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Quantitative volume determination of dispensed nanoliter droplets on the fly 纳米液滴在苍蝇上的定量体积测定
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285741
A. Ernst, W. Streule, R. Zengerle, P. Koltay
{"title":"Quantitative volume determination of dispensed nanoliter droplets on the fly","authors":"A. Ernst, W. Streule, R. Zengerle, P. Koltay","doi":"10.1109/SENSOR.2009.5285741","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285741","url":null,"abstract":"In this paper we present a sensor for non-contact monitoring of dispensed micro-droplets on the fly. In extension to our previous work [1], the sensor now allows for a direct, quantitative volume determination of single liquid droplets in the volume range from 20 to 100 nl. The improved electronic transducer enables to measure the droplet volume with an accuracy of ΔV ± 3 nl. The sensor signal provides a variety of information about the monitored droplet like for examples droplet velocity. This paper considers in particular the influence of the droplet velocity on the volume measurement. It turned out that the velocity effect can be fully compensated, if the signals are interpreted correctly.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122605829","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Feedback enhanced thermo-electric topography sensing 反馈增强热电地形传感
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285675
A. Sebastian, D. Wiesmann, P. Baechtold, H. Rothuizen, M. Despont, U. Drechsler
{"title":"Feedback enhanced thermo-electric topography sensing","authors":"A. Sebastian, D. Wiesmann, P. Baechtold, H. Rothuizen, M. Despont, U. Drechsler","doi":"10.1109/SENSOR.2009.5285675","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285675","url":null,"abstract":"Thermo-electric sensors in micro-fabricated silicon cantilevers are used in a variety of applications that exploit their temperature-dependent conductivity. While the ease and low cost of integration makes their application attractive, their low sensing bandwidth presents a significant disadvantage. In this article we present a novel scheme for enhancing the sensitivity and bandwidth of these sensors using an external feedback. This scheme demonstrates the applicability of feedback control to shape a sensor's sensing dynamics.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"229 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131620101","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Self-aligned opposite mirrors for tilting field of view driven by electrowetting 由电润湿驱动的可倾斜视野的自对准反镜
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285901
K. Suzuki, A. Takei, E. Iwase, K. Matsumoto, I. Shimoyama
{"title":"Self-aligned opposite mirrors for tilting field of view driven by electrowetting","authors":"K. Suzuki, A. Takei, E. Iwase, K. Matsumoto, I. Shimoyama","doi":"10.1109/SENSOR.2009.5285901","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285901","url":null,"abstract":"We propose an optical device which appends pan/tilt functions to cameras by moving mirrors with electrowetting force. The device is composed of two plates and a liquid pillar holding two mirrors. On the lower plate, electrodes are patterned and a hydrophobic layer is coated. When a voltage is applied to the electrode on the lower plate, the liquid is moved toward the electrode by electrowetting force. Consequently, the mirror is tilted and the light path that comes into the device is controlled. When a camera was put below our device, the field of view of the camera was shifted by 25 degrees with 50 V applied.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127623692","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Silicon nanopore membrane technology for an implantable artificial kidney 硅纳米孔膜技术用于植入式人工肾
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285603
Shuvo Roy, Anna Dubnisheva, Abigail N. Eldridge, A. Fleischman, Kenneth G. Goldman, H. Humes, A. Zydney, W. Fissell
{"title":"Silicon nanopore membrane technology for an implantable artificial kidney","authors":"Shuvo Roy, Anna Dubnisheva, Abigail N. Eldridge, A. Fleischman, Kenneth G. Goldman, H. Humes, A. Zydney, W. Fissell","doi":"10.1109/SENSOR.2009.5285603","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285603","url":null,"abstract":"High performance silicon nanoporous membranes have been developed to investigate the feasibility of an implantable bioartificial kidney. The nanoscale pore size is defined by the thickness of a sacrificial layer of silicon dioxide (SiO2), which is grown by thermal oxidation down to 5 nm with 1% variation. Standardized test protocols to examine biocompatibility revealed that silicon and related MEMS materials did not exhibit any evidence of cytotoxicity or hemolysis. Surface modification with polyethylene glycol (PEG) monolayers reduced adsorption of bovine serum albumin (BSA) onto MEMS surfaces to ∼4% of positive control. PEG-modified membranes exhibited size-dependent rejection of Ficoll 70, a spherical probe solute, dissolved in bovine whole blood. Prolonged hemofiltration revealed constant membrane flux and consistent molecular selectivity for ≫72 hours.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128143412","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Arrowhead-shaped micro-electrode array on polyimide substrate for retinal prostheses enabling close approach to target cells 用于视网膜假体的聚酰亚胺基板上的箭头状微电极阵列，可近距离接近靶细胞
