Micro and Nano Engineering最新文献_第7页

Supercapacitors for renewable energy applications: A review 用于可再生能源应用的超级电容器：综述

Micro and Nano Engineering Pub Date : 2023-10-02 DOI: 10.1016/j.mne.2023.100229

Jie Zhang, Min Gu, Xi Chen

引用次数: 0

Development of an integrated breath analysis technology for on-chip aerosol capture and molecular analysis 用于芯片气溶胶捕获和分子分析的集成呼吸分析技术的开发

Micro and Nano Engineering Pub Date : 2023-09-25 DOI: 10.1016/j.mne.2023.100228

Filip Paeps , Thomas Degreef , Wout Duthoo , Yorick Koumans , Erik Emmen , Abdulkadir Yurt , Elisabeth Marchal , Andrey Kossarev , Thi-Minh-Tho Dam , Rabea Hanifa , Joost Van Duppen , Zhenxiang Luo , Marco Peca , Tobe Wauters , Wouter Vleugels , Nadia Chakrova , Johan Berte , Floris Vernieuwe , Maxime Delgrange , Hari Prasanth , Bert Verbruggen

{"title":"Development of an integrated breath analysis technology for on-chip aerosol capture and molecular analysis","authors":"Filip Paeps , Thomas Degreef , Wout Duthoo , Yorick Koumans , Erik Emmen , Abdulkadir Yurt , Elisabeth Marchal , Andrey Kossarev , Thi-Minh-Tho Dam , Rabea Hanifa , Joost Van Duppen , Zhenxiang Luo , Marco Peca , Tobe Wauters , Wouter Vleugels , Nadia Chakrova , Johan Berte , Floris Vernieuwe , Maxime Delgrange , Hari Prasanth , Bert Verbruggen","doi":"10.1016/j.mne.2023.100228","DOIUrl":"https://doi.org/10.1016/j.mne.2023.100228","url":null,"abstract":"<div><p>As proven early on in the pandemic, SARS-CoV-2 is mainly transmitted by aerosols. This urged us to develop a silicon impactor that collects the virus particles directly from breath. Performing PCR on these breath samples proved equally sensitive as nasopharyngeal swabs during the first week of an infection [Stakenborg et al., 2022], yet it remained a mostly manual process and PCR turn-around-time was still long. To overcome these drawbacks, we developed a fast and sensitive, fully integrated point-of-need breath test, comprising a novel breath sampler device and PCR instrument. The breath sampler combines virus collection and in-situ RNA amplification. The PCR instrument performs very fast amplification of the released viral RNA. Sample-to-result time was reduced to <20 min with an equal performance as the original manual procedure.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"21 ","pages":"Article 100228"},"PeriodicalIF":0.0,"publicationDate":"2023-09-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"50182422","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Wafer-bonded deep fluidics in BCB with in-plane coupling for lab-on-a-chip applications 用于芯片实验室应用的BCB中具有平面内耦合的晶片键合深流体

Micro and Nano Engineering Pub Date : 2023-09-21 DOI: 10.1016/j.mne.2023.100227

Deepthi Sekhar , Ewa Lisicka-Skrzek , Pierre Berini

{"title":"Wafer-bonded deep fluidics in BCB with in-plane coupling for lab-on-a-chip applications","authors":"Deepthi Sekhar , Ewa Lisicka-Skrzek , Pierre Berini","doi":"10.1016/j.mne.2023.100227","DOIUrl":"https://doi.org/10.1016/j.mne.2023.100227","url":null,"abstract":"<div><p>The wafer-scale fabrication of deep channel microfluidics for lab-on-a-chip applications by reactive ion etching and wafer bonding is reported. The microfluidic channels are etched in B-stage bisbenzocyclobutene (BCB) and Cytop with the latter used as a bonding agent. The channels are hermetically sealed between Borofloat glass and Si wafers by wafer bonding. Fluidic coupling is achieved in the plane of the channels via inlets and outlets that are revealed on the end facets of chips after dicing. Process techniques and details are reported for uniform coating and curing of BCB and Cytop, defining the channels with high accuracy using photolithography, dry etching the polymers using a hard mask, and sealing the channels by wafer bonding. Fluidic measurements are carried out at various flow rates and compared with modeling. The low Reynold's numbers of the channels ensure laminar flow conditions. Deep fluidic channels are less difficult to align to fluidic interfaces, they support higher flow rates and are less susceptible to clogging. In-plane fluidic coupling precludes the need to etch holes through the substrate. Our wafer-scale process was applied to 4 in. diameter wafers yielding 195 precision-aligned and hermetically sealed microfluidic chips, but is readily scalable to larger diameter wafers for volume production.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"21 ","pages":"Article 100227"},"PeriodicalIF":0.0,"publicationDate":"2023-09-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"50182345","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometers 多层结构电镀金元件的热解吸光谱杂质分析及其在金微机电系统电容加速度计中的应用

