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Continuous Cellular Automaton for the simulation of the surface morphology on any silicon orientation Si{HKL} in anisotropic etching 各向异性蚀刻中任意硅取向Si{HKL}表面形貌模拟的连续元胞自动机
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-10-13 DOI: 10.1109/SENSOR.2009.5285587
Y. Xing, M. Gosálvez, K. Sato
{"title":"Continuous Cellular Automaton for the simulation of the surface morphology on any silicon orientation Si{HKL} in anisotropic etching","authors":"Y. Xing, M. Gosálvez, K. Sato","doi":"10.1109/SENSOR.2009.5285587","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285587","url":null,"abstract":"A Continuous Cellular Automaton (CCA) is modified to incorporate a micromasking model and a removal rate restriction function in order to address the formation of morphological instabilities during anisotropic wet etching. As an example, the etching of crystalline silicon in KOH with isopropanol is considered (12% KOH+IPA). By combining the micromasking model with site-specific atomistic removal rate values previously calibrated by matching the macroscopic orientation-dependence of the etch rate, a good agreement with the experimental surface morphologies for a wide range of crystalline orientations {h k l} is obtained. This is in contrast to traditional Kinetic Monte Carlo (KMC) studies where the site-specific rates are calibrated by matching the surface morphologies but the orientation-dependence of the etch rate is not described correctly. The modified CCA makes possible the realization of accurate simulations of anisotropic etching in realistic engineering applications.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-10-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115262528","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Suspended microstructures made using silicon migration 用硅迁移制成的悬浮微结构
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285949
R. Kant, M. Ziaei-Moayyed, R. T. Howe
{"title":"Suspended microstructures made using silicon migration","authors":"R. Kant, M. Ziaei-Moayyed, R. T. Howe","doi":"10.1109/SENSOR.2009.5285949","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285949","url":null,"abstract":"We demonstrate a new approach for large area releases in single crystal silicon without the use of traditional undercutting-based etches. Our approach uses silicon migration to create suspended microstructures by transforming periodic array of trenches into a continuous void under the silicon surface. We show close agreement between simulation of the silicon migration phenomenon and fabrication results, and demonstrate the viability for creating large released microstructures and micro-fluidic devices.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114970637","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
High-performance humidity sensor with polyimide nano-grass 高性能湿度传感器与聚酰亚胺纳米草
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285959
Hyemin Lee, Seungwon Jung, Hyungchul Kim, Junghoon Lee
{"title":"High-performance humidity sensor with polyimide nano-grass","authors":"Hyemin Lee, Seungwon Jung, Hyungchul Kim, Junghoon Lee","doi":"10.1109/SENSOR.2009.5285959","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285959","url":null,"abstract":"This paper presents a micro capacitive humidity sensor based on polyimide nano-grass with improved performance such as quick response and high sensitivity. These benefits come from the modification of polyimide surface morphology and dielectric constant. The nano-grass structure is created with plasma treatment on a polyimide layer to drastically enhance the water adsorption due to the increased surface to volume ratio. The plasma treatment also improves the surface chemistry useful for sensor performance. XPS and AFM analyses confirm the emergence of carbonyl groups responsible for the affinity of the treated surface to water molecules.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114995637","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Superparamagnetic photosensitive polymer nanocomposite for microactuators 微致动器用超顺磁光敏聚合物纳米复合材料
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285841
M. Suter, S. Graf, O. Ergeneman, S. Schmid, A. Camenzind, B. Nelson, C. Hierold
{"title":"Superparamagnetic photosensitive polymer nanocomposite for microactuators","authors":"M. Suter, S. Graf, O. Ergeneman, S. Schmid, A. Camenzind, B. Nelson, C. Hierold","doi":"10.1109/SENSOR.2009.5285841","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285841","url":null,"abstract":"We present a photosensitive polymer composite with superparamagnetic characteristics for the fabrication of microactuators. A uniform distribution of particles in the photosensitive polymer matrix SU-8 is achieved by applying superparamagnetic nanoparticles with the aid of a surfactant. The composite contains Fe3O4 nanoparticles up to 3 vol.% (12 wt.%) with diameters of around 13 nm. Superparamagnetic composite microcantilevers are successfully fabricated and actuated in resonance by the magnetic field of an external coil.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115640452","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Parametrically amplified MEMS magnetometer 参数放大MEMS磁强计
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285917
M. J. Thompson, D. Horsley
{"title":"Parametrically amplified MEMS magnetometer","authors":"M. J. Thompson, D. Horsley","doi":"10.1109/SENSOR.2009.5285917","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285917","url":null,"abstract":"This paper demonstrates how parametric amplification can improve the system wide signal to noise ratio (SNR) of MEMS resonant force sensors. Experiments demonstrate how parametric amplification increases the mechanical sensitivity of a Lorentz force based MEMS magnetometer. This increase in mechanical sensitivity amplifies both the Lorentz and Brownian forces. The RMS displacement caused by the 39 nT/√lHz Brownian noise floor is amplified from 13.75 pm to 283 pm. In this study a maximum stable magnetic field sensitivity increase of 51 times was achieved which has an equivalent amplification to a linear resonator with a quality factor (Q) of 40,000.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"464 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123053261","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 24
An optimized Cu-Ni nanocomposite coil for low-power electromagnetic microspeaker fabrication 一种优化的Cu-Ni纳米复合线圈，用于制造低功率电磁微扬声器
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285572
Y. C. Chen, Wei-Ting Liu, T. Chao, Y. T. Cheng
