Micro and Nano Engineering最新文献

{"title":"Fabrication of a hybrid device for the integration of light-triggered proton pumps","authors":"Jacqueline Figueiredo da Silva ,&nbsp;Vesna Bacheva ,&nbsp;Ute Drechsler ,&nbsp;Philippe Nicollier ,&nbsp;Steffen Reidt ,&nbsp;Dimitrios Fotiadis ,&nbsp;Armin Knoll ,&nbsp;Heiko Wolf","doi":"10.1016/j.mne.2024.100250","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100250","url":null,"abstract":"<div><p>Biological ion pumps, such as bacteriorhodopsin (bR), utilize photons to move ions against concentration gradients, offering energy harvesting and spatiotemporal control of chemical gradients. This capability goes far beyond the capabilities of today's synthetic devices, suggesting a hybrid approach to embed bRs in synthetic devices in order to direct the proton flow towards useful system applications. In this study, a hybrid silicon-based nanochannel network with integrated purple membranes (PM) containing bR was fabricated. The fabrication method combines thermal scanning probe lithography, etching techniques, atomic layer deposition, plasma-enhanced chemical vapor deposition, and photolithography to create devices with buried nanochannels on silicon substrates. PM patches were deposited onto specified sites by a tunable nanofluidic confinement apparatus. The resulting device holds the potential for locally controlling directed ion transport in micrometer scale devices, a first step towards applications, such as locally affected proton catalyzed chemical reaction networks. Furthermore, this fabrication strategy, employing a maskless overlay, is a tool for constructing intricate nanofluidic network designs which are mechanically robust and straightforward to fabricate.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100250"},"PeriodicalIF":0.0,"publicationDate":"2024-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000133/pdfft?md5=907b0512bf199bb1eefa3b01cb6f097e&pid=1-s2.0-S2590007224000133-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140347770","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Dependence of Structural Design on Effective Young's Modulus of Ti/Au Multi-layered Micro-cantilevers","authors":"Shunkai Watanabe ,&nbsp;Tomoyuki Kurioka ,&nbsp;Chun-Yi Chen ,&nbsp;Tso-Fu Mark Chang ,&nbsp;Akira Onishi ,&nbsp;Parthojit Chakraborty ,&nbsp;Katsuyuki Machida ,&nbsp;Hiroyuki Ito ,&nbsp;Yoshihiro Miyake ,&nbsp;Masato Sone","doi":"10.1016/j.mne.2024.100249","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100249","url":null,"abstract":"<div><p>Gold-based micro-electro-mechanical-systems (Au-MEMS) capacitive accelerometers can simultaneously realize high sensitivity and miniaturization because of the high mass density of Au. In order to further improve the sensitivity of the Au-MEMS capacitive accelerometers, Young's modulus of the cantilever-like spring part connected to the movable component is a key parameter. Considering the size effect in the mechanical property of metallic materials on micro-scale, the design of the spring part is expected to reflect their Young's modulus; that is, effective Young's modulus (<em>E</em>_eff). In this study, we clarify effects of the structural designs of the Au-based micro-cantilevers on their <em>E</em>_eff by experiments and finite element analyses (FEA) simulations. The <em>E</em>_eff of the Au micro-cantilevers having Ti/Au multi-layered structures is evaluated by resonance frequency method, which demonstrates the key structural parameters affecting their <em>E</em>_eff. The FEA calculations show a consistent trend with that observed in the experimental results.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100249"},"PeriodicalIF":0.0,"publicationDate":"2024-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000121/pdfft?md5=9023396f9b43780109efb15a52677e42&pid=1-s2.0-S2590007224000121-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140342104","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Enabling focused ion beam sample preparation for application in reverse tip sample scanning probe microscopy","authors":"P. Lagrain,&nbsp;K. Paulussen,&nbsp;E. Grieten,&nbsp;G. Van den Bosch,&nbsp;S. Rachidi,&nbsp;D. Yudistira,&nbsp;L. Wouters,&nbsp;T. Hantschel","doi":"10.1016/j.mne.2024.100247","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100247","url":null,"abstract":"<div><p>Focused ion beam (FIB) has become a powerful tool for transmission electron microscopy sample preparation in the nanoelectronics industry and has in recent years also shown its benefits for specific preparation