S. Kulkarni, S. Pae, Zhanping Chen, W. Hafez, B. Pedersen, A. Rahman, T. Tong, U. Bhattacharya, C. Jan, K. Zhang
{"title":"A 32nm high-k and metal-gate anti-fuse array featuring a 1.01µm2 1T1C bit cell","authors":"S. Kulkarni, S. Pae, Zhanping Chen, W. Hafez, B. Pedersen, A. Rahman, T. Tong, U. Bhattacharya, C. Jan, K. Zhang","doi":"10.1109/VLSIT.2012.6242470","DOIUrl":"https://doi.org/10.1109/VLSIT.2012.6242470","url":null,"abstract":"A 1 k-bit high-density OTP (One Time Programmable)-ROM array featuring a new anti-fuse memory is presented using 32nm high-k (HK) and metal-gate (MG) CMOS process. Our 32nm HK+MG SOC process technology enables smallest reported one-transistor one-capacitor (1T1C) bit cell area measuring 1.01μm2. The 32-row by 32-column array with a programmable sensing scheme demonstrates yield exceeding 99.9% and robust reliability.","PeriodicalId":266298,"journal":{"name":"2012 Symposium on VLSI Technology (VLSIT)","volume":"123 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124501829","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Lee, J. Johnson, B. Greene, A. Chou, K. Zhao, M. Chowdhury, J. Sim, A. Kumar, D. Kim, A. Sutton, S. Ku, Y. Liang, Y. Wang, D. Slisher, K. Duncan, P. Hyde, R. Thoma, J. Deng, Y. Deng, R. Rupani, R. Williams, L. Wagner, C. Wermer, H. Li, B. Johnson, D. Daley, J. Plouchart, S. Narasimha, C. Putnam, E. Maciejewski, W. Henson, S. Springer
{"title":"Advanced modeling and optimization of high performance 32nm HKMG SOI CMOS for RF/analog SoC applications","authors":"S. Lee, J. Johnson, B. Greene, A. Chou, K. Zhao, M. Chowdhury, J. Sim, A. Kumar, D. Kim, A. Sutton, S. Ku, Y. Liang, Y. Wang, D. Slisher, K. Duncan, P. Hyde, R. Thoma, J. Deng, Y. Deng, R. Rupani, R. Williams, L. Wagner, C. Wermer, H. Li, B. Johnson, D. Daley, J. Plouchart, S. Narasimha, C. Putnam, E. Maciejewski, W. Henson, S. Springer","doi":"10.1109/VLSIT.2012.6242498","DOIUrl":"https://doi.org/10.1109/VLSIT.2012.6242498","url":null,"abstract":"We demonstrate advanced modeling and optimization of 32nm high-K metal gate (HKMG) SOI CMOS technology for high-speed digital and RF/analog system-on-chip applications. To enable high-performance RF/analog circuit design, we present challenging device modeling features and their enhancements. At nominal Lpoly, floating-body NFET and PFET demonstrate peak fT of 300GHz and fMAX of higher than 350GHz with excellent model-to-hardware accuracy. For precision analog circuit design, body-contacted (BC) FETs and various passives are offered, and their performance and modeling accuracy are co-optimized to push the technology limit and achieve state-of-the-art circuits, e.g., 28Gb/s serial link transceiver and LC-tank VCO operating at higher than 100GHz.","PeriodicalId":266298,"journal":{"name":"2012 Symposium on VLSI Technology (VLSIT)","volume":"172 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121972355","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y. Yamamoto, H. Makiyama, T. Tsunomura, T. Iwamatsu, H. Oda, N. Sugii, Y. Yamaguchi, T. Mizutani, T. Hiramoto
{"title":"Poly/high-k/SiON gate stack and novel profile engineering dedicated for ultralow-voltage silicon-on-thin-BOX (SOTB) CMOS operation","authors":"Y. Yamamoto, H. Makiyama, T. Tsunomura, T. Iwamatsu, H. Oda, N. Sugii, Y. Yamaguchi, T. Mizutani, T. Hiramoto","doi":"10.1109/VLSIT.2012.6242485","DOIUrl":"https://doi.org/10.1109/VLSIT.2012.6242485","url":null,"abstract":"We demonstrated Silicon on Thin Buried oxide (SOTB) CMOS especially designed for ultralow-voltage (ULV) operation down to 0.4 V for the first time. Utilizing i) dual-poly gate stack with high-k having quarter-gap work functions best for the ULV CMOS operation, and ii) a novel “local ground plane (LGP)” structure that significantly improves short-channel effect (Vth roll off) without increasing local variability unlike halo for bulk, low-leakage SRAM operation was demonstrated with adaptive-body-bias (ABB) scheme.","PeriodicalId":266298,"journal":{"name":"2012 Symposium on VLSI Technology (VLSIT)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115963664","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Morvan, F. Andrieu, M. Cassé, O. Weber, N. Xu, P. Perreau, J. Hartmann, J. Barbe, J. Mazurier, P. Nguyen, C. Fenouillet-Béranger, C. Tabone, L. Tosti, L. Brevard, A. Toffoli, F. Allain, D. Lafond, B. Nguyen, G. Ghibaudo, F. Boeuf, O. Faynot, T. Poiroux
