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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference最新文献

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Temperature controlled miniaturized cell in magnetic beads handling system for bio-chemical reaction 生物化学反应磁珠处理系统中的微型化温控池
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285482
N. Inagaki, R. Imai, M. Shikida, M. Okochi, H. Honda, K. Sato
{"title":"Temperature controlled miniaturized cell in magnetic beads handling system for bio-chemical reaction","authors":"N. Inagaki, R. Imai, M. Shikida, M. Okochi, H. Honda, K. Sato","doi":"10.1109/SENSOR.2009.5285482","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285482","url":null,"abstract":"We proposed a temperature-controlled miniaturized cell for use in a magnetic beads handling system for bio-chemical reaction, especially for PCR usage, and created it by using conventional high-precision processing technologies. The proposed system consists of four temperature-controlled cells (designed for PCR use), a flow channel, a permanent magnet, and a compact linear actuator for driving the magnet. We introduced a miniaturized metallic armor and covered the cell unit with it to increase the liquid temperature uniformity in a cell. We experimentally evaluated the temperature distribution of the system by using thermography, and obtained a temperature distribution in the center (3.5 × 3.5 mm) that was less than 1.0 °C.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114862056","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Thermo-optic infrared focal plane array 热光学红外焦平面阵列
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285854
X. Yan, F. Feng, Y. Wang
{"title":"Thermo-optic infrared focal plane array","authors":"X. Yan, F. Feng, Y. Wang","doi":"10.1109/SENSOR.2009.5285854","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285854","url":null,"abstract":"We reported an optically readable infrared focal plane array based on thermo-optic effect in this paper. The optical characteristics of the thermo-optic infrared focal plane array (TOFPA) are analyzed and simulated by ZEMAX software. The results show that the thermo-optic sensitivity and the average infrared absorption of the TOFPA can reach 6.23% K−1 and 65.2%, respectively. Then, the TOFPA is released by XeF2 etch using a sidewall passivation method. Finally, an optical system is designed for measuring the thermo-optical sensitivity of TOFPA.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114670180","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Enhancing dna microarray detection limits using optical resonances from photonic crystal surfaces 利用光子晶体表面的光学共振增强dna微阵列检测极限
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285438
P. Mathias, S. Jones, D. Gonzalez, L. Vodkin, B. Cunningham
{"title":"Enhancing dna microarray detection limits using optical resonances from photonic crystal surfaces","authors":"P. Mathias, S. Jones, D. Gonzalez, L. Vodkin, B. Cunningham","doi":"10.1109/SENSOR.2009.5285438","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285438","url":null,"abstract":"DNA microarrays are typically composed of micron-scale spots of specific genetic sequences attached to a glass microscope slide for the purpose of gene expression analysis. By replacing the glass microarray substrate with a photonic crystal surface, fluorescence enhancement effects can be utilized to improve the performance of the microarray. This work describes the design of photonic crystal surfaces by Rigorous Coupled-Wave Analysis to align guided-mode resonances with Cyanine-5 excitation and emission wavelengths at approximately 633 nm and 680 nm, respectively. The resonances from photonic crystals fabricated by nanoreplica molding are characterized by optical transmission measurements, and 20x enhancement from the fluorophore Cyanine-5 is demonstrated relative to a glass slide. Finally, a DNA microarray experiment probing the expression of genes in Glycine max (soybean) is performed, demonstrating the photonic crystal microarray detects 20% more genes from the sample than are detected by the glass microarray.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114700829","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design, fabrication and testing of a micromachined seismometer with NANO-G resolution NANO-G分辨率微机械地震仪的设计、制造和测试
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285413
W. Pike, I. Standley, W. Karl, S. Kumar, T. Stemple, S. Vijendran, T. Hopf
{"title":"Design, fabrication and testing of a micromachined seismometer with NANO-G resolution","authors":"W. Pike, I. Standley, W. Karl, S. Kumar, T. Stemple, S. Vijendran, T. Hopf","doi":"10.1109/SENSOR.2009.5285413","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285413","url":null,"abstract":"We have designed a high resolution microseismometer by combining a low-resonant-frequency, high-quality-factor suspension with a sensitive lateral capacitive transducer under electromagnetic feedback control. It has been fabricated and tested to demonstrate for the first time a micromachined seismometer capable of resolving the Earth's ambient seismicity and with the best acceleration resolution of any micromachined device to date, with a self noise down to 4ng/√(Hz).","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"218 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115075257","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 21
Energy loss in MEMS resonators and the impact on inertial and RF devices MEMS谐振器中的能量损耗及其对惯性和射频器件的影响
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285418
M. Weinberg, R. Candler, S. Chandorkar, J. Varsanik, T. Kenny, Amy Duwel1
{"title":"Energy loss in MEMS resonators and the impact on inertial and RF devices","authors":"M. Weinberg, R. Candler, S. Chandorkar, J. Varsanik, T. Kenny, Amy Duwel1","doi":"10.1109/SENSOR.2009.5285418","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285418","url":null,"abstract":"In this paper, we review the current understanding of energy loss mechanisms in micromachined (MEMS and NEMS) devices. We describe the importance of high quality factor (Q) to the performance of MEMS gyros and MEMS resonators used in radio-frequency applications.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"13 6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116893919","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 89
Hybrid integrated platform of PDMS microfluidics and Silica Capillary for effective CE and ESI-MS coupling PDMS微流体和硅胶毛细管的混合集成平台，用于有效的CE和ESI-MS耦合
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285864
I. Dimov, A. Riaz, J. Ducrée, Luke P. Lee
