Micro and Nano Engineering最新文献_第8页

Mathematical modeling for predicting electrical energy harvested using piezoelectric composite materials for smart system applications 利用压电复合材料预测智能系统应用中电能采集的数学建模

Micro and Nano Engineering Pub Date : 2024-04-15 DOI: 10.1016/j.mne.2024.100253

Meryiem Derraz , Chouaib Ennawaoui , Hicham Mastouri , Youssef El Hmamssy , Nourredine Abouricha , Abdelkader Rjafallah , El Mehdi Laadissi , Abdelowahed Hajjaji

{"title":"Mathematical modeling for predicting electrical energy harvested using piezoelectric composite materials for smart system applications","authors":"Meryiem Derraz , Chouaib Ennawaoui , Hicham Mastouri , Youssef El Hmamssy , Nourredine Abouricha , Abdelkader Rjafallah , El Mehdi Laadissi , Abdelowahed Hajjaji","doi":"10.1016/j.mne.2024.100253","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100253","url":null,"abstract":"<div><p>In the contemporary quest for sustainable energy, the potential of piezoelectric energy harvesters to convert mechanical vibrations into electrical energy has become increasingly important. This study focuses on piezoelectric composites, in particular a BaTiO<sub>3</sub>/PLA (Barium Titanate/ Polylactic Acid) system with different volume percentages of BaTiO<sub>3</sub> ceramic particles (20%, 40% and 60%), with the aim of optimizing energy conversion efficiency. A mathematical model is introduced, encompassing material attributes, mechanical loading frequencies and electrical energy outputs. The central role of mathematical modeling in predicting harvested energy is highlighted, offering insights beyond experimental limitations. The model, which is functionally dependent on the properties of the ceramic and polymer, enables the systematic exploration of various compositions and the identification of optimal material ratios. Experimental validation of the model for different strains (0.4%, 0.8% and 1%) and compositions of BaTiO<sub>3</sub>/PLA reaffirms its reliability. Notably, the highest power harvest observed is around 4.5 μW under a strain of 1% with a BaTiO<sub>3</sub> composition of 60%. With these specific numerical values, this approach merges materials science and energy technology, propelling the advancement of efficient piezoelectric materials for renewable energy applications.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100253"},"PeriodicalIF":0.0,"publicationDate":"2024-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000169/pdfft?md5=260daf411a495666f7d851fc90385f87&pid=1-s2.0-S2590007224000169-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140555202","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Damascene versus subtractive line CMP process for resistive memory crossbars BEOL integration 电阻记忆横梁的大马士革与减法线 CMP 工艺 BEOL 集成

Micro and Nano Engineering Pub Date : 2024-04-12 DOI: 10.1016/j.mne.2024.100251

Raphaël Dawant , Matthieu Gaudreau , Marc-Antoine Roy , Pierre-Antoine Mouny , Matthieu Valdenaire , Pierre Gliech , Javier Arias Zapata , Malek Zegaoui , Fabien Alibart , Dominique Drouin , Serge Ecoffey

{"title":"Damascene versus subtractive line CMP process for resistive memory crossbars BEOL integration","authors":"Raphaël Dawant , Matthieu Gaudreau , Marc-Antoine Roy , Pierre-Antoine Mouny , Matthieu Valdenaire , Pierre Gliech , Javier Arias Zapata , Malek Zegaoui , Fabien Alibart , Dominique Drouin , Serge Ecoffey","doi":"10.1016/j.mne.2024.100251","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100251","url":null,"abstract":"<div><p>In recent years, resistive memories have emerged as a pivotal advancement in the realm of electronics, offering numerous advantages in terms of energy efficiency, scalability, and non-volatility [1]. Characterized by their unique resistive switching behavior, these memories are well-suited for a variety of applications, ranging from high-density data storage to neuromorphic computing [2]. Their potential is further enhanced by their compatibility with advanced semiconductor processes, enabling seamless integration into modern electronic circuits [3]. A particularly promising avenue for resistive memory lies in its integration at the Back-End-of-Line (BEOL) stage of semiconductor manufacturing [4]. BEOL integration involves processes that occur after the fabrication of the transistors, primarily focusing on creating interconnections that electrically link these transistors. Integrating resistive memories at this stage can lead to compact, efficient, and high-performance architectures, pivotal for in-memory computing applications where data storage and processing are co-located [5]. This paper studies three ways to integrate TiO<sub><em>x</em></sub>-based resistive memory into passive crossbar array structures, using chemical mechanical polishing (CMP) processes, focusing on identifying the optimal integration techniques.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100251"},"PeriodicalIF":0.0,"publicationDate":"2024-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000145/pdfft?md5=636ca20e86a04bf9828411b55d748881&pid=1-s2.0-S2590007224000145-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140558500","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Fabrication of a hybrid device for the integration of light-triggered proton pumps 制造集成光触发质子泵的混合装置

