压阻环形MEMS谐振器

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285837

K. L. Phan, J. V. van Beek, G. Koops

{"title":"压阻环形MEMS谐振器","authors":"K. L. Phan, J. V. van Beek, G. Koops","doi":"10.1109/SENSOR.2009.5285837","DOIUrl":null,"url":null,"abstract":"We have previously reported a new class of MEMS resonators based on the piezoresistive readout principle and extensional vibration mode. Those devices suffer from unwanted mode-coupling at large vibration amplitudes, giving rise to problems such as beat patterns in the time signal. In this paper, we present a novel type of piezoresistive resonator that has a shape of a ring and operates in a flexural in-plane mode shape. The new resonators can be operated at larger excitation forces without having the mode-coupling problem, as compared to the conventional piezoresistive resonators.","PeriodicalId":247826,"journal":{"name":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"76 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":"{\"title\":\"Piezoresistive ring-shaped MEMS resonator\",\"authors\":\"K. L. Phan, J. V. van Beek, G. Koops\",\"doi\":\"10.1109/SENSOR.2009.5285837\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have previously reported a new class of MEMS resonators based on the piezoresistive readout principle and extensional vibration mode. Those devices suffer from unwanted mode-coupling at large vibration amplitudes, giving rise to problems such as beat patterns in the time signal. In this paper, we present a novel type of piezoresistive resonator that has a shape of a ring and operates in a flexural in-plane mode shape. The new resonators can be operated at larger excitation forces without having the mode-coupling problem, as compared to the conventional piezoresistive resonators.\",\"PeriodicalId\":247826,\"journal\":{\"name\":\"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference\",\"volume\":\"76 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-06-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"10\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2009.5285837\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2009.5285837","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 10

摘要

我们之前报道了一类基于压阻读出原理和外延振动模式的新型MEMS谐振器。这些设备在大振动幅值时遭受不必要的模式耦合，从而产生时间信号中的节拍模式等问题。在本文中，我们提出了一种新型的压阻谐振器，它具有环形形状并以弯曲的平面内模态形状工作。与传统的压阻谐振器相比，新型谐振器可以在更大的激励力下工作，而没有模式耦合问题。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Piezoresistive ring-shaped MEMS resonator

We have previously reported a new class of MEMS resonators based on the piezoresistive readout principle and extensional vibration mode. Those devices suffer from unwanted mode-coupling at large vibration amplitudes, giving rise to problems such as beat patterns in the time signal. In this paper, we present a novel type of piezoresistive resonator that has a shape of a ring and operates in a flexural in-plane mode shape. The new resonators can be operated at larger excitation forces without having the mode-coupling problem, as compared to the conventional piezoresistive resonators.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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