TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference最新文献

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Leukocyte count and two-part differential in whole blood based on a portable microflow cytometer 基于便携式微流式细胞仪的全血白细胞计数和两部分差异
W. Shi, S. Zheng, H. Kasdan, A. Fridge, Y. Tai
{"title":"Leukocyte count and two-part differential in whole blood based on a portable microflow cytometer","authors":"W. Shi, S. Zheng, H. Kasdan, A. Fridge, Y. Tai","doi":"10.1109/SENSOR.2009.5285400","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285400","url":null,"abstract":"This work demonstrated leukocyte count and two-part leukocyte differential from the whole blood based on a portable microflow cytometer system. Leukocytes are selectively stained with a fluorescent dye, Acridine Orange (AO). The blood sample is then pumped through a disposable microfluidic device for fluorescence sensing. Under blue LED excitation (460nm), the green fluorescence from DNA and the red fluorescence from RNA are detected simultaneously with two photomultiplier tubes (PMT). Leukocytes are counted and differentiated into two parts, lymphocyte versus non-lymphocyte, based on their fluorescence signatures. The results, including leukocyte absolute count and lymphocyte ratio, matched well with the commercial hemacytometer counts (maximal error 9.0%, correlation coefficient ~0.8). We also tested the system for the first time under a zero-gravity (zero-G) environment that facilitated its application in space missions.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125599331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
A hybrid generator for virbration energy harvesting applications 一种用于振动能量收集应用的混合发电机
M. Wischke, M. Masur, P. Woias
{"title":"A hybrid generator for virbration energy harvesting applications","authors":"M. Wischke, M. Masur, P. Woias","doi":"10.1109/SENSOR.2009.5285376","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285376","url":null,"abstract":"As vibrations are present almost everywhere in urban infrastructure, they are an excellent source to power wireless sensors. Based on our previous clamped-free cantilever, we have developed a beam-type vibratory energy harvester that is suspended on both sides. In the generator, a piezoelectric and an electromagnetic transducer are merged to increase the power output. Different arrangements of magnet and inductor have been tested. At resonance 300 µW and 120 µW can be drawn with 10m/s2 stimulation and optimal load conditions from the piezoelectric and electromagnetic generator part, respectively.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121444212","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
Control of locomotion in ambulatory and airborne insects using implanted thermal microstimulators 利用植入式热微刺激器控制流动和空气传播昆虫的运动
K. Visvanathan, N. Gupta, M. Maharbiz, Y. Gianchandani
{"title":"Control of locomotion in ambulatory and airborne insects using implanted thermal microstimulators","authors":"K. Visvanathan, N. Gupta, M. Maharbiz, Y. Gianchandani","doi":"10.1109/SENSOR.2009.5285681","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285681","url":null,"abstract":"This paper describes the use of implanted microthermal stimulators for locomotion control of ambulatory and airborne insects. In the long term, this research is intended to support micro autonomous vehicles. Experiments were performed using both resistive (nickel), and piezoelectrically driven ultrasonic (PZT-5A) thermal stimulators on green june beetles (GJB) (Cotinis nitida) and Madagascar hissing roaches (Gromphadorhina Portentosa). Ultrasonic heating was 2x more power efficient, requiring 330–360 mW of input power to achieve the 43°C pulses necessary for stimulation. Both stimulators demonstrated the feasibility of locomotion control with a success rate of 80% on GJB and 93.5% on the roaches. The microthermal stimulation resulted in average turn angles of 15–18° and 30–45° on GJB and roaches, respectively. Left and right turns were statistically similar.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126260269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Mesoporous thin films as versatile sensitive matrices on Love wave sensors for fast sub-ppm vapor detection 介孔薄膜作为多功能敏感矩阵在Love波传感器上用于快速亚ppm蒸汽检测
G. Tortissier, L. Blanc, A. Tetelin, J. Pistré, J. Lachaud, C. Boissière, C. Sanchez, C. Dejous, D. Rebière
{"title":"Mesoporous thin films as versatile sensitive matrices on Love wave sensors for fast sub-ppm vapor detection","authors":"G. Tortissier, L. Blanc, A. Tetelin, J. Pistré, J. Lachaud, C. Boissière, C. Sanchez, C. Dejous, D. Rebière","doi":"10.1109/SENSOR.2009.5285464","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285464","url":null,"abstract":"Love wave gas sensors with mesoporous thin film as sensitive layers are presented. They are dedicated to volatile organic compound vapor detection. Mesoporous films of SiO2 were prepared using the Sol-Gel process and deposited on the devices acoustic path. The obtained films have been characterized by ellipsometry resulting in the determination of porosity and pore size distribution in the film and of water adsorption isotherms. Ethanol (130–2000ppm) and toluene (70–1000ppm) exposures resulted in frequency shifts up to 20 kHz, showing the high sensitivity of the mesoporous-based Love wave devices.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122210607","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Supersonic cluster beam deposition as novel tool addressing Nano-On-Micro issue 超音速束沉积是解决纳米-微问题的新工具
E. Barborini, S. Vinati, M. Leccardi, P. Repetto, M. Decarli, L. Lorenzelli, P. Milani
{"title":"Supersonic cluster beam deposition as novel tool addressing Nano-On-Micro issue","authors":"E. Barborini, S. Vinati, M. Leccardi, P. Repetto, M. Decarli, L. Lorenzelli, P. Milani","doi":"10.1109/SENSOR.2009.5285639","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285639","url":null,"abstract":"Supersonic cluster beam deposition was used to integrate nanostructured oxide films onto silicon microstructures (microhotplates and microbridges), for batch production of conductimetric chemical sensors. Devices were characterized respect to oxidizing as well as reducting species, such as NO2, ethanol and hydrogen. Hybrid devices performing on the same micromachined platform either air flow measurement, temperature measurement, and chemical detection were also produced, by integrating the nanomaterials exclusively on the parts dedicated to chemical sensing. This research demonstrates the possibility of direct and high-throughput parallel integration of nanomaterials on micromachined parts and generally MEMS.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123885738","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Monolithic CMOS-MEMS oscillators with micro-degree temperature resolution in air conditions 在空气条件下具有微度温度分辨率的单片CMOS-MEMS振荡器