Micro and Nano Engineering Pub Date : 2024-03-29 DOI: 10.1016/j.mne.2024.100250

Jacqueline Figueiredo da Silva , Vesna Bacheva , Ute Drechsler , Philippe Nicollier , Steffen Reidt , Dimitrios Fotiadis , Armin Knoll , Heiko Wolf

{"title":"Fabrication of a hybrid device for the integration of light-triggered proton pumps","authors":"Jacqueline Figueiredo da Silva , Vesna Bacheva , Ute Drechsler , Philippe Nicollier , Steffen Reidt , Dimitrios Fotiadis , Armin Knoll , Heiko Wolf","doi":"10.1016/j.mne.2024.100250","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100250","url":null,"abstract":"<div><p>Biological ion pumps, such as bacteriorhodopsin (bR), utilize photons to move ions against concentration gradients, offering energy harvesting and spatiotemporal control of chemical gradients. This capability goes far beyond the capabilities of today's synthetic devices, suggesting a hybrid approach to embed bRs in synthetic devices in order to direct the proton flow towards useful system applications. In this study, a hybrid silicon-based nanochannel network with integrated purple membranes (PM) containing bR was fabricated. The fabrication method combines thermal scanning probe lithography, etching techniques, atomic layer deposition, plasma-enhanced chemical vapor deposition, and photolithography to create devices with buried nanochannels on silicon substrates. PM patches were deposited onto specified sites by a tunable nanofluidic confinement apparatus. The resulting device holds the potential for locally controlling directed ion transport in micrometer scale devices, a first step towards applications, such as locally affected proton catalyzed chemical reaction networks. Furthermore, this fabrication strategy, employing a maskless overlay, is a tool for constructing intricate nanofluidic network designs which are mechanically robust and straightforward to fabricate.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100250"},"PeriodicalIF":0.0,"publicationDate":"2024-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000133/pdfft?md5=907b0512bf199bb1eefa3b01cb6f097e&pid=1-s2.0-S2590007224000133-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140347770","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Dependence of Structural Design on Effective Young's Modulus of Ti/Au Multi-layered Micro-cantilevers 结构设计对钛/金多层微悬臂有效杨氏模量的影响

Micro and Nano Engineering Pub Date : 2024-03-29 DOI: 10.1016/j.mne.2024.100249

Shunkai Watanabe , Tomoyuki Kurioka , Chun-Yi Chen , Tso-Fu Mark Chang , Akira Onishi , Parthojit Chakraborty , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone

{"title":"Dependence of Structural Design on Effective Young's Modulus of Ti/Au Multi-layered Micro-cantilevers","authors":"Shunkai Watanabe , Tomoyuki Kurioka , Chun-Yi Chen , Tso-Fu Mark Chang , Akira Onishi , Parthojit Chakraborty , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone","doi":"10.1016/j.mne.2024.100249","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100249","url":null,"abstract":"<div><p>Gold-based micro-electro-mechanical-systems (Au-MEMS) capacitive accelerometers can simultaneously realize high sensitivity and miniaturization because of the high mass density of Au. In order to further improve the sensitivity of the Au-MEMS capacitive accelerometers, Young's modulus of the cantilever-like spring part connected to the movable component is a key parameter. Considering the size effect in the mechanical property of metallic materials on micro-scale, the design of the spring part is expected to reflect their Young's modulus; that is, effective Young's modulus (<em>E</em><sub>eff</sub>). In this study, we clarify effects of the structural designs of the Au-based micro-cantilevers on their <em>E</em><sub>eff</sub> by experiments and finite element analyses (FEA) simulations. The <em>E</em><sub>eff</sub> of the Au micro-cantilevers having Ti/Au multi-layered structures is evaluated by resonance frequency method, which demonstrates the key structural parameters affecting their <em>E</em><sub>eff</sub>. The FEA calculations show a consistent trend with that observed in the experimental results.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100249"},"PeriodicalIF":0.0,"publicationDate":"2024-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000121/pdfft?md5=9023396f9b43780109efb15a52677e42&pid=1-s2.0-S2590007224000121-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140342104","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Enabling focused ion beam sample preparation for application in reverse tip sample scanning probe microscopy 在反向尖端样品扫描探针显微镜中应用聚焦离子束样品制备技术

