在空气条件下具有微度温度分辨率的单片CMOS-MEMS振荡器

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285435

J. Verd, M. Sansa, A. Uranga, C. Pey, G. Abadal, F. Pérez-Murano, N. Barniol

{"title":"在空气条件下具有微度温度分辨率的单片CMOS-MEMS振荡器","authors":"J. Verd, M. Sansa, A. Uranga, C. Pey, G. Abadal, F. Pérez-Murano, N. Barniol","doi":"10.1109/SENSOR.2009.5285435","DOIUrl":null,"url":null,"abstract":"This paper reports the thermal characterization of MEMS resonator-based oscillators fabricated using a conventional 0.35-µm CMOS process. The MEMS resonators are sub-micrometer scale metal beams which resonance frequency is highly dependent on temperature (up to −2055 ppm/°C). Thanks to the monolithic integration of the oscillator electronics, the oscillator frequency stability is better than 1 ppm allowing temperature resolutions up to 0.00019°C for 0.1 s averaging time, which is at least one order of magnitude better than the best previously reported.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"63 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Monolithic CMOS-MEMS oscillators with micro-degree temperature resolution in air conditions\",\"authors\":\"J. Verd, M. Sansa, A. Uranga, C. Pey, G. Abadal, F. Pérez-Murano, N. Barniol\",\"doi\":\"10.1109/SENSOR.2009.5285435\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports the thermal characterization of MEMS resonator-based oscillators fabricated using a conventional 0.35-µm CMOS process. The MEMS resonators are sub-micrometer scale metal beams which resonance frequency is highly dependent on temperature (up to −2055 ppm/°C). Thanks to the monolithic integration of the oscillator electronics, the oscillator frequency stability is better than 1 ppm allowing temperature resolutions up to 0.00019°C for 0.1 s averaging time, which is at least one order of magnitude better than the best previously reported.\",\"PeriodicalId\":247826,\"journal\":{\"name\":\"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference\",\"volume\":\"63 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-06-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2009.5285435\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2009.5285435","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 6

摘要

本文报道了采用传统的0.35µm CMOS工艺制造的基于MEMS谐振器的振荡器的热特性。MEMS谐振器是亚微米级的金属梁，谐振频率高度依赖于温度(高达- 2055 ppm/°C)。由于振荡器电子器件的单片集成，振荡器频率稳定性优于1 ppm，允许温度分辨率高达0.00019°C，平均时间为0.1 s，这比之前报道的最佳时间至少好一个数量级。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Monolithic CMOS-MEMS oscillators with micro-degree temperature resolution in air conditions

This paper reports the thermal characterization of MEMS resonator-based oscillators fabricated using a conventional 0.35-µm CMOS process. The MEMS resonators are sub-micrometer scale metal beams which resonance frequency is highly dependent on temperature (up to −2055 ppm/°C). Thanks to the monolithic integration of the oscillator electronics, the oscillator frequency stability is better than 1 ppm allowing temperature resolutions up to 0.00019°C for 0.1 s averaging time, which is at least one order of magnitude better than the best previously reported.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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