Micro and Nano Engineering Pub Date : 2023-09-04 DOI: 10.1016/j.mne.2023.100226

Takumi Akiyama , Tomoyuki Kurioka , Chun-Yi Chen , Tso-Fu Mark Chang , Parthojit Chakraborty , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone

{"title":"Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometers","authors":"Takumi Akiyama , Tomoyuki Kurioka , Chun-Yi Chen , Tso-Fu Mark Chang , Parthojit Chakraborty , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone","doi":"10.1016/j.mne.2023.100226","DOIUrl":"10.1016/j.mne.2023.100226","url":null,"abstract":"<div><p>Au-based micro-electro-mechanical-system (Au-MEMS) capacitance accelerometers show high sensitivity by suppressing the mechanical noise because of the high mass density of gold (<em>ρ</em> = 19.3 g/cm<sup>3</sup>). On the other hand, their long-term reliability suffers from drift phenomena induced by the impurities incorporated in the key component during their fabrication process, such as the gold electroplating step. Herein, impurities in electroplated Au-based components for MEMS capacitive accelerometers are evaluated by thermal desorption spectrometry (TDS) measurements. The TDS measurement reveals that dominant desorption gases from the Au-based component are molecular hydrogen (H<sub>2</sub>) and water (H<sub>2</sub>O). These desorption gases are derived from impurities in the electroplated Au-based component, and the amount of these gases is significantly suppressed by a thermal treatment step. In conclusion, this study demonstrates that the electroplated Au-based component contains impurities originated from the fabrication process, and these impurities could be removed by a thermal treatment step.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"21 ","pages":"Article 100226"},"PeriodicalIF":0.0,"publicationDate":"2023-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43597910","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Detachable three-layer Au absorber microfabrication for low-temperature detectors 低温探测器用可拆卸三层Au吸收体微加工

Micro and Nano Engineering Pub Date : 2023-09-01 DOI: 10.1016/j.mne.2023.100220

Jawad Hadid , Matias Rodrigues , Abdelmounaim Harouri , Christophe Dupuis , David Bouville , Antoine Martin , Martin Loidl , Laurence Ferlazzo

{"title":"Detachable three-layer Au absorber microfabrication for low-temperature detectors","authors":"Jawad Hadid , Matias Rodrigues , Abdelmounaim Harouri , Christophe Dupuis , David Bouville , Antoine Martin , Martin Loidl , Laurence Ferlazzo","doi":"10.1016/j.mne.2023.100220","DOIUrl":"10.1016/j.mne.2023.100220","url":null,"abstract":"<div><p>Low temperature detectors (LTDs) used for decay energy spectrometry (DES) can provide accurate and reliable decay data thanks to their high-energy resolution and a near 100% detection efficiency for the radiations of interest. However, it is essential to consider the source quality to mitigate spectral distortion due to the self-absorption of particle energy in the source deposited.</p><p>This work aimed to produce a replaceable 4π 3-layer gold absorber for DES in reusable metallic magnetic calorimeters, a class of LTDs. We present a novel 3-layer microfabrication process for a 1 mm diameter absorber with a total gold thickness ranging from 20 μm to 120 μm depending on the measured radionuclide (<sup>55</sup>Fe or <sup>241</sup>Am). The absorber integrates a gold nanofoam in which the radionuclide is deposited by nanodrop deposition of a few tenths of μL of a radioactive solution. We fabricated a high quality gold nanofoam layer with controllable porosity through a dealloying process using wet etching and integrating it on a thick electrodeposited gold layer. The fine study of the nanofoam microfabrication is performed using high-resolution scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDX).</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"20 ","pages":"Article 100220"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"42697078","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Printed ecoresorbable temperature sensors for environmental monitoring 用于环境监测的印刷生态可吸收温度传感器