{"title":"Efficiency of mechanical stressors in Planar FDSOI n and p MOSFETs down to 14nm gate length","authors":"S. Morvan, F. Andrieu, M. Cassé, O. Weber, N. Xu, P. Perreau, J. Hartmann, J. Barbe, J. Mazurier, P. Nguyen, C. Fenouillet-Béranger, C. Tabone, L. Tosti, L. Brevard, A. Toffoli, F. Allain, D. Lafond, B. Nguyen, G. Ghibaudo, F. Boeuf, O. Faynot, T. Poiroux","doi":"10.1109/VLSIT.2012.6242486","DOIUrl":"https://doi.org/10.1109/VLSIT.2012.6242486","url":null,"abstract":"We fabricated highly stressed Fully Depleted Silicon-On-Insulator (FDSOI) n and pMOSFETs reaching I<sub>ON,n</sub>/I<sub>ON,p</sub>=1148/1014μA/μm drive current at I<sub>OFF,n</sub>/I<sub>OFF,p</sub>=55/16nA/μm leakage current (V<sub>DD</sub>=1V) with excellent V<sub>T</sub>-matching (A<sub>VT</sub> <; 1.5mV.μm). These short channel performances are well correlated and quantitatively explained by the effectiveness of strained SOI (sSOI), Contact-Etch-Stop-Layers (CESL) and SiGe raised sources and drains. sSOI improves I<sub>ON,n</sub> up to 22% and degrades SiGe sources and drains efficiency for pMOSFETs. However, 0° (<;110>;) orientation remains the best configuration for high-stress pMOSFETs and provides the best trade-off for CMOS.","PeriodicalId":266298,"journal":{"name":"2012 Symposium on VLSI Technology (VLSIT)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126633954","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Kim, R. Hill, C. Young, D. Veksler, L. Morassi, S. Oktybrshky, J. Oh, C. Kang, D. Kim, J. D. del Alamo, C. Hobbs, P. Kirsch, R. Jammy
{"title":"InAs quantum-well MOSFET (Lg = 100 nm) with record high gm, fT and fmax","authors":"T. Kim, R. Hill, C. Young, D. Veksler, L. Morassi, S. Oktybrshky, J. Oh, C. Kang, D. Kim, J. D. del Alamo, C. Hobbs, P. Kirsch, R. Jammy","doi":"10.1109/VLSIT.2012.6242520","DOIUrl":"https://doi.org/10.1109/VLSIT.2012.6242520","url":null,"abstract":"This paper reports InAs quantum-well (QW) MOSFETs with record transconductance (g<sub>m,max</sub> = 1.73 mS/μm) and high-frequency performance (f<sub>T</sub> = 245 GHz and f<sub>max</sub> = 355 GHz) at L<sub>g</sub> = 100 nm. This record performance is achieved by using a low D<sub>it</sub> composite Al<sub>2</sub>O<sub>3</sub>/InP gate stack, optimized layer design and a high mobility InAs channel. This work is significant because it shows a possible III-V material pathway from In<sub>1-x</sub>Ga<sub>x</sub>As to InAs with similar processing and generalized characterization, including D<sub>it</sub>.","PeriodicalId":266298,"journal":{"name":"2012 Symposium on VLSI Technology (VLSIT)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126693842","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Jeon, Hojung Kim, Hyunsik Choi, I. Song, Seung‐Eon Ahn, C. J. Kim, Jaikwang Shin, U. Chung, I. Yoo, Kinam Kim
{"title":"High performance bilayer oxide transistor for gate driver circuitry implemented on power electronic devices","authors":"S. Jeon, Hojung Kim, Hyunsik Choi, I. Song, Seung‐Eon Ahn, C. J. Kim, Jaikwang Shin, U. Chung, I. Yoo, Kinam Kim","doi":"10.1109/VLSIT.2012.6242493","DOIUrl":"https://doi.org/10.1109/VLSIT.2012.6242493","url":null,"abstract":"The integration of electronically active oxide transistors onto silicon circuits represents an innovative approach to improving the performance of devices. In this paper, we present high performance oxide transistor for use as gate drive circuitry integrated on top of a power electronic device, providing a novel power system. Specifically, as a core device component in gate driver, oxide transistor exhibits remarkable performance such as, high mobility (23~47cm2/Vs) and high breakdown voltage (BV) of 60~340V despite low process temperatures (<;300°C). In addition, we demonstrate the dynamic behavior of the inverter and the latch produced by oxide transistor and thus a complete and functioning gate drive circuitry can be implemented on top of power management integrated circuit (PMIC) as depicted in the report.","PeriodicalId":266298,"journal":{"name":"2012 Symposium on VLSI Technology (VLSIT)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126415996","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
U. Avci, S. Hasan, D. Nikonov, R. Rios, K. Kuhn, I. Young
