Cross-sectional geometry effect on bending strength of gold micro-cantilever with trapezoidal cross-section

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Ryohei Hori , Kazuya Fujita , Chun Yi Chen , Tomoyuki Kurioka , Jhen-Yang Wu , Tso-Fu Mark Chang , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone
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引用次数: 0

Abstract

Gold is a promising material for movable components in MEMS devices by the high mass density, which allows reduction of the Brownian noise. Mechanical properties of metallic materials are known to be affected by the sample size effect. When bending test is utilized, the sample geometry effect is another factor. In this study, effects of the shape of the cross-section, or the cross-sectional geometry effect, are evaluated using micro-cantilevers with a trapezoidal cross-section. The yield stresses are ranged from 112 MPa to 185 MPa in micro-cantilevers composed of single crystalline gold, and the yield stresses varied from 372 MPa to 489 MPa in polycrystalline gold micro-cantilevers. The yield stress is found to be higher in the micro-cantilever having a smaller ratio of the top width over the bottom width, which demonstrates the cross-sectional geometry effect. Also, the cross-sectional geometry effect is more significant in the polycrystalline micro-cantilevers.

Abstract Image

横截面几何形状对梯形截面金微型悬臂弯曲强度的影响
金的质量密度高,可降低布朗噪声,因此是微机电系统设备中可移动部件的理想材料。众所周知,金属材料的机械性能会受到样品尺寸效应的影响。在使用弯曲测试时,样品的几何形状效应是另一个因素。在本研究中,使用梯形横截面的微型悬臂评估了横截面形状或横截面几何效应的影响。由单晶金组成的微悬臂的屈服应力介于 112 兆帕至 185 兆帕之间,而多晶金微悬臂的屈服应力则介于 372 兆帕至 489 兆帕之间。发现顶宽与底宽之比小的微悬臂的屈服应力更高,这说明了横截面几何效应。此外,横截面几何效应在多晶微悬臂中更为显著。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Micro and Nano Engineering
Micro and Nano Engineering Engineering-Electrical and Electronic Engineering
CiteScore
3.30
自引率
0.00%
发文量
67
审稿时长
80 days
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