Tangential and perpendicular driving micro transmission systems based on ratchet mechanism and electrostatic actuator

Abstract

This paper presents comprehensive improvements of micro motion transmission systems (MTS), which driven by electrostatic comb-drive actuators through ratchet mechanism to move micro objects unidirectionally in straight, curved and rotational paths. The first MTS is the tangential driving MTS, in which the driven objects are moved by tangential force. A rotational gearing MTS and micro conveyance system (MCS) based on this driving mode will be presented. Thanks to the new designs of directional guider of the micro containers and new turning module, the containers can move in both straight and curved paths in the tangential MCS. The second MTS is the perpendicular driving MCS, which drives micro containers by the perpendicular driving force, i.e. the moving direction of the container is perpendicular to the actuation direction. Movement velocities of the containers can be controlled by changing the driving frequency.