{"title":"High temperature silicon-on-insulator pressure sensor technology","authors":"R.L. Johnson","doi":"10.1109/HITEN.1999.827460","DOIUrl":"https://doi.org/10.1109/HITEN.1999.827460","url":null,"abstract":"In this paper the recent development of a high sensitivity high temperature Silicon-On-Insulator (SOI) piezoresistive sensor technology that provides pressure sensing, temperature sensing, and feedback and bias resistor networks all integrated on a single miniature chip that measures only 0.23 cm software (90 mils square) is reported. This advanced sensor technology also provides sheet resistivities of approximated 3 times greater than conventional bulk silicon sensors while maintaining the same dopant concentration of the p-type resistor elements. The new chip design features a high impedance 30 K/spl Omega/ pressure bridge which provides a full scale output of 200 milli-volt per volt of excitation. This corresponds to a /spl Delta/R/R gage factor of 0.20. Also featured is a high impedance 60 K/spl Omega/ temperature bridge with an output sensitivity of 1.2 milli-volt per /spl deg/C per volt of excitation. This high temperature SOI sensor technology complements Honeywell's HTMOS high temperature electronics product line which provides both analog devices (including quad amplifiers and switches, fluxes, A/D's, and voltage references) and digital devices (including SRAMs, microcontrollers and clock generators) with operation up to 300/spl deg/C. This dual capability of high temperature sensors and high temperature electronics provides all the required functional blocks needed for designing complete sensor systems for an array of high temperature applications.","PeriodicalId":297771,"journal":{"name":"HITEN 99. Third European Conference on High Temperature Electronics. (IEEE Cat. No.99EX372)","volume":"156 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130686001","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Diffusions barrier, an important layer for high temperature bonds","authors":"J. Wagner, A. Dommann","doi":"10.1109/HITEN.1999.827489","DOIUrl":"https://doi.org/10.1109/HITEN.1999.827489","url":null,"abstract":"Summary form only given. Sputtered Ta-Si-N films are investigated in view of their use as diffusion barriers. Deposition conditions and film properties such as atomic composition, crystallization temperature, surface roughness and, in particular, the amorphous structure as a function of the nitride concentration were analyzed by RBS, XRD and AFM. Their application as diffusion barriers in electromechanical microstructures and for interconnects with glass sealing are discussed.","PeriodicalId":297771,"journal":{"name":"HITEN 99. Third European Conference on High Temperature Electronics. (IEEE Cat. No.99EX372)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131594648","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Packaging and thermomechanical challenges for high temperature electronics","authors":"B. Michel, D. Vogel","doi":"10.1109/HITEN.1999.827463","DOIUrl":"https://doi.org/10.1109/HITEN.1999.827463","url":null,"abstract":"Summary form only given. The development of new solutions for high temperature applications in the field of automotive electronics has become very important in recent years. However, it has been known to constitute a very complicated area of research. Serious troubles are connected with the thermal misfit problems. In electronic packaging for automotive electronics, various problems have to be solved. Due to the thermomechanical behaviour of solder joints, new packaging strategies are required (e.g. chip scale package, /spl mu/BGA and flip chip interconnection). The classical tin-lead solders have to be removed. Another problem is the \"polymeric material problem\". The creep behaviour in high temperature regions leads to a very complicated material behaviour which required new steps for advanced measures in the design and testing processes. The authors present their experience in the field of reliability analysis in automotive electronics and microsystems technology applications (e.g. airbag sensors) taking into account both simulation and experiments mainly in the field of automotive sensors and packaging for high temperature applications. In addition, the problem of CTE measurement by the new microDAC method in high temperature automotive electronics is discussed.","PeriodicalId":297771,"journal":{"name":"HITEN 