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Continuous microfluidic airborne bacteria separation using dielectrophoresis 介质电泳连续微流控空气细菌分离
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285664
H. Moon, Y.W. Nam, J.C. Park, H.I. Jung
{"title":"Continuous microfluidic airborne bacteria separation using dielectrophoresis","authors":"H. Moon, Y.W. Nam, J.C. Park, H.I. Jung","doi":"10.1109/SENSOR.2009.5285664","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285664","url":null,"abstract":"Airborne microbes such as bacteria are a threat to public health. To prevent and control such dangerous biological particles, robust and real-time detection systems are necessary. For direct and real-time detection of airborne microbes, samples must be collected and typically re-suspended in liquid prior to detection; however, environmental particles such as dust are also trapped in such samples. Therefore, the isolation of target bacteria or selective collection of microbes from unwanted non-biological particles prior to detection is of great importance. Dielectrophoresis (DEP), the translational motion of particles in non-uniform electric fields, is an emerging technique that can rapidly separate biological particles in microfluidics. In this paper, we propose a new method for the separation of airborne microbes using DEP with a simple and novel curved electrode design for separating bacteria in a solution containing beads or dust which is taken from an airborne environmental sample. As there has been little research on analyzing environmental samples using microfluidics and DEP, this work describes a novel strategy for a rapid and direct bioaerosol monitoring system.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130586524","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Fabrication and process characterization of atom transistor chips 原子晶体管芯片的制备与工艺表征
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285870
Ho-Chiao Chuang, Evan A. Salim, V. Vuletić, Dana Z. Anderson, Victor M. Bright
{"title":"Fabrication and process characterization of atom transistor chips","authors":"Ho-Chiao Chuang, Evan A. Salim, V. Vuletić, Dana Z. Anderson, Victor M. Bright","doi":"10.1109/SENSOR.2009.5285870","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285870","url":null,"abstract":"This paper describes the design and fabrication of an atom chip for atom tunneling experiments. A fabrication process was developed that uses a combination of UV-optical and Electron-Beam lithography to pattern micrometer and nanometer scale copper wires on a single chip. The minimum wire width fabricated in this work is 200nm. The wires can carry current densities of more than 7.5×107 A/cm2. The electrical current tests establish the feasibility of realizing chip-based atom tunneling experiments.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132372704","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of molecular-scale patterns with chemically tunable functionalities 具有化学可调功能的分子尺度图案的制造
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285467
Z. Liu, D. Bucknall, M. Allen
{"title":"Fabrication of molecular-scale patterns with chemically tunable functionalities","authors":"Z. Liu, D. Bucknall, M. Allen","doi":"10.1109/SENSOR.2009.5285467","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285467","url":null,"abstract":"This paper presents a scalable hybrid molecular nanofabrication approach of sub-10 nm patterns with functionalized surfaces by combining “bottom-up” surface initiated polymerization (SIP) with “top-down” electron beam lithography (EBL). This prototype molecular nanofabrication is based on the concept of nanolithography-based molecular manipulation (NMM). The strategy is to apply free-radical SIP (“bottom-up”) to the non-molecularly engineered and chemically inert nano-patterns prepared by “top-down” nanolithography, e.g. EBL. This integration can minimize feature sizes to molecular length scales (sub-10 nm) and simultaneously tune the surface chemistry of the nano-patterns through functional polymer brushes. In this work, 4 nm nanostructures have been obtained which are chemically functionalized by poly(vinyl pyridine) (PVP).","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"209 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132388351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiC 用LPCVD多晶3C-SiC进行晶圆级真空封装和微结构包覆
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285964
C. Roper, R. Candler, S. Yoneoka, T. Kenny, R. Howe, R. Maboudian
{"title":"Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiC","authors":"C. Roper, R. Candler, S. Yoneoka, T. Kenny, R. Howe, R. Maboudian","doi":"10.1109/SENSOR.2009.5285964","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285964","url":null,"abstract":"This work reports a novel wafer-scale packaging method whereby MEMS devices are simultaneously vacuum sealed in a micromachined cavity and clad with a thin polycrystalline silicon carbide (poly-SiC) film. The deposition of poly-SiC is controlled by adjusting the precursor flow rates to yield a uniform film with low residual stress and moderate resistivity to prevent film cracking and device shorting. Functioning poly-SiC clad, silicon-core resonators are tested. Comparison of the resonator quality factor (Q) to a pressure-Q calibration curve determines the pressure within the sealed cavity to be 8 mBar.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132409374","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
MEMS on robot applications MEMS在机器人上的应用
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285608
K. Noda, Y. Hashimoto, Y. Tanaka, I. Shimoyama
{"title":"MEMS on robot applications","authors":"K. Noda, Y. Hashimoto, Y. Tanaka, I. Shimoyama","doi":"10.1109/SENSOR.2009.5285608","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285608","url":null,"abstract":"Two main problems in the manipulation of objects with robot-hands are the control of the contact force and the planning of approaching motion. In this paper, we report on the three types of MEMS sensors for robots to detect the contact forces, slippage and the distance to the objects to realize dexterous manipulation of objects with robot-hands.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132202913","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 33