steps in electrical scanning probe microscopy (SPM). Most recently, a novel SPM approach – so-called reverse tip sample (RTS) SPM – has been proposed in which the position of sample and tip are switched compared to standard SPM; in RTS SPM the sample is attached to the end of a cantilever beam. To achieve this configuration, the region of interest must first be extracted from a substrate and then needs to be reliably fixed to the cantilever by FIB. Therefore, we have explored and developed dedicated FIB preparation methods for RTS SPM in this work. Our established procedures ensure a strong mechanical and good electrical connection of the sample to the cantilever for both cross-section and top view sample preparation. Furthermore, we introduce an approach for mounting samples from a full wafer size workflow. This paper presents the developed FIB procedures and discusses the quality and stability of all mounted samples and their electrical evaluation in RTS SPM.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100247"},"PeriodicalIF":0.0,"publicationDate":"2024-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000108/pdfft?md5=1c3e88b8ea444e476143b485f6d4ff3c&pid=1-s2.0-S2590007224000108-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140321015","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Sky-mimesis, a path from nanotechnology to visual arts: A review of art applications of aerogels","authors":"Ioannis Michaloudis ,&nbsp;A. Venkateswara Rao ,&nbsp;Kazuyoshi Kanamori","doi":"10.1016/j.mne.2024.100248","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100248","url":null,"abstract":"<div><p>Interdisciplinary research between science and art is becoming more active, because it stimulates the both fields with far different viewpoints. In the field of aerogels, exceptionally low-density porous materials, the authors have been promoting interdisciplinary research based on a unifying aesthetic idea. Since typical silica aerogels consist of nano-scaled colloidal skeletons and mesopores, they show high light transmittance and slight scattering that allows aerogels to be impressive bluish piece of the sky. With various techniques such as molding, inclusion, and surface machining/patterning, a number of artworks has been expressed with the material silica aerogel interpreting aerogels to the sky through fruitful collaborations between an artist and scientists including the present co-authors. In the present paper, we discuss the interactions between human and materials in visual arts and photography, and show how the aerogels are expended as the <em>materia prima</em> for the artworks of the first author. We will emphasize how the synergy between artists and scientists drove and stimulated the both fields through collaborative works.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100248"},"PeriodicalIF":0.0,"publicationDate":"2024-03-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S259000722400011X/pdfft?md5=e501195e7e66af4a0a01b536dde0fd45&pid=1-s2.0-S259000722400011X-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140328781","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"2D BDiode – A switchable bidirectional diode for analog electronic circuits fabricated entirely from 2D materials","authors":"Christian D. Matthus ,&nbsp;Phanish Chava ,&nbsp;Kenji Watanabe ,&nbsp;Takashi Taniguchi ,&nbsp;Thomas Mikolajick ,&nbsp;Artur Erbe","doi":"10.1016/j.mne.2024.100246","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100246","url":null,"abstract":"<div><p>The advent of two-dimensional (2D) materials has led to innovative and compact electronic devices with remarkable properties. In this work, we introduce a switchable bidirectional diode (2D BDiode), fabricated entirely using different 2D materials, that serves as a fundamental building block for various analog circuit applications. This proof-of-concept diode exhibits the ability to control the flow of current in both forward and reverse bias configurations, enabling advanced functionality in the realm of analog circuit design. We provide a SPICE-based model for the diode based on current-voltage device characterization, capturing its behavior under different biasing conditions, and finally demonstrate a few potential use cases of the 2D BDiode including AC/DC conversion, DC/AC conversion and charge pump circuits.