Patterning high density SWNT networks on flexible Parylene-C substrate

Abstract

In this work, a directed assembly technique for controlled micro-patterning of Single-Walled Carbon Nanotubes (SWNTs) on to a flexible Parylene-C substrate has been demonstrated. A simple site-selective fluidic assembly of SWNTs has been utilized to directly assemble SWNTs on a plasma treated parylene-C substrate to form ordered high density carbon nanotube networks. Continuous nanotube micro-arrays and networks as small as 4µm wide and lengths as long as 1500µm have been fabricated. After fabrication, the parylene substrate containing the SWNT networks was peeled off from the Polycarbonate substrate. We next performed both electrical and mechanical tests to further characterize the flexible SWNT networks. The measured resistance of patterned SWNT networks was around 300Ω utilizing Au electrode pads. The test sample handled multiple bending cycles (tested up to 5 times) without showing any signs of hysteresis. High density patterning of carbon nanotube networks on flexible Parylene-C substrates has potential applications including wearable electronics and sensors, flexible field effect transistors (FETs) and interconnects.