{"title":"Understanding the feasibility of scaled III–V TFET for logic by bridging atomistic simulations and experimental results","authors":"U. Avci, S. Hasan, D. Nikonov, R. Rios, K. Kuhn, I. Young","doi":"10.1109/VLSIT.2012.6242522","DOIUrl":"https://doi.org/10.1109/VLSIT.2012.6242522","url":null,"abstract":"A detailed comparison between III-V TFET's experimental characteristics and atomistic quantum mechanical predictions is reported to study the validity of the performance improvement predictions of a scaled TFET. Simulations did not employ any fitting parameters to match the experimental data, but instead used material and geometry parameters as the only inputs. The results show that the experimental and simulation characteristics are in reasonable agreement, suggesting that the experimental devices are without significant unknown effects or defects, and the atomistic simulations have good predictability. The differences between scaled TFET predictions and large experimental TFET devices are shown to be due to the geometry, meaning that improved electrostatics with thin body and double-gate (DG) is required for TFET scaling. Results demonstrate that the III-V TFET is a realistic candidate for future low-voltage logic applications.","PeriodicalId":266298,"journal":{"name":"2012 Symposium on VLSI Technology (VLSIT)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127632923","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Tanaka, H. Kino, R. Nakazawa, K. Kiyoyama, H. Ohno, M. Koyanagi
{"title":"Ultrafast parallel reconfiguration of 3D-stacked reconfigurable spin logic chip with on-chip SPRAM (SPin-transfer torque RAM)","authors":"T. Tanaka, H. Kino, R. Nakazawa, K. Kiyoyama, H. Ohno, M. Koyanagi","doi":"10.1109/VLSIT.2012.6242515","DOIUrl":"https://doi.org/10.1109/VLSIT.2012.6242515","url":null,"abstract":"We have developed novel 3D-stacked reconfigurable spin logic chip having ultrafast on-chip SPRAM to overcome drawbacks of conventional reconfigurable LSIs. Two reconfigurable spin logic chips were carefully designed and successfully stacked using 3D integration technology. From the SPRAM cell evaluation, the fastest write speed of 5 ns was obtained in the circuits. To realize higher performance reconfigurable LSIs, parallel reconfiguration was fully demonstrated for the stacked reconfigurable spin logic chips for the first time. Both ultrafast on-chip SPRAM and 3D-stacked structure will open a new era of reconfigurable LSIs.","PeriodicalId":266298,"journal":{"name":"2012 Symposium on VLSI Technology (VLSIT)","volume":"545 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133108841","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Ninomiya, T. Takagi, Z. Wei, S. Muraoka, R. Yasuhara, K. Katayama, Y. Ikeda, K. Kawai, Y. Kato, Y. Kawashima, S. Ito, T. Mikawa, K. Shimakawa, K. Aono
{"title":"Conductive filament scaling of TaOx bipolar ReRAM for long retention with low current operation","authors":"T. Ninomiya, T. Takagi, Z. Wei, S. Muraoka, R. Yasuhara, K. Katayama, Y. Ikeda, K. Kawai, Y. Kato, Y. Kawashima, S. Ito, T. Mikawa, K. Shimakawa, K. Aono","doi":"10.1109/VLSIT.2012.6242467","DOIUrl":"https://doi.org/10.1109/VLSIT.2012.6242467","url":null,"abstract":"We demonstrate for the first time that the density of oxygen vacancy in a conductive filament plays a key role in ensuring data retention. We achieve very good retention results up to 100 hours at 150°C even under the low current operation due to the scaling of conductive filament size while retaining sufficiently high density of oxygen vacancy.","PeriodicalId":266298,"journal":{"name":"2012 Symposium on VLSI Technology (VLSIT)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114421113","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Liu, L. Hutin, I. Chen, R. Nathanael, Yenhao Chen, M. Spencer, E. Alon
{"title":"Recent progress and challenges for relay logic switch technology","authors":"T. Liu, L. Hutin, I. Chen, R. Nathanael, Yenhao Chen, M. Spencer, E. Alon","doi":"10.1109/VLSIT.2012.6242452","DOIUrl":"https://doi.org/10.1109/VLSIT.2012.6242452","url":null,"abstract":"The energy efficiency of CMOS technology is fundamentally limited by transistor off-state leakage (IOFF). Mechanical switches have zero IOFF and therefore could be advantageous for ultra-low-power digital logic applications. This paper discusses recent advancements in relay logic switch technology and current challenges which must be addressed to realize its promise.","PeriodicalId":266298,"journal":{"name":"2012 Symposium on VLSI Technology (VLSIT)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125597621","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}