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In-plane microneedle chip fabricated by crystalline wet etching of (110) silicon wafer 用晶体湿法蚀刻(110)硅片制成的平面内微针芯片
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285529
Sungsik Yun, Jaeyong An, Seunghwan Moon, Jong-Hyun Lee
{"title":"In-plane microneedle chip fabricated by crystalline wet etching of (110) silicon wafer","authors":"Sungsik Yun, Jaeyong An, Seunghwan Moon, Jong-Hyun Lee","doi":"10.1109/SENSOR.2009.5285529","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285529","url":null,"abstract":"In this research, simple crystalline wet etching of (110) silicon is employed to fabricate an in-plane silicon microneedle chip, which is composed of microneedle tips, microchannels and reservoir. The required penetration forces to insert the fabricated microneedles into the skin of chicken breast flesh without failure were 70 mN (500 µm in displacement) and 250 mN (2 mm in displacement) for a single tip and five tips, respectively.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123723738","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
A dual function Parylene-based biomimetic tactile sensor and actuator for next generation mechanically responsive microelectrode arrays 用于下一代机械响应微电极阵列的双功能基于聚苯乙烯的仿生触觉传感器和致动器
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285612
C. Gutierrez, E. Meng
{"title":"A dual function Parylene-based biomimetic tactile sensor and actuator for next generation mechanically responsive microelectrode arrays","authors":"C. Gutierrez, E. Meng","doi":"10.1109/SENSOR.2009.5285612","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285612","url":null,"abstract":"We present the first multimodal Parylene-based biomimetic platform with the ability to measure tactile forces while simultaneously enabling active stimulation/recording of neural tissue via movable microelectrodes. A liquid-filled microchamber encapsulating interdigitated microelectrodes performs the dual functions of actuation and tactile sensing. The electrodes are impedance-based tactile sensing elements and sites for electrolytic gas generation for pneumatic control of microelectrode position. Impedance sensitivity of up to 1.7 %/µm and out-of-plane positioning up to 8 µm were demonstrated. We also report on the mechanotransduction of biomimetic channel structures.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125867957","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Microfluidic protein synthesis array for toxin detection 用于毒素检测的微流控蛋白质合成阵列
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285971
Z. Fan, Q. Mei, R. Khnouf, S. Jin
{"title":"Microfluidic protein synthesis array for toxin detection","authors":"Z. Fan, Q. Mei, R. Khnouf, S. Jin","doi":"10.1109/SENSOR.2009.5285971","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285971","url":null,"abstract":"A microfluidic array device has been developed for simultaneous production of multiple proteins in cell-free media. The device is fabricated from poly(methyl methacrylate) (PMMA). Since biological synthesis of a protein can be inhibited by a toxin, a lower yield of protein synthesis than the control indicates the presence of toxins. We have synthesized three proteins in the array device and found that their production yields are inhibited differentially by two toxin simulants. As a result, identification of a toxin can be achieved based on their unique response pattern of the array. In addition, the device has been exploited to detect ricin, with a detection limit lower than the immunoassay-based method.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124969216","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Applications of a novel cell micropatterning process for long-term neuron and cell culture 一种新的细胞微模式过程在长期神经元和细胞培养中的应用
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285953
W.C. Chang, D. Sretavan
{"title":"Applications of a novel cell micropatterning process for long-term neuron and cell culture","authors":"W.C. Chang, D. Sretavan","doi":"10.1109/SENSOR.2009.5285953","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285953","url":null,"abstract":"We show several applications for a unique method for creating user-friendly, micropatterned substrates for neuron and cell culture. With neurons, we demonstrated that our micropatterns can separate cell bodies and axons while organizing them in orderly arrays for easy experimentation. These micropatterned neuron cultures also persisted for weeks, enabling maturation and development of presynaptic structures and potentially allowing the explicit design of neuronal circuits. Beyond neurons, we also demonstrated the culture of fibroblasts on the patterned substrates and showed that these cell types likewise remained viable and highly compliant to a variety micropatterns.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129776147","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
CMOS-compatible back-end process for in-plane actuating ferromagnetic MEMS 平面内驱动铁磁MEMS的cmos兼容后端工艺
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285516
M. Glickman, P. Tseng, J. Harrison, I. Goldberg, Peter Johnson, P. Smeys, T. Niblock, J. Judy
{"title":"CMOS-compatible back-end process for in-plane actuating ferromagnetic MEMS","authors":"M. Glickman, P. Tseng, J. Harrison, I. Goldberg, Peter Johnson, P. Smeys, T. Niblock, J. Judy","doi":"10.1109/SENSOR.2009.5285516","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285516","url":null,"abstract":"We have designed, fabricated, and tested in-plane actuating ferromagnetic MEMS switches and solenoidal inductors, which were produced using a CMOS-compatible back-end process. This process creates compact high-performance devices without high temperature processes (<; 400°C) or etching into the plane of the wafer.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"154 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127281607","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Coulometric detection of an analyte in a liquid plug formed in a microflow channel 在微流通道中形成的液体塞中分析物的库仑法检测
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285975
F. Sassa, H. Laghzali, J. Fukuda, H. Suzuki
