Thermo-optic infrared focal plane array

Abstract

We reported an optically readable infrared focal plane array based on thermo-optic effect in this paper. The optical characteristics of the thermo-optic infrared focal plane array (TOFPA) are analyzed and simulated by ZEMAX software. The results show that the thermo-optic sensitivity and the average infrared absorption of the TOFPA can reach 6.23% K−1 and 65.2%, respectively. Then, the TOFPA is released by XeF2 etch using a sidewall passivation method. Finally, an optical system is designed for measuring the thermo-optical sensitivity of TOFPA.