Effects of the strain rate in compression of electrodeposited gold micro-pillars toward the design of MEMS components

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Micro and Nano Engineering Pub Date : 2024-04-23 DOI:10.1016/j.mne.2024.100254

Shota Kanno , Taro Omura , Jhen-Yang Wu , Tomoyuki Kurioka , Chun-Yi Chen , Parthojit Chakraborty , Katsuyuki Machida , Hiroyuki Ito , Yoshihiro Miyake , Masato Sone , Tso-Fu Mark Chang

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Abstract

In this study, the strain rate dependence in yield strengths of electrodeposited gold micro-pillars is evaluated for the design of movable components in MEMS devices. The micro-pillars are fabricated from electrodeposited gold by focused ion beam system. The strain rate dependence is quantified by the strain rate sensitivity, and the strain rate sensitivity is calculated from the yield strength obtained from compression tests of the gold micro-pillars having different sizes at different strain rates. An increase in the yield strength following a reduction in the pillar size is observed, which is the sample size effect. Also, weakening of the yield strength is observed following a decrease in the strain rate, which is the strain rate dependence, and the strain rate sensitivity of the gold micro-pillars is found be at roughly 0.03.

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电沉积金微柱压缩应变率对微机电系统元件设计的影响

本研究评估了电沉积金微柱屈服强度的应变率依赖性，以用于微机电系统设备中可移动部件的设计。微柱由电沉积金通过聚焦离子束系统制成。应变速率依赖性由应变速率灵敏度来量化，而应变速率灵敏度则是根据不同尺寸的金微柱在不同应变速率下进行压缩试验所获得的屈服强度计算得出的。可以观察到金微柱尺寸减小后屈服强度增加，这就是样品尺寸效应。此外，应变速率降低时，屈服强度也会减弱，这就是应变速率依赖性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Micro and Nano Engineering Engineering-Electrical and Electronic Engineering

CiteScore

3.30

自引率

0.00%

发文量

审稿时长

80 days