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100246"},"PeriodicalIF":0.0,"publicationDate":"2024-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000091/pdfft?md5=0f99259ac1e3a5fba569346b5db40a4b&pid=1-s2.0-S2590007224000091-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140290679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"High force compression mode to Shear mode piezoelectric energy harvesting","authors":"Fergus J.E. Crawley,&nbsp;Zhenhua Luo","doi":"10.1016/j.mne.2024.100245","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100245","url":null,"abstract":"<div><p>This study is to develop structures with the ability to convert a compression force into radial extension or shear force, to increase power output through piezo shear mode. In this work, a piezoceramic-spring system was developed with two types of force-spreading spring configurations, the Belleville disc springs and the crinkle washer. A force loading profile is applied to a piezoceramic element and structure causing the force to be distributed in different directions when compared to a conventional helical spring damping system or compression. The performances of these novel structures were studied using Multiphysics simulation and experiments. This work shows that both the Belleville disc and crinkle washer produce improved energy output between 15 and 22% compared to compression alone, whilst the Belleville disc spring outperformed a crinkle washer in both simulations and experiments. The results show that converting compression to shear force in energy harvesting could be a potential approach to increase the energy efficiency and energy density.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100245"},"PeriodicalIF":0.0,"publicationDate":"2024-03-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S259000722400008X/pdfft?md5=0073b73976bff7096b56afb0695d8807&pid=1-s2.0-S259000722400008X-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140540652","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Normally closed thermally activated irreversible solid state erbium hydrides switches","authors":"Michael J. Abere,&nbsp;Richard J. Gallegos,&nbsp;Matthew W. Moorman,&nbsp;Mark A. Rodriguez,&nbsp;Paul G. Kotula,&nbsp;Rick A. Kellogg,&nbsp;David P. Adams","doi":"10.1016/j.mne.2024.100243","DOIUrl":"10.1016/j.mne.2024.100243","url":null,"abstract":"<div><p>A thermally driven, micrometer-scale switch technology has been created that utilizes the ErH₃/Er₂O₃ materials system. The technology is comprised of novel thin film switches, interconnects, on-board micro-scale heaters for passive thermal environment sensing, and on-board micro-scale heaters for individualized switch actuation. Switches undergo a thermodynamically stable reduction/oxidation reaction leading to a multi-decade (&gt;11 orders) change in resistance. The resistance contrast remains after cooling to room temperature, making them suitable as thermal fuses. An activation energy of 290 kJ/mol was calculated for the switch reaction, and a thermos-kinetic model was employed to determine switch times of 120 ms at 560 °C with the potential to scale to 1 ms at 680 °C.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100243"},"PeriodicalIF":0.0,"publicationDate":"2024-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000066/pdfft?md5=02ad29251ac9b08fe75c93a60d170ab3&pid=1-s2.0-S2590007224000066-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140282277","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Clarification of Geometric Effects on Long-term Structural Stability of Ti/Au Multi-layered Micro-cantilevers","authors":"Ryosuke Miyai ,&nbsp;Tomoyuki Kurioka ,&nbsp;Chun-Yi Chen ,&nbsp;Tso-Fu Mark Chang ,&nbsp;Akira Onishi ,&nbsp;Parthojit Chakraborty ,&nbsp;Katsuyuki Machida ,&nbsp;Hiroyuki Ito ,&nbsp;Yoshihiro Miyake ,&nbsp;Masato Sone","doi":"10.1016/j.mne.2024.100244","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100244","url":null,"abstract":"<div><p>A gold micro-electro-mechanical-systems (Au-MEMS) capacitive accelerometer having Ti/Au multi-layered structures is a promising device to detect very weak accelerations, such as muscle sounds, because of the high mass density of Au. However, Au is a soft metal, which raises concerns about the structural stability of the Au-MEMS capacitive accelerometers for practical use. In this work, we clarify the key geometric parameters to enhance their long-term structural stability by conducting a long-term vibration test for a total of 240 Ti/Au multi-layered micro-cantilevers with different geometric parameters, such as the length, width, and thickness of the micro-cantilevers, and the number of Ti/Au multi-layered structures. The long-term structural stability is evaluated from the change in the tip height of the micro-cantilevers before and after the vibration tests. These tests demonstrate that the micro-cantilevers with a shorter length, larger thickness, and more Ti/Au multi-layered structures are found to show better long-term structural stability.