热光学红外焦平面阵列

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285854

X. Yan, F. Feng, Y. Wang

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引用次数: 0

摘要

本文报道了一种基于热光效应的光学可读红外焦平面阵列。利用ZEMAX软件对热光学红外焦平面阵列(TOFPA)的光学特性进行了分析和仿真。结果表明，TOFPA的热光学灵敏度和平均红外吸收率分别达到6.23%和65.2%。然后，通过XeF2蚀刻采用侧壁钝化方法释放TOFPA。最后，设计了测量TOFPA热光学灵敏度的光学系统。

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Thermo-optic infrared focal plane array

We reported an optically readable infrared focal plane array based on thermo-optic effect in this paper. The optical characteristics of the thermo-optic infrared focal plane array (TOFPA) are analyzed and simulated by ZEMAX software. The results show that the thermo-optic sensitivity and the average infrared absorption of the TOFPA can reach 6.23% K−1 and 65.2%, respectively. Then, the TOFPA is released by XeF2 etch using a sidewall passivation method. Finally, an optical system is designed for measuring the thermo-optical sensitivity of TOFPA.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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