J. Verd, M. Sansa, A. Uranga, C. Pey, G. Abadal, F. Pérez-Murano, N. Barniol
{"title":"Monolithic CMOS-MEMS oscillators with micro-degree temperature resolution in air conditions","authors":"J. Verd, M. Sansa, A. Uranga, C. Pey, G. Abadal, F. Pérez-Murano, N. Barniol","doi":"10.1109/SENSOR.2009.5285435","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285435","url":null,"abstract":"This paper reports the thermal characterization of MEMS resonator-based oscillators fabricated using a conventional 0.35-µm CMOS process. The MEMS resonators are sub-micrometer scale metal beams which resonance frequency is highly dependent on temperature (up to −2055 ppm/°C). Thanks to the monolithic integration of the oscillator electronics, the oscillator frequency stability is better than 1 ppm allowing temperature resolutions up to 0.00019°C for 0.1 s averaging time, which is at least one order of magnitude better than the best previously reported.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127553643","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A MEMS digital mirror for tunable laser wavelength selection 用于可调谐激光波长选择的MEMS数字反射镜
W. M. Zhu, W. Zhang, H. Cai, J. Tamil, B. Liu, T. Bourouina, A. Liu
{"title":"A MEMS digital mirror for tunable laser wavelength selection","authors":"W. M. Zhu, W. Zhang, H. Cai, J. Tamil, B. Liu, T. Bourouina, A. Liu","doi":"10.1109/SENSOR.2009.5285615","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285615","url":null,"abstract":"This paper presents a digital mirror for tunable laser wavelength selection using microelectromechanical systems (MEMS) technology. The digital mirror which has discrete reflection spectrum is totally different compared to the current broadband mirrors MEMS tunable lasers [1–3]. The reflection of the digital mirror can be tuned by digital pumping signals which promise fast output wavelength switching. The experimental results show that the output wavelength of the MEMS tunable laser using the digital mirror has high tuning resolution without increasing the physical length of the internal cavity of the tunable laser. The output wavelength of tuning resolution can reach 0.2 nm and the bandwidth is around 0.04 nm.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127557945","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Local stimulation to single cell on tissue-mimicking microfluidic device 模拟组织微流体装置对单细胞的局部刺激
K. Terao, A. Okonogi, T. Okitsu, T. Suzuki, M. Washizu, H. Kotera
{"title":"Local stimulation to single cell on tissue-mimicking microfluidic device","authors":"K. Terao, A. Okonogi, T. Okitsu, T. Suzuki, M. Washizu, H. Kotera","doi":"10.1109/SENSOR.2009.5285887","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285887","url":null,"abstract":"In this paper, we developed a novel device for the analysis of intracellular response to external stimulus in single-cell level with high-spatial resolution that simulates in vivo tissue micro-environment. We utilized multidirectional UV lithography technique to realize simple 3-dimentional fabrication of the tissue-mimicking device. Microchannel with an aperture at its sidewall was fabricated. Localized delivery of stimuli to single cell was demonstrated here.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130157683","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Microfabricated out-of-plane arrays of integrated capillary nano-electrospray emitters 集成毛细管纳米电喷雾发射器的微加工面外阵列
R. Krpoun, H. Shea
{"title":"Microfabricated out-of-plane arrays of integrated capillary nano-electrospray emitters","authors":"R. Krpoun, H. Shea","doi":"10.1109/SENSOR.2009.5285883","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285883","url":null,"abstract":"This paper presents the fabrication and operation of an integrated nano-electrospray thruster consisting of an array of microfabricated silicon capillary emitters and microfabricated silicon extractor electrodes. Based on previous work in which we showed operation of single microfabricated capillaries [1], the improved thruster presented here allows simultaneously operation of arrays of emitters. In addition, we control the hydraulic impedance of the capillaries by filling them with silica beads, thus tailoring the flow rate in order to spray either in droplet regime or in ionic regime for two ionic liquids. Operation in both modes is confirmed by mass spectrometry and retarding potential analysis. In ion regime, a specific impulse of 3500 s is obtained at 1.2 kV for the ionic liquid EMI-BF4.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122440449","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Needle-type in-situ plant water content sensors with polyethersulfone membrane 聚醚砜膜针式原位植物水分传感器
T. Iwashita, N. Miki
{"title":"Needle-type in-situ plant water content sensors with polyethersulfone membrane","authors":"T. Iwashita, N. Miki","doi":"10.1109/SENSOR.2009.5285706","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285706","url":null,"abstract":"Plant water content (PWC) strongly affects growth, yields and quality of the plants. In this paper we propose and demonstrate a needle-type PWC sensor with a polyethersulfone (PES) membrane. When the sensor is inserted into a plant, PES absorbs water from the plant according to its water content. The electric impedance of PES is determined by the amount of the absorbed water and reflects the PWC. The proposed sensor can explicitly measure the plant water content in-situ. The sensor was fabricated and characterized and successfully demonstrated an in-situ measurement of PWC of strawberry (Fragaria x ananassa).","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122512227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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