{"title":"Hybrid integrated platform of PDMS microfluidics and Silica Capillary for effective CE and ESI-MS coupling","authors":"I. Dimov, A. Riaz, J. Ducrée, Luke P. Lee","doi":"10.1109/SENSOR.2009.5285864","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285864","url":null,"abstract":"We present an effective hybrid integration of PDMS microfluidic devices and fused silica capillaries. These hybrid microfluidic Integrated PDMS and Silica Capillary (iPSC) modules exhibit a novel architecture and method for leakage free CE sample injection requiring only a single high voltage source. Use of the iPSC devices is based on a modular approach which allows the capillary to be reused over 1,000 times whilst replacing the fluidics below it for different experiments. Integrating fused silica capillaries with PDMS microfluidics allows the direct application of a wide variety of well established conventional CE protocols for complex analyte separations and ESI-MS coupling, allowing users to focus on the sample analysis rather than the development of new separation protocols. The iPSC fabrication method is simple (3 steps) and quick (7 min).","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116971889","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
MEMS-based resonant sensor with uniform mass sensitivity 基于mems的均匀质量灵敏度谐振传感器
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285673
K. Park, R. Bashir
{"title":"MEMS-based resonant sensor with uniform mass sensitivity","authors":"K. Park, R. Bashir","doi":"10.1109/SENSOR.2009.5285673","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285673","url":null,"abstract":"MEMS-based resonant mass sensors have been extensively studied as biological and chemical sensor. Most of these sensors have utilized a cantilever structure, and these cantilever resonant mass sensors have a spatially non-uniform mass sensitivity. In this study, a silicon MEMS-based resonant mass sensor with a spatially uniform mass sensitivity is developed. The sensor is composed of a platform for the target attachment and four half-folded springs. The novel structure generates a vertical displacement of the platform, which leads to the uniform mass sensitivity. The extracted mass of a same bead on different places shows a standard deviation of 1.4%.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117074793","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
A MEMS turbopump for fuel delivery in small-scale power systems 用于小型电力系统燃料输送的MEMS涡轮泵
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285407
C. Waits, M. McCarthy, R. Ghodssi
{"title":"A MEMS turbopump for fuel delivery in small-scale power systems","authors":"C. Waits, M. McCarthy, R. Ghodssi","doi":"10.1109/SENSOR.2009.5285407","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285407","url":null,"abstract":"The design, fabrication, and characterization of a microball bearing supported turbopump for fuel delivery in smallscale power systems are reported. A spiral-groove viscous pump is integrated with a microball bearing and a radial in-flow microturbine. Using water as the working fluid, pumping is demonstrated at rotational speeds, flow rates, and pressure rises of up to 10 krpm, 80 mL/hour, and 8.2 kPa, respectively. In addition, bearing and turbine performances are improved from previous work through design and fabrication changes, enabling continuous stable operation for over 4.5 million revolutions and maximum demonstrated speeds above 85 krpm.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117135195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Three-dimensional microstructures fabricated by multi-step electrochemical etching of aluminum sheet 采用多步电化学刻蚀法制备铝板三维微结构
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285941
Y. Kim, S. Youn, W. Han, Y. Cho, H. Park, B. Chang, Y. Oh
{"title":"Three-dimensional microstructures fabricated by multi-step electrochemical etching of aluminum sheet","authors":"Y. Kim, S. Youn, W. Han, Y. Cho, H. Park, B. Chang, Y. Oh","doi":"10.1109/SENSOR.2009.5285941","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285941","url":null,"abstract":"We present a fabrication process for three-dimensional (3D) microstructures using multi-step electrochemical etching of metal foils. The present process offers advantages of simple, cose-effective, and fast process with uniform and well-controlled material property. In the experimental study, we performed single-step electrochemical etching of 2D cantilever array and multi-step electrochemical etching of 3D micro probe array. The average depth etch rate and the average bias etch rate were measured as 1.50±0.10µm/min, and 0.77±0.03 µm wide structure. The surface roughness of 11.34nm has been measured. The demonstrated multi-step electrochemical etching process results in a simple, cost-effective, and timesaving fabrication of 3D metallic structures.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116444826","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Pyrolyzed polymer and its composite for 18F− concentration electrode toward PET application 热解聚合物及其复合材料在PET电极中的应用
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285690
K. Okamoto, A. Syunori, R. Iwata, H. Saiki, H. Nakanishi, S. Konishi
{"title":"Pyrolyzed polymer and its composite for 18F− concentration electrode toward PET application","authors":"K. Okamoto, A. Syunori, R. Iwata, H. Saiki, H. Nakanishi, S. Konishi","doi":"10.1109/SENSOR.2009.5285690","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285690","url":null,"abstract":"Micromachined pyrolyzed polymer electrode is evaluated as <sup>18</sup>F<sup>−</sup> deposition and recovery electrode toward positron emission tomography (PET) application for the first time. Electrical separation of <sup>18</sup>F<sup>−</sup> from H<inf>2</inf> <sup>18</sup>O water has been studied for a preparation of a PET probe. A typical deposition and recovery cell of <sup>18</sup>F<sup>−</sup> is illustrated in Fig. 1. We propose pyrolyzed polymer electrode instead of conventional bulk glassy carbon (GC) electrode in order to open the way for an integrated cell system with benefit of MEMS technology in replacement of bulk GC. It will be reported that pyrolyzed polymer electrode can deposit and recover <sup>18</sup>F<sup>−</sup> (77% and 38% yield, respectively). Furthermore, we propose a composite of pyrolyzed polymer and GC particles to take advantage of both materials. This paper evaluates developed electrode for PET application and discuss its potential possibilities.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"86 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123572285","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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