Micro and Nano Engineering Pub Date : 2024-03-26 DOI: 10.1016/j.mne.2024.100247

P. Lagrain, K. Paulussen, E. Grieten, G. Van den Bosch, S. Rachidi, D. Yudistira, L. Wouters, T. Hantschel

{"title":"Enabling focused ion beam sample preparation for application in reverse tip sample scanning probe microscopy","authors":"P. Lagrain, K. Paulussen, E. Grieten, G. Van den Bosch, S. Rachidi, D. Yudistira, L. Wouters, T. Hantschel","doi":"10.1016/j.mne.2024.100247","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100247","url":null,"abstract":"<div><p>Focused ion beam (FIB) has become a powerful tool for transmission electron microscopy sample preparation in the nanoelectronics industry and has in recent years also shown its benefits for specific preparation steps in electrical scanning probe microscopy (SPM). Most recently, a novel SPM approach – so-called reverse tip sample (RTS) SPM – has been proposed in which the position of sample and tip are switched compared to standard SPM; in RTS SPM the sample is attached to the end of a cantilever beam. To achieve this configuration, the region of interest must first be extracted from a substrate and then needs to be reliably fixed to the cantilever by FIB. Therefore, we have explored and developed dedicated FIB preparation methods for RTS SPM in this work. Our established procedures ensure a strong mechanical and good electrical connection of the sample to the cantilever for both cross-section and top view sample preparation. Furthermore, we introduce an approach for mounting samples from a full wafer size workflow. This paper presents the developed FIB procedures and discusses the quality and stability of all mounted samples and their electrical evaluation in RTS SPM.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100247"},"PeriodicalIF":0.0,"publicationDate":"2024-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000108/pdfft?md5=1c3e88b8ea444e476143b485f6d4ff3c&pid=1-s2.0-S2590007224000108-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140321015","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Sky-mimesis, a path from nanotechnology to visual arts: A review of art applications of aerogels 天空哑剧，从纳米技术到视觉艺术的途径：气凝胶艺术应用综述

Micro and Nano Engineering Pub Date : 2024-03-25 DOI: 10.1016/j.mne.2024.100248

Ioannis Michaloudis , A. Venkateswara Rao , Kazuyoshi Kanamori

{"title":"Sky-mimesis, a path from nanotechnology to visual arts: A review of art applications of aerogels","authors":"Ioannis Michaloudis , A. Venkateswara Rao , Kazuyoshi Kanamori","doi":"10.1016/j.mne.2024.100248","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100248","url":null,"abstract":"<div><p>Interdisciplinary research between science and art is becoming more active, because it stimulates the both fields with far different viewpoints. In the field of aerogels, exceptionally low-density porous materials, the authors have been promoting interdisciplinary research based on a unifying aesthetic idea. Since typical silica aerogels consist of nano-scaled colloidal skeletons and mesopores, they show high light transmittance and slight scattering that allows aerogels to be impressive bluish piece of the sky. With various techniques such as molding, inclusion, and surface machining/patterning, a number of artworks has been expressed with the material silica aerogel interpreting aerogels to the sky through fruitful collaborations between an artist and scientists including the present co-authors. In the present paper, we discuss the interactions between human and materials in visual arts and photography, and show how the aerogels are expended as the <em>materia prima</em> for the artworks of the first author. We will emphasize how the synergy between artists and scientists drove and stimulated the both fields through collaborative works.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100248"},"PeriodicalIF":0.0,"publicationDate":"2024-03-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S259000722400011X/pdfft?md5=e501195e7e66af4a0a01b536dde0fd45&pid=1-s2.0-S259000722400011X-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140328781","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