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100244"},"PeriodicalIF":0.0,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000078/pdfft?md5=07c8b696eec7ebecb309f899837f7237&pid=1-s2.0-S2590007224000078-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140160885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A novel dual-parameter proximity and touch sensor using SiO2 nanoparticles and NaCl with commercial acrylic-based encapsulation","authors":"Michelle Cedeño Mata,&nbsp;Ana Coloma Velez,&nbsp;Ramon Bragos,&nbsp;Manuel Dominguez-Pumar,&nbsp;Sandra Bermejo","doi":"10.1016/j.mne.2024.100242","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100242","url":null,"abstract":"<div><p>This study shows the development and analysis of a novel capacity proximity sensor (CPS) based on a sensing layer made up of a mixture of silicon dioxide nanoparticles (SiO₂) and sodium chloride (NaCl), and an encapsulation layer based on a commercial acrylic-based varnish. The encapsulated and non-encapsulated proximity sensors were characterised using impedance spectroscopy (IS), revealing that the resulting impedimetric and capacitance responses exhibit different sensitivities and working sensing ranges. The non-encapsulated sensor presents impedimetric and maximum capacitive sensitivities of 0.0775 cm⁻¹ and -0.9831 cm⁻¹, respectively, within a 2–14 cm sensing range. In contrast, the encapsulated CPS shows maximum impedimetric and capacitive sensitivities of 0.3447 cm⁻¹ and −3.349 cm⁻¹, respectively, and an operation sensing range of 0–3 cm. The results show a 75% decrease in the total sensing range that could be attributed to: (i) a reduction of the effective sensing area due to a reduction of the roughness as demonstrated by SEM analysis, (ii) insulation effects limiting the impact of the material under test (MUT) on the charge carriers distribution, and (iii) decreased charge carrier density involved in the sensing process. Despite the reduced operational range, the encapsulation layer maintains the dual-parameter sensing capabilities, preserves the integrity of the sensing layer, and enables its dual functionality as a proximity and touch sensor. The reported comparison between the encapsulated and non-encapsulated CPSs highlights the effects of the encapsulation layer. The encapsulated version introduces a simple, fast, and cost-effective novel approach for developing CPSs that outperforms some reported CPSs in terms of reliability due to its dual-parameter sensing capability and sensitivity.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100242"},"PeriodicalIF":0.0,"publicationDate":"2024-03-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000054/pdfft?md5=54854ebd3a7553184c6bff9e4f3ed156&pid=1-s2.0-S2590007224000054-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140551702","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Design and fabrication of an opto-mechanical antenna in the NIR range","authors":"Daniyal Khosh Maram ,&nbsp;Xavier Borrisé ,&nbsp;Joan Garcia-Garcia ,&nbsp;Raul Ruiz ,&nbsp;Xavier Cartoixà ,&nbsp;Gabriel Abadal","doi":"10.1016/j.mne.2024.100241","DOIUrl":"https://doi.org/10.1016/j.mne.2024.100241","url":null,"abstract":"<div><p>In this study we present a novel device for the direct transduction of optical radiation in the near-infrared region into mechanical actuation, which is based on a plasmonic optical nanoantenna integrated in a microcantilever. We propose and demonstrate the feasibility of a simple fabrication process consisting in the nano-tailoring of a commercially available Atomic Force Microscope (AFM) cantilever by means of the Focused Ion Beam (FIB) milling technique. Furthermore, the comprehensive analysis of the device performance characteristics included in this work reveals the different sensitivity values of these characteristics to the fabrication process tolerances of the most relevant geometric design parameters.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"23 ","pages":"Article 100241"},"PeriodicalIF":0.0,"publicationDate":"2024-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2590007224000042/pdfft?md5=035a50e22d9f7691eae1113a50bbbf62&pid=1-s2.0-S2590007224000042-main.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140103873","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}