Micro and Nano Engineering Pub Date : 2023-09-01 DOI: 10.1016/j.mne.2023.100218

Nicolas Fumeaux, Melissa Kossairi, James Bourely, Danick Briand

{"title":"Printed ecoresorbable temperature sensors for environmental monitoring","authors":"Nicolas Fumeaux, Melissa Kossairi, James Bourely, Danick Briand","doi":"10.1016/j.mne.2023.100218","DOIUrl":"10.1016/j.mne.2023.100218","url":null,"abstract":"<div><p>Electronic waste has become a pressing issue, necessitating sustainable solutions for the disposal of electronic devices. While the development of environmentally degradable electronics has gained attention, the fabrication of stable and performant sensors from biodegradable materials remains challenging. We present printed degradable resistance temperature detectors (RTDs) based on the photonic sintering of a zinc microparticles ink on a cellulosic substrate. Efficient sintering is attained via a two-step process involving electrochemical oxide removal and pulsed light exposure using a xenon lamp. By optimizing the pulse energy and pulse count, we obtain highly linear zinc-based RTDs with a high temperature coefficient of resistance (TCR). The printed zinc reaches a TCR value of 3160 ppm/K, which represents about 80% of the value of the bulk material. The dynamic response of the sensors in a range from −20 to 40 °C closely matches the temperature signal recorded by a commercial sensor. The encapsulation of the screen-printed sensors on paper substrate with a biodegradable beeswax coating ensures protection against the interference of moisture. These printed RTDs, fully made of degradable materials, pave the way to the cost-effective manufacturing of eco-friendly yet performant sensors for environmental monitoring.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"20 ","pages":"Article 100218"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"49106690","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Development of EUV interference lithography for 25 nm line/space patterns 用于25nm线/空间图案的EUV干涉光刻技术的发展

Micro and Nano Engineering Pub Date : 2023-09-01 DOI: 10.1016/j.mne.2023.100215

A.K. Sahoo , P.-H. Chen , C.-H. Lin , R.-S. Liu , B.-J. Lin , T.-S. Kao , P.-W. Chiu , T.-P. Huang , W.-Y. Lai , J. Wang , Y.-Y. Lee , C.-K. Kuan

引用次数: 0

UV-assisted punching of microgel shapes for oral biomacromolecule delivery 用于口服生物大分子递送的微凝胶形状的紫外线辅助打孔

Micro and Nano Engineering Pub Date : 2023-09-01 DOI: 10.1016/j.mne.2023.100221

Shahana Bishnoi , Xiaoli Liu , Lasse Højlund Eklund Thamdrup , Ritika Singh Petersen , Leticia Hosta-Rigau , Stephan Sylvest Keller

{"title":"UV-assisted punching of microgel shapes for oral biomacromolecule delivery","authors":"Shahana Bishnoi , Xiaoli Liu , Lasse Højlund Eklund Thamdrup , Ritika Singh Petersen , Leticia Hosta-Rigau , Stephan Sylvest Keller","doi":"10.1016/j.mne.2023.100221","DOIUrl":"10.1016/j.mne.2023.100221","url":null,"abstract":"<div><p>Hydrogel based carriers have been predominantly investigated to combat the prominent challenges faced by oral biomacromolecule delivery. Several micromolding, microfluidic and photolithographic techniques have been described for the fabrication of non-spherical hydrogel based microcarriers. However, these techniques are unsuitable for loading biomacromolecules as integral part of the fabrication process due to the use of high temperatures, solvents and multiple processing steps. Here, we introduce UV-assisted punching as a novel two-step fabrication technique for the development of biocompatible microgel shapes for oral drug administration. Poly-ethylene glycol (PEG) microgel shapes with lateral dimensions of 25–100 μm and a height of 25 μm were fabricated on a flexible poly vinyl alcohol (PVA) substrate with a robust cycloolefin polymer (COP) stamp. The proposed process uses UV-initiated crosslinking of aqueous solutions at ambient temperatures, thereby providing a highly attractive method for the fabrication of biomacromolecule loaded hydrogel based carriers. For the proof-of-concept, the microgel shapes were loaded with the fluorescently labelled model biomacromolecule bovine serum albumin without any additional steps. The successful loading is demonstrated by fluorescence microscopy. <em>In vitro</em> studies are performed to quantify the macromolecular content and the release profile associated with the fabricated microgel shapes.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"20 ","pages":"Article 100221"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45497290","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Overcoming the response instability of MoS2 humidity sensors by hydrochloric acid surface treatment 盐酸表面处理克服二硫化钼湿度传感器响应不稳定性

Micro and Nano Engineering Pub Date : 2023-09-01 DOI: 10.1016/j.mne.2023.100216

Maria Kainourgiaki, Menelaos Tsigkourakos, Evangelos Skotadis, Evangelos Aslanidis, Dimitris Tsoukalas