99. Third European Conference on High Temperature Electronics. (IEEE Cat. No.99EX372)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116667966","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Process technology and high temperature performance of 6H-SiC MOS devices","authors":"U. Schmid, W. Wondrak","doi":"10.1109/HITEN.1999.827495","DOIUrl":"https://doi.org/10.1109/HITEN.1999.827495","url":null,"abstract":"In this article, processing and characterization of 6H-SiC MOS devices is described. We start with gate controlled diode measurements determining the thermally grown oxide quality, describe the high temperature behavior of single enhancement-mode MOSFETs and present the static transfer characteristic of a monolithic differential amplifier. The gate oxides are investigated after five different contact anneal temperatures between 900/spl deg/C and 1150/spl deg/C. Contact annealing temperatures between 900/spl deg/C and 1050/spl deg/C cause only a slight increase in N/sub it/ from 1.0/spl middot/10/sup 12/ cm/sup -2/ to 1.6/spl middot/10/sup -2/ cm/sup -2/. Leakage currents in the pre-tunneling region are very low and amount to about 4/spl middot/10/sup -9/ A/cm/sup 2/. Threshold implantations enable the realization of depletion- and enhancement-mode devices on the same wafer. This technology proves to be suited for the fabrication of integrated circuits.","PeriodicalId":297771,"journal":{"name":"HITEN 99. Third European Conference on High Temperature Electronics. (IEEE Cat. No.99EX372)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117161382","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"The influence of the Hall scattering factor on the determination of activation energies of the nitrogen donors in 4H-SiC epitaxial layers","authors":"G. Rutsch, R. Devaty, W.J. Chovke","doi":"10.1109/HITEN.1999.827494","DOIUrl":"https://doi.org/10.1109/HITEN.1999.827494","url":null,"abstract":"In 4H-SiC, the most common donor impurity, nitrogen, is not always completely ionized at room temperature, so its activation energy can have a direct impact on device characteristics. Values of the activation energies of the nitrogen donors in SiC as determined by Hall effect measurements are frequently higher than values determined by optical measurements which should give a maximum value. The Hall scattering factor r/sub H/ can skew activation energies if one uses the common approximation r/sub H/=1, so an investigation of this quantity was undertaken. r/sub H/ can be measured if magnetic fields larger an 1//spl mu//sub D/ are available where /spl mu//sub D/ is the electron drift mobility. The Hall scattering factor was measured on four 4H-SiC epitaxial layers at the National High Field Magnet Lab (NHMFL) in Tallahassee, Florida, USA with magnetic fields of up to 30 T. Nitrogen donor activation energies extracted from carrier concentration data corrected with Hall scattering factor information are within experimental error equal to these. The correction is not significant and cannot account for the experimental difference between electrical and optical data. Details of the procedure for extracting activation energies are presented.","PeriodicalId":297771,"journal":{"name":"HITEN 99. Third European Conference on High Temperature Electronics. (IEEE Cat. No.99EX372)","volume":"700 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115019113","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Relationships between radiation tolerant and high temperature electronics","authors":"R. Sharp, S. Pater, J. Cook, R. Peat","doi":"10.1109/HITEN.1999.827485","DOIUrl":"https://doi.org/10.1109/HITEN.1999.827485","url":null,"abstract":"Summary form only given. Five aspects of technology have to be addressed by the designer on order that his system operates successfully in a hostile environment: basic effects on operating parameters of semiconductor components; basic effects on operating parameters of passive components; mechanical effects on packaging, substrates, and adhesives; electrochemical effects on semiconductor junctions and solders; and system effects, including heat dissipation, off-gassing and chemical by-products. Each of these aspects is examined to identify the commonalities between high temperature and radiation tolerant applications, highlighting the areas where one community can learn and benefit from the other.","PeriodicalId":297771,"journal":{"name":"HITEN 99. Third European Conference on High Temperature Electronics. (IEEE Cat. No.99EX372)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128207962","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. Manca, W. Wondrak, K. Croes, W. De Ceuninck, V. D’Haeger, L. de Schepper, L. Tielemans
