TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference最新文献_第5页

One-dimensional-motion and pressure hybrid sensor fabricated and process-level-packaged with CMOS back-end-of-line processes 采用CMOS后端工艺制备和工艺级封装一维运动和压力混合传感器

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285417

Yuko Hanaoka, T. Fujimori, K. Yamanaka, S. Machida, H. Takano, Yasushi Goto, Hiroshi Fukuda

引用次数: 9

Realistic imitation of mosquito's proboscis -sharp and jagged needle and their cooperative inserting motion- 逼真地模仿蚊子的喙尖和锯齿状的针及其配合插入动作

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285601

H. Izumi, M. Suzuki, T. Kanzaki, S. Aoyagi

引用次数: 3

Single element 3-terminal pressure sensors: A new approach to pressure sensing and its comparison to the half bridge sensors 单元件三端压力传感器:一种新的压力传感方法及其与半桥式传感器的比较

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285930

U. Gowrishetty, K. Walsh, S. Mcnamara, T. Roussel, J. Aebersold

{"title":"Single element 3-terminal pressure sensors: A new approach to pressure sensing and its comparison to the half bridge sensors","authors":"U. Gowrishetty, K. Walsh, S. Mcnamara, T. Roussel, J. Aebersold","doi":"10.1109/SENSOR.2009.5285930","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285930","url":null,"abstract":"We report the development of a novel 3-terminal single element piezoresistor for ultra-miniature pressure sensor applications and compare its performance to that of a traditional half Wheatstone bridge design. The pressure sensors reported here are 0.69-French in size (1F= 333µm) and are designed and batch-fabricated using SOI (silicon on insulator) and DRIE (deep reactive ion etching) technologies. One of the major applications of this device is for blood pressure monitoring using ultra-miniature 1F catheters. The combination of SOI and DRIE technologies results in uniform diaphragm thickness and complete elimination of the post-processing dicing step by micromachining “die separation streets” during the DRIE process. The novel 3-terminal single element design and half Wheatstone bridge sensors were optimized using finite element analysis (FEA). Performance characteristics of the half bridge and 3-terminal sensors, i.e. sensitivity, nonlinearity (NL%), temperature coefficient offset (TCO) and drift were measured and compared. It was determined that the 3-terminal pressure sensors (3-TPS) had greater sensitivity, better non-linearity and lower drift compared to half bridge design sensors. The 3-TPS devices were also less sensitive to alignment errors.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"20 11","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132090760","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

A novel passive microfluidic device for preprocessing whole blood for point of care diagnostics 一种新型无源微流控全血预处理装置

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285475

Pranjul Shah, M. Dimaki, W. Svendsen

引用次数: 5

Photonic patterns and micro knife array on individual faces of transparent bifacial chip for in situ nir observation and biopsy 用于原位近红外观察和活检的透明双面芯片单个面上的光子模式和微刀阵列

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285679

T. Kobayashi, H. Koga, S. Konishi

引用次数: 0

Sorting of differentiated neurons using Phototransistor-based optoelectronic tweezers for cell replacement therapy of neurodegenerative diseases 基于光电晶体管的光电子镊子分选分化神经元用于神经退行性疾病的细胞替代治疗

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285764

H. Hsu, H. Lee, S. Pautot, K. Yu, S. Neale, A. Ohta, A. Jamshidi, J. Valley, E. Isocaff, M. Wu

引用次数: 5

A large displacement piezodriven silicon XY-microstage 一种大位移压电驱动硅xy微台

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285429

M. Sabri, T. Ono, M. Esashi

引用次数: 6

Piezoresistive ring-shaped MEMS resonator 压阻环形MEMS谐振器

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285837

K. L. Phan, J. V. van Beek, G. Koops

引用次数: 10

Fabrication and characterization of multiple nanowires using microtubule structures 微管结构纳米线的制备与表征

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285848

K. Wada, M. Tarhan, C. Bottier, D. Collard, H. Fujita, R. Yokokawa

引用次数: 1

A new platform for manipulation and separation of oil-in-water emulsion droplets using optically induced dielectrophoresis 一种利用光诱导介质电泳处理和分离水包油乳化液滴的新平台

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI: 10.1109/SENSOR.2009.5285884

Shih-Hsun Hung, Yen-Heng Lin, Gwo-Bin Lee

{"title":"A new platform for manipulation and separation of oil-in-water emulsion droplets using optically induced dielectrophoresis","authors":"Shih-Hsun Hung, Yen-Heng Lin, Gwo-Bin Lee","doi":"10.1109/SENSOR.2009.5285884","DOIUrl":"https://doi.org/10.1109/SENSOR.2009.5285884","url":null,"abstract":"A new platform for manipulation and separation of oil-in-water emulsion droplets by using optically induced dielectrophoresis (ODEP) is reported. By utilizing different scanning speeds of a moving light beam, the oil-in-water emulsion droplets can be moved and separated with a high separation resolution. Several new applications such as pre-separation and fine separation of emulsion droplets were presented. Three different sized droplets (40~43 μm, 20~30 μm and 2~8 μm) can be roughly separated first, which demonstrates the capability of the developed method for pre-separation of emulsion droplets. The fine separation of droplets with a radius of 17.5 μm and 20 μm is then performed using a moving light beam with gradual gradient of moving speeds. To avoid the collision and overlapping of the droplets, a new approach with which individual moving track for each droplet can be achieved by using well-defined moving light pattern, is adopted. Accordingly, droplets with five sizes (30, 20, 10, 7.5, and 5 μm) are successfully separated.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"137 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124381984","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0