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285492
K. Koo, S. Lee, J. Ban, H. Jeong, H. Park, S. Ha, J. Seo, H. Chung, D. Cho
{"title":"Arrowhead-shaped micro-electrode array on polyimide substrate for retinal prostheses enabling close approach to target cells","authors":"K. Koo, S. Lee, J. Ban, H. Jeong, H. Park, S. Ha, J. Seo, H. Chung, D. Cho","doi":"10.1109/SENSOR.2009.5285492","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285492","url":null,"abstract":"In this paper, an undulated micro-electrode array (MEA) on polyimide is fabricated and evaluated for retinal prosthesis. The undulated MEA consists of the individual micro-electrodes having arrowhead shapes and varying heights of 50 ~150 μm. The proposed device is implanted in a rabbit eye, and an optical coherent tomography (OCT) image is taken. The OCT image shows that the implanted MEA contacts conformably with the retinal layers. The electrically evoked cortical potential (EECP) is recorded for the comparison of the proposed micro-electrode and a conventional planar micro-electrode. The EECP amplitude of the proposed device is higher than that of a conventional planar micro-electrode. We conclude, based on the conformal contact data, in vivo EECP results, and in vivo biocompatibility test, that the proposed 3-D undulated MEA has a high potential for clinical applications.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133198727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
An air-breathing silicon-based micro direct methanol fuel cell with a capillary-based water drawn out structure 一种呼吸式硅基微直接甲醇燃料电池，具有毛细管水抽出结构
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285408
Y.A. Zhou, X. H. Wang, X. Lin, Q. Zhang, L.T. Liu
{"title":"An air-breathing silicon-based micro direct methanol fuel cell with a capillary-based water drawn out structure","authors":"Y.A. Zhou, X. H. Wang, X. Lin, Q. Zhang, L.T. Liu","doi":"10.1109/SENSOR.2009.5285408","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285408","url":null,"abstract":"This paper presents a capillary-based cathode structure for air-breathing micro direct methanol fuel cell (μDMFC). An array of capillaries with hydrophilic surface is designed on the ribs of cathode window to draw out excessive water from the cathode. Microfabrication techniques, including double-side lithography and ICP, are used to fabricate anode and cathode plates of the μDMFC on the same silicon wafer simultaneously. Both μDMFCs, one with capillary-based water drawn out structure and the regular one without, are assembled and characterized. Experimental results show that the μDMFC achieves a power density of 2.35mW/cm2, 10% larger than that of the regular one, of which the power density is about 2.1mW/cm2. The capillary-based water drawn out structure on the cathode draws water out in evidence.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133287102","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Pressure stable thermoelectric flow sensors by means of membrane perforation 膜穿孔式压力稳定热电流量传感器
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285929
M. Kropp, C. Kutzner, N. Hartgenbusch, S. Gu, C. Sosna, R. Buchner, P. Hauptmann, W. Lang
{"title":"Pressure stable thermoelectric flow sensors by means of membrane perforation","authors":"M. Kropp, C. Kutzner, N. Hartgenbusch, S. Gu, C. Sosna, R. Buchner, P. Hauptmann, W. Lang","doi":"10.1109/SENSOR.2009.5285929","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285929","url":null,"abstract":"A commonly used method for measurements of small liquid flows are membrane based thermoelectric flow sensors. High temperature stable flow sensors have been developed and fabricated at IMSAS. A pressure stable version of these sensors has been developed by creating a membrane with perforation. Thereby a backpressure compensation is achieved. Here we present the fabrication process, first measurements and simulation results showing pressure stability to at least 8 bar.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"59 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133927551","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
MWCNTS array incorporated nanochannel with charge-selectivity for high efficient biomolecule preconcentration MWCNTS阵列采用了具有电荷选择性的纳米通道，可实现高效的生物分子预富集
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285977
R. Wu, Yi-Shiuan Wu, Chung-Shi Yang, F. Tseng