Wafer-scale processed, low impedance, neural arrays with varying length microelectrodes 晶圆级加工，低阻抗，具有可变长度微电极的神经阵列
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285875
R. Bhandari, S. Negi, L. Rieth, F. Solzbacher
{"title":"Wafer-scale processed, low impedance, neural arrays with varying length microelectrodes","authors":"R. Bhandari, S. Negi, L. Rieth, F. Solzbacher","doi":"10.1109/SENSOR.2009.5285875","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285875","url":null,"abstract":"Advances in silicon micromachining have lead to development of sophisticated neural interfaces such as the Utah Slant Electrode Array (USEA). The unique architecture of the USEA comprises of electrodes which increase in length in one direction, while being constant in length in the other. When implanted into a peripheral nerve, the tips of the electrodes penetrate nerve fascicles, and are close to discrete populations of nerve fibers. Although the USEA has been widely used in neural prosthesis the current processes used to fabricate USEA impose limitations in the tolerances of the electrode array geometry. This paper presents a wafer scale fabrication method for USEA which offers high precision and control in electrode geometry and their electrical characteristics.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130243038","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Design of a novel microreactor for microfluidic synthesis of silica nanoparticles 新型微流控合成二氧化硅纳米颗粒微反应器的设计
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285849
C. Chung, T. Shih, B.H. Wu
{"title":"Design of a novel microreactor for microfluidic synthesis of silica nanoparticles","authors":"C. Chung, T. Shih, B.H. Wu","doi":"10.1109/SENSOR.2009.5285849","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285849","url":null,"abstract":"Conventional microreactors for nanoparticle synthesis were operated at low flow velocity as well as more residence time because of low mixing efficiency of the meander micromixer. Here, we purpose a simple obstacle micromixer to be operated at a wide range of flow velocity for increasing single-channel synthesis production rate of silica nanoparticles. Results show our obstacle micromixer has over 85% mixing efficiency covering the flow regions in both convection and diffusion mixing. This microreactor was used to synthesize silica nanoparticles with an average diameter of 200–250 nm. Enhancing fluid mixing at high flow velocity can result in high production rate.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130273131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A Multi-Terminal Pressure Sensor with enhanced sensitivity 具有增强灵敏度的多端压力传感器
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285927
G. O. Coraucci, M. R. Finardi, F. Fruett
{"title":"A Multi-Terminal Pressure Sensor with enhanced sensitivity","authors":"G. O. Coraucci, M. R. Finardi, F. Fruett","doi":"10.1109/SENSOR.2009.5285927","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285927","url":null,"abstract":"This paper describes the design, microfabrication and characterization of a CMOS compatible Multi-Terminal Pressure Sensor (MTPS). This sensor is an alternative to the pressure sensors based on the conventional silicon Wheatstone piezoresistive bridge (WB) or four-terminal piezotransducers. The layout of the MTPS is designed in such a way that the sensor sensitivity is effectively improved and the short-circuit effects, which are modeled by the Geometrical Correction Factor (G), can be minimized. The sensor design was supported by Finite Element Method (FEM). The MTPS sensitivity amounts to 4,8 mV/psi.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127893284","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Microfluidic high-resolution NMR chip for biological fluids 生物流体微流控高分辨率核磁共振芯片
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285775
J. Gardeniers, J. Bart, A. Kolkman, A.-J. de Vries, J. Janssen, P. van Bentum, K. Ampt, S. Wijmenga, A. Kentgens
{"title":"Microfluidic high-resolution NMR chip for biological fluids","authors":"J. Gardeniers, J. Bart, A. Kolkman, A.-J. de Vries, J. Janssen, P. van Bentum, K. Ampt, S. Wijmenga, A. Kentgens","doi":"10.1109/SENSOR.2009.5285775","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285775","url":null,"abstract":"This contribution describes a silicon-based microfluidic chip with an integrated RF stripline for NMR detection, with high spectral resolution (ca. 1 Hz at 600 MHZ proton resonance) and high sensitivity (ca. 1.2 mM) for mass-limited (600 nL) biological samples, with a particular focus on human cerebrospinal fluid samples.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131323146","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Effect of phonon interactions on limiting the f.Q product of micromechanical resonators 声子相互作用对限制微机械谐振器f.Q积的影响
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285627
R. Tabrizian, Mina Rais-Zadeh, Farrokh Ayazi
{"title":"Effect of phonon interactions on limiting the f.Q product of micromechanical resonators","authors":"R. Tabrizian, Mina Rais-Zadeh, Farrokh Ayazi","doi":"10.1109/SENSOR.2009.5285627","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285627","url":null,"abstract":"We discuss the contribution of phonon interactions in determining the upper limit of f.Q product in micromechanical resonators. There is a perception in the MEMS community that the maximum f.Q product of a microresonator is limited to a “frequency-independent constant” determined by the material properties of the resonator [1]. In this paper, we discuss that for frequencies higher than ωτ= 1/τ, where τ is the phonon relaxation time, the f.Q product is no longer constant but a linear function of frequency. This makes it possible to reach very high Qs in GHz micromechanical resonators. Moreover, we show that 〈100〉 is the preferred crystalline orientation for obtaining very high Q in bulk-acoustic-mode silicon resonators above ∼750 MHz, while 〈100〉 is the preferred direction for achieving high-Q at lower frequencies.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125597536","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 168
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