集成毛细管纳米电喷雾发射器的微加工面外阵列

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285883

R. Krpoun, H. Shea

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引用次数: 10

摘要

本文介绍了由微晶硅毛细管发射器和微晶硅萃取电极阵列组成的集成纳米电喷雾推力器的制造和运行。基于先前的工作，我们展示了单个微制造毛细血管[1]的操作，这里提出的改进的推力器允许同时操作发射器阵列。此外，我们通过填充硅珠来控制毛细管的液压阻抗，从而调整流速，以便以液滴形式或离子形式喷射两种离子液体。通过质谱分析和缓速电位分析证实了两种模式的运行。在离子态下，离子液体EMI-BF4在1.2 kV下可获得3500 s的比脉冲。

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Microfabricated out-of-plane arrays of integrated capillary nano-electrospray emitters

This paper presents the fabrication and operation of an integrated nano-electrospray thruster consisting of an array of microfabricated silicon capillary emitters and microfabricated silicon extractor electrodes. Based on previous work in which we showed operation of single microfabricated capillaries [1], the improved thruster presented here allows simultaneously operation of arrays of emitters. In addition, we control the hydraulic impedance of the capillaries by filling them with silica beads, thus tailoring the flow rate in order to spray either in droplet regime or in ionic regime for two ionic liquids. Operation in both modes is confirmed by mass spectrometry and retarding potential analysis. In ion regime, a specific impulse of 3500 s is obtained at 1.2 kV for the ionic liquid EMI-BF4.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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