{"title":"MWCNTS array incorporated nanochannel with charge-selectivity for high efficient biomolecule preconcentration","authors":"R. Wu, Yi-Shiuan Wu, Chung-Shi Yang, F. Tseng","doi":"10.1109/SENSOR.2009.5285977","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285977","url":null,"abstract":"This paper presents a study of electrokinetic transport in a nano-fluidic chip that allows for the selection and pre-concentration of molecular mixtures by a high density multi-wall carbon nanotubes array (MCNTs) in nano-channels. Parylene (poly(p-xylylene) was deposited on MWCNTs walls as a dielectric material, the surface charge characters and density could adjusted when an induced polarizes filed was applied. The MCNTs array was used as an induced-surface charge filter to attract the charged molecules on the wall surface by van der Waals and electrostatic force. The surface charge of MCNTs is inversely proportional to the channel wall thickness and proportional to the dielectric constant of Parylene thin layer as well as the applied external electric-field. The competition between electroosmotic dragging force and nonlinear electrophoretic forces induced by polarization effect is suggested responsible for the setup of two preconcentration regimes at both cathodic and anodic sides of the nanochannel. A 105–6 folds high concentration capability of FITC-labelied IgG has been achieved in 15 min in this device which is not easily carried out by standard MEMS process. The fabrication of this device with direct growth of MWCNTs inside nanochannel is first reported to apply to electro-preconcentration.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"174 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131836325","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An RFMEMS based reflection type C-Ku band tunable band pass filter 基于RFMEMS的反射型C-Ku波段可调谐带通滤波器
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285650
S. Lee, T. Nishino, Y. Kitsukawa, N. Konno, M. Miyazaki
{"title":"An RFMEMS based reflection type C-Ku band tunable band pass filter","authors":"S. Lee, T. Nishino, Y. Kitsukawa, N. Konno, M. Miyazaki","doi":"10.1109/SENSOR.2009.5285650","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285650","url":null,"abstract":"In this paper, we present a novel band reflection type C-Ku band tunable band pass filter (BPF), which has been developed by surface micromachining technology for wireless applications. Our BPF consists of two identical band rejection filters (BRF) and a coplanar waveguide (CPW) 90-degree hybrid coupler. The BRF is composed of metal contact type RFMEMS switches, inductors and capacitors. In the fabrication, a sacrificial layer is applied to not only RFMEMS switch but also inductor, capacitor and CPW 90-degree hybrid coupler to form air bridge, short avoidable structure and enhanced capacitive coupling, respectively. Each tuning state in C- to Ku-band is achieved by RFMEMS switch operation, which selects adequate capacitors or inductors designed corresponding to each tuning state. The insertion losses of the BPF were 3.2dB, 3.6dB and 3.5dB at 8GHz, 12GHz and 16GHz, respectively.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"19 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131923953","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
SS-DNA-decorated Single-Walled Carbon Nanotubes integrated on CMOS circuitry for high sensitivity gas sensing ss - dna修饰的单壁碳纳米管集成在CMOS电路上，用于高灵敏度气体传感
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285823
C.-L. Chen, C.-F. Yang, V. Agarwal, S. Sonkusale, A. Busnaina, M. Chen, M. Dokmeci
{"title":"SS-DNA-decorated Single-Walled Carbon Nanotubes integrated on CMOS circuitry for high sensitivity gas sensing","authors":"C.-L. Chen, C.-F. Yang, V. Agarwal, S. Sonkusale, A. Busnaina, M. Chen, M. Dokmeci","doi":"10.1109/SENSOR.2009.5285823","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285823","url":null,"abstract":"In this paper, we demonstrate the integration of single-stranded-DNA (ss-DNA) decorated Single-Walled Carbon Nanotubes (SWNT) onto Complementary Metal Oxide Semiconductor (CMOS) circuitry for gas sensing applications. Utilizing Dielectrophoresis (DEP) assembly, a simple and a low temperature process, we first demonstrate integration of SWNTs onto CMOS circuitry at the die level. SWNTs are sensitive to numerous odors, and functionalization of SWNTs with biomolecular complexes further enhances their sensing specificity and sensitivity. This was demonstrated when we attached ss-DNA around SWNTs and our results indicated twice the sensitivity of the sensors compared to the plain SWNTs. The remarkable set of attributes of the SWNTs coupled with the ss-DNA molecules provides an attractive platform for ultra sensitive electronic nose type of applications.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134296753","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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