膜穿孔式压力稳定热电流量传感器

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285929

M. Kropp, C. Kutzner, N. Hartgenbusch, S. Gu, C. Sosna, R. Buchner, P. Hauptmann, W. Lang

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引用次数: 4

摘要

一种常用的测量小液体流量的方法是基于膜的热电流量传感器。在IMSAS研制并制造了高温稳定流量传感器。这些传感器的压力稳定版本已经通过制造穿孔膜而开发出来。这样就实现了背压补偿。在这里，我们介绍了制造过程，首次测量和模拟结果显示压力稳定到至少8巴。

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Pressure stable thermoelectric flow sensors by means of membrane perforation

A commonly used method for measurements of small liquid flows are membrane based thermoelectric flow sensors. High temperature stable flow sensors have been developed and fabricated at IMSAS. A pressure stable version of these sensors has been developed by creating a membrane with perforation. Thereby a backpressure compensation is achieved. Here we present the fabrication process, first measurements and simulation results showing pressure stability to at least 8 bar.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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