{"title":"The Arrhenius relation for electronics in extreme temperature conditions","authors":"J. Manca, W. Wondrak, K. Croes, W. De Ceuninck, V. D’Haeger, L. de Schepper, L. Tielemans","doi":"10.1109/HITEN.1999.827344","DOIUrl":"https://doi.org/10.1109/HITEN.1999.827344","url":null,"abstract":"In the field of high temperature electronics some doubts have been expressed about the validity of the Arrhenius relation. In this paper the in-situ electrical measurement technique is presented to investigate the temperature dependence of failure mechanisms and conduction mechanisms of several material systems in a broad temperature region. Measurement results will be presented showing single-activation energy and multiple-activation energy behaviour of a.o. electrical conduction, degradation of resistances, electromigration and time dependent dielectric breakdown at high temperature conditions.","PeriodicalId":297771,"journal":{"name":"HITEN 99. Third European Conference on High Temperature Electronics. (IEEE Cat. No.99EX372)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133200124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Rudenko, V. Lysenko, V. Kilchytska, A. Rudenko, J. Colinge
{"title":"Properties of high-temperature off-state currents in SOI MOSFETs derived from the diffusion mechanism","authors":"T. Rudenko, V. Lysenko, V. Kilchytska, A. Rudenko, J. Colinge","doi":"10.1109/HITEN.1999.827468","DOIUrl":"https://doi.org/10.1109/HITEN.1999.827468","url":null,"abstract":"In this paper, off-state leakage currents in long-channel SOI MOSFETs are investigated by simulation and measurements in the range 50-320/spl deg/C. The general trends of high-temperature off-state currents are interpreted in terms of the diffusion mechanism. The back-gate biasing and silicon film thinning effects are considered. Both single- and double-gate operation cases are analyzed.","PeriodicalId":297771,"journal":{"name":"HITEN 99. Third European Conference on High Temperature Electronics. (IEEE Cat. No.99EX372)","volume":"46 11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125701345","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Adriaensen, V. Dessard, P. Delatte, J.R. Querol, D. Flandre, S. Richter
{"title":"High-temperature characterization of a PD SOI CMOS process with LDMOS and lateral bipolar structures","authors":"S. Adriaensen, V. Dessard, P. Delatte, J.R. Querol, D. Flandre, S. Richter","doi":"10.1109/HITEN.1999.827467","DOIUrl":"https://doi.org/10.1109/HITEN.1999.827467","url":null,"abstract":"High-temperature characterization of a 0.8 /spl mu/m partially-depleted (PD) silicon-on-insulator (SOI) CMOS process is reported. The process is designed for mixed analog/digital/high-voltage applications. The measurements have been realized on n-MOSFETs, on lateral bipolar transistors and on LDMOS transistors and demonstrate the interest of the process under consideration.","PeriodicalId":297771,"journal":{"name":"HITEN 99. Third European Conference on High Temperature Electronics. (IEEE Cat. No.99EX372)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124854495","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A bandgap circuit operating up to 300/spl deg/C using lateral bipolar transistors in thin-film CMOS-SOI technology","authors":"S. Adriaensen, V. Dessard, D. Flandre","doi":"10.1109/HITEN.1999.827461","DOIUrl":"https://doi.org/10.1109/HITEN.1999.827461","url":null,"abstract":"A voltage reference circuit with 3V output has been designed and implemented in a SOI (Silicon-On-Insulator) FD (Fully-Depleted) CMOS technology for very wide temperature range applications. The design integrates thin-film lateral bipolar transistors and diffusion resistors. The circuit has been fabricated and tested over the full operating temperature range (25/spl deg/C-300/spl deg/C) and features a temperature coefficient lower than 100 ppm//spl deg/C.","PeriodicalId":297771,"journal":{"name":"HITEN 99. Third European Conference on High Temperature Electronics. (IEEE Cat. No.99EX372)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125786902","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}