka ,&nbsp;Jhen-Yang Wu ,&nbsp;Tso-Fu Mark Chang ,&nbsp;Katsuyuki Machida ,&nbsp;Hiroyuki Ito ,&nbsp;Yoshihiro Miyake ,&nbsp;Masato Sone","doi":"10.1016/j.mne.2024.100259","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100259","url":null,"abstract":"<div><p>Gold is a promising material for movable components in MEMS devices by the high mass density, which allows reduction of the Brownian noise. Mechanical properties of metallic materials are known to be affected by the sample size effect. When bending test is utilized, the sample geometry effect is another factor. In this study, effects of the shape of the cross-section, or the cross-sectional geometry effect, are evaluated using micro-cantilevers with a trapezoidal cross-section. The yield stresses are ranged from 112 MPa to 185 MPa in micro-cantilevers composed of single crystalline gold, and the yield stresses varied from 372 MPa to 489 MPa in polycrystalline gold micro-cantilevers. The yield stress is found to be higher in the micro-cantilever having a smaller ratio of the top width over the bottom width, which demonstrates the cross-sectional geometry effect. Also, the cross-sectional geometry effect is more significant in the polycrystalline micro-cantilevers.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100259"},"PeriodicalIF":0.0,"publicationDate":"2024-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000224/pdfft?md5=c975d3baea9813e31a1d20e50884ceb8&pid=1-s2.0-S2590007224000224-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140951303","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Prospects of nano-lithographic tools for the fabrication of surface-enhanced Raman spectroscopy (SERS) substrates","authors":"K. Srivastava ,&nbsp;H. Le-The ,&nbsp;J.J.A. Lozeman ,&nbsp;A. van den Berg ,&nbsp;W. van der Stam ,&nbsp;M. Odijk","doi":"10.1016/j.mne.2024.100267","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100267","url":null,"abstract":"<div><p>The previous decades have seen a massive increase in the research towards reproducible and optimized surface-enhanced Raman spectroscopy (SERS) substrates. While traditional colloidal synthesis methods have commonly been used for SERS substrate fabrication, they lack reproducibility hindering their usage for many applications. The need for reproducible nanostructures showing high orders of enhancement factors has brought about a shift in the methods one can use to fabricate SERS nanostructures. Lithographic techniques have thus piqued the interest of researchers as a viable option for SERS substrate fabrication. Not only do they offer high enhancement factors and reproducible nanostructures, they also provide the ability to fabricate nanostructures with many different geometries, shapes, sizes and periodicities. Some of the most established lithographic techniques include electron beam lithography, nanosphere lithography, laser interference lithography and many more. This review discusses established lithographic techniques, such as mentioned above, along with other upcoming lithographic techniques to understand the principles and the methodology behind them. A deep understanding of how various parameters can influence the nanostructure fabrication and thereby influence the SERS enhancement is developed. A detailed description of how these nanostructures can be fabricated is also provided for better insight. In addition, strengths and limitations of each method are discussed in detail. Lastly, we also discuss the applicability of SERS substrates for commercial applications comparing the performance of chemical synthesis routes and lithography for SERS substrate fabrication. This review serves as a base to understand the concept and application of SERS from a microfabrication perspective.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100267"},"PeriodicalIF":0.0,"publicationDate":"2024-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000303/pdfft?md5=2f4a3ffed6ee1c9d3ae17b3a50f174dc&pid=1-s2.0-S2590007224000303-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141244518","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Mathematical modeling for predicting electrical energy harvested using piezoelectric composite materials for smart system applications","authors":"Meryiem Derraz ,&nbsp;Chouaib Ennawaoui ,&nbsp;Hicham Mastouri ,&nbsp;Youssef El Hmamssy ,&nbsp;Nourredine Abouricha ,&nbsp;Abdelkader Rjafallah ,&nbsp;El Mehdi Laadissi ,&nbsp;Abdelowahed Hajjaji","doi":"10.1016/j.mne.2024.100253","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100253","url":null,"abstract":"<div><p>In the contemporary quest for sustainable energy, the potential of piezoelectric energy harvesters to convert mechanical vibrations into electrical energy has become increasingly important. This study focuses on piezoelectric composites, in particular a BaTiO₃/PLA (Barium Titanate/ Polylactic Acid) system with different volume percentages of BaTiO₃ ceramic particles (20%, 40% and 60%), with the aim of optimizing energy conversion efficiency. A mathematical model is introduced, encompassing material attributes, mechanical loading frequencies and electrical energy outputs. The central role of mathematical modeling in predicting harvested energy is highlighted, offering insights beyond experimental limitations. The model, which is functionally dependent on the properties of the ceramic and polymer, enables the systematic exploration of various compositions and the identification of optimal material ratios. Experimental validation of the model for different strains (0.4%, 0.8% and 1%) and compositions of BaTiO₃/PLA reaffirms its reliability. Notably, the highest power harvest observed is around 4.5 μW under a strain of 1% with a BaTiO₃ composition of 60%. With these specific numerical values, this approach merges materials science and energy technology, propelling the advancement of efficient piezoelectric materials for renewable energy applications.