{"title":"Coulometric detection of an analyte in a liquid plug formed in a microflow channel","authors":"F. Sassa, H. Laghzali, J. Fukuda, H. Suzuki","doi":"10.1109/SENSOR.2009.5285975","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285975","url":null,"abstract":"Applicability of coulometric detection was tested for the analysis of an analyte in a liquid plug confined in a PDMS microflow channel. A plug prepared in the flow channel was placed on a three-electrode system and hydrogen peroxide was detected. With plugs of a small volume, the depletion of the analyte was rapid, making reproducible amperometric detection difficult particularly when the flow channel was shallow. On the other hand, coulometric detection showed a clear relationship between the generated charge and the concentration. However, when the volume of the plug was large, only a part of the analyte was used for detection, suggesting the possibility to improve the detection sensitivity further. The device was also tested in the detection of L-glutamate.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127198188","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A cross-junction channel valveless-micropump with integrated hotwires for fluidic application 一个交叉结通道无阀微泵集成热线流体应用
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285662
V. Dau, T. Otake, T. X. Dinh, K. Tanaka, R. Amarasinghe, S. Sugiyama
{"title":"A cross-junction channel valveless-micropump with integrated hotwires for fluidic application","authors":"V. Dau, T. Otake, T. X. Dinh, K. Tanaka, R. Amarasinghe, S. Sugiyama","doi":"10.1109/SENSOR.2009.5285662","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285662","url":null,"abstract":"This paper proposes a new valve-less pump with cross-junction channels and integrated hotwires. The pump was actuated by PZT diaphragm to create a gas jet flow for fluidic application. The design and simulation are based on transient fluidic analysis with experimental result of PZT diaphragm so that features of micropump is predicted with high reliability. Two designs of the pumps with different nozzles were investigated to study 3D nozzle effect. The micro pump was fabricated by standard MEMS process. Experiment was performed and agreement has been achieved between simulated and experimental results. The flow rate of 4.3sccm was achieved at the driving voltage of 40 Vpp in frequency response of 7.9 kHz. The discharge pressure of 0.18 kPa was measured at 40 Vpp and the output voltage of the hotwire was 1.07V at the constant applied voltage of 0.4mA","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130047338","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A gold nanoparticles dispersion waveguide for label-free detection 一种用于无标签检测的金纳米粒子色散波导
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285799
S. Xiong, Y. Yang, H.J. Huang, D. Tsai, A. Liu
{"title":"A gold nanoparticles dispersion waveguide for label-free detection","authors":"S. Xiong, Y. Yang, H.J. Huang, D. Tsai, A. Liu","doi":"10.1109/SENSOR.2009.5285799","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285799","url":null,"abstract":"This paper presents a liquid waveguide with dispersing gold nanoparticles (Au NPs) in a microchannel. The liquid waveguide is achieved by sandwiching three layers of laminar flow stream in a rectangular microchannel. Light is guided and scattered along the microchannel. The dispersing Au NPs in the core flow stream of the liquid waveguide can combine the unique properties of Au NPs with the guiding and scattering of light along the microchannel.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130053742","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design, fabrication, and assembly of a hollow-core fiber-based micro cryogenic cooler 中空纤维微低温冷却器的设计、制造和装配
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285925
M.-H. Lin, P. Bradley, H. Wu, J. Booth, R. Radebaugh, Y.C. Lee
{"title":"Design, fabrication, and assembly of a hollow-core fiber-based micro cryogenic cooler","authors":"M.-H. Lin, P. Bradley, H. Wu, J. Booth, R. Radebaugh, Y.C. Lee","doi":"10.1109/SENSOR.2009.5285925","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285925","url":null,"abstract":"One of the smallest Joule Thomson (J-T) micro cryogenic coolers (MCC) utilizing a hollow-core fiber-based heat exchanger (HX) is designed, fabricated, assembled and tested. Techniques that control mask material etching are developed to fabricate a multi-layer silicon structure on HX-coupling manifolds. A segmental metal coating is applied on the fibers and the capillary for solderable areas and reduced radiation and conduction heat transfer. With 16∶1 pressure ratio mixed refrigerants, a 140 K stable temperature and 76 K transient temperature at cold head are demonstrated.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130133853","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 16
Flexible enzyme free glucose micro-sensor for continuous monitoring applications 用于连续监测应用的柔性无酶葡萄糖微传感器
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285725
Y.J. Lee, J. Kim, J. Park
{"title":"Flexible enzyme free glucose micro-sensor for continuous monitoring applications","authors":"Y.J. Lee, J. Kim, J. Park","doi":"10.1109/SENSOR.2009.5285725","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285725","url":null,"abstract":"Flexible enzyme free glucose micro-sensor with nanoporous Pt (Platinum) working electrode on a bio-compatible PET (Polyethylene Terephthalate) film was designed, fabricated, and characterized for continuous monitoring applications. The fabricated flexible sensor showed electrode surface RF (roughness factor) of 106.5 which was much higher than that of the sensor with sputtered Au electrode. The fabricated sensor exhibited high sensitivity of 20.16 µA/mM·cm2 with correlation coefficient of 0.958 without affecting inferring species in glucose concentrations ranged from 5 to 30 mM. It also exhibited low detection limit of 25 µM, and highly stable recovery characteristic. Flexibility, bio-compatibility, and enzyme free characteristic of the fabricated sensor are strong advantages for continuous glucose monitoring applications.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122370160","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
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