参数放大MEMS磁强计

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285917

M. J. Thompson, D. Horsley

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引用次数: 24

摘要

本文论证了参数放大如何提高MEMS谐振力传感器的全系统信噪比。实验证明了参数放大如何提高基于洛伦兹力的MEMS磁强计的机械灵敏度。机械灵敏度的增加放大了洛伦兹力和布朗力。39 nT/√lHz布朗底噪声引起的均方根位移从13.75 pm放大到283 pm。在这项研究中，最大稳定磁场灵敏度增加了51倍，与质量因子(Q)为40,000的线性谐振器等效放大。

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Parametrically amplified MEMS magnetometer

This paper demonstrates how parametric amplification can improve the system wide signal to noise ratio (SNR) of MEMS resonant force sensors. Experiments demonstrate how parametric amplification increases the mechanical sensitivity of a Lorentz force based MEMS magnetometer. This increase in mechanical sensitivity amplifies both the Lorentz and Brownian forces. The RMS displacement caused by the 39 nT/√lHz Brownian noise floor is amplified from 13.75 pm to 283 pm. In this study a maximum stable magnetic field sensitivity increase of 51 times was achieved which has an equivalent amplification to a linear resonator with a quality factor (Q) of 40,000.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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