微致动器用超顺磁光敏聚合物纳米复合材料

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285841

M. Suter, S. Graf, O. Ergeneman, S. Schmid, A. Camenzind, B. Nelson, C. Hierold

{"title":"微致动器用超顺磁光敏聚合物纳米复合材料","authors":"M. Suter, S. Graf, O. Ergeneman, S. Schmid, A. Camenzind, B. Nelson, C. Hierold","doi":"10.1109/SENSOR.2009.5285841","DOIUrl":null,"url":null,"abstract":"We present a photosensitive polymer composite with superparamagnetic characteristics for the fabrication of microactuators. A uniform distribution of particles in the photosensitive polymer matrix SU-8 is achieved by applying superparamagnetic nanoparticles with the aid of a surfactant. The composite contains Fe3O4 nanoparticles up to 3 vol.% (12 wt.%) with diameters of around 13 nm. Superparamagnetic composite microcantilevers are successfully fabricated and actuated in resonance by the magnetic field of an external coil.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":"{\"title\":\"Superparamagnetic photosensitive polymer nanocomposite for microactuators\",\"authors\":\"M. Suter, S. Graf, O. Ergeneman, S. Schmid, A. Camenzind, B. Nelson, C. Hierold\",\"doi\":\"10.1109/SENSOR.2009.5285841\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a photosensitive polymer composite with superparamagnetic characteristics for the fabrication of microactuators. A uniform distribution of particles in the photosensitive polymer matrix SU-8 is achieved by applying superparamagnetic nanoparticles with the aid of a surfactant. The composite contains Fe3O4 nanoparticles up to 3 vol.% (12 wt.%) with diameters of around 13 nm. Superparamagnetic composite microcantilevers are successfully fabricated and actuated in resonance by the magnetic field of an external coil.\",\"PeriodicalId\":247826,\"journal\":{\"name\":\"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-06-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"13\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2009.5285841\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2009.5285841","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 13

摘要

提出了一种具有超顺磁特性的光敏聚合物复合材料，用于微致动器的制备。在光敏聚合物基体SU-8中，通过在表面活性剂的帮助下施加超顺磁性纳米颗粒，实现了颗粒的均匀分布。该复合材料含有高达3vol .% (12wt .%)的Fe3O4纳米颗粒，直径约为13nm。成功制备了超顺磁复合微悬臂梁，并利用外部线圈的磁场进行共振驱动。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Superparamagnetic photosensitive polymer nanocomposite for microactuators

We present a photosensitive polymer composite with superparamagnetic characteristics for the fabrication of microactuators. A uniform distribution of particles in the photosensitive polymer matrix SU-8 is achieved by applying superparamagnetic nanoparticles with the aid of a surfactant. The composite contains Fe3O4 nanoparticles up to 3 vol.% (12 wt.%) with diameters of around 13 nm. Superparamagnetic composite microcantilevers are successfully fabricated and actuated in resonance by the magnetic field of an external coil.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

自引率

0.00%

发文量