{"title":"An optimized Cu-Ni nanocomposite coil for low-power electromagnetic microspeaker fabrication","authors":"Y. C. Chen, Wei-Ting Liu, T. Chao, Y. T. Cheng","doi":"10.1109/SENSOR.2009.5285572","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285572","url":null,"abstract":"This paper presents an optimized Cu-Ni nanocomposite coil synthesized based on the trade-off of resistivity and permeability of the nanocomposite for low-power electromagnetic microspeaker fabrication. A 200µm wide composite coil plated in an alkaline noncyanide copper based bath that is added with 2g/L of Ni nanopowders can realize ∼40% power saving of the speaker performed in a frequency range of 1 to 6kHz as compared with the coil made of pure Cu for the same speaker design.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"558 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123145143","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Patterning high density SWNT networks on flexible Parylene-C substrate 在柔性聚苯乙烯- c衬底上设计高密度SWNT网络
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285846
C.-L. Chen, C.-F. Yang, X. Xiong, A. Busnaina, M. Dokmeci
{"title":"Patterning high density SWNT networks on flexible Parylene-C substrate","authors":"C.-L. Chen, C.-F. Yang, X. Xiong, A. Busnaina, M. Dokmeci","doi":"10.1109/SENSOR.2009.5285846","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285846","url":null,"abstract":"In this work, a directed assembly technique for controlled micro-patterning of Single-Walled Carbon Nanotubes (SWNTs) on to a flexible Parylene-C substrate has been demonstrated. A simple site-selective fluidic assembly of SWNTs has been utilized to directly assemble SWNTs on a plasma treated parylene-C substrate to form ordered high density carbon nanotube networks. Continuous nanotube micro-arrays and networks as small as 4µm wide and lengths as long as 1500µm have been fabricated. After fabrication, the parylene substrate containing the SWNT networks was peeled off from the Polycarbonate substrate. We next performed both electrical and mechanical tests to further characterize the flexible SWNT networks. The measured resistance of patterned SWNT networks was around 300Ω utilizing Au electrode pads. The test sample handled multiple bending cycles (tested up to 5 times) without showing any signs of hysteresis. High density patterning of carbon nanotube networks on flexible Parylene-C substrates has potential applications including wearable electronics and sensors, flexible field effect transistors (FETs) and interconnects.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116940961","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Label-free electronic detection of growth factor induced cellular chatter on chemoreceptive neuron MOS (CvMOS) transistors 化学感受神经元MOS (CvMOS)晶体管上生长因子诱导细胞颤振的无标记电子检测
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285727
K. Jayant, T. Porri, J. Erickson, E. Kan
{"title":"Label-free electronic detection of growth factor induced cellular chatter on chemoreceptive neuron MOS (CvMOS) transistors","authors":"K. Jayant, T. Porri, J. Erickson, E. Kan","doi":"10.1109/SENSOR.2009.5285727","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285727","url":null,"abstract":"In this paper we present a novel label-free detection scheme to sense growth factor over-expression in tumor cells at the single cell level using a chemoreceptive neuron MOSFET (C?MOS) [1]. Tumor cell lines including A431, HeLa, TSE and NIH-3T3's were dispensed onto poly-Llysine-coated sensing gates with a limited dilution and their responses to EGF (epidermal growth factor) were recorded. A change in cell shape after stimulation is observed and is validated through SEM images on witness samples. Stimulation of downstream pathways upon EGF activation is detected through an abrupt change in threshold voltage and subthreshold slope indicating cell effects from both charge exchange and capacitance.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121251523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Tangential and perpendicular driving micro transmission systems based on ratchet mechanism and electrostatic actuator 基于棘轮机构和静电作动器的切向和垂直驱动微传动系统
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285569
D. Dao, P. H. Pham, Satoshi Senkawa, S. Sugiyama
{"title":"Tangential and perpendicular driving micro transmission systems based on ratchet mechanism and electrostatic actuator","authors":"D. Dao, P. H. Pham, Satoshi Senkawa, S. Sugiyama","doi":"10.1109/SENSOR.2009.5285569","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285569","url":null,"abstract":"This paper presents comprehensive improvements of micro motion transmission systems (MTS), which driven by electrostatic comb-drive actuators through ratchet mechanism to move micro objects unidirectionally in straight, curved and rotational paths. The first MTS is the tangential driving MTS, in which the driven objects are moved by tangential force. A rotational gearing MTS and micro conveyance system (MCS) based on this driving mode will be presented. Thanks to the new designs of directional guider of the micro containers and new turning module, the containers can move in both straight and curved paths in the tangential MCS. The second MTS is the perpendicular driving MCS, which drives micro containers by the perpendicular driving force, i.e. the moving direction of the container is perpendicular to the actuation direction. Movement velocities of the containers can be controlled by changing the driving frequency.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124825651","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Ellipsoidal micro lens fabricated by depositing parylene directly on liquid 用聚对二甲苯直接沉积在液体上制备椭球微透镜
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285855
R. Miyamoto, N. Binh-Khiem, E. Iwase, K. Matsumoto, I. Shimoyama
{"title":"Ellipsoidal micro lens fabricated by depositing parylene directly on liquid","authors":"R. Miyamoto, N. Binh-Khiem, E. Iwase, K. Matsumoto, I. Shimoyama","doi":"10.1109/SENSOR.2009.5285855","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285855","url":null,"abstract":"We report on an ellipsoidal liquid lens fabricated by PoLD (Parylene on liquid deposition). We fabricated ellipsoidal liquid lenses of 0.50, 1.00, 1.50, and 2.00 µl in volume on hydrophilic elliptical domains with 5.00mm major diameter and 2.50mm minor diameter. We measured the two focal lengths corresponding to major and minor diameters by observing the image formed by a laser beam. We verified that measured focal lengths agreed with theoretical calculated results. In addition, we showed that our method enables us to fabricate ellipsoidal lenses which have the focal lengths as designed.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"88 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126116021","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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