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100253"},"PeriodicalIF":0.0,"publicationDate":"2024-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000169/pdfft?md5=260daf411a495666f7d851fc90385f87&pid=1-s2.0-S2590007224000169-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140555202","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Enabling focused ion beam sample preparation for application in reverse tip sample scanning probe microscopy","authors":"P. Lagrain,&nbsp;K. Paulussen,&nbsp;E. Grieten,&nbsp;G. Van den Bosch,&nbsp;S. Rachidi,&nbsp;D. Yudistira,&nbsp;L. Wouters,&nbsp;T. Hantschel","doi":"10.1016/j.mne.2024.100247","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100247","url":null,"abstract":"<div><p>Focused ion beam (FIB) has become a powerful tool for transmission electron microscopy sample preparation in the nanoelectronics industry and has in recent years also shown its benefits for specific preparation steps in electrical scanning probe microscopy (SPM). Most recently, a novel SPM approach – so-called reverse tip sample (RTS) SPM – has been proposed in which the position of sample and tip are switched compared to standard SPM; in RTS SPM the sample is attached to the end of a cantilever beam. To achieve this configuration, the region of interest must first be extracted from a substrate and then needs to be reliably fixed to the cantilever by FIB. Therefore, we have explored and developed dedicated FIB preparation methods for RTS SPM in this work. Our established procedures ensure a strong mechanical and good electrical connection of the sample to the cantilever for both cross-section and top view sample preparation. Furthermore, we introduce an approach for mounting samples from a full wafer size workflow. This paper presents the developed FIB procedures and discusses the quality and stability of all mounted samples and their electrical evaluation in RTS SPM.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100247"},"PeriodicalIF":0.0,"publicationDate":"2024-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000108/pdfft?md5=1c3e88b8ea444e476143b485f6d4ff3c&pid=1-s2.0-S2590007224000108-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140321015","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fabrication of a hybrid device for the integration of light-triggered proton pumps","authors":"Jacqueline Figueiredo da Silva ,&nbsp;Vesna Bacheva ,&nbsp;Ute Drechsler ,&nbsp;Philippe Nicollier ,&nbsp;Steffen Reidt ,&nbsp;Dimitrios Fotiadis ,&nbsp;Armin Knoll ,&nbsp;Heiko Wolf","doi":"10.1016/j.mne.2024.100250","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100250","url":null,"abstract":"<div><p>Biological ion pumps, such as bacteriorhodopsin (bR), utilize photons to move ions against concentration gradients, offering energy harvesting and spatiotemporal control of chemical gradients. This capability goes far beyond the capabilities of today's synthetic devices, suggesting a hybrid approach to embed bRs in synthetic devices in order to direct the proton flow towards useful system applications. In this study, a hybrid silicon-based nanochannel network with integrated purple membranes (PM) containing bR was fabricated. The fabrication method combines thermal scanning probe lithography, etching techniques, atomic layer deposition, plasma-enhanced chemical vapor deposition, and photolithography to create devices with buried nanochannels on silicon substrates. PM patches were deposited onto specified sites by a tunable nanofluidic confinement apparatus. The resulting device holds the potential for locally controlling directed ion transport in micrometer scale devices, a first step towards applications, such as locally affected proton catalyzed chemical reaction networks. Furthermore, this fabrication strategy, employing a maskless overlay, is a tool for constructing intricate nanofluidic network designs which are mechanically robust and straightforward to fabricate.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100250"},"PeriodicalIF":0.0,"publicationDate":"2024-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000133/pdfft?md5=907b0512bf199bb1eefa3b01cb6f097e&pid=1-s2.0-S2590007224000133-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140347770","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fabrication of pyrolytic carbon interdigitated microelectrodes by maskless UV photolithography with epoxy-based photoresists SU-8 and mr-DWL","authors":"Nicolai Støvring ,&nbsp;Babak Rezaei ,&nbsp;Arto Heiskanen ,&nbsp;Jenny Emnéus ,&nbsp;Stephan Sylvest Keller","doi":"10.1016/j.mne.2024.100257","DOIUrl":"10.1016/j.mne.2024.100257","url":null,"abstract":"<div><p>Maskless UV photolithography is increasingly used, especially in research environments where low turn-around time for new designs improves productivity. Here, we fabricate pyrolytic carbon interdigitated microelectrodes with small interelectrode gaps, good adhesion to the carrier substrate, high surface area and excellent electrochemical properties using maskless UV photolithography with two negative epoxy-based photoresists, namely the commonly used SU-8 and the recently developed mr-DWL. The minimum realizable trench width in 15 μm thick photoresist films is 2.4 ± 0.15 μm for mr-DWL 5 and 3.1 ± 0.10 μm for SU-8 2035. After pyrolysis, the two resulting pyrolytic carbon materials show similar electrochemical properties. However, shrinkage during pyrolysis is significantly lower for mr-DWL compared to SU-8, which is beneficial for the fabrication of interdigitated microelectrodes. Furthermore, delamination of the electrodes during processing and operation is prevented due to the introduction of poly silicon adhesion structures. This work provides valuable insights into maskless UV lithography as well as into the pyrolytic carbon process to increase the yield, performance and productivity for fabrication of microelectrodes.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100257"},"PeriodicalIF":0.0,"publicationDate":"2024-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000200/pdfft?md5=60673ebe8420e6820b9903f3d1fe7dce&pid=1-s2.0-S2590007224000200-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141049018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}