2D BDiode – A switchable bidirectional diode for analog electronic circuits fabricated entirely from 2D materials 2D BDiode - 用于模拟电子电路的可切换双向二极管，完全由 2D 材料制成

Micro and Nano Engineering Pub Date : 2024-03-21 DOI: 10.1016/j.mne.2024.100246

Christian D. Matthus , Phanish Chava , Kenji Watanabe , Takashi Taniguchi , Thomas Mikolajick , Artur Erbe

引用次数: 0

High force compression mode to Shear mode piezoelectric energy harvesting 从高力压缩模式到剪切模式的压电能量采集

Micro and Nano Engineering Pub Date : 2024-03-20 DOI: 10.1016/j.mne.2024.100245

Fergus J.E. Crawley, Zhenhua Luo

{"title":"High force compression mode to Shear mode piezoelectric energy harvesting","authors":"Fergus J.E. Crawley, Zhenhua Luo","doi":"10.1016/j.mne.2024.100245","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100245","url":null,"abstract":"<div><p>This study is to develop structures with the ability to convert a compression force into radial extension or shear force, to increase power output through piezo shear mode. In this work, a piezoceramic-spring system was developed with two types of force-spreading spring configurations, the Belleville disc springs and the crinkle washer. A force loading profile is applied to a piezoceramic element and structure causing the force to be distributed in different directions when compared to a conventional helical spring damping system or compression. The performances of these novel structures were studied using Multiphysics simulation and experiments. This work shows that both the Belleville disc and crinkle washer produce improved energy output between 15 and 22% compared to compression alone, whilst the Belleville disc spring outperformed a crinkle washer in both simulations and experiments. The results show that converting compression to shear force in energy harvesting could be a potential approach to increase the energy efficiency and energy density.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100245"},"PeriodicalIF":0.0,"publicationDate":"2024-03-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S259000722400008X/pdfft?md5=0073b73976bff7096b56afb0695d8807&pid=1-s2.0-S259000722400008X-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140540652","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Normally closed thermally activated irreversible solid state erbium hydrides switches 常闭热激活不可逆固态铒氢化物开关

Micro and Nano Engineering Pub Date : 2024-03-16 DOI: 10.1016/j.mne.2024.100243

Michael J. Abere, Richard J. Gallegos, Matthew W. Moorman, Mark A. Rodriguez, Paul G. Kotula, Rick A. Kellogg, David P. Adams

引用次数: 0

Clarification of Geometric Effects on Long-term Structural Stability of Ti/Au Multi-layered Micro-cantilevers 澄清几何效应对钛/金多层微悬臂长期结构稳定性的影响

Micro and Nano Engineering Pub Date : 2024-03-13 DOI: 10.1016/j.mne.2024.100244

Ryosuke Miyai , Tomoyuki Kurioka , Chun-Yi Chen , Tso-Fu Mark Chang , Akira Onishi , Parthojit Chakraborty , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone

{"title":"Clarification of Geometric Effects on Long-term Structural Stability of Ti/Au Multi-layered Micro-cantilevers","authors":"Ryosuke Miyai , Tomoyuki Kurioka , Chun-Yi Chen , Tso-Fu Mark Chang , Akira Onishi , Parthojit Chakraborty , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone","doi":"10.1016/j.mne.2024.100244","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100244","url":null,"abstract":"<div><p>A gold micro-electro-mechanical-systems (Au-MEMS) capacitive accelerometer having Ti/Au multi-layered structures is a promising device to detect very weak accelerations, such as muscle sounds, because of the high mass density of Au. However, Au is a soft metal, which raises concerns about the structural stability of the Au-MEMS capacitive accelerometers for practical use. In this work, we clarify the key geometric parameters to enhance their long-term structural stability by conducting a long-term vibration test for a total of 240 Ti/Au multi-layered micro-cantilevers with different geometric parameters, such as the length, width, and thickness of the micro-cantilevers, and the number of Ti/Au multi-layered structures. The long-term structural stability is evaluated from the change in the tip height of the micro-cantilevers before and after the vibration tests. These tests demonstrate that the micro-cantilevers with a shorter length, larger thickness, and more Ti/Au multi-layered structures are found to show better long-term structural stability.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100244"},"PeriodicalIF":0.0,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000078/pdfft?md5=07c8b696eec7ebecb309f899837f7237&pid=1-s2.0-S2590007224000078-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140160885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0