{"title":"Overcoming the response instability of MoS2 humidity sensors by hydrochloric acid surface treatment","authors":"Maria Kainourgiaki, Menelaos Tsigkourakos, Evangelos Skotadis, Evangelos Aslanidis, Dimitris Tsoukalas","doi":"10.1016/j.mne.2023.100216","DOIUrl":"10.1016/j.mne.2023.100216","url":null,"abstract":"<div><p>The synthesis of MoS<sub>2</sub> with chemical vapor deposition (CVD) using sodium molybdate (Na<sub>2</sub>MoO<sub>4</sub>) as the Mo precursor produces a big number of large flakes (∼100-300 μm) compared to other CVD methods that use different precursors. In this work, humidity sensors based on MoS<sub>2</sub> are developed, whereby MoS<sub>2</sub> is grown using this Mo precursor in an aqueous solution form. The final devices exhibit a response-switching during operation under high (>50%) relative humidity conditions, due to the presence of Na<sub>2</sub>MoO<sub>4</sub> residues on their surface. By decreasing the concentration of the aqueous Mo precursor during the CVD process we partially diminish the switching effect, as the Na<sub>2</sub>MoO<sub>4</sub> residue is reduced To completely overcome this issue, we present a post-fabrication surface treatment using hydrochloric acid that removes the Na<sub>2</sub>MoO<sub>4</sub> residue from the devices' surface. Rinsing the devices with an HCl solution results in the elimination of the response-switching effect and the sensors demonstrate a constant positive response from the initial operation steps.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"20 ","pages":"Article 100216"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"47655135","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Functionalization of polyethylene terephthalate fabrics with au@Cu2O core@shell nanocrystals for environmental purifications 用au@Cu2O core@shell纳米晶体功能化聚对苯二甲酸乙二醇酯织物用于环境净化

Micro and Nano Engineering Pub Date : 2023-09-01 DOI: 10.1016/j.mne.2023.100217

Jhen-Yang Wu , Mei-Jing Fang , Tomoyuki Kurioka , Ting-Hsuan Lai , Ming-Yu Kuo , Yi-Hsuan Chiu , Chun-Wen Tsao , Yi-An Chen , Hsuan-Hung Kuo , Yu-An Chien , Po-Wei Cheng , Bo-You Lin , Sue-Min Chang , Chun-Yi Chen , Masato Sone , Tso-Fu Mark Chang , Yung-Jung Hsu

{"title":"Functionalization of polyethylene terephthalate fabrics with au@Cu2O core@shell nanocrystals for environmental purifications","authors":"Jhen-Yang Wu , Mei-Jing Fang , Tomoyuki Kurioka , Ting-Hsuan Lai , Ming-Yu Kuo , Yi-Hsuan Chiu , Chun-Wen Tsao , Yi-An Chen , Hsuan-Hung Kuo , Yu-An Chien , Po-Wei Cheng , Bo-You Lin , Sue-Min Chang , Chun-Yi Chen , Masato Sone , Tso-Fu Mark Chang , Yung-Jung Hsu","doi":"10.1016/j.mne.2023.100217","DOIUrl":"10.1016/j.mne.2023.100217","url":null,"abstract":"<div><p>Wastewater containing synthetic dyes has caused a significant risk to the environment and human health. Among the various methods to treat wastewater, photocatalysis recommends itself as a particularly efficient tool for the removal of dyes from industrial effluents. In this work, Au@Cu<sub>2</sub>O core@shell nanocrystals with controllable shell thicknesses from 38.1 ± 2.8 (Au@Cu<sub>2</sub>O-2), 48.1 ± 3.7 (Au@Cu<sub>2</sub>O-3) to 59.1 ± 4.1 nm (Au@Cu<sub>2</sub>O-4) have been prepared and immobilized on polyethylene terephthalate (PET) fabrics for applications in photocatalytic degradation of methylene orange (MO). The influence of the shell thickness of Au@Cu<sub>2</sub>O on the photocatalytic performance of the functionalized PET fabrics has been examined. Among all the samples tested, immobilization of Au@Cu<sub>2</sub>O-3 rendered PET fabrics the largest photocatalytic activity for MO degradation, achieving an apparent rate constant of MO degradation of 7.43 × 10<sup>−3</sup> min<sup>−1</sup>. A plausible mechanism accounting for the degradation process of MO over the functionalized PET has been proposed based on the results of scavenger experiments. This work has provided a delicate yet practical functional textile paradigm by combining the photocatalytic capability of Au@Cu<sub>2</sub>O and the adaptable feature of PET fabrics. The findings from this study can deliver a viable idea for the design of versatile textiles with competent photocatalytic capacity for environmental purifications and energy conversion.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"20 ","pages":"Article 100217"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"49039206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1