用于可调谐激光波长选择的MEMS数字反射镜

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285615

W. M. Zhu, W. Zhang, H. Cai, J. Tamil, B. Liu, T. Bourouina, A. Liu

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引用次数: 7

摘要

本文提出了一种利用微机电系统(MEMS)技术实现可调谐激光波长选择的数字反射镜。数字反射镜具有离散反射谱，与目前的宽带反射镜MEMS可调谐激光器完全不同[1-3]。数字反射镜的反射可以通过数字泵送信号进行调谐，从而保证了输出波长的快速切换。实验结果表明，在不增加可调谐激光器内腔物理长度的情况下，采用数字反射镜的MEMS可调谐激光器输出波长具有较高的调谐分辨率。调谐分辨率输出波长可达0.2 nm，带宽约为0.04 nm。

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A MEMS digital mirror for tunable laser wavelength selection

This paper presents a digital mirror for tunable laser wavelength selection using microelectromechanical systems (MEMS) technology. The digital mirror which has discrete reflection spectrum is totally different compared to the current broadband mirrors MEMS tunable lasers [1–3]. The reflection of the digital mirror can be tuned by digital pumping signals which promise fast output wavelength switching. The experimental results show that the output wavelength of the MEMS tunable laser using the digital mirror has high tuning resolution without increasing the physical length of the internal cavity of the tunable laser. The output wavelength of tuning resolution can reach 0.2 nm and the bandwidth is around 0.04 nm.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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