反馈增强热电地形传感

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285675

A. Sebastian, D. Wiesmann, P. Baechtold, H. Rothuizen, M. Despont, U. Drechsler

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引用次数: 5

摘要

微制造硅悬臂梁中的热电传感器用于各种利用其温度相关导电性的应用中。虽然集成的简单性和低成本使其应用具有吸引力，但其低传感带宽存在显着的缺点。在本文中，我们提出了一种利用外部反馈来提高这些传感器的灵敏度和带宽的新方案。该方案证明了反馈控制在塑造传感器感知动态方面的适用性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Feedback enhanced thermo-electric topography sensing

Thermo-electric sensors in micro-fabricated silicon cantilevers are used in a variety of applications that exploit their temperature-dependent conductivity. While the ease and low cost of integration makes their application attractive, their low sensing bandwidth presents a significant disadvantage. In this article we present a novel scheme for enhancing the sensitivity and bandwidth of these sensors using an external feedback. This scheme demonstrates the applicability of feedback control to shape